JP2002523707A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2002523707A5 JP2002523707A5 JP2000567292A JP2000567292A JP2002523707A5 JP 2002523707 A5 JP2002523707 A5 JP 2002523707A5 JP 2000567292 A JP2000567292 A JP 2000567292A JP 2000567292 A JP2000567292 A JP 2000567292A JP 2002523707 A5 JP2002523707 A5 JP 2002523707A5
- Authority
- JP
- Japan
- Prior art keywords
- adsorbent
- gas
- physical
- manufacturing
- metering
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000003463 adsorbent Substances 0.000 description 224
- 239000007789 gas Substances 0.000 description 86
- 238000004519 manufacturing process Methods 0.000 description 62
- 238000009826 distribution Methods 0.000 description 57
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 33
- RBFQJDQYXXHULB-UHFFFAOYSA-N arsane Chemical compound [AsH3] RBFQJDQYXXHULB-UHFFFAOYSA-N 0.000 description 27
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 17
- 238000005259 measurement Methods 0.000 description 17
- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 description 16
- 229910002092 carbon dioxide Inorganic materials 0.000 description 16
- 239000001569 carbon dioxide Substances 0.000 description 16
- 229910002091 carbon monoxide Inorganic materials 0.000 description 16
- 238000010438 heat treatment Methods 0.000 description 16
- 238000000034 method Methods 0.000 description 15
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 13
- 238000003860 storage Methods 0.000 description 9
- -1 diborane Chemical compound 0.000 description 8
- 229910000073 phosphorus hydride Inorganic materials 0.000 description 8
- WTEOIRVLGSZEPR-UHFFFAOYSA-N boron trifluoride Chemical compound FB(F)F WTEOIRVLGSZEPR-UHFFFAOYSA-N 0.000 description 6
- 229910052799 carbon Inorganic materials 0.000 description 6
- 238000003795 desorption Methods 0.000 description 6
- 229910002090 carbon oxide Inorganic materials 0.000 description 5
- 238000007789 sealing Methods 0.000 description 5
- 238000001179 sorption measurement Methods 0.000 description 5
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 229910015900 BF3 Inorganic materials 0.000 description 4
- CPELXLSAUQHCOX-UHFFFAOYSA-N Hydrogen bromide Chemical compound Br CPELXLSAUQHCOX-UHFFFAOYSA-N 0.000 description 4
- 229910000074 antimony hydride Inorganic materials 0.000 description 4
- 239000011324 bead Substances 0.000 description 4
- 239000011261 inert gas Substances 0.000 description 4
- 238000005468 ion implantation Methods 0.000 description 4
- OUULRIDHGPHMNQ-UHFFFAOYSA-N stibane Chemical compound [SbH3] OUULRIDHGPHMNQ-UHFFFAOYSA-N 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 2
- YZCKVEUIGOORGS-OUBTZVSYSA-N Deuterium Chemical compound [2H] YZCKVEUIGOORGS-OUBTZVSYSA-N 0.000 description 2
- RWSOTUBLDIXVET-UHFFFAOYSA-N Dihydrogen sulfide Chemical compound S RWSOTUBLDIXVET-UHFFFAOYSA-N 0.000 description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 2
- 229910021529 ammonia Inorganic materials 0.000 description 2
- 239000000460 chlorine Substances 0.000 description 2
- 229910052801 chlorine Inorganic materials 0.000 description 2
- 229910052805 deuterium Inorganic materials 0.000 description 2
- UFHFLCQGNIYNRP-OUBTZVSYSA-N deuterium atom Chemical compound [2H][H] UFHFLCQGNIYNRP-OUBTZVSYSA-N 0.000 description 2
- 238000005429 filling process Methods 0.000 description 2
