JPH0419426B2 - - Google Patents

Info

Publication number
JPH0419426B2
JPH0419426B2 JP62198498A JP19849887A JPH0419426B2 JP H0419426 B2 JPH0419426 B2 JP H0419426B2 JP 62198498 A JP62198498 A JP 62198498A JP 19849887 A JP19849887 A JP 19849887A JP H0419426 B2 JPH0419426 B2 JP H0419426B2
Authority
JP
Japan
Prior art keywords
container
gas
acetylene
purity
dissolved
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62198498A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6446098A (en
Inventor
Yasuo Kotani
Minoru Nishida
Kenji Yamawaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NICHIGO ASECHIREN KK
Original Assignee
NICHIGO ASECHIREN KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NICHIGO ASECHIREN KK filed Critical NICHIGO ASECHIREN KK
Priority to JP62198498A priority Critical patent/JPS6446098A/ja
Priority to US07/148,794 priority patent/US4863493A/en
Publication of JPS6446098A publication Critical patent/JPS6446098A/ja
Publication of JPH0419426B2 publication Critical patent/JPH0419426B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C11/00—Aliphatic unsaturated hydrocarbons
    • C07C11/22—Aliphatic unsaturated hydrocarbons containing carbon-to-carbon triple bonds
    • C07C11/24—Acetylene
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C7/00—Purification; Separation; Use of additives
    • C07C7/12—Purification; Separation; Use of additives by adsorption, i.e. purification or separation of hydrocarbons with the aid of solids, e.g. with ion-exchangers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C11/00—Use of gas-solvents or gas-sorbents in vessels
    • F17C11/002—Use of gas-solvents or gas-sorbents in vessels for acetylene

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Water Supply & Treatment (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
JP62198498A 1987-08-07 1987-08-07 Method for cleaning inside of container of dissolved acetylene Granted JPS6446098A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP62198498A JPS6446098A (en) 1987-08-07 1987-08-07 Method for cleaning inside of container of dissolved acetylene
US07/148,794 US4863493A (en) 1987-08-07 1988-01-27 High purity acetylene gas

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62198498A JPS6446098A (en) 1987-08-07 1987-08-07 Method for cleaning inside of container of dissolved acetylene

Publications (2)

Publication Number Publication Date
JPS6446098A JPS6446098A (en) 1989-02-20
JPH0419426B2 true JPH0419426B2 (enExample) 1992-03-30

Family

ID=16392128

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62198498A Granted JPS6446098A (en) 1987-08-07 1987-08-07 Method for cleaning inside of container of dissolved acetylene

Country Status (2)

Country Link
US (1) US4863493A (enExample)
JP (1) JPS6446098A (enExample)

Families Citing this family (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1995021012A1 (en) * 1994-02-04 1995-08-10 University Of Chicago Apparatus for detection and separation of heavy noble gases
US7357845B2 (en) * 1997-04-10 2008-04-15 Cookgas, L.L.C. Methods of making laryngeal masks
FR2853313B1 (fr) * 2003-04-04 2005-05-06 Air Liquide Procede d'elimination d'un solvant contenu dans l'acetylene, installation pour la mise en oeuvre du procede
US7284409B2 (en) * 2004-05-05 2007-10-23 The Regents Of The University Of Michigan Thermal modulation for gas chromatography
US8664124B2 (en) 2005-10-31 2014-03-04 Novellus Systems, Inc. Method for etching organic hardmasks
US8110493B1 (en) 2005-12-23 2012-02-07 Novellus Systems, Inc. Pulsed PECVD method for modulating hydrogen content in hard mask
US7981810B1 (en) 2006-06-08 2011-07-19 Novellus Systems, Inc. Methods of depositing highly selective transparent ashable hardmask films
US7915166B1 (en) 2007-02-22 2011-03-29 Novellus Systems, Inc. Diffusion barrier and etch stop films
US7981777B1 (en) 2007-02-22 2011-07-19 Novellus Systems, Inc. Methods of depositing stable and hermetic ashable hardmask films
US20080242912A1 (en) * 2007-03-29 2008-10-02 Olivier Letessier Methods and Apparatus for Providing a High Purity Acetylene Product
FR2912401A1 (fr) * 2007-07-17 2008-08-15 Air Liquide Nouveau procede d'elimination d'un solvant contenu dans de l'acetylene sous pression. installation pour la mise en oeuvre du procede
FR2915991A1 (fr) * 2007-07-17 2008-11-14 Air Liquide Nouveau procede d'elimination d'un solvant contenu dans de l'acetylene detendu. installation pour la mise en oeuvre du procede
US8962101B2 (en) 2007-08-31 2015-02-24 Novellus Systems, Inc. Methods and apparatus for plasma-based deposition
US7820556B2 (en) * 2008-06-04 2010-10-26 Novellus Systems, Inc. Method for purifying acetylene gas for use in semiconductor processes
US8435608B1 (en) 2008-06-27 2013-05-07 Novellus Systems, Inc. Methods of depositing smooth and conformal ashable hard mask films
US8129577B2 (en) * 2008-09-16 2012-03-06 Air Products And Chemicals, Inc. Process and system for providing acetylene
KR101493756B1 (ko) * 2008-09-16 2015-02-17 에어 프로덕츠 앤드 케미칼스, 인코오포레이티드 아세틸렌을 제공하기 위한 방법 및 시스템
US7955990B2 (en) * 2008-12-12 2011-06-07 Novellus Systems, Inc. Method for improved thickness repeatability of PECVD deposited carbon films
US8322383B2 (en) 2009-05-27 2012-12-04 Praxair Technology, Inc. Cylinder preparation for high purity acetylene
US8398747B2 (en) * 2009-06-23 2013-03-19 Praxair Technology, Inc. Processes for purification of acetylene
US8563414B1 (en) 2010-04-23 2013-10-22 Novellus Systems, Inc. Methods for forming conductive carbon films by PECVD
SG195494A1 (en) 2012-05-18 2013-12-30 Novellus Systems Inc Carbon deposition-etch-ash gap fill process
US9362133B2 (en) 2012-12-14 2016-06-07 Lam Research Corporation Method for forming a mask by etching conformal film on patterned ashable hardmask
US9304396B2 (en) 2013-02-25 2016-04-05 Lam Research Corporation PECVD films for EUV lithography
US9589799B2 (en) 2013-09-30 2017-03-07 Lam Research Corporation High selectivity and low stress carbon hardmask by pulsed low frequency RF power
US9320387B2 (en) 2013-09-30 2016-04-26 Lam Research Corporation Sulfur doped carbon hard masks
CN104361811A (zh) * 2014-11-25 2015-02-18 张泽阳 电石法乙炔生产及性质检验装置
CN104496740A (zh) * 2014-12-15 2015-04-08 苏州金宏气体股份有限公司 一种工业乙炔纯化为高纯乙炔的装置及提纯方法
US9857804B2 (en) 2015-12-23 2018-01-02 Praxair Technology, Inc. Method and system for optimizing acetylene delivery
KR20220002748A (ko) 2019-05-29 2022-01-06 램 리써치 코포레이션 고 전력 펄싱된 저 주파수 rf에 의한 고 선택도, 저 응력, 및 저 수소 다이아몬드-유사 탄소 하드 마스크들
CN110410662B (zh) * 2019-08-08 2023-07-11 广东华特气体股份有限公司 一种超高纯气体的钢瓶处理系统及方法
EP4022670A4 (en) 2019-08-30 2023-08-30 Lam Research Corporation High density, modulus, and hardness amorphous carbon films at low pressure
CN115867999A (zh) 2020-06-06 2023-03-28 朗姆研究公司 用于半导体处理的可移除喷头面板
WO2022026271A1 (en) 2020-07-29 2022-02-03 Lam Research Corporation Concentration control using a bubbler
CN113719748A (zh) 2021-09-28 2021-11-30 乔治洛德方法研究和开发液化空气有限公司 提供乙炔至乙炔使用装置的系统和方法
CN114195614A (zh) * 2021-12-30 2022-03-18 大连科利德光电子材料有限公司 一种制备4n纯度乙炔气体的方法
CN116747670A (zh) * 2023-05-27 2023-09-15 太仓市金阳气体有限公司 高纯度乙炔气体净化工艺

