TW482967B - System and method for automatically managing semiconductor production bays - Google Patents
System and method for automatically managing semiconductor production bays Download PDFInfo
- Publication number
- TW482967B TW482967B TW089109913A TW89109913A TW482967B TW 482967 B TW482967 B TW 482967B TW 089109913 A TW089109913 A TW 089109913A TW 89109913 A TW89109913 A TW 89109913A TW 482967 B TW482967 B TW 482967B
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- TW
- Taiwan
- Prior art keywords
- batch
- data
- cassette
- equipment
- control device
- Prior art date
Links
- 238000000034 method Methods 0.000 title claims abstract description 242
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 82
- 239000004065 semiconductor Substances 0.000 title claims abstract description 60
- 230000008569 process Effects 0.000 claims abstract description 217
- 235000012431 wafers Nutrition 0.000 claims abstract description 27
- 230000004044 response Effects 0.000 claims abstract description 10
- 238000012545 processing Methods 0.000 claims abstract description 6
- 238000003860 storage Methods 0.000 claims description 64
- 238000007726 management method Methods 0.000 claims description 37
- 238000004891 communication Methods 0.000 claims description 26
- 238000013500 data storage Methods 0.000 claims description 13
- 230000032258 transport Effects 0.000 claims description 13
- 239000000463 material Substances 0.000 claims description 12
- 238000012546 transfer Methods 0.000 claims description 8
- 238000006243 chemical reaction Methods 0.000 claims description 7
- 238000011112 process operation Methods 0.000 claims description 7
- 238000013480 data collection Methods 0.000 claims description 5
- 238000012423 maintenance Methods 0.000 claims description 4
- 239000011257 shell material Substances 0.000 claims description 4
- 238000000605 extraction Methods 0.000 claims 1
- 230000001568 sexual effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 12
- 238000010923 batch production Methods 0.000 description 4
- 239000004020 conductor Substances 0.000 description 4
- 230000036541 health Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 238000007639 printing Methods 0.000 description 2
- 241000254173 Coleoptera Species 0.000 description 1
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- 239000005977 Ethylene Substances 0.000 description 1
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- 238000012360 testing method Methods 0.000 description 1
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Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
- G05B19/41875—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by quality surveillance of production
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/32—Operator till task planning
- G05B2219/32074—History of operation of each machine
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/32—Operator till task planning
- G05B2219/32196—Store audit, history of inspection, control and workpiece data into database
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/35—Nc in input of data, input till input file format
- G05B2219/35291—Record history, log, journal, audit of machine operation
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Power Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Quality & Reliability (AREA)
- Automation & Control Theory (AREA)
- General Factory Administration (AREA)
- Management, Administration, Business Operations System, And Electronic Commerce (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Control By Computers (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1019990018261A KR100303322B1 (ko) | 1999-05-20 | 1999-05-20 | 반도체 라인 관리를 위한 통합 자동화 시스템 및 그 방법 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW482967B true TW482967B (en) | 2002-04-11 |
Family
ID=19586791
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW089109913A TW482967B (en) | 1999-05-20 | 2000-05-23 | System and method for automatically managing semiconductor production bays |
Country Status (9)
| Country | Link |
|---|---|
| JP (1) | JP2001035760A (fr) |
| KR (1) | KR100303322B1 (fr) |
| CN (1) | CN1213367C (fr) |
| DE (1) | DE10024735A1 (fr) |
| FR (1) | FR2793916B1 (fr) |
| GB (1) | GB2352058B (fr) |
| IT (1) | IT1317658B1 (fr) |
| NL (1) | NL1015251A1 (fr) |
| TW (1) | TW482967B (fr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI571908B (zh) * | 2014-08-15 | 2017-02-21 | 力晶科技股份有限公司 | 製程控制方法與製程控制系統 |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001176763A (ja) * | 1999-12-14 | 2001-06-29 | Nec Corp | 製品ウェハを含む非製品ウェハの自動化処理方法ならびにシステム及び同方法が記録された記録媒体 |
| EP1391796A4 (fr) * | 2001-05-24 | 2007-08-08 | Yamatake Corp | Unite de commande de procede, dispositif de recueil d'informations relatives a un produit et programme de tra age de procede |
| ITBO20010330A1 (it) | 2001-05-25 | 2002-11-25 | Gd Spa | Metodo per la stima dell'efficienza di una macchina automatica |