- 229910052736 halogen Inorganic materials 0.000 description 2
- 150000002367 halogens Chemical class 0.000 description 2
- 150000004678 hydrides Chemical class 0.000 description 2
- 229930195733 hydrocarbon Natural products 0.000 description 2
- 150000002430 hydrocarbons Chemical class 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 150000002431 hydrogen Chemical class 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910000042 hydrogen bromide Inorganic materials 0.000 description 2
- IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 description 2
- 229910000041 hydrogen chloride Inorganic materials 0.000 description 2
- 229910000040 hydrogen fluoride Inorganic materials 0.000 description 2
- XMBWDFGMSWQBCA-UHFFFAOYSA-N hydrogen iodide Chemical compound I XMBWDFGMSWQBCA-UHFFFAOYSA-N 0.000 description 2
- 229910000043 hydrogen iodide Inorganic materials 0.000 description 2
- 229910000037 hydrogen sulfide Inorganic materials 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- SPVXKVOXSXTJOY-UHFFFAOYSA-N selane Chemical compound [SeH2] SPVXKVOXSXTJOY-UHFFFAOYSA-N 0.000 description 2
- 229910000058 selane Inorganic materials 0.000 description 2
- 229910000077 silane Inorganic materials 0.000 description 2
- 229910000059 tellane Inorganic materials 0.000 description 2
- PORWMNRCUJJQNO-UHFFFAOYSA-N tellurium atom Chemical compound [Te] PORWMNRCUJJQNO-UHFFFAOYSA-N 0.000 description 2
- PORFVJURJXKREL-UHFFFAOYSA-N trimethylstibine Chemical compound C[Sb](C)C PORFVJURJXKREL-UHFFFAOYSA-N 0.000 description 2
- NXHILIPIEUBEPD-UHFFFAOYSA-H tungsten hexafluoride Chemical compound F[W](F)(F)(F)(F)F NXHILIPIEUBEPD-UHFFFAOYSA-H 0.000 description 2
- 229910015844 BCl3 Inorganic materials 0.000 description 1
- 239000005909 Kieselgur Substances 0.000 description 1
- 229910017843 NF3 Inorganic materials 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 230000000274 adsorptive effect Effects 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910000323 aluminium silicate Inorganic materials 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000002594 sorbent Substances 0.000 description 1
- FAQYAMRNWDIXMY-UHFFFAOYSA-N trichloroborane Chemical compound ClB(Cl)Cl FAQYAMRNWDIXMY-UHFFFAOYSA-N 0.000 description 1
- 238000005303 weighing Methods 0.000 description 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/143,809 US6083298A (en) | 1994-10-13 | 1998-08-31 | Process for fabricating a sorbent-based gas storage and dispensing system, utilizing sorbent material pretreatment |
| US09/143,809 | 1998-08-31 | ||
| PCT/US1999/019868 WO2000012196A1 (en) | 1998-08-31 | 1999-08-30 | Process for fabricating a sorbent-based gas storage and dispensing system, utilizing sorbent material pretreatment |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010280915A Division JP2011099562A (ja) | 1998-08-31 | 2010-12-16 | 吸着剤前処理を利用した吸着型気体貯蔵及び計量分配システムの製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2002523707A JP2002523707A (ja) | 2002-07-30 |
| JP2002523707A5 true JP2002523707A5 (enExample) | 2009-11-12 |
Family
ID=22505743
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000567292A Pending JP2002523707A (ja) | 1998-08-31 | 1999-08-30 | 吸着剤前処理を利用した吸着型気体貯蔵及び計量分配システムの製造方法 |
