TW482967B - System and method for automatically managing semiconductor production bays - Google Patents

Abstract

A system for automatically managing semiconductor production bays, includes: a plurality of process equipment, each for processing a lot representing a predetermined number of semiconductor wafers and generating real-time process data associated with a process in response to a lot data; at least one production management device for generating control commands associated with the process in the semiconductor production bays and receiving the real-time process data from said each process equipment; a equipment control device for controlling said process equipment in response to the control commands and transmitting the real-time process data to said production management device; a data storing device for storing data associated with process and the lot in the semiconductor production bays in response to the commands issued from said production management device; and a history management device for managing history of each of said process equipment and semiconductor wafers in response to the control commands issued from said production management device.

Description

V. Description of the invention (1) Inventive jaw field The present invention is related to the _ system and method, in which Lu J is used to automatically manage the various processes of the semiconductor production machine ^ Purpose-can be effectively managed before the semiconductor production equipment i The system and method of the relevant data generated by the arts and crafts gg. Production equipment, and ^ special process equipment = semi-etching equipment 'Yizhao] is used to make In addition, the semi-conductor: lithographic printing set, where the storage device is the production process of the opening block production machine and has: : The number of temporary storage cabinets is set by production and 2 can be added in order to carry out the conventional semiconductors in a simple process. The traditional process of the Dingshou plant will be used. ≪ 糸 and-can be used with the system including The f ❾ main engine is used to connect Lai Shengyan and the traditional wood health house + conductor system, which is usually a conductor production machine, a process semiconductor wafer device, and other similar machines. This device. For some time, some cassettes prepared by the machine are stored in stacks, and among them are called π-batch pi semiconductors, a storage container is supplied to the raw. Stored in a batch of precursor wafers. In the industry-related system, an electronically-connected semiconductor-related information system is set up and the data generated by the crystal process are also used in the brain host library. It is prepared by the factory. Because of the semi-conductor production, it has a traditional network. , Multiple systems. After electrical automation, the electricity can be impure body wafer system. Terminals, brain-hosts in the system of the brain-host system > Reduction of the execution rate to the most relevant time Φ will be used to control all the 9 rounds of the 'Ding' system to control the process of falling into the lights "Low level, this: the number of people is 'Asian. Outside' and can be quickly

482967 V. Description of the invention (2) However, because the traditional process equipment is not equipped with a classified health device, and it is not possible to manage all related The information is provided so that a large number of operators can operate the semiconductor production machine, and as a result, the semiconductor equipment has come down. "The invention of the invention under productivity" Therefore, one of the objectives of the present invention is to provide a system and method that can be used to automatically manage the semi-body production machine, so as to effectively solve the various problems of the prior patented technology Question. According to a concept of the present invention, it is to provide a system that can be used to automatically manage a conductor production machine, including: a plurality of process equipment, each of which can prepare two batches of semiconductor wafers with a preset number, and in the process ^ = In China will also respond to this data and will produce real-time process data; ^ There is at least one production management device that can be used in the production of semiconductor production equipment to generate control instructions and can process each process The device end receives the process data of the process; a grasp of the production process ^ ^ ^ ^ ^ σ and control gear, not only can respond to the control _ 7 to control the process equipment and can be timely ^ L ^ LI ^ throne & management set, a data storage device, can respond to the instructions issued by the system ^ A official management device for storage ΐ: i 1 Batch production tool in the semiconductor material produced in the "i ϊ: processing means' that the system may respond via the production control apparatus makes a circle, and thus each of the management apparatus and process historical data of a semiconductor wafer. According to another concept of the present invention, it provides a system for automatic management of 482967. V. Description of the invention (3) _ Taiwan method 'includes the following steps: automatic rotation from production by using; ": card supply instructions to Plural process equipment end and-know that the process equipment is used to carry out the process in a roll of cassettes and approved by ί = batch data κ through-data collection device, and-a data = Ϊ = column 衩 equipment production process in real time The process data is stored in the card tray; then the card can be stored in the storage device by the automatic conveying device; then the real-time process resources are classified by a historical management device. . Another concept of clothing $ $ jj, which provides a medium that can be read by a computer = Bottom :: The way to automatically manage semiconductor production machines with Ming "" t-batch "; Second, by using the production control device The first batch of beetles sent to send the soy bean bitter supply instruction to produce the cassette supply instruction to the multiple process equipment side and — ^ ^ 2 ^ Ε This process equipment is processed in a roll card factory ^ delivery device 钿, b) Use c) m ancestors: batch data stored in E;; two: and will-batch the same day-to-day process data processed by the process equipment, stored in a data store. By ) ;! The conveying device is moved to store the Kakun in the Kakun. That is, the historical process data is stored in the historical storage process. The historical data is classified by the historical management process. 482967