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1181116A (en) * 1915-07-20 1916-05-02 Prest O Lite Co Inc Method of separating acetylene and hydrogen.
US1230531A (en) * 1916-11-07 1917-06-19 Acetylene Illuminating Company Ltd Storing of gases under pressure.
US1906035A (en) * 1928-09-22 1933-04-25 Robert G Wulff Method of charging compressed gas cylinders
US2146448A (en) * 1936-05-06 1939-02-07 Du Pont Acetylene solution
US2422251A (en) * 1941-09-13 1947-06-17 Linde Air Prod Co Storage of acetylene
GB950971A (en) * 1960-10-14 1964-03-04 Kurashiki Rayon Kk Method of separation of acetylene and ethylene from a gaseous mixture and apparatus therefor
GB1125833A (en) * 1965-05-29 1968-09-05 Montedison Spa Process for the separation of acetylene from gaseous mixtures
JPS4813081B1 (enExample) * 1966-02-18 1973-04-25
DE1904744C3 (de) * 1969-01-31 1973-10-18 Metallgesellschaft Ag, 6000 Frankfurt Verfahren zur Gewinnung von Acetylen aus rohem durch thermische Spaltung von Kohlenwasserstoffen erzeugtem Äthylen
BE755590A (fr) * 1969-09-02 1971-02-15 Linde Ag Procede de fabrication d'ethylene pur
US3706181A (en) * 1970-11-20 1972-12-19 Tenneco Chem Process for the safe handling of c{11 {11 and c{11 {11 acetylenic hydrocarbons
DE2116557A1 (de) * 1971-04-05 1972-10-12 Badische Anilin & Soda Fabrik AG, 6700 Ludwigshafen Verfahren zur Entfernung von CO tief 2 aus Acetylen
US3816976A (en) * 1971-07-15 1974-06-18 Lummus Co Process for the purification of acetylene and ethylene
US3837144A (en) * 1972-11-21 1974-09-24 J Lewis Separation of acetylene from ethylene-bearing gases
US3870482A (en) * 1973-09-19 1975-03-11 Tenneco Chem Process for the separation of c{hd 4 {b acetylenic hydrocarbons from gas streams
US4177250A (en) * 1976-08-16 1979-12-04 Phillips Petroleum Company Method of removing acetylene and sulfur compounds from gases by absorption in dimethyl formamide
US4086288A (en) * 1976-08-16 1978-04-25 Phillips Petroleum Company Acetylenes removal from olefin streams for alkylation by dimethyl formamide absorption
US4349463A (en) * 1981-01-19 1982-09-14 Union Carbide Corporation Acetylene storage vessel
DE3413898A1 (de) * 1984-04-13 1985-10-17 EC Erdölchemie GmbH, 5000 Köln Verfahren zur entfernung von acetylen aus einem c(pfeil abwaerts)2(pfeil abwaerts)-strom

Also Published As

Publication number Publication date
US4863493A (en) 1989-09-05
JPS6446098A (en) 1989-02-20

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