JP2002520606A - 蛍光性被覆の厚さ測定 - Google Patents
蛍光性被覆の厚さ測定Info
- Publication number
- JP2002520606A JP2002520606A JP2000560410A JP2000560410A JP2002520606A JP 2002520606 A JP2002520606 A JP 2002520606A JP 2000560410 A JP2000560410 A JP 2000560410A JP 2000560410 A JP2000560410 A JP 2000560410A JP 2002520606 A JP2002520606 A JP 2002520606A
- Authority
- JP
- Japan
- Prior art keywords
- light
- coating
- thickness
- wavelength
- intensity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000009675 coating thickness measurement Methods 0.000 title claims 3
- 238000000576 coating method Methods 0.000 claims abstract description 65
- 239000011248 coating agent Substances 0.000 claims abstract description 63
- 239000008199 coating composition Substances 0.000 claims abstract description 42
- 238000000034 method Methods 0.000 claims abstract description 27
- 239000000758 substrate Substances 0.000 claims description 17
- 230000003287 optical effect Effects 0.000 claims description 10
- 239000000463 material Substances 0.000 claims description 5
- 238000002211 ultraviolet spectrum Methods 0.000 claims description 3
- 239000007787 solid Substances 0.000 abstract description 3
- 238000004020 luminiscence type Methods 0.000 abstract 1
- 238000005259 measurement Methods 0.000 description 15
- 230000005284 excitation Effects 0.000 description 13
- 239000010408 film Substances 0.000 description 11
- 238000001228 spectrum Methods 0.000 description 10
- 239000003795 chemical substances by application Substances 0.000 description 9
- 239000010409 thin film Substances 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 5
- ZUOUZKKEUPVFJK-UHFFFAOYSA-N diphenyl Chemical compound C1=CC=CC=C1C1=CC=CC=C1 ZUOUZKKEUPVFJK-UHFFFAOYSA-N 0.000 description 4
- 229910052731 fluorine Inorganic materials 0.000 description 4
- 239000011737 fluorine Substances 0.000 description 4
- 230000005855 radiation Effects 0.000 description 4
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 2
- 235000010290 biphenyl Nutrition 0.000 description 2
- 239000004305 biphenyl Substances 0.000 description 2
- 238000009501 film coating Methods 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- 238000010606 normalization Methods 0.000 description 2
- 101000650817 Homo sapiens Semaphorin-4D Proteins 0.000 description 1
- -1 NN-decyl fluorine Chemical class 0.000 description 1
- 101150116266 RR24 gene Proteins 0.000 description 1
- 102100027744 Semaphorin-4D Human genes 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000002313 adhesive film Substances 0.000 description 1
- 239000002390 adhesive tape Substances 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000000295 emission spectrum Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000000695 excitation spectrum Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000007850 fluorescent dye Substances 0.000 description 1
- 150000002221 fluorine Chemical class 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000003504 photosensitizing agent Substances 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
- G01B11/0658—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of emissivity or reradiation
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
- Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/116,009 US6252237B1 (en) | 1998-07-15 | 1998-07-15 | Low cost thickness measurement method and apparatus for thin coatings |
| US09/116,009 | 1998-07-15 | ||
| PCT/US1999/000888 WO2000004340A1 (en) | 1998-07-15 | 1999-01-14 | Thickness measurement of fluorescing coatings |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2002520606A true JP2002520606A (ja) | 2002-07-09 |
| JP2002520606A5 JP2002520606A5 (enExample) | 2006-03-02 |
Family
ID=22364723
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000560410A Withdrawn JP2002520606A (ja) | 1998-07-15 | 1999-01-14 | 蛍光性被覆の厚さ測定 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US6252237B1 (enExample) |
| EP (1) | EP1097352B1 (enExample) |
| JP (1) | JP2002520606A (enExample) |
| AU (1) | AU2457599A (enExample) |
| DE (1) | DE69924378T2 (enExample) |
| WO (1) | WO2000004340A1 (enExample) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010107277A (ja) * | 2008-10-29 | 2010-05-13 | Nippon Paper-Pak Co Ltd | 有機薄膜の膜厚測定方法 |
| WO2017043198A1 (ja) * | 2015-09-08 | 2017-03-16 | 日東電工株式会社 | 光学フィルムおよびその製造方法 |
| JP2022536074A (ja) * | 2019-06-08 | 2022-08-12 | ヒューレット－パッカード デベロップメント カンパニー エル．ピー． | 光学式液滴検出器のコーティング |
| JP2022178427A (ja) * | 2021-05-20 | 2022-12-02 | 株式会社ディスコ | 保護膜の厚み測定方法 |
| KR102642534B1 (ko) * | 2023-09-05 | 2024-02-29 | (주)오로스 테크놀로지 | 다층 박막 각층의 두께 계측의 정밀도 향상을 위한 처리 장치 및 방법 |
Families Citing this family (34)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB9906011D0 (en) * | 1999-03-16 | 1999-05-12 | Whiley Foils Ltd | Fluorescent materials |
| US6962670B1 (en) | 2000-08-16 | 2005-11-08 | Eastman Chemical Company | Determination of layer thickness or non-uniformity of layer thickness based on fluorophore additives |
| US7052483B2 (en) * | 2000-12-19 | 2006-05-30 | Animas Corporation | Transcutaneous inserter for low-profile infusion sets |
| US6950547B2 (en) * | 2001-02-12 | 2005-09-27 | 3M Innovative Properties Company | Web inspection method and device |
| DE10217950B4 (de) * | 2001-04-24 | 2011-01-13 | Volkswagen Ag | Verfahren zur Bestimmung einer Beschichtungsstärke |
| JP3723845B2 (ja) * | 2002-03-26 | 2005-12-07 | 国立大学法人富山大学 | 有機エレクトロルミネッセンス素子に使用される有機薄膜の膜厚測定法および測定装置 |
| KR101203325B1 (ko) * | 2003-12-31 | 2012-11-20 | 쓰리엠 이노베이티브 프로퍼티즈 컴파니 | 시트-기반 물품에 대한 재고품 제어 |
| US7187995B2 (en) * | 2003-12-31 | 2007-03-06 | 3M Innovative Properties Company | Maximization of yield for web-based articles |
| US7623699B2 (en) | 2004-04-19 | 2009-11-24 | 3M Innovative Properties Company | Apparatus and method for the automated marking of defects on webs of material |
| US20080049972A1 (en) * | 2006-07-07 | 2008-02-28 | Lockheed Martin Corporation | Mail imaging system with secondary illumination/imaging window |
| US20080011654A1 (en) * | 2006-07-07 | 2008-01-17 | Hale Mathew S | Mail processing system with radiation filtering |
| US20080019563A1 (en) * | 2006-07-07 | 2008-01-24 | Goodwin Mark D | Mail processing system with low resolution UV imaging subsystem |
| US20080035866A1 (en) * | 2006-07-07 | 2008-02-14 | Lockheed Martin Corporation | Mail imaging system with UV illumination interrupt |
| US20080012981A1 (en) * | 2006-07-07 | 2008-01-17 | Goodwin Mark D | Mail processing system with dual camera assembly |
| US8175739B2 (en) * | 2007-07-26 | 2012-05-08 | 3M Innovative Properties Company | Multi-unit process spatial synchronization |