V. Description of the invention (4) The foregoing and other objects and characteristics of the present invention can be learned by studying the preferred embodiment and explaining it in detail with the related legends, among which: Figure 1 is a preferred embodiment of the present invention A schematic diagram of a system for automatically managing semiconductor production equipment in an automated production system of a semiconductor factory; FIG. 2 is a schematic structural diagram of a historical database of the system shown in FIG. 1; FIG. 3 is shown in FIG. 2 Schematic diagram of the batch of data sheets in a batch of data; " Figure 4 is a schematic diagram of the structure of the equipment data sheet related to the process equipment shown in Figure 2; Figure 5 is shown in Figure 2-^ in the box The structure and schematic diagram of the network cable and card data tables related to the network cables of each semiconductor wafer are included; FIG. 6 is a schematic structural diagram of a process data table related to the process items shown in FIG. 2; FIG. 7A 7C is a flowchart of a method for automatically managing a semiconductor production machine according to the present invention; FIG. 8 shows steps performed when a CMS shown in FIG. 7A transmits a cassette supply instruction to a process equipment terminal Flowchart; Figure 9 is a flowchart of the steps performed when one AGV supplies a cassette to the process equipment shown in Figure 7A; Figure 10 is when the process data shown in Figure 7B can be recorded to an instant database FIG. 11 is a flowchart of steps performed when one of the process equipment shown in FIG. 7B requests to eject the cassette;

482967 V. Description of the invention (5) Figure 12 is a flowchart of the steps performed by the CMS shown in Figure 7B when sending a cassette withdrawal instruction to the process equipment side; and Figure 1 3 is when an AGV homemade process equipment side exits the cassette and A flow chart of steps for storing it in a storage cabinet. Detailed description of the specific embodiment of the disk In order to produce semiconductor devices, usually a plurality of semiconductors are produced, and the production machine is directly installed into an automated production system of a semiconductor factory, and the semiconductor production machine is transparent and general communication lines. The stations are connected to the end of life and production management systems. For convenience, only a semiconductor production machine will be described in the description of the present invention. || Coincidentally refer to FIG. 1, which is a schematic diagram showing a preferred embodiment of the present invention in which a system for automatically managing a semiconductor production machine is configured in an automated production system of a semiconductor factory. As shown in the figure, the automation system of the semiconductor factory includes at least one, where it is a semiconductor production machine with a predetermined number of g 卩 4 groups. In a semiconductor production machine, a preset number of process equipment 700, a storage device 8900, and one or more automatic guided vehicles (^ GVs) 880 are provided. Each process equipment 70 () is used to process semiconductor wafers to obtain the required semiconductor devices. For example, the process equipment is packaged ^ I have not prepared for a while 'a photolithographic printing equipment, that is, similar equipment. The storage device can temporarily store some cassettes. Each cassette has a pre-set number of semiconductor wafers, usually referred to as, "batch". These cards can be automated guided carrier (AGV) 880 and can be used in Selective way to be transported to a process equipment side.