| JP2010280915A Pending JP2011099562A (ja) | 1998-08-31 | 2010-12-16 | 吸着剤前処理を利用した吸着型気体貯蔵及び計量分配システムの製造方法 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010280915A Pending JP2011099562A (ja) | 1998-08-31 | 2010-12-16 | 吸着剤前処理を利用した吸着型気体貯蔵及び計量分配システムの製造方法 |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US6083298A (enExample) |
| EP (1) | EP1109613A4 (enExample) |
| JP (2) | JP2002523707A (enExample) |
| KR (1) | KR100618072B1 (enExample) |
| AU (1) | AU5904799A (enExample) |
| MY (1) | MY133994A (enExample) |
| TW (1) | TW565467B (enExample) |
| WO (1) | WO2000012196A1 (enExample) |
Families Citing this family (27)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6083298A (en) * | 1994-10-13 | 2000-07-04 | Advanced Technology Materials, Inc. | Process for fabricating a sorbent-based gas storage and dispensing system, utilizing sorbent material pretreatment |
| US6500238B1 (en) * | 2000-08-10 | 2002-12-31 | Advanced Technology Materials, Inc. | Fluid storage and dispensing system |
| JP2003080019A (ja) * | 2001-09-10 | 2003-03-18 | Morikawa Co Ltd | 吸着された有機化合物の脱着装置および脱着方法 |
| US6592653B2 (en) * | 2001-11-12 | 2003-07-15 | Advanced Technology Materials, Inc. | Fluid storage and delivery system utilizing low heels carbon sorbent medium |
| RU2215688C2 (ru) * | 2001-11-13 | 2003-11-10 | Федеральное государственное унитарное предприятие "Сибирский химический комбинат" | Способ извлечения трифторида бора из газовых смесей |
| US6620225B2 (en) * | 2002-01-10 | 2003-09-16 | Advanced Technology Materials, Inc. | Adsorbents for low vapor pressure fluid storage and delivery |
| US6716271B1 (en) | 2002-10-29 | 2004-04-06 | Advanced Technology Materials, Inc. | Apparatus and method for inhibiting decomposition of germane |
| US6991671B2 (en) * | 2002-12-09 | 2006-01-31 | Advanced Technology Materials, Inc. | Rectangular parallelepiped fluid storage and dispensing vessel |
| DE10306344B8 (de) * | 2003-02-15 | 2013-11-21 | Pharmpur Gmbh | Gasspeicher zur Speicherung einer vorgegebenen Gasmenge und Freigabe des Gases für eine medizinische Applikation |
| JP2005024068A (ja) * | 2003-07-02 | 2005-01-27 | Toyo Tanso Kk | ハロゲンガス又はハロゲン含有ガスの供給装置 |
| WO2005054742A1 (en) * | 2003-12-03 | 2005-06-16 | Chemviron Carbon Limited | Storage of gases and their use in dispensing fluids |
| US7253413B2 (en) * | 2004-11-15 | 2007-08-07 | Smiths Detection Inc. | Gas identification system |
| KR101297917B1 (ko) | 2005-08-30 | 2013-08-27 | 어드밴스드 테크놀러지 머티리얼즈, 인코포레이티드 | 대안적인 불화 붕소 전구체를 이용한 붕소 이온 주입 방법,및 주입을 위한 대형 수소화붕소의 형성 방법 |
| CN101410164B (zh) * | 2006-01-30 | 2012-05-02 | 高级技术材料公司 | 纳米多孔碳材料，以及利用其的系统和方法 |
| DE202008000810U1 (de) * | 2007-11-04 | 2008-12-24 | BLüCHER GMBH | Sorptionsfiltermaterial |
| US8598022B2 (en) | 2009-10-27 | 2013-12-03 | Advanced Technology Materials, Inc. | Isotopically-enriched boron-containing compounds, and methods of making and using same |
| US8858819B2 (en) | 2010-02-15 | 2014-10-14 | Air Products And Chemicals, Inc. | Method for chemical mechanical planarization of a tungsten-containing substrate |
| CN102091591A (zh) * | 2010-12-29 | 2011-06-15 | 广东工业大学 | 一种硅藻土改性吸附材料及其制备方法和应用 |
| US8679231B2 (en) | 2011-01-19 | 2014-03-25 | Advanced Technology Materials, Inc. | PVDF pyrolyzate adsorbent and gas storage and dispensing system utilizing same |
| US9073005B2 (en) | 2011-06-09 | 2015-07-07 | Sri International | Falling microbead counter-flow process for separating gas mixtures |
