DE69523476T2 - Schichtdickenmessung, die rückstreuung von hochenergischen photonen verwendet - Google Patents
Schichtdickenmessung, die rückstreuung von hochenergischen photonen verwendetInfo
- Publication number
- DE69523476T2 DE69523476T2 DE69523476T DE69523476T DE69523476T2 DE 69523476 T2 DE69523476 T2 DE 69523476T2 DE 69523476 T DE69523476 T DE 69523476T DE 69523476 T DE69523476 T DE 69523476T DE 69523476 T2 DE69523476 T2 DE 69523476T2
- Authority
- DE
- Germany
- Prior art keywords
- photones
- backflow
- energy
- layer thickness
- thickness measurement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000005259 measurement Methods 0.000 title 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B15/00—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons
- G01B15/02—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons for measuring thickness
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B12/00—Arrangements for controlling delivery; Arrangements for controlling the spray area
- B05B12/08—Arrangements for controlling delivery; Arrangements for controlling the spray area responsive to condition of liquid or other fluent material to be discharged, of ambient medium or of target ; responsive to condition of spray devices or of supply means, e.g. pipes, pumps or their drive means
- B05B12/084—Arrangements for controlling delivery; Arrangements for controlling the spray area responsive to condition of liquid or other fluent material to be discharged, of ambient medium or of target ; responsive to condition of spray devices or of supply means, e.g. pipes, pumps or their drive means responsive to condition of liquid or other fluent material already sprayed on the target, e.g. coating thickness, weight or pattern
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B16/00—Spray booths
- B05B16/20—Arrangements for spraying in combination with other operations, e.g. drying; Arrangements enabling a combination of spraying operations
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B64—AIRCRAFT; AVIATION; COSMONAUTICS
- B64D—EQUIPMENT FOR FITTING IN OR TO AIRCRAFT; FLIGHT SUITS; PARACHUTES; ARRANGEMENT OR MOUNTING OF POWER PLANTS OR PROPULSION TRANSMISSIONS IN AIRCRAFT
- B64D15/00—De-icing or preventing icing on exterior surfaces of aircraft
- B64D15/20—Means for detecting icing or initiating de-icing
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Aviation & Aerospace Engineering (AREA)
- Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Length Measuring Devices By Optical Means (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB9417419A GB9417419D0 (en) | 1994-08-30 | 1994-08-30 | Method of measuring film thickness and monitoring liquid flow using backscattered x-rays and gamma-rays |
PCT/CA1995/000498 WO1996007077A1 (en) | 1994-08-30 | 1995-08-30 | Measuring layer thickness using backscattering of high energy photons |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69523476D1 DE69523476D1 (de) | 2001-11-29 |
DE69523476T2 true DE69523476T2 (de) | 2002-05-16 |
Family
ID=10760558
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69523476T Expired - Fee Related DE69523476T2 (de) | 1994-08-30 | 1995-08-30 | Schichtdickenmessung, die rückstreuung von hochenergischen photonen verwendet |
Country Status (8)
Country | Link |
---|---|
US (1) | US6252930B1 (de) |
EP (1) | EP0805949B1 (de) |
AU (1) | AU3250095A (de) |
CA (1) | CA2198712A1 (de) |
DE (1) | DE69523476T2 (de) |
ES (1) | ES2166831T3 (de) |
GB (1) | GB9417419D0 (de) |
WO (1) | WO1996007077A1 (de) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6816101B2 (en) * | 2002-03-08 | 2004-11-09 | Quelian, Inc. | High-speed analog-to-digital converter using a unique gray code |