Page 10 482967 Five invention descriptions (6) Guide bow 丨 Vehicle (AGV) 88 0, you can use the card I? (Hereinafter referred to as " 一一 链 本 涵 土 4ιχ 丄 丨丨 \. I, 7, J, Q, and Q's gates also produce other cassettes (hereinafter referred to as "a process cassette or batch"), which are successfully transported to the process equipment side or the storage device 890 side. And the process cassettes stored in the storage to 890 will be transported to another semiconductor production machine. &Amp; Each process equipment is set through a device control device 600 to lightly / general communication Line 10 terminal, for example, 5-Ethylene Network 1 supplied by Xerox Company. Storage devices 8 90 and AGV can also be directly coupled to the terminal 10 of the signal line. And the automation of the semiconductor factory Also included in the system is the unit management device 100, an instantaneous ^ repository 200 that can be connected to the unit management device 100, and a temporary storage '100' that can be connected to the unit management device 100. Device 300, a calendar management that can be connected to the temporary storage device 300 It is possible to set 400 and a historical database 500 that can be connected to the 400 terminal of the historical management device. The unit management device 100 ′, the historical management device 400, and the historical database 500, etc. Connect to the 10 ends of the general communication line respectively for communication. With the Ethernet TM cable 10, the unit management device 100 can communicate with the device control device 600 smoothly for control. A process equipment 7 0 0, and it can also communicate with the transport control device 8 0 0 to control the storage device 890 and AGV 8 6 0. Second, the historical database 5 0 0 is coupled through the general communication line 1 0 To a reporting device 9000. The unit management device 100 includes an operator interface server (hereinafter, referred to as, 0 I Sn) 1 2 0, a unit for generating control instructions, management

Article UI 482967 1. Description of the invention (7) 1 server (hereinafter referred to as "CMS" M 40) and a piece of data that can be used to store a batch of process data that appears in the real-time database 2 0c Gathering server (hereinafter referred to as "DGS") 160 and so on. 'The operator interface server (0IS) 1 2 has a graphical user interface. Then, the operator can start preparing the batch for Process data, such as an identifier of the breeding material, the identification name of a cassette containing one of the batches of data, etc., are input into 0 IS 1 2 0. And the batch of data is input into QI s 1 2 0 That is, go to the end of the Shanfan Management Server (CMS) 1 40, and then feed it into the real-time = material library 2 0. In this way, the CMS 140 will be stored in advance in the == database 2 Q The process progress in 0 results in a control instruction such as a card supply instruction or a cassette withdrawal instruction. The instruction is based on the general communication line, the "that" Ethernet, and the Ethernet message format It is transmitted to the 8GG terminal of the transport control device, and it will be displayed on the screen of 〇IS 12 () simultaneously. The MS 140 can receive process data in the form of an Ethernet message grid from the equipment control device 700, and can store the real-time process data in a straightforward way: the raw shell 7 device in 300. In this way, the temporary: = will be stored according to a preset time. The device is called a "historical information feeder (hereinafter, briefly stored temporarily, let alone according to CMS 1 40) Instructions can be taken from within. Garbage materials are stored directly in the historical database 500 technology system 600 including a link to the 10 end of the general communication line

Page 12 482967 V. Description of the invention (8) Equipment server (hereinafter referred to as |, EQS ") 6 2 0, and a communication operation that can be used to process the process equipment 7 0 0 and EQS 6 2 0 Equipment communication server (hereinafter referred to as ECS) 640. The ECS 640 can directly convert the process data issued by the process equipment 700 into a standard for semiconductor equipment communication (hereinafter referred to as SECS) message. This SECS is a server that can be used between servers in this system. Communication protocol when communicating with each other. The EQS 620 transmits the control commands issued by the CMS 140 to the process equipment 700 through EQS 6200 and ECS 640. In addition, EQS 6 2 0 is also available through ECS 640.