| US7542821B2 (en) * | 2007-07-26 | 2009-06-02 | 3M Innovative Properties Company | Multi-unit process spatial synchronization of image inspection systems |
| US7903265B2 (en) * | 2008-04-04 | 2011-03-08 | Toyota Motor Engineering & Manufacturing North America, Inc. | Method for measuring coating uniformity |
| US7797133B2 (en) * | 2008-09-10 | 2010-09-14 | 3M Innovative Properties Company | Multi-roller registered repeat defect detection of a web process line |
| FR2993972B1 (fr) * | 2012-07-26 | 2014-07-18 | Inst Pierre Vernier | Dispositif de determination d'un ensemble de donnees spatiales d'epaisseur d'une couche mince a la surface d'un substrat, par mesure d'emission infra-rouge |
| US20140171956A1 (en) | 2012-12-17 | 2014-06-19 | Abbott Medical Optics Inc. | Detecting coatings on intraocular lens insertion devices and methods of manufacturing the devices |
| KR102224848B1 (ko) | 2014-10-06 | 2021-03-08 | 삼성전자주식회사 | 발광 소자 패키지 제조 방법 |
| EP3400431B1 (en) | 2016-01-07 | 2022-03-23 | Arkema, Inc. | Optical method to measure the thickness of coatings deposited on substrates |
| US11125549B2 (en) | 2016-01-07 | 2021-09-21 | Arkema Inc. | Optical intensity method to measure the thickness of coatings deposited on substrates |
| CN108474732B (zh) | 2016-01-07 | 2022-04-15 | 阿科玛股份有限公司 | 测量高速移动的弯曲物体上沉积涂层厚度的不依赖于物体位置的方法 |
| DE102018103171A1 (de) * | 2017-11-23 | 2019-05-23 | Tdk Electronics Ag | Verfahren zum Bestimmen von Eigenschaften einer Beschichtung auf einer transparenten Folie, Verfahren zur Herstellung einer Kondensatorfolie und Einrichtung zum Bestimmen von Eigenschaften einer Beschichtung auf einer transparenten Folie |
| DE102018110931C5 (de) * | 2018-05-07 | 2023-06-29 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren und System zum Erfassen der Oberflächenbelegung einer Beschichtung auf einer Oberfläche eines bandförmigen Prüflings |
| EP4055373A1 (en) | 2019-11-08 | 2022-09-14 | 3M Innovative Properties Company | Ultraviolet light-based inspection for detecting coating defects in manufactured webs using fluorescing agents |
| CN111024469A (zh) * | 2019-12-25 | 2020-04-17 | 珠海格力电工有限公司 | 一种测试漆包线偏心度的方法 |
| EP3872445B1 (de) * | 2020-02-25 | 2024-03-27 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Schichtdickenmessung durch auswertung des spektrums der fluoreszenzemission |
| US12257590B2 (en) | 2022-04-20 | 2025-03-25 | Foreman Technologies Inc. | System for detecting thickness of a coating autonomously applied to a structure |
| WO2023205359A2 (en) * | 2022-04-20 | 2023-10-26 | FOREMAN TECHNOLOGIES INC., dba PAINTJET | System for autonomously applying paint to a target surface |
| WO2023230281A1 (en) * | 2022-05-25 | 2023-11-30 | FOREMAN TECHNOLOGIES INC., dba PAINTJET | System for detecting thickness of a coating autonomously applied to a structure |
| CN119618088B (zh) * | 2024-12-13 | 2025-10-31 | 北京航空航天大学 | 一种涂层厚度无损测量方法、设备、介质及产品 |
| CN119666869B (zh) * | 2025-02-19 | 2025-06-03 | 河钢数字技术股份有限公司 | 涂层缺陷检测方法、电子设备及存储介质 |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3577885A (en) | 1969-07-30 | 1971-05-11 | Phillips Petroleum Co | Paper coating composition |
| US4922113A (en) * | 1986-07-10 | 1990-05-01 | Minnesota Mining And Manufacturing Company | Process for fluorimetric monitoring of functional coatings and compositions and fluorescent agents therefor |
