DE69924378T2 - Dickenmessung von fluoreszierenden schichten - Google Patents
Dickenmessung von fluoreszierenden schichten Download PDFInfo
- Publication number
- DE69924378T2 DE69924378T2 DE69924378T DE69924378T DE69924378T2 DE 69924378 T2 DE69924378 T2 DE 69924378T2 DE 69924378 T DE69924378 T DE 69924378T DE 69924378 T DE69924378 T DE 69924378T DE 69924378 T2 DE69924378 T2 DE 69924378T2
- Authority
- DE
- Germany
- Prior art keywords
- light
- thickness
- wavelength
- coating
- measuring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005259 measurement Methods 0.000 title description 11
- 238000000576 coating method Methods 0.000 claims description 67
- 239000011248 coating agent Substances 0.000 claims description 61
- 239000008199 coating composition Substances 0.000 claims description 44
- 238000000034 method Methods 0.000 claims description 31
- 239000000463 material Substances 0.000 claims description 16
- 239000007787 solid Substances 0.000 claims description 14
- 230000003287 optical effect Effects 0.000 claims description 7
- 238000010606 normalization Methods 0.000 claims description 4
- 238000002211 ultraviolet spectrum Methods 0.000 claims description 3
- 239000010408 film Substances 0.000 description 15
- 230000005855 radiation Effects 0.000 description 10
- 238000001228 spectrum Methods 0.000 description 10
- 230000005284 excitation Effects 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 239000000047 product Substances 0.000 description 5
- 239000000758 substrate Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- ZUOUZKKEUPVFJK-UHFFFAOYSA-N diphenyl Chemical compound C1=CC=CC=C1C1=CC=CC=C1 ZUOUZKKEUPVFJK-UHFFFAOYSA-N 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 239000010409 thin film Substances 0.000 description 4
- 125000001153 fluoro group Chemical group F* 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 230000002411 adverse Effects 0.000 description 2
- 235000010290 biphenyl Nutrition 0.000 description 2
- 239000004305 biphenyl Substances 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 230000004936 stimulating effect Effects 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000002313 adhesive film Substances 0.000 description 1
- 239000002390 adhesive tape Substances 0.000 description 1
- 238000011088 calibration curve Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000000295 emission spectrum Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 239000007888 film coating Substances 0.000 description 1
- 238000009501 film coating Methods 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
- G01B11/0658—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of emissivity or reradiation
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
- Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/116,009 US6252237B1 (en) | 1998-07-15 | 1998-07-15 | Low cost thickness measurement method and apparatus for thin coatings |
| US116009 | 1998-07-15 | ||
| PCT/US1999/000888 WO2000004340A1 (en) | 1998-07-15 | 1999-01-14 | Thickness measurement of fluorescing coatings |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE69924378D1 DE69924378D1 (de) | 2005-04-28 |
| DE69924378T2 true DE69924378T2 (de) | 2006-03-09 |
Family
ID=22364723
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE69924378T Expired - Lifetime DE69924378T2 (de) | 1998-07-15 | 1999-01-14 | Dickenmessung von fluoreszierenden schichten |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US6252237B1 (enExample) |
| EP (1) | EP1097352B1 (enExample) |
| JP (1) | JP2002520606A (enExample) |
| AU (1) | AU2457599A (enExample) |
| DE (1) | DE69924378T2 (enExample) |
| WO (1) | WO2000004340A1 (enExample) |
Families Citing this family (39)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB9906011D0 (en) * | 1999-03-16 | 1999-05-12 | Whiley Foils Ltd | Fluorescent materials |