| EP3295075A4 (en) * | 2015-05-12 | 2019-03-20 | Entegris, Inc. | VALVE ARRANGEMENTS AND LIQUID STORAGE AND PACKING THEREFORE |
| CN105664662B (zh) * | 2016-03-31 | 2018-07-13 | 威格气体纯化科技（苏州）股份有限公司 | 在线更换吸附材料的净化柱及手套箱 |
| CN111093802B (zh) * | 2017-09-25 | 2021-08-17 | 纽麦特科技公司 | 高反应性气体的吸附剂辅助稳定化 |
| KR102785430B1 (ko) * | 2017-11-17 | 2025-03-21 | 라시크 아이엔씨. | 기재로부터의 프로세스 가스의 저장 및 전달을 위한 방법, 시스템, 및 디바이스 |
| KR102796847B1 (ko) * | 2019-10-17 | 2025-04-15 | 현대자동차주식회사 | 판상 유도 자기장 코일을 이용하는 자기 유도 열 제어 고체 수소 저장 시스템 |
| CN116391090A (zh) * | 2020-10-23 | 2023-07-04 | 恩特格里斯公司 | 具有高纯度输送气体的吸附型储运容器和相关方法 |
| JP7012189B1 (ja) | 2021-09-02 | 2022-01-27 | 東京瓦斯株式会社 | ガス供給方法 |
Family Cites Families (84)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US240423A (en) * | 1881-04-19 | Alexander james | ||
| US1608155A (en) * | 1920-08-02 | 1926-11-23 | American Solvent Recovery Corp | Means for transporting and storing gases |
| US1714245A (en) * | 1927-12-23 | 1929-05-21 | American Signs Corp | Gas-purifying trap and method of restoring same |
| US2283989A (en) * | 1938-06-04 | 1942-05-26 | Guy J Henry | Method of charging and conditioning dehydrators |
| US2356334A (en) * | 1941-12-18 | 1944-08-22 | Hooker Electrochemical Co | Means for storing and concentrating anhydrous hydrogen chloride |
| US2450289A (en) * | 1944-04-15 | 1948-09-28 | Little Inc A | Gas treating apparatus |
| US2663626A (en) * | 1949-05-14 | 1953-12-22 | Pritchard & Co J F | Method of storing gases |
| NL112548C (enExample) * | 1953-09-25 | 1900-01-01 | ||
| US3287432A (en) * | 1957-04-11 | 1966-11-22 | Texaco Inc | Selective sorption process |
| US3080307A (en) * | 1957-10-21 | 1963-03-05 | Westinghouse Electric Corp | Radioactive fluid handling system |
| US3093564A (en) * | 1957-10-21 | 1963-06-11 | Westinghouse Electric Corp | Gas handling systems for radioactive gases |
| NL241272A (enExample) * | 1958-07-14 | |||
| US2997371A (en) * | 1958-12-01 | 1961-08-22 | Standard Oil Co | Recovering of bf3 from admixture with hydrocarbons |
| US3037338A (en) * | 1958-12-30 | 1962-06-05 | Union Carbide Corp | Method for molecular sieve adsorption and desorption |
| US3116132A (en) * | 1960-01-22 | 1963-12-31 | Olin Mathieson | Process for the adsorption and desorption of diborane |
| US3006153A (en) * | 1960-08-29 | 1961-10-31 | Union Carbide Corp | Method and apparatus for storing and transporting ozone |
| NL297067A (enExample) * | 1962-09-04 | 1900-01-01 | ||
| US3144200A (en) * | 1962-10-17 | 1964-08-11 | Clyde E Taylor | Process and device for cryogenic adsorption pumping |
| US3264803A (en) * | 1963-01-21 | 1966-08-09 | Gen Electric | Sorption vacuum pump |
| US3415069A (en) * | 1966-10-31 | 1968-12-10 | Nasa | High pressure helium purifier |
| US3469375A (en) * | 1967-10-16 | 1969-09-30 | Nasa | Sorption vacuum trap |
| FR2064540A5 (en) * | 1969-09-23 | 1971-07-23 | Sigma Plastique | Moulding of packing for lpg storage bottles |
| US3675392A (en) * | 1970-01-30 | 1972-07-11 | Ite Imperial Corp | Adsorption-desorption method for purifying sf{11 |
| GB1385922A (en) * | 1971-03-31 | 1975-03-05 | Yatsurugi Y Kuratomi T | Preparation and use of 4-5a zeolite |
| US3713273A (en) * | 1971-05-03 | 1973-01-30 | R Coffee | Method and apparatus for storing gases and fueling internal combustion engines |
| US3719026A (en) * | 1971-06-01 | 1973-03-06 | Zeochem Corp | Selective sorption of non-polar molecules |