Receive the process data output by the process equipment 700 and transfer the batch process data to the CMS 140. The transport control device 800 includes a storage device control server (hereinafter referred to as scs) 82 () which can be used to control the storage device 890 $, and an in-machine control server (hereinafter referred to as scs 820) which can be interconnected with the scs 820. Abbreviated as ics), and an automatic guidance vehicle controller that can be interconnected with ICS 840 is referred to as AGVC) 86 0. The ICS 840 series can receive the control instructions issued by the CMS 140, and then transmit the batch control 3 instructions to each SCS 82 and ^% 86. Like 8 > 20 ^ i—It will be controlled according to the content of the control instructions it receives, so that the storage device 890 can be loaded or unloaded. AGVC 86 0 will transport the protective shackles according to the received _ ', °, and φj 扪 to control the content of the private order to generate a thing i to control Lbl. Then, the group will be controlled as _. AGV m then transports the selected cassettes according to the shuffled transport = =. The frightening deduction instead of the notification device 9 0 0 series includes a w w i available to retrieve 482967 from the historical database 500. 5. Description of the invention (9) information and generate a report The server 920, and a report database 94 for storing all reports generated by the reporting server 920. The configuration method of the plurality of servers can be used in conjunction with a plurality of software programs and at the same set point can also build more than one server at the same time, such as personal computers' workstations, microcomputers and similar devices. Cangkao Figure 2 'is a schematic structural diagram of a historical database in a system constructed in accordance with the present invention. As shown in Figure 2, 'historical database 500' includes _ batch data table 51 〇, a batch of equipment data table 520, — batch network cable and cassette information table 540, and a batch of process data table 5 4 0 and so on. 'For the batch of data sheets in the data, please refer to FIG. 3, which shows a structure diagram of a batch of 5 10 in FIG. 2. As shown in the figure, the batch of data tables 5 and 5 are respectively 5U, a batch of historical data tables 512, and each batch has ^ batch numbness ^ data table 513,-batch characteristic data table 514,-batch operation ^ The historical shellfish schedule data sheet 516 'batch rejection data sheet n command sheet 515'-batch, and-batch error data sheet 519y. 17, -Batch reprocessing data sheet The batch status data table 511 is representative data of the procedures executed in a meeting. The number of systems in the batch and the status of the wafers in the batch ": Medium The historical data table 512 of the wafer to be processed is divided into "relevant related data". The representative 77 data of the procedures that have been carried out in this batch are stored in a batch of related information such as the number of systems in the batch. A batch of wafers that have been changed in this time is a batch of historical assets stored in the historical data sheet 51, which is deleted by the historical deletion book, which is 7 and 482967. V. Description of the invention ( 10) The time when the batch of data is deleted and deleted, as well as the operator and other data. The batch data table 514 is used to store a batch of data about characteristics defined by the operator. The operation instruction table 515 stores relevant information of operation instructions used in each program. A batch_process data table 516 stores the data of the process to be performed during each process. In the batch of refusal data, Table 51 17 stores the relevant information of the batch when the refusal event occurred in a process, the reason for the rejection, and historical data used to manage the refusal event. In the batch of re-processing data table 5 丨 8, relevant information such as the reason why the batch of data must be re-processed is stored. And when there is a batch of error conditions, the batch of error data table 519 stores the reasons that caused the error conditions, as well as historical data for managing the error conditions, and so on. Μ Please refer to FIG. 4 ′, which is a schematic structural diagram of a device information table 5 2 0 related to the process equipment in FIG. 2. As shown in FIG. 4, the batch of equipment information tables 520 each have a state data table 521, a batch of equipment historical data tables 522, a data table 5 2 3, a batch of equipment operation tables 5 2 4 and a batch of equipment instructions. Historical data sheet 5 2 5 and so on. The equipment status data sheet 5 21 is used to store the status of the process equipment 700 which is currently being processed. The batch of equipment historical data table 5 2 2 is used to store relevant information about the error conditions that occurred in the process equipment 700. A batch of equipment maintenance information table 5 2 3 can store relevant information about process equipment 700 in maintenance. And a batch of equipment operation table 524 can be used to store relevant information of the process equipment 700 and its manufacturing process

Page 15 W967 V. Description of the invention (π) When there are obstacles related to the process equipment itself, there will be-batch equipment 2: 2: When the process equipment 70 occurs, the history / sex data of the process equipment 700 made by the process equipment 700 Table 525 will store this, please refer to FIG. 5, which includes the related information of :::. The system containing the sum of each semi-conductor is said to be the structure diagram of the table 530 in the card S shown in FIG. ® network cables related to the network cable and card ® information line: Shi Jin f · shengding information Haier II, and the cassette information table 530 are respectively * Yes- batch network shell table 531 and the history of the network cable instructions Data sheet 532 Health f ^ 2 J to / when there is an error condition on a network cable, the history of the network cable 来 来 H The network cable # 生 的 error status data storage marriage break # 人 田 糸 系 At least one network When an error condition occurs on the line, the historical π of the: π table 5 3 2 is to store the data of the process equipment 700 related instructions for the process T. The second figure 6 ′ is a schematic diagram showing the structure of a red seashell watch related to the process item in FIG. 2. Two: 6 The main process data sheet 540 of the main institute, respectively • There are batch-type process daggers, Table 5 41 and the historical data sheet 5 4 2 of the batch process. Theft === Cheng state data table 54ι is the data that can store the state of the semiconductor wafer or the batch in the process—the state of a person. The Lifengfeng data table 542 of a batch of process is used to store the data of the number of I-body wafers * processed by the process equipment 700 and the required process time. / In this specific embodiment, a unit management device 100, a historical management device 400, and an instantaneous database 200, etc. are respectively disclosed, and then