| US6962670B1 (en) | 2000-08-16 | 2005-11-08 | Eastman Chemical Company | Determination of layer thickness or non-uniformity of layer thickness based on fluorophore additives |
| US7052483B2 (en) * | 2000-12-19 | 2006-05-30 | Animas Corporation | Transcutaneous inserter for low-profile infusion sets |
| US6950547B2 (en) * | 2001-02-12 | 2005-09-27 | 3M Innovative Properties Company | Web inspection method and device |
| DE10217950B4 (de) * | 2001-04-24 | 2011-01-13 | Volkswagen Ag | Verfahren zur Bestimmung einer Beschichtungsstärke |
| JP3723845B2 (ja) * | 2002-03-26 | 2005-12-07 | 国立大学法人富山大学 | 有機エレクトロルミネッセンス素子に使用される有機薄膜の膜厚測定法および測定装置 |
| KR101203325B1 (ko) * | 2003-12-31 | 2012-11-20 | 쓰리엠 이노베이티브 프로퍼티즈 컴파니 | 시트-기반 물품에 대한 재고품 제어 |
| EP1704589A4 (en) * | 2003-12-31 | 2008-05-28 | 3M Innovative Properties Co | MAXIMIZING RETURN OF ARTICLES IN SAIL |
| US7623699B2 (en) * | 2004-04-19 | 2009-11-24 | 3M Innovative Properties Company | Apparatus and method for the automated marking of defects on webs of material |
| US20080012981A1 (en) * | 2006-07-07 | 2008-01-17 | Goodwin Mark D | Mail processing system with dual camera assembly |
| US20080011654A1 (en) * | 2006-07-07 | 2008-01-17 | Hale Mathew S | Mail processing system with radiation filtering |
| US20080019563A1 (en) * | 2006-07-07 | 2008-01-24 | Goodwin Mark D | Mail processing system with low resolution UV imaging subsystem |
| US20080035866A1 (en) * | 2006-07-07 | 2008-02-14 | Lockheed Martin Corporation | Mail imaging system with UV illumination interrupt |
| US20080049972A1 (en) * | 2006-07-07 | 2008-02-28 | Lockheed Martin Corporation | Mail imaging system with secondary illumination/imaging window |
| US7542821B2 (en) * | 2007-07-26 | 2009-06-02 | 3M Innovative Properties Company | Multi-unit process spatial synchronization of image inspection systems |
| US8175739B2 (en) * | 2007-07-26 | 2012-05-08 | 3M Innovative Properties Company | Multi-unit process spatial synchronization |
| US7903265B2 (en) * | 2008-04-04 | 2011-03-08 | Toyota Motor Engineering & Manufacturing North America, Inc. | Method for measuring coating uniformity |
| US7797133B2 (en) * | 2008-09-10 | 2010-09-14 | 3M Innovative Properties Company | Multi-roller registered repeat defect detection of a web process line |
| JP5399038B2 (ja) * | 2008-10-29 | 2014-01-29 | 日本製紙株式会社 | 有機薄膜の膜厚測定方法 |
| FR2993972B1 (fr) * | 2012-07-26 | 2014-07-18 | Inst Pierre Vernier | Dispositif de determination d'un ensemble de donnees spatiales d'epaisseur d'une couche mince a la surface d'un substrat, par mesure d'emission infra-rouge |
| US20140171956A1 (en) | 2012-12-17 | 2014-06-19 | Abbott Medical Optics Inc. | Detecting coatings on intraocular lens insertion devices and methods of manufacturing the devices |
| KR102224848B1 (ko) | 2014-10-06 | 2021-03-08 | 삼성전자주식회사 | 발광 소자 패키지 제조 방법 |
| JP6823919B2 (ja) * | 2015-09-08 | 2021-02-03 | 日東電工株式会社 | 光学フィルムおよびその製造方法 |
| EP3400430A4 (en) | 2016-01-07 | 2019-11-06 | Arkema, Inc. | OBJECT-POSITION-INDEPENDENT METHOD FOR MEASURING THE THICKNESS OF COATINGS THAT ON CURED OBJECTS MOVING AT HIGH SPEEDS |
| US11125549B2 (en) | 2016-01-07 | 2021-09-21 | Arkema Inc. | Optical intensity method to measure the thickness of coatings deposited on substrates |
| CN108474739B (zh) | 2016-01-07 | 2021-10-01 | 阿科玛股份有限公司 | 测量基材上沉积的涂层的厚度的光学方法 |
| DE102018103171A1 (de) * | 2017-11-23 | 2019-05-23 | Tdk Electronics Ag | Verfahren zum Bestimmen von Eigenschaften einer Beschichtung auf einer transparenten Folie, Verfahren zur Herstellung einer Kondensatorfolie und Einrichtung zum Bestimmen von Eigenschaften einer Beschichtung auf einer transparenten Folie |
