KR100684201B1 - 불소 포함 배기가스의 처리방법 및 이의 방법을 사용하기위한 흡착 컬럼 장치 - Google Patents
불소 포함 배기가스의 처리방법 및 이의 방법을 사용하기위한 흡착 컬럼 장치 Download PDFInfo
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- KR100684201B1 KR100684201B1 KR1020050072701A KR20050072701A KR100684201B1 KR 100684201 B1 KR100684201 B1 KR 100684201B1 KR 1020050072701 A KR1020050072701 A KR 1020050072701A KR 20050072701 A KR20050072701 A KR 20050072701A KR 100684201 B1 KR100684201 B1 KR 100684201B1
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- Prior art keywords
- fluorine
- exhaust gas
- containing exhaust
- activated carbon
- treating
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
- B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/46—Removing components of defined structure
- B01D53/68—Halogens or halogen compounds
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
- B01D2253/10—Inorganic adsorbents
- B01D2253/102—Carbon
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2258/00—Sources of waste gases
- B01D2258/02—Other waste gases
- B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
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- Engineering & Computer Science (AREA)
- Analytical Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Health & Medical Sciences (AREA)
- Biomedical Technology (AREA)
- Environmental & Geological Engineering (AREA)
- Treating Waste Gases (AREA)
- Solid-Sorbent Or Filter-Aiding Compositions (AREA)
Abstract
Description
컬럼에 충진된 처리제 | 충진비 | 파괴시간 (min) | 불소 포함 배기가스 처리량 [㎖(가스)/ g(처리제)] | 투입전 가스 | ||
실시예 | 1 | 활성탄 + 수산화칼슘 | 4:96 | 901 | 676 | HF + F2 + CO2 + N2 |
2 | 활성탄 + 탄산칼슘 | 4:96 | 952 | 714 | ||
3 | 수산화칼슘 + 탄산칼슘 | 47:53 | 1,255 | 941 | ||
4 | 활성탄 + 수산화칼슘 + 탄산칼슘 | 2:46:52 | 1,532 | 1,149 | ||
5 | 1:30:69 | 1,510 | 1,133 | |||
6 | 1:23:76 | 1,493 | 1,120 | |||
7 | 1:18:81 | 1,512 | 1,134 | |||
8 | 2:63:35 | 1,511 | 1,133 | |||
9 | 1:47:52 | 1,506 | 1,130 | |||
비교예 | 1 | 활성탄 | - | 749 | 562 | |
2 | 수산화칼슘 | - | 839 | 629 | ||
3 | 탄산칼슘 | - | 835 | 626 |
Claims (10)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020050072701A KR100684201B1 (ko) | 2005-08-09 | 2005-08-09 | 불소 포함 배기가스의 처리방법 및 이의 방법을 사용하기위한 흡착 컬럼 장치 |
Applications Claiming Priority (1)
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---|---|---|---|
KR1020050072701A KR100684201B1 (ko) | 2005-08-09 | 2005-08-09 | 불소 포함 배기가스의 처리방법 및 이의 방법을 사용하기위한 흡착 컬럼 장치 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20070018238A KR20070018238A (ko) | 2007-02-14 |
KR100684201B1 true KR100684201B1 (ko) | 2007-02-20 |
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KR1020050072701A KR100684201B1 (ko) | 2005-08-09 | 2005-08-09 | 불소 포함 배기가스의 처리방법 및 이의 방법을 사용하기위한 흡착 컬럼 장치 |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101140883B1 (ko) * | 2010-03-30 | 2012-07-12 | 현대제철 주식회사 | 배가스의 불소 제거방법 |
KR102061895B1 (ko) | 2019-07-02 | 2020-01-03 | (주)플라즈마텍 | 고안정성 흡착제 및 이를 이용한 배기가스의 처리 방법 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111725066A (zh) * | 2019-03-22 | 2020-09-29 | 东莞新科技术研究开发有限公司 | 一种半导体表面去除氟杂质的方法 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07297166A (ja) * | 1994-04-20 | 1995-11-10 | Toshiba Eng & Constr Co Ltd | 電子デバイス製造用基板の乾燥装置 |
JP2000061245A (ja) | 1998-08-18 | 2000-02-29 | Seiko Epson Corp | ガスフイルタおよびそれを用いたガス検知器ならびに除害装置 |
KR20000062165A (ko) * | 1999-03-12 | 2000-10-25 | 오하시 미츠오 | 불화 할로겐을 함유하는 배기가스의 처리방법, 처리제 및처리장치 |
KR20020087035A (ko) * | 2002-10-14 | 2002-11-21 | 남연우 | 폐기의 처리 방법 |
US6649082B2 (en) | 2000-05-26 | 2003-11-18 | Showa Denko K.K. | Harm-removing agent and method for rendering halogen-containing gas harmless and uses thereof |
-
2005
- 2005-08-09 KR KR1020050072701A patent/KR100684201B1/ko active IP Right Grant
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07297166A (ja) * | 1994-04-20 | 1995-11-10 | Toshiba Eng & Constr Co Ltd | 電子デバイス製造用基板の乾燥装置 |
JP2000061245A (ja) | 1998-08-18 | 2000-02-29 | Seiko Epson Corp | ガスフイルタおよびそれを用いたガス検知器ならびに除害装置 |
KR20000062165A (ko) * | 1999-03-12 | 2000-10-25 | 오하시 미츠오 | 불화 할로겐을 함유하는 배기가스의 처리방법, 처리제 및처리장치 |
US6649082B2 (en) | 2000-05-26 | 2003-11-18 | Showa Denko K.K. | Harm-removing agent and method for rendering halogen-containing gas harmless and uses thereof |
KR20020087035A (ko) * | 2002-10-14 | 2002-11-21 | 남연우 | 폐기의 처리 방법 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101140883B1 (ko) * | 2010-03-30 | 2012-07-12 | 현대제철 주식회사 | 배가스의 불소 제거방법 |
KR102061895B1 (ko) | 2019-07-02 | 2020-01-03 | (주)플라즈마텍 | 고안정성 흡착제 및 이를 이용한 배기가스의 처리 방법 |
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Publication number | Publication date |
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KR20070018238A (ko) | 2007-02-14 |
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