Page 16 482967 V. Description of the invention (12) '------ In the real situation, however, there is m unit management device 100, historical official management device 400 and real-time data semiconductor factory automation System. Alas. In addition, the data stored in the data table are stored in the temporary storage device 300 in accordance with the right. If the time has exceeded the original preset time, the data will be stored in the historical database 500 at this time. At this time, stay—for Tian Zhuangji, the management device 40 0 will be parallel. The MEMS device m and historicity = to 7C are flowcharts of the method of the present invention that can be used to automatically manage a semiconducting production machine. As shown in Figures: A to 7C, at step 〇00, the operator uses the graphical user interface in OIS 120 to enter the batch of data in order to build a preparatory process.疋 Include the identifier of a batch 'the batch to be processed, the number of wafers in the 2 times, and the card ID that contains one of the batch: #. At the same time, in step S310, the CMS 14 will receive the first batch of data, and then, it will generate a cassette supply instruction. At steps S320 and S330, the CMS 14 will send the cassette supply instruction to the process equipment 700 and ICS 840 in a message format, respectively. As a result, at step S34, the ICS 84 will transmit the cassette supply instruction to the SCS 820, AGVC 860, and the like. The cassette supply instruction includes control data having a cassette identifier therein, a position where the cassette is supplied, and a position where the cassette is to be intercepted. In this case, AGVC 86 0 will turn on at step S350.

Page 17 482967 V. Description of the invention (13)-The AGV control signal is transmitted to the AGV 88 0 terminal and the scs 82 0 will also transmit the z storage device control signal to the storage device 890 terminal. Next, the storage device 890 will cause the AGV 880 to collect a card containing the batch to be processed. In addition, at step S3 60, the AGV 88 0 will collect the cassette supplied by the storage device 89 Rotate to the end of a target process equipment. Then, in step S370, the target process equipment will produce the cassette containing the batch data sent from AGV 88 0 and will also process the real-time process data, including the information related to the process. The materials of the manufacturing process and equipment related to the process equipment are directly transmitted to the CU 140 side. In this way, at step S38, the CMS 14 will record the real-time process data to the real-time database 200 through DGS 160. After the Shimao dry material manufacturing equipment has completed its manufacturing process, the target material manufacturing equipment generates a request signal and passes the equipment control device 600 at step S39〇, and requests the CMS 140 to withdraw from the completed cassette. Then, at steps S400 and S410, the CMS 140 generates a cassette withdrawal instruction and sends a cassette withdrawal instruction to the target device and the ICS 840 in a message format. The control shell material contained in the cassette withdrawal instruction includes the respective identifiers of the cassettes to be withdrawn, the process equipment for which the cassettes are to be returned and ejected, and the process equipment for the next target. At step S42 0, the ICS 840 will send a card withdrawal instruction to the "" 860. At the same time, the process equipment 700 will load the batch to be processed into the card, and then wait for the next milk process operation. :

Page 18 482967 V. Description of the invention (14) In step S43 0, the AGVC 860 can transmit an AGV control signal to the AGV 880 terminal through the wireless communication network, and in step S440, the AGV 880 is a self-made process equipment 70 0 Withdraw the cassette and store the cassette in the storage device 890.

At step S45 0, SCS 8200 will send poor information about the new storage location of the newly stored cassette to CMS 1 40; and at step S 4 60; CMS 140 will use this The information of the new location is updated with the old information of the storage location of the newly stored cassette originally stored in the real-time database 2000. Then, the CMS 1 40 will retrieve the process data stored in the real-time database 200, and at step S470, it will record the process data it retrieved in the temporary storage device 3 0. 〇Zhongzhong as a process data file. After that, the CMS 140 transmits file information sufficient to represent the process data stored in the temporary storage device 300 to ΗIs 420. Then, at step S4800, Η S S4 2 0 is retrieved from the temporary storage device 300. Xuan Yiyun data file and record it in the historical database of 500.