| DE102018110931C5 (de) * | 2018-05-07 | 2023-06-29 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren und System zum Erfassen der Oberflächenbelegung einer Beschichtung auf einer Oberfläche eines bandförmigen Prüflings |
| JP7196340B2 (ja) * | 2019-06-08 | 2022-12-26 | ヒューレット－パッカード デベロップメント カンパニー エル．ピー． | 光学式液滴検出器のコーティング |
| US12092585B2 (en) | 2019-11-08 | 2024-09-17 | 3M Innovative Properties Company | Ultraviolet light-based inspection for detecting coating defects in manufactured webs using fluorescing agents |
| CN111024469A (zh) * | 2019-12-25 | 2020-04-17 | 珠海格力电工有限公司 | 一种测试漆包线偏心度的方法 |
| EP3872445B1 (de) * | 2020-02-25 | 2024-03-27 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Schichtdickenmessung durch auswertung des spektrums der fluoreszenzemission |
| JP7701189B2 (ja) * | 2021-05-20 | 2025-07-01 | 株式会社ディスコ | 保護膜の厚み測定方法 |
| US12257590B2 (en) | 2022-04-20 | 2025-03-25 | Foreman Technologies Inc. | System for detecting thickness of a coating autonomously applied to a structure |
| US12036577B2 (en) * | 2022-04-20 | 2024-07-16 | Foreman Technologies Inc. | System for autonomously applying paint to a target surface |
| WO2023230281A1 (en) * | 2022-05-25 | 2023-11-30 | FOREMAN TECHNOLOGIES INC., dba PAINTJET | System for detecting thickness of a coating autonomously applied to a structure |
| KR102642534B1 (ko) * | 2023-09-05 | 2024-02-29 | (주)오로스 테크놀로지 | 다층 박막 각층의 두께 계측의 정밀도 향상을 위한 처리 장치 및 방법 |
| CN119618088B (zh) * | 2024-12-13 | 2025-10-31 | 北京航空航天大学 | 一种涂层厚度无损测量方法、设备、介质及产品 |
| CN119666869B (zh) * | 2025-02-19 | 2025-06-03 | 河钢数字技术股份有限公司 | 涂层缺陷检测方法、电子设备及存储介质 |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3577885A (en) | 1969-07-30 | 1971-05-11 | Phillips Petroleum Co | Paper coating composition |
| US5270116A (en) * | 1986-07-10 | 1993-12-14 | Minnesota Mining And Manufacturing Company | Process for fluorimetric monitoring of functional coatings and compositions and fluorescent agents therefor |
| US4922113A (en) * | 1986-07-10 | 1990-05-01 | Minnesota Mining And Manufacturing Company | Process for fluorimetric monitoring of functional coatings and compositions and fluorescent agents therefor |
| US4841156A (en) | 1987-05-15 | 1989-06-20 | Electronic Instrumentation And Technology, Inc. | Measurement of the thickness of thin films |
| DE3728704A1 (de) * | 1987-08-28 | 1989-03-09 | Agfa Gevaert Ag | Vorrichtung zur bestimmung der dicke von schichttraegern |
| US5001353A (en) | 1989-01-17 | 1991-03-19 | Sumitomo Light Metal Industries, Ltd. | Method and apparatus to measure the thickness of coating films |
| US4956558A (en) | 1989-03-16 | 1990-09-11 | Battelle Memorial Institute | System for measuring film thickness |
| US5281819A (en) | 1991-06-06 | 1994-01-25 | Aluminum Company Of America | Apparatus for nondestructively determining coating thickness on a metal object and associated method |
| JP2917861B2 (ja) | 1995-05-15 | 1999-07-12 | ブリヂストンスポーツ株式会社 | ゴルフボール塗膜の膜厚測定方法及び装置 |
| JPH09304281A (ja) | 1996-05-09 | 1997-11-28 | Tokyo Electric Power Co Inc:The | 油検知装置 |
-
1998
- 1998-07-15 US US09/116,009 patent/US6252237B1/en not_active Expired - Lifetime
-
1999
- 1999-01-14 DE DE69924378T patent/DE69924378T2/de not_active Expired - Lifetime
- 1999-01-14 AU AU24575/99A patent/AU2457599A/en not_active Abandoned
- 1999-01-14 JP JP2000560410A patent/JP2002520606A/ja not_active Withdrawn
- 1999-01-14 WO PCT/US1999/000888 patent/WO2000004340A1/en not_active Ceased
- 1999-01-14 EP EP99904103A patent/EP1097352B1/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| AU2457599A (en) | 2000-02-07 |
| EP1097352A1 (en) | 2001-05-09 |
| EP1097352B1 (en) | 2005-03-23 |
| JP2002520606A (ja) | 2002-07-09 |
| WO2000004340A1 (en) | 2000-01-27 |
| DE69924378D1 (de) | 2005-04-28 |
| US6252237B1 (en) | 2001-06-26 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8364 | No opposition during term of opposition |