JP2002094061A5 - - Google Patents

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Publication number
JP2002094061A5
JP2002094061A5 JP2000279355A JP2000279355A JP2002094061A5 JP 2002094061 A5 JP2002094061 A5 JP 2002094061A5 JP 2000279355 A JP2000279355 A JP 2000279355A JP 2000279355 A JP2000279355 A JP 2000279355A JP 2002094061 A5 JP2002094061 A5 JP 2002094061A5
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JP
Japan
Prior art keywords
conductivity type
layer
trench
forming
type base
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Pending
Application number
JP2000279355A
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English (en)
Japanese (ja)
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JP2002094061A (ja
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Priority to JP2000279355A priority Critical patent/JP2002094061A/ja
Priority claimed from JP2000279355A external-priority patent/JP2002094061A/ja
Publication of JP2002094061A publication Critical patent/JP2002094061A/ja
Publication of JP2002094061A5 publication Critical patent/JP2002094061A5/ja
Pending legal-status Critical Current

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JP2000279355A 2000-09-14 2000-09-14 半導体装置及びその製造方法 Pending JP2002094061A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000279355A JP2002094061A (ja) 2000-09-14 2000-09-14 半導体装置及びその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000279355A JP2002094061A (ja) 2000-09-14 2000-09-14 半導体装置及びその製造方法

Publications (2)

Publication Number Publication Date
JP2002094061A JP2002094061A (ja) 2002-03-29
JP2002094061A5 true JP2002094061A5 (enExample) 2004-12-24

Family

ID=18764371

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000279355A Pending JP2002094061A (ja) 2000-09-14 2000-09-14 半導体装置及びその製造方法

Country Status (1)

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JP (1) JP2002094061A (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4028333B2 (ja) 2002-09-02 2007-12-26 株式会社東芝 半導体装置
JP4047153B2 (ja) * 2002-12-03 2008-02-13 株式会社東芝 半導体装置
JP3742400B2 (ja) 2003-04-23 2006-02-01 株式会社東芝 半導体装置及びその製造方法
JP2005072356A (ja) * 2003-08-26 2005-03-17 Sanyo Electric Co Ltd 絶縁ゲート型電界効果半導体装置およびその製造方法
JP2011055017A (ja) * 2010-12-17 2011-03-17 Toshiba Corp 半導体装置
JP5696536B2 (ja) * 2011-03-15 2015-04-08 トヨタ自動車株式会社 半導体装置

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