JP2001319880A5 - - Google Patents

Info

Publication number

JP2001319880A5

JP2001319880A5 JP2001086935A JP2001086935A JP2001319880A5 JP 2001319880 A5 JP2001319880 A5 JP 2001319880A5 JP 2001086935 A JP2001086935 A JP 2001086935A JP 2001086935 A JP2001086935 A JP 2001086935A JP 2001319880 A5 JP2001319880 A5 JP 2001319880A5

Authority

JP

Japan

Prior art keywords

film

silicon

silicon film

amorphous

crystalline

Prior art date

2001-03-26

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Granted

Links

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• 229910021419 crystalline silicon Inorganic materials 0.000 claims description 22
• 239000004065 semiconductor Substances 0.000 claims description 9
• 238000004519 manufacturing process Methods 0.000 claims description 8
• 229910021417 amorphous silicon Inorganic materials 0.000 claims 28
• 238000010438 heat treatment Methods 0.000 claims 12
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 11
• 229910052814 silicon oxide Inorganic materials 0.000 claims 11
• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 8
• 238000002425 crystallisation Methods 0.000 claims 8
• 230000008025 crystallization Effects 0.000 claims 8
• 229910052710 silicon Inorganic materials 0.000 claims 8
• 239000010703 silicon Substances 0.000 claims 8
• 229910052581 Si3N4 Inorganic materials 0.000 claims 7
• 239000002184 metal Substances 0.000 claims 7
• 229910052751 metal Inorganic materials 0.000 claims 7
• HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims 7
• 230000001737 promoting effect Effects 0.000 claims 4
• 238000000034 method Methods 0.000 claims 3
• 238000005229 chemical vapour deposition Methods 0.000 claims 1
• 229910052802 copper Inorganic materials 0.000 claims 1
• 229910052737 gold Inorganic materials 0.000 claims 1
• 229910052741 iridium Inorganic materials 0.000 claims 1
• 229910052742 iron Inorganic materials 0.000 claims 1
• 230000001678 irradiating effect Effects 0.000 claims 1
• 229910052759 nickel Inorganic materials 0.000 claims 1
• 229910052763 palladium Inorganic materials 0.000 claims 1
• 229910052697 platinum Inorganic materials 0.000 claims 1
• 238000004544 sputter deposition Methods 0.000 claims 1