US20050129178A1 (en) * | 2003-12-16 | 2005-06-16 | Pettit John W. | Detector using carbon nanotube material as cold cathode for synthetic radiation source |
NZ538649A (en) | 2005-03-07 | 2006-10-27 | Inst Geolog Nuclear Sciences | Estimating strengths of wooden supports using gamma rays |
US7605366B2 (en) | 2005-09-21 | 2009-10-20 | Troxler Electronic Laboratories, Inc. | Nuclear density gauge |
DE102008017838A1 (de) | 2008-04-08 | 2009-12-10 | Dürr Systems GmbH | Lackieranlage mit einer Messzelle zur Schichtdickenmessung |
US8767912B1 (en) | 2013-04-09 | 2014-07-01 | King Abdulaziz University | System for inspection and imaging of insulated pipes and vessels using backscattered radiation and X-ray fluorescence |
US9151722B2 (en) | 2014-01-15 | 2015-10-06 | King Abdulaziz University | Systems for determining and imaging wax deposition and simultaneous corrosion and wax deposit determination in pipelines |
US8976936B1 (en) | 2014-05-22 | 2015-03-10 | King Abdulaziz University | Collimator for backscattered radiation imaging and method of using the same |
US20160274039A1 (en) | 2014-09-25 | 2016-09-22 | King Abdulaziz University | System for determining and imaging wax deposition and corrosion in pipelines |
US9020099B1 (en) | 2014-12-03 | 2015-04-28 | King Abdulaziz University | Miniaturized pipe inspection system for measuring corrosion and scale in small pipes |
US10071482B2 (en) * | 2015-08-19 | 2018-09-11 | Ford Global Technologies, Llc | Robotic vehicle painting instrument including a terahertz radiation device |
JP6550101B2 (ja) * | 2017-07-13 | 2019-07-24 | Jfeテクノリサーチ株式会社 | 膜厚測定方法及び膜厚測定装置 |
CN108466106B (zh) * | 2018-06-22 | 2023-08-01 | 江苏速力达精密科技有限公司 | 一种轮毂加工中心机内检测装置 |
US11614324B2 (en) | 2019-10-24 | 2023-03-28 | International Business Machines Corporation | Non-destructive bond line thickness measurement of thermal interface material on silicon packages |
Family Cites Families (31)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2846589A (en) | 1954-04-01 | 1958-08-05 | United States Steel Corp | Apparatus for determining the thickness of zinc coating on a ferrous metal base |
US2855518A (en) | 1954-12-23 | 1958-10-07 | Armco Steel Corp | Apparatus for measuring the thickness of a metallic coating on a strip of base metal |
US2926257A (en) | 1955-05-16 | 1960-02-23 | Friedman Herbert | Method of measuring the thickness of thin coatings |
US2890344A (en) | 1955-12-27 | 1959-06-09 | Philips Corp | Analysis of materials by x-rays |
US3012140A (en) | 1959-01-28 | 1961-12-05 | United States Steel Corp | Apparatus for measuring the thickness of a coating on a base material |
US3115577A (en) | 1962-05-03 | 1963-12-24 | Twin City Testing Corp | Measuring table for use in coating thickness measuring |
US3412249A (en) | 1964-08-04 | 1968-11-19 | Industrial Nucleonics Corp | Backscatter thickness measuring gauge utilizing different energy levels of bremsstrahlung and two ionization chambers |
US3483382A (en) | 1965-12-23 | 1969-12-09 | Twin City Testing Corp | Self-stabilizing portable probe for measuring thickness utilizing radiation |
US3499152A (en) | 1966-03-18 | 1970-03-03 | Industrial Nucleonics Corp | Method and apparatus for improving backscatter gauge response |
US3539808A (en) | 1966-04-22 | 1970-11-10 | Industrial Nucleonics Corp | Measuring corrosion on a coated metallic surface by means of backscattered nuclear radiation |
US3409774A (en) | 1966-05-25 | 1968-11-05 | United States Steel Corp | Method of determining the thickness of a coating on a metal base and method of calibrating the thickness gauge |
US3497691A (en) | 1967-06-30 | 1970-02-24 | Ohmart Corp | Dual mode fluorescence and backscatter coating thickness measuring gauge |
US3767920A (en) | 1971-08-16 | 1973-10-23 | Tokyo Shibaura Electric Co | Reflection type radiation thickness meter |
