JP2001035760A - 半導体生産ベイを自動的に管理するためのシステム、方法及び記録媒体 - Google Patents
半導体生産ベイを自動的に管理するためのシステム、方法及び記録媒体Info
- Publication number
- JP2001035760A JP2001035760A JP2000150555A JP2000150555A JP2001035760A JP 2001035760 A JP2001035760 A JP 2001035760A JP 2000150555 A JP2000150555 A JP 2000150555A JP 2000150555 A JP2000150555 A JP 2000150555A JP 2001035760 A JP2001035760 A JP 2001035760A
- Authority
- JP
- Japan
- Prior art keywords
- cassette
- data
- lot
- equipment
- real
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims abstract description 251
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 98
- 239000004065 semiconductor Substances 0.000 title claims abstract description 88
- 230000008569 process Effects 0.000 claims abstract description 227
- 238000007726 management method Methods 0.000 claims abstract description 45
- 230000004044 response Effects 0.000 claims abstract description 17
- 238000013500 data storage Methods 0.000 claims abstract description 13
- 238000012545 processing Methods 0.000 claims abstract description 10
- 238000004891 communication Methods 0.000 claims description 27
- 235000012431 wafers Nutrition 0.000 claims description 26
- 230000032258 transport Effects 0.000 claims description 25
- 230000006870 function Effects 0.000 claims description 13
- 238000013480 data collection Methods 0.000 claims description 9
- 238000012546 transfer Methods 0.000 claims description 6
- 238000012217 deletion Methods 0.000 claims description 5
- 230000037430 deletion Effects 0.000 claims description 5
- 238000012423 maintenance Methods 0.000 claims description 5
- 238000011084 recovery Methods 0.000 claims description 4
- 230000008859 change Effects 0.000 claims description 2
- 238000012958 reprocessing Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 5
- 238000005530 etching Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
- G05B19/41875—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by quality surveillance of production
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/32—Operator till task planning
- G05B2219/32074—History of operation of each machine
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/32—Operator till task planning
- G05B2219/32196—Store audit, history of inspection, control and workpiece data into database
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/35—Nc in input of data, input till input file format
- G05B2219/35291—Record history, log, journal, audit of machine operation
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Power Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Quality & Reliability (AREA)
- Automation & Control Theory (AREA)
- General Factory Administration (AREA)
- Management, Administration, Business Operations System, And Electronic Commerce (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Control By Computers (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1999/P18261 | 1999-05-20 | ||
KR1019990018261A KR100303322B1 (ko) | 1999-05-20 | 1999-05-20 | 반도체 라인 관리를 위한 통합 자동화 시스템 및 그 방법 |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2001035760A true JP2001035760A (ja) | 2001-02-09 |
Family
ID=19586791
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2000150555A Pending JP2001035760A (ja) | 1999-05-20 | 2000-05-22 | 半導体生産ベイを自動的に管理するためのシステム、方法及び記録媒体 |
Country Status (9)
Country | Link |
---|---|
JP (1) | JP2001035760A (fr) |
KR (1) | KR100303322B1 (fr) |
CN (1) | CN1213367C (fr) |
DE (1) | DE10024735A1 (fr) |
FR (1) | FR2793916B1 (fr) |
GB (1) | GB2352058B (fr) |
IT (1) | IT1317658B1 (fr) |
NL (1) | NL1015251A1 (fr) |
TW (1) | TW482967B (fr) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006237365A (ja) * | 2005-02-25 | 2006-09-07 | Agilent Technol Inc | 半導体特性評価装置の管理方法及びそのプログラム |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001176763A (ja) * | 1999-12-14 | 2001-06-29 | Nec Corp | 製品ウェハを含む非製品ウェハの自動化処理方法ならびにシステム及び同方法が記録された記録媒体 |
WO2002095515A1 (fr) * | 2001-05-24 | 2002-11-28 | Yamatake Corporation | Unite de commande de procede, dispositif de recueil d'informations relatives a un produit et programme de traçage de procede |
ITBO20010330A1 (it) * | 2001-05-25 | 2002-11-25 | Gd Spa | Metodo per la stima dell'efficienza di una macchina automatica |
US7123974B1 (en) * | 2002-11-19 | 2006-10-17 | Rockwell Software Inc. | System and methodology providing audit recording and tracking in real time industrial controller environment |