| US5270116A (en) * | 1986-07-10 | 1993-12-14 | Minnesota Mining And Manufacturing Company | Process for fluorimetric monitoring of functional coatings and compositions and fluorescent agents therefor |
| US4841156A (en) | 1987-05-15 | 1989-06-20 | Electronic Instrumentation And Technology, Inc. | Measurement of the thickness of thin films |
| DE3728704A1 (de) * | 1987-08-28 | 1989-03-09 | Agfa Gevaert Ag | Vorrichtung zur bestimmung der dicke von schichttraegern |
| US5001353A (en) | 1989-01-17 | 1991-03-19 | Sumitomo Light Metal Industries, Ltd. | Method and apparatus to measure the thickness of coating films |
| US4956558A (en) | 1989-03-16 | 1990-09-11 | Battelle Memorial Institute | System for measuring film thickness |
| US5281819A (en) | 1991-06-06 | 1994-01-25 | Aluminum Company Of America | Apparatus for nondestructively determining coating thickness on a metal object and associated method |
| JP2917861B2 (ja) | 1995-05-15 | 1999-07-12 | ブリヂストンスポーツ株式会社 | ゴルフボール塗膜の膜厚測定方法及び装置 |
| JPH09304281A (ja) | 1996-05-09 | 1997-11-28 | Tokyo Electric Power Co Inc:The | 油検知装置 |
-
1998
- 1998-07-15 US US09/116,009 patent/US6252237B1/en not_active Expired - Lifetime
-
1999
- 1999-01-14 JP JP2000560410A patent/JP2002520606A/ja not_active Withdrawn
- 1999-01-14 AU AU24575/99A patent/AU2457599A/en not_active Abandoned
- 1999-01-14 DE DE69924378T patent/DE69924378T2/de not_active Expired - Lifetime
- 1999-01-14 EP EP99904103A patent/EP1097352B1/en not_active Expired - Lifetime
- 1999-01-14 WO PCT/US1999/000888 patent/WO2000004340A1/en not_active Ceased
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010107277A (ja) * | 2008-10-29 | 2010-05-13 | Nippon Paper-Pak Co Ltd | 有機薄膜の膜厚測定方法 |
| WO2017043198A1 (ja) * | 2015-09-08 | 2017-03-16 | 日東電工株式会社 | 光学フィルムおよびその製造方法 |
| JP2017053941A (ja) * | 2015-09-08 | 2017-03-16 | 日東電工株式会社 | 光学フィルムおよびその製造方法 |
| CN108027466A (zh) * | 2015-09-08 | 2018-05-11 | 日东电工株式会社 | 光学膜及其制造方法 |
| JP2022536074A (ja) * | 2019-06-08 | 2022-08-12 | ヒューレット－パッカード デベロップメント カンパニー エル．ピー． | 光学式液滴検出器のコーティング |
| JP7196340B2 (ja) | 2019-06-08 | 2022-12-26 | ヒューレット－パッカード デベロップメント カンパニー エル．ピー． | 光学式液滴検出器のコーティング |
| US11833815B2 (en) | 2019-06-08 | 2023-12-05 | Hewlett-Packard Development Company, L.P. | Coatings for optical drop detectors |
| JP2022178427A (ja) * | 2021-05-20 | 2022-12-02 | 株式会社ディスコ | 保護膜の厚み測定方法 |
| JP7701189B2 (ja) | 2021-05-20 | 2025-07-01 | 株式会社ディスコ | 保護膜の厚み測定方法 |
| KR102642534B1 (ko) * | 2023-09-05 | 2024-02-29 | (주)오로스 테크놀로지 | 다층 박막 각층의 두께 계측의 정밀도 향상을 위한 처리 장치 및 방법 |
Also Published As
| Publication number | Publication date |
|---|---|
| DE69924378T2 (de) | 2006-03-09 |
| EP1097352B1 (en) | 2005-03-23 |
| DE69924378D1 (de) | 2005-04-28 |
| WO2000004340A1 (en) | 2000-01-27 |
| US6252237B1 (en) | 2001-06-26 |
| EP1097352A1 (en) | 2001-05-09 |
| AU2457599A (en) | 2000-02-07 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20060111 |
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| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20060111 |
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| A761 | Written withdrawal of application |
Free format text: JAPANESE INTERMEDIATE CODE: A761 Effective date: 20070907 |