| US3788036A (en) * | 1972-07-26 | 1974-01-29 | D Stahl | Pressure equalization and purging system for heatless adsorption systems |
| US4023701A (en) * | 1974-03-04 | 1977-05-17 | Dockery Denzel J | Breathing apparatus for underwater use |
| JPS5272373A (en) * | 1975-12-15 | 1977-06-16 | Chiyoda R & D | Adsorption and separation apparatus |
| US4099936A (en) * | 1976-12-16 | 1978-07-11 | Union Carbide Corporation | Process for the purification of silane |
| GB1594454A (en) * | 1976-12-23 | 1981-07-30 | Boc Ltd | Gas separation |
| US4158639A (en) * | 1977-11-14 | 1979-06-19 | Autoclave Engineers, Inc. | Method of storing gases |
| US4343770A (en) * | 1977-12-19 | 1982-08-10 | Billings Energy Corporation | Self-regenerating system of removing oxygen and water impurities from hydrogen gas |
| US4263018A (en) * | 1978-02-01 | 1981-04-21 | Greene & Kellogg | Pressure swing adsorption process and system for gas separation |
| NL8005645A (nl) * | 1980-10-13 | 1982-05-03 | Euratom | Werkwijze voor het omkeerbaar opsluiten van gassen of dampen in een natuurlijk of synthetisch zeoliet. |
| DE3139781A1 (de) * | 1981-10-07 | 1983-04-21 | Nyby Uddeholm AB, 64480 Torshälla | Verfahren und vorrichtung zur reinigung eines dampffoermige schadstoffe enthaltenden gases |
| US4477265A (en) * | 1982-08-05 | 1984-10-16 | Air Products And Chemicals, Inc. | Argon purification |
| JPS6071040A (ja) * | 1983-09-27 | 1985-04-22 | Takeda Chem Ind Ltd | 有害ガス吸着剤 |
| SU1181692A1 (ru) * | 1983-11-14 | 1985-09-30 | Московский ордена Ленина и ордена Трудового Красного Знамени химико-технологический институт им.Д.И.Менделеева | Способ очистки газов от примесей фосфина и арсина |
| DE3344228A1 (de) * | 1983-12-07 | 1985-06-20 | Bergwerksverband Gmbh, 4300 Essen | Vorrichtung und verfahren zum regenerieren von trockenen, pulverfoermigen beladenen kohlenstoffhaltigen adsorptionsmitteln u. verfahren zum thermischen regenerieren mit dieser vorrichtung |
| JPS60208699A (ja) * | 1984-03-30 | 1985-10-21 | Sekisui Chem Co Ltd | 金属水素化物反応容器の製造方法 |
| US4552571A (en) * | 1984-04-05 | 1985-11-12 | Vbm Corporation | Oxygen generator with two compressor stages |
| JPS61133116A (ja) * | 1984-11-30 | 1986-06-20 | Nippon Paionikusu Kk | ガス精製装置 |
| FR2580947B1 (fr) * | 1985-04-25 | 1989-09-01 | Air Liquide | Procede et installation d'epuration par adsorption sur charbon actif, et pot adsorbeur correspondant |
| US4869733A (en) * | 1986-05-22 | 1989-09-26 | Vbm Corporation | Super-enriched oxygen generator |
| US4673415A (en) * | 1986-05-22 | 1987-06-16 | Vbm Corporation | Oxygen production system with two stage oxygen pressurization |
| JPH06104177B2 (ja) * | 1986-10-02 | 1994-12-21 | 大阪瓦斯株式会社 | 高純度ガス貯蔵用圧力容器 |
| JPS63156542A (ja) * | 1986-12-19 | 1988-06-29 | Kuraray Chem Kk | 活性炭再生法 |
| US5094830A (en) * | 1987-03-24 | 1992-03-10 | Novapure Corporation | Process for removal of water and silicon mu-oxides from chlorosilanes |
| US4761395A (en) * | 1987-03-24 | 1988-08-02 | Advanced Technology Materials, Inc. | Process and composition for purifying arsine, phosphine, ammonia, and inert gases to remove Lewis acid and oxidant impurities therefrom |
| US5151395A (en) * | 1987-03-24 | 1992-09-29 | Novapure Corporation | Bulk gas sorption and apparatus, gas containment/treatment system comprising same, and sorbent composition therefor |