KR100520062B1 (ko) * | 2003-03-11 | 2005-10-11 | 삼성전자주식회사 | 자동반송시스템 및 그 제어방법 |
US6931303B2 (en) * | 2003-10-02 | 2005-08-16 | Taiwan Semiconductor Manufacturing Co., Ltd. | Integrated transport system |
JP4673548B2 (ja) * | 2003-11-12 | 2011-04-20 | 東京エレクトロン株式会社 | 基板処理装置及びその制御方法 |
JP2005294754A (ja) * | 2004-04-05 | 2005-10-20 | Toshiba Corp | 電子ビーム描画装置、電子ビーム描画方法、電子ビーム描画プログラム及び直接描画方式を用いた半導体装置の製造方法 |
US7206653B1 (en) * | 2005-11-29 | 2007-04-17 | Taiwan Semiconductor Manufacturing Co., Ltd. | Wafer-based planning methods and systems for batch-based processing tools |
KR100755136B1 (ko) | 2005-12-28 | 2007-09-04 | 동부일렉트로닉스 주식회사 | 제조실행 시스템에서 그룹별 반도체 제품군의 공정상태파악방법 |
CN102422233B (zh) * | 2010-02-18 | 2014-04-30 | 新日铁住金株式会社 | 操作指导设定支援装置、操作支援系统 |
TWI571908B (zh) * | 2014-08-15 | 2017-02-21 | 力晶科技股份有限公司 | 製程控制方法與製程控制系統 |
CN109240224B (zh) * | 2018-08-17 | 2022-04-15 | 张家港康得新光电材料有限公司 | 一种收料方法、装置、设备及存储介质 |
CN110290194A (zh) * | 2019-06-20 | 2019-09-27 | 苏州工业园区恒越自动化科技有限公司 | 一种基于semi标准的secs通信方法 |
CN114924536B (zh) * | 2022-05-26 | 2024-01-30 | 江苏泰治科技股份有限公司 | 一种光伏电池片生产控制方法 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4974166A (en) * | 1987-05-18 | 1990-11-27 | Asyst Technologies, Inc. | Processing systems with intelligent article tracking |
JP3309997B2 (ja) * | 1991-09-05 | 2002-07-29 | 株式会社日立製作所 | 複合処理装置 |
JP2724082B2 (ja) * | 1992-12-18 | 1998-03-09 | シャープ株式会社 | Vlsiプロセスのデータ解析支援システム |
JPH06203040A (ja) * | 1992-12-28 | 1994-07-22 | Honda Motor Co Ltd | 製造経歴管理システム |
JPH06338552A (ja) * | 1993-05-31 | 1994-12-06 | Sony Corp | 半導体シミュレーション装置 |
IT1272036B (it) * | 1993-11-05 | 1997-06-11 | Marelli Autronica | Sistema di registraziome per una linea di produzione. |
US5654896A (en) * | 1994-10-31 | 1997-08-05 | Ixys Corp | Performance prediction method for semiconductor power modules and ICS |
US5591299A (en) * | 1995-04-28 | 1997-01-07 | Advanced Micro Devices, Inc. | System for providing integrated monitoring, control and diagnostics functions for semiconductor spray process tools |
US5659467A (en) * | 1996-06-26 | 1997-08-19 | Texas Instruments Incorporated | Multiple model supervisor control system and method of operation |
JP2800795B2 (ja) * | 1996-08-05 | 1998-09-21 | 日本電気株式会社 | 生産制御方法及び生産制御装置 |
KR100211671B1 (ko) * | 1996-11-11 | 1999-08-02 | 윤종용 | 반도체 제조장비의 관리시스템 및 관리방법 |
US5862054A (en) * | 1997-02-20 | 1999-01-19 | Taiwan Semiconductor Manufacturing Company, Ltd. | Process monitoring system for real time statistical process control |
KR19980068469A (ko) * | 1997-02-20 | 1998-10-15 | 김광호 | 반도체 설비 통합 제어시스템 |
KR19980074797A (ko) * | 1997-03-27 | 1998-11-05 | 윤종용 | 반도체 제조용 설비의 관리방법 |
JPH10335193A (ja) * | 1997-05-30 | 1998-12-18 | Toshiba Corp | 製造工程仕様作成運営システム、プロセスデータ作成システム及び半導体装置の製造方法 |
WO2000036479A1 (fr) * | 1998-12-16 | 2000-06-22 | Speedfam-Ipec Corporation | Gestionnaire virtuel d'equipements |
-
1999
- 1999-05-20 KR KR1019990018261A patent/KR100303322B1/ko not_active IP Right Cessation
-
2000
- 2000-05-19 DE DE10024735A patent/DE10024735A1/de not_active Withdrawn
- 2000-05-19 NL NL1015251A patent/NL1015251A1/xx not_active IP Right Cessation
- 2000-05-20 CN CNB001226681A patent/CN1213367C/zh not_active Expired - Fee Related
- 2000-05-22 JP JP2000150555A patent/JP2001035760A/ja active Pending
- 2000-05-22 IT IT2000MI001128A patent/IT1317658B1/it active
- 2000-05-22 FR FR0006508A patent/FR2793916B1/fr not_active Expired - Fee Related
- 2000-05-22 GB GB0012374A patent/GB2352058B/en not_active Expired - Fee Related
- 2000-05-23 TW TW089109913A patent/TW482967B/zh not_active IP Right Cessation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006237365A (ja) * | 2005-02-25 | 2006-09-07 | Agilent Technol Inc | 半導体特性評価装置の管理方法及びそのプログラム |
Also Published As
Publication number | Publication date |
---|---|
TW482967B (en) | 2002-04-11 |
KR100303322B1 (ko) | 2001-09-26 |
NL1015251C2 (fr) | 2004-10-19 |
GB0012374D0 (en) | 2000-07-12 |
GB2352058A (en) | 2001-01-17 |
DE10024735A1 (de) | 2001-02-01 |
ITMI20001128A0 (it) | 2000-05-22 |
FR2793916B1 (fr) | 2005-06-03 |
CN1213367C (zh) | 2005-08-03 |
NL1015251A1 (nl) | 2000-11-21 |
KR20000074361A (ko) | 2000-12-15 |
FR2793916A1 (fr) | 2000-11-24 |
IT1317658B1 (it) | 2003-07-15 |
GB2352058B (en) | 2003-08-13 |
CN1278621A (zh) | 2001-01-03 |
ITMI20001128A1 (it) | 2001-11-22 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
RD02 | Notification of acceptance of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7422 Effective date: 20051101 |