In the full case ', at step S491, the operator will be able to confirm whether there is another job that must be processed by CMS 14 through 0 1 s 120. If another job is required only on the next day, CMS 1 40 will return to j 1 0 in order to generate a card 11 supply instruction. In other words, if there is another job to be prepared, the process goes to step S50, and the reporting device 002 judges on its own whether it needs to submit a report on the completion of the work process. If you want to submit a report <2, then in step S51〇, the notification server 92 ()… takes the data stored in the historical database 5 () (), and in step S52

Page 19 482967 V. Description of Invention (15) ^ reports will be output. After that, the notification server 9200 will directly store the relevant information of the monster report in the Tibetan report database 9400. In other words, when t does not need to make a report, the operation returns to the step S409. Please refer to FIG. 8, which is a flowchart showing the steps performed when a CMS 140 transmits a caliper response command to a process equipment terminal as shown in FIG. 7 a. At step S321, the CMS 140 transmits the card £ supply instruction to the EQS 620 in a message format. After that, at step 8322, eqs 62〇 will send the cassette supply instruction to ECS 640 and the ECS 640 will also convert the card E supply instruction to one of the 700 which can be used to control the process equipment signal. Then, in step S323, the ecs will transmit the control signal to the process equipment 700 in response to the cassette supply instruction. So-come, the process equipment 700 will be in standby to wait for the arrival of the cassette. It is a flowchart of the steps performed when one of the AGV 8 80 supplies the card E to the process equipment side in FIG. 7A. = = ^ At the time of S361, 'SCS 820 will transmit the control signal of the storage device /' device 890 ', and at step S362, the storage device 8 9 0, ie # ㈢, should respond to the control signal and prepare to supply a target Cassette. Then, in step S363, the AGV 880 receives the AGV control signal generated by the group in response to the 1 E supply instruction from the AGVC 860 terminal, and in step S36j 2, it will automatically move to the storage device 89 terminal so that After extracting the head ', at step S365, the AGV 880 will face

482967

The target process equipment 700 that supplies the cassette to 1 is moved, and in step S36 6 it will supply the target card directly to the target process equipment 70 0 end 0 dream test Figure 10, which shows the Flow chart of the process steps when the process data is recorded to a real-time database. ... Steps ... At the time of ‘Processing Equipment 700’ will pass 640 to pass the day-to-day manufacturing process. Then, at step 5382, ecs 640 will convert the real-time process data into a SECS message.

After that, it will send the instantaneous process data of the conversion completion to the EQS 62 0 〇 Thus, at step S383, the EQS 62 o will transfer the instantaneous process data of the conversion completion through the general communication line 10 Transfer to CMS CMS 140 also sends the real-time process data to 1) (^ 160), and in step S384 'DGS 160 records the real-time process data directly into the real-time database 2 0 0. Please refer to FIG. 11, where Shown is a flowchart of the steps performed by a process device when it is required to eject the cassette.

At step S 3 91, the process equipment 7 00 has completed the process operation, and at step S392, it makes a request to withdraw a cassette to the ECS 640 end 0-then, at step S3 93, the ECS 640 The request message for the withdrawal of the cassette will be converted into a SECS message and transmitted to EQS 62 0. Subsequently, in step S394, the EQS 620 transmits a request message for the card withdrawal to the CMS 140 through the general communication line 10. At step S395, the

Page 21 482967 V. Description of the invention (17) The CMS 140 will also respond to the request for a cassette withdrawal and generate a cassette withdrawal instruction. Referring to FIG. 12, it is a flowchart of the steps performed by the CMS when transmitting a cassette withdrawal instruction to the process equipment side. At step S401, the CMS 140 transmits the cassette withdrawal instruction to eqs 6 2 0; and at the time of step S 4 02, the E Q S 6 2 0 will also transmit the card withdrawal instruction to ECS 640. Then, in step S403, the ECS 64 0 will be a type of SECS message.