| US4749384A (en) * | 1987-04-24 | 1988-06-07 | Union Carbide Corporation | Method and apparatus for quick filling gas cylinders |
| US4723967A (en) * | 1987-04-27 | 1988-02-09 | Advanced Technology Materials, Inc. | Valve block and container for semiconductor source reagent dispensing and/or purification |
| US4738693A (en) * | 1987-04-27 | 1988-04-19 | Advanced Technology Materials, Inc. | Valve block and container for semiconductor source reagent dispensing and/or purification |
| JPS63315146A (ja) * | 1987-06-16 | 1988-12-22 | Koko Res Kk | 炭素質吸着体の再生方法 |
| US4744221A (en) * | 1987-06-29 | 1988-05-17 | Olin Corporation | Zeolite based arsine storage and delivery system |
| DE3729517A1 (de) * | 1987-09-03 | 1989-03-16 | Siemens Ag | Adsorptionseinrichtung zur gastrennung |
| SU1544475A1 (ru) * | 1987-12-07 | 1990-02-23 | Предприятие П/Я Г-4567 | Способ получени сорбента дл очистки газов |
| SU1583151A1 (ru) * | 1988-05-23 | 1990-08-07 | Государственный научно-исследовательский и проектный институт редкометаллической промышленности "Гиредмет" | Способ очистки газов от арсина |
| DE3842930A1 (de) * | 1988-12-21 | 1990-06-28 | Bayer Ag | Verfahren zur adsorptiven sauerstoffanreicherung von luft mit mischungen aus ca-zeolith a molekularsieben mittels vakuum-swing-adsorption |
| DE3843313A1 (de) * | 1988-12-22 | 1990-06-28 | Wacker Chemitronic | Verfahren zur entfernung von gasfoermigen kontaminierenden, insbesondere dotierstoffverbindungen aus halogensilanverbindungen enthaltenden traegergasen |
| FR2652346B1 (fr) * | 1989-09-22 | 1991-11-29 | Air Liquide | Procede de preparation de disilane. |
| JPH03127606A (ja) * | 1989-10-09 | 1991-05-30 | Hitachi Ltd | 充填塔構造 |
| US5202096A (en) * | 1990-01-19 | 1993-04-13 | The Boc Group, Inc. | Apparatus for low temperature purification of gases |
| FR2659030B1 (fr) * | 1990-03-02 | 1993-01-08 | Air Liquide | Enceinte et installation d'absorption pour separation des melanges gazeux. |
| US5238469A (en) * | 1992-04-02 | 1993-08-24 | Saes Pure Gas, Inc. | Method and apparatus for removing residual hydrogen from a purified gas |
| US5224350A (en) * | 1992-05-11 | 1993-07-06 | Advanced Extraction Technologies, Inc. | Process for recovering helium from a gas stream |
| GB9220975D0 (en) * | 1992-10-06 | 1992-11-18 | Air Prod & Chem | Apparatus for supplying high purity gas |
| JPH06233915A (ja) * | 1993-02-10 | 1994-08-23 | Mitsubishi Heavy Ind Ltd | 燃焼排ガスの脱硝設備 |
| US5385689A (en) * | 1993-06-29 | 1995-01-31 | Novapure Corporation | Process and composition for purifying semiconductor process gases to remove Lewis acid and oxidant impurities therefrom |
| US5417742A (en) * | 1993-12-03 | 1995-05-23 | The Boc Group, Inc. | Removal of perfluorocarbons from gas streams |
| CA2147112A1 (en) * | 1994-05-26 | 1995-11-27 | Kishor Purushottam Gadkaree | Electrically heatable activated carbon bodies for adsorption and desorption applications |
| US5707424A (en) * | 1994-10-13 | 1998-01-13 | Advanced Technology Materials, Inc. | Process system with integrated gas storage and delivery unit |
| US6083298A (en) * | 1994-10-13 | 2000-07-04 | Advanced Technology Materials, Inc. | Process for fabricating a sorbent-based gas storage and dispensing system, utilizing sorbent material pretreatment |