| US7123974B1 (en) | 2002-11-19 | 2006-10-17 | Rockwell Software Inc. | System and methodology providing audit recording and tracking in real time industrial controller environment |
| KR100520062B1 (ko) * | 2003-03-11 | 2005-10-11 | 삼성전자주식회사 | 자동반송시스템 및 그 제어방법 |
| US6931303B2 (en) * | 2003-10-02 | 2005-08-16 | Taiwan Semiconductor Manufacturing Co., Ltd. | Integrated transport system |
| JP4673548B2 (ja) * | 2003-11-12 | 2011-04-20 | 東京エレクトロン株式会社 | 基板処理装置及びその制御方法 |
| JP2005294754A (ja) * | 2004-04-05 | 2005-10-20 | Toshiba Corp | 電子ビーム描画装置、電子ビーム描画方法、電子ビーム描画プログラム及び直接描画方式を用いた半導体装置の製造方法 |
| JP2006237365A (ja) * | 2005-02-25 | 2006-09-07 | Agilent Technol Inc | 半導体特性評価装置の管理方法及びそのプログラム |
| US7206653B1 (en) * | 2005-11-29 | 2007-04-17 | Taiwan Semiconductor Manufacturing Co., Ltd. | Wafer-based planning methods and systems for batch-based processing tools |
| KR100755136B1 (ko) | 2005-12-28 | 2007-09-04 | 동부일렉트로닉스 주식회사 | 제조실행 시스템에서 그룹별 반도체 제품군의 공정상태파악방법 |
| KR101251855B1 (ko) * | 2010-02-18 | 2013-04-10 | 신닛테츠스미킨 카부시키카이샤 | 조업 가이던스 설정 지원 장치, 조업 지원 시스템, 및 컴퓨터 프로그램을 기록한 컴퓨터 판독 가능한 기록 매체 |
| CN109240224B (zh) * | 2018-08-17 | 2022-04-15 | 张家港康得新光电材料有限公司 | 一种收料方法、装置、设备及存储介质 |
| CN110290194A (zh) * | 2019-06-20 | 2019-09-27 | 苏州工业园区恒越自动化科技有限公司 | 一种基于semi标准的secs通信方法 |
| CN114924536B (zh) * | 2022-05-26 | 2024-01-30 | 江苏泰治科技股份有限公司 | 一种光伏电池片生产控制方法 |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4974166A (en) * | 1987-05-18 | 1990-11-27 | Asyst Technologies, Inc. | Processing systems with intelligent article tracking |
| JP3309997B2 (ja) * | 1991-09-05 | 2002-07-29 | 株式会社日立製作所 | 複合処理装置 |
| JP2724082B2 (ja) * | 1992-12-18 | 1998-03-09 | シャープ株式会社 | Ｖｌｓｉプロセスのデータ解析支援システム |
| JPH06203040A (ja) * | 1992-12-28 | 1994-07-22 | Honda Motor Co Ltd | 製造経歴管理システム |
| JPH06338552A (ja) * | 1993-05-31 | 1994-12-06 | Sony Corp | 半導体シミュレーション装置 |
| IT1272036B (it) * | 1993-11-05 | 1997-06-11 | Marelli Autronica | Sistema di registraziome per una linea di produzione. |
| US5654896A (en) * | 1994-10-31 | 1997-08-05 | Ixys Corp | Performance prediction method for semiconductor power modules and ICS |
| US5591299A (en) * | 1995-04-28 | 1997-01-07 | Advanced Micro Devices, Inc. | System for providing integrated monitoring, control and diagnostics functions for semiconductor spray process tools |
| US5659467A (en) * | 1996-06-26 | 1997-08-19 | Texas Instruments Incorporated | Multiple model supervisor control system and method of operation |
| JP2800795B2 (ja) * | 1996-08-05 | 1998-09-21 | 日本電気株式会社 | 生産制御方法及び生産制御装置 |
| KR100211671B1 (ko) * | 1996-11-11 | 1999-08-02 | 윤종용 | 반도체 제조장비의 관리시스템 및 관리방법 |
| KR19980068469A (ko) * | 1997-02-20 | 1998-10-15 | 김광호 | 반도체 설비 통합 제어시스템 |
| US5862054A (en) * | 1997-02-20 | 1999-01-19 | Taiwan Semiconductor Manufacturing Company, Ltd. | Process monitoring system for real time statistical process control |
| KR19980074797A (ko) * | 1997-03-27 | 1998-11-05 | 윤종용 | 반도체 제조용 설비의 관리방법 |
| JPH10335193A (ja) * | 1997-05-30 | 1998-12-18 | Toshiba Corp | 製造工程仕様作成運営システム、プロセスデータ作成システム及び半導体装置の製造方法 |
| WO2000036479A1 (fr) * | 1998-12-16 | 2000-06-22 | Speedfam-Ipec Corporation | Gestionnaire virtuel d'equipements |
-
1999
- 1999-05-20 KR KR1019990018261A patent/KR100303322B1/ko not_active IP Right Cessation
-
2000
- 2000-05-19 DE DE10024735A patent/DE10024735A1/de not_active Withdrawn
- 2000-05-19 NL NL1015251A patent/NL1015251A1/xx not_active IP Right Cessation
- 2000-05-20 CN CNB001226681A patent/CN1213367C/zh not_active Expired - Fee Related
- 2000-05-22 GB GB0012374A patent/GB2352058B/en not_active Expired - Fee Related
- 2000-05-22 FR FR0006508A patent/FR2793916B1/fr not_active Expired - Fee Related
- 2000-05-22 JP JP2000150555A patent/JP2001035760A/ja active Pending
- 2000-05-22 IT IT2000MI001128A patent/IT1317658B1/it active
- 2000-05-23 TW TW089109913A patent/TW482967B/zh not_active IP Right Cessation
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI571908B (zh) * | 2014-08-15 | 2017-02-21 | 力晶科技股份有限公司 | 製程控制方法與製程控制系統 |
| US9864363B2 (en) | 2014-08-15 | 2018-01-09 | Powerchip Technology Corporation | Process control method and process control system |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2001035760A (ja) | 2001-02-09 |
| GB0012374D0 (en) | 2000-07-12 |
| KR20000074361A (ko) | 2000-12-15 |
| NL1015251C2 (fr) | 2004-10-19 |
| CN1213367C (zh) | 2005-08-03 |
| KR100303322B1 (ko) | 2001-09-26 |
| ITMI20001128A1 (it) | 2001-11-22 |
| NL1015251A1 (nl) | 2000-11-21 |
| FR2793916A1 (fr) | 2000-11-24 |
| IT1317658B1 (it) | 2003-07-15 |
| ITMI20001128A0 (it) | 2000-05-22 |
| DE10024735A1 (de) | 2001-02-01 |
| CN1278621A (zh) | 2001-01-03 |
| GB2352058A (en) | 2001-01-17 |
| FR2793916B1 (fr) | 2005-06-03 |
| GB2352058B (en) | 2003-08-13 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GD4A | Issue of patent certificate for granted invention patent | ||
| MM4A | Annulment or lapse of patent due to non-payment of fees |