US3843884A (en) | 1971-09-20 | 1974-10-22 | Industrial Nucleonics Corp | X-ray gauging method and apparatus with stabilized response |
DE2163703A1 (de) * | 1971-12-22 | 1973-06-28 | Vdo Schindling | Einrichtung zum feststellen der vereisung einer oberflaeche eines gegenstandes |
US3854042A (en) | 1973-05-10 | 1974-12-10 | A Ott | Device for measuring the thickness of layers with a radionuclide irradiating the layer |
US3988582A (en) | 1975-08-28 | 1976-10-26 | Nucleonic Data Systems, Inc. | Blown film thickness gauge |
JPS538165A (en) | 1976-07-12 | 1978-01-25 | Seiko Instr & Electronics Ltd | Thickness measuring method of thin film material and thin film material thickness measuring apparatus |
US4229652A (en) | 1977-06-03 | 1980-10-21 | Unit Process Assemblies, Inc. | Backscatter apparatus and method for measuring thickness of a continuously moving coated strip of substrate material |
US4228351A (en) | 1979-02-26 | 1980-10-14 | The United States Of America As Represented By The United States Department Of Energy | Method for measuring the density of lightweight materials |
JPS5758300U (de) | 1980-09-22 | 1982-04-06 | ||
JPS58135407A (ja) | 1982-01-22 | 1983-08-12 | Nippon X Sen Kk | 被膜の厚さ測定方法 |
US4525854A (en) | 1983-03-22 | 1985-06-25 | Troxler Electronic Laboratories, Inc. | Radiation scatter apparatus and method |
US4641030A (en) | 1984-12-13 | 1987-02-03 | Troxler Electronic Laboratories, Inc. | Apparatus and method for directly measuring the density of a thin layer |
US4701868A (en) | 1984-12-13 | 1987-10-20 | Troxler Electronic Laboratories, Inc. | Apparatus and method for accurately measuring the density of materials with rough surfaces by radiation backscatter |
GB8811459D0 (en) | 1988-05-13 | 1988-06-15 | Dmc Boyle Ltd | Method & apparatus for measuring thickness of coating on substrate |
US5029337A (en) * | 1989-01-19 | 1991-07-02 | Tava Corporation | Method for measuring coating thickness |
GB9020353D0 (en) | 1990-09-18 | 1990-10-31 | Univ Guelph | Method and apparatus for low dose estimates of bone minerals in vivo by gamma ray backscatter |
US5125017A (en) | 1991-01-30 | 1992-06-23 | The United States Of America As Represented By The Secretary Of The Air Force | Compton backscatter gage |
US5195117A (en) | 1992-04-24 | 1993-03-16 | University Of Houston | Method for using secondary radiation scattering to evaluate the thickness of materials |
US5862199A (en) * | 1995-08-30 | 1999-01-19 | University Of Guelph | Method and apparatus for measuring thickness of paint layers on substrates using backscattering of x-rays |
-
1994
- 1994-08-30 GB GB9417419A patent/GB9417419D0/en active Pending
-
1995
- 1995-08-30 EP EP95928920A patent/EP0805949B1/de not_active Expired - Lifetime
- 1995-08-30 AU AU32500/95A patent/AU3250095A/en not_active Abandoned
- 1995-08-30 DE DE69523476T patent/DE69523476T2/de not_active Expired - Fee Related
- 1995-08-30 WO PCT/CA1995/000498 patent/WO1996007077A1/en active IP Right Grant
- 1995-08-30 ES ES95928920T patent/ES2166831T3/es not_active Expired - Lifetime
- 1995-08-30 CA CA002198712A patent/CA2198712A1/en not_active Abandoned
-
1999
- 1999-01-19 US US09/233,158 patent/US6252930B1/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
MX9701633A (es) | 1998-10-31 |
AU3250095A (en) | 1996-03-22 |
US6252930B1 (en) | 2001-06-26 |
EP0805949B1 (de) | 2001-10-24 |
GB9417419D0 (en) | 1994-10-19 |
EP0805949A1 (de) | 1997-11-12 |
WO1996007077A1 (en) | 1996-03-07 |
DE69523476D1 (de) | 2001-11-29 |
CA2198712A1 (en) | 1996-03-07 |
ES2166831T3 (es) | 2002-05-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8328 | Change in the person/name/address of the agent |
Representative=s name: PUSCHMANN & BORCHERT, 82041 OBERHACHING |
|
8339 | Ceased/non-payment of the annual fee |