| US5518528A (en) * | 1994-10-13 | 1996-05-21 | Advanced Technology Materials, Inc. | Storage and delivery system for gaseous hydride, halide, and organometallic group V compounds |
| US5704967A (en) * | 1995-10-13 | 1998-01-06 | Advanced Technology Materials, Inc. | Fluid storage and delivery system comprising high work capacity physical sorbent |
| DE19536992A1 (de) * | 1995-10-04 | 1997-04-10 | Sued Chemie Ag | Verfahren zum Regenerieren von gebrauchten anorganischen Adsorbentien sowie Verwendung der Regenerate |
| JP3807634B2 (ja) * | 1995-10-18 | 2006-08-09 | 住友重機械工業株式会社 | 炭素質触媒の再生方法及び再生器 |
| US5761910A (en) * | 1996-05-20 | 1998-06-09 | Advanced Technology Materials, Inc. | High capacity gas storage and dispensing system |
| US5837027A (en) * | 1996-05-20 | 1998-11-17 | Advanced Technology Materials, Inc. | Manufacturing process for gas source and dispensing systems |
| WO1997044118A1 (en) * | 1996-05-20 | 1997-11-27 | Advanced Technology Materials, Inc. | Fluid storage and delivery system comprising high work capacity physical sorbent |
| US5858067A (en) * | 1996-05-20 | 1999-01-12 | Advanced Technology Materials, Inc. | Ex situ degassing and sorbate loading system for manufacture of sorbent-based fluid storage and dispensing apparatus |
| JPH1066823A (ja) * | 1996-08-27 | 1998-03-10 | Mitsui Petrochem Ind Ltd | 気相化学蒸着装置 |
| US5676735A (en) * | 1996-10-31 | 1997-10-14 | Advanced Technology Materials, Inc. | Reclaiming system for gas recovery from decommissioned gas storage and dispensing vessels and recycle of recovered gas |
-
1998
- 1998-08-31 US US09/143,809 patent/US6083298A/en not_active Expired - Lifetime
-
1999
- 1999-08-05 TW TW088113376A patent/TW565467B/zh not_active IP Right Cessation
- 1999-08-25 MY MYPI99003632A patent/MY133994A/en unknown
- 1999-08-30 KR KR1020017002536A patent/KR100618072B1/ko not_active Expired - Lifetime
- 1999-08-30 AU AU59047/99A patent/AU5904799A/en not_active Abandoned
- 1999-08-30 JP JP2000567292A patent/JP2002523707A/ja active Pending
- 1999-08-30 WO PCT/US1999/019868 patent/WO2000012196A1/en not_active Ceased
- 1999-08-30 EP EP99946692A patent/EP1109613A4/en not_active Withdrawn
-
2010
- 2010-12-16 JP JP2010280915A patent/JP2011099562A/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2002523707A5 (enExample) | ||
| JP2011099562A5 (enExample) | ||
| JP2011099562A (ja) | 吸着剤前処理を利用した吸着型気体貯蔵及び計量分配システムの製造方法 | |
| JP4612920B2 (ja) | 流体貯蔵および供給容器を製造する方法および流体貯蔵および供給装置を製造する方法 | |
| JP4705240B2 (ja) | 高純度ガスを放出するための収着型ガス貯蔵および放出システム | |
| JP3058918B2 (ja) | 気体化合物の貯蔵と送出のシステム | |
| JPH0419426B2 (enExample) | ||
| CA1269089A (en) | Selective adsorbent for co and method of manufacturing the same | |
| US20050109419A1 (en) | Gas supplying method and system | |
| US20250216034A1 (en) | Adsorbent-type storage and delivery vessels with high purity delivery of gas, and related methods | |
| CN105026313A (zh) | 通过液相低温吸附纯化氩 | |
| TWI225467B (en) | Vacuum preparation of hydrogen halide drier | |
| WO1995017251A1 (en) | System and process for removing free and dissolved co2 from aqueous solutions | |
| WO2019071067A2 (en) | IN SITU PURIFICATION OF ELECTRONIC GAS | |
| JP2012189219A5 (ja) | 吸着性流体の貯蔵ならびに計量分配用の吸着・脱着装置及び流体試薬の供給方法 | |
| JP6700370B2 (ja) | 多結晶シリコンの収容治具および多結晶シリコンの製造方法 | |
| JPS6238282B2 (enExample) | ||
| JP2020128332A (ja) | 多結晶シリコンの収容治具および多結晶シリコンの製造方法 | |
| JPS643805B2 (enExample) | ||
| JPH05261282A (ja) | 吸着剤の再生方法 |