The existing card withdrawal instruction is transformed into a device control signal, and in step S404, it transmits the device control signal to the process device 700. Thereafter, in step S405, the process equipment 700 loads the processed batches into the card and waits for the next instruction. Please refer to FIG. 13, which shows a flowchart of the steps when an AGV self-made process device withdraws the card &amp; and stores it in a storage cabinet. f At the step S441, the AGV 880 receives the AGV control signal ^ of the response to the Kaka, and moves toward the process equipment 700. When J is connected, the AGV 88 ° will automatically return the processed cartridge at the 700 end. After that, in step S443 g, move toward the storage device 890 end and place the card _

Equipment. Modu can turn into another process design. In summary, according to the knowledge of the people in the production machine of the conductor in a real-time database and the content disclosed in the Ming and the historical data database, Since it appears in the semi-material system can be stored automatically,

Page 482 967

Page 23

Claims (1)

482967 VI. Scope of patent application 1 · A semi-conductive control device for processing equipment that responds to automated wafers and will produce at least one production management multiple process quantity; process equipment; equipment; equipment storage; Management order, and expected. The patent model is able to return the batch of i, f jlL. Τ γπ from the production of a real-time production equipment control line control of the production management device a data storage instruction to make historical control of the production machine Refers to historical assets 2. If you apply for a device, it will contain the end. 3 · If applied, it is used to generate one: ¾ | 4 · If applied for the management system of semiconductor production equipment, including: Each device can be individually manufactured in a batch and preset in the process of its production. The batch of Shisei's instantaneous process information; devices, can be processed in the semiconductor production machine's order 'and can be received from each process equipment end;' not only can be entered by responding to control instructions' And can transmit the real-time process data to the student, which can be stored in the process for the production management device and the batch of poor materials generated in the semiconductor; and the device can respond to the production management device. The system that is issued to further manage each of the process equipment and the semiconductor wafer surrounding item 1 further includes ^-^ cassette input should be from the control instructions of the production management device, and the cassette of the secondary data is transferred to a target process equipment The system of item 2 of the patent scope further includes a notification device to retrieve related data stored in the data storage device &lt; and the system of item 3 of the patent challenge System, further including ... Page 24 482967 VI. Scope of patent application ^ Cassette storage device, which is used to store the cassette containing information about the number of processes that have already been processed, and batches to be processed in response to control instructions from the production device. 5 · If the system of item 4 of the scope of patent application, wherein the production management device includes an interface device with a graphical user interface so that it can be used to enter the batch of data; a production control device, which can be based on the batch The data content generates a card supply instruction, and can respond to the request of the equipment control device to generate a card E withdrawal instruction, and can receive process data issued by the workstation; and P ^ a data collection device, It is used to store real-time process data in the data storage device. u Save to 6 · If the system of item 5 of the patent application scope, the equipment control device includes a process equipment control device, so that the process equipment can be controlled in response to the instructions issued by the production control device; and An old machine is installed for receiving the cassette supply instruction and the cassette withdrawal instruction from the production control device, and converts the instruction into a standby control signal, and can send the command issued by the process equipment. That is, the process data is converted into _Semiconductor Equipment Communication Standard (SKS). After that, the real-time process data is transmitted to the equipment control. The system includes an internal control device for receiving card E supply instructions and card withdrawal instructions issued by the device. The storage device control device responds to card g supply instructions and cards. Carpenter Page 25 482967 6. After the patent application scope withdrawal instruction, a storage device control signal can be generated through the control device in the machine to control the cassette storage device; a cassette conveyance control device is used to respond to the cassette supply Instructions and cassette withdrawal instructions to generate a transport control signal; and a transport device, which can respond to a transport control signal derived from the cassette supply instruction and the cassette withdrawal instruction, respectively, from the cassette storage device Extracting the target cassette, supplying it to a target process equipment side, and extracting the target cassette from the target process equipment side, and supplying it to the cassette storage device side. 8. If the system of item 7 of the patent application is applied, the storage device includes an instant data storage device for storing the real-time process data; a temporary data storage device for the batch of real-time data The process data is temporarily stored as a file; a historical data storage device is used to store real-time process data in a temporary data storage device, and under the control of the historical management device and for more than a preset time Only then began to store; and a report storage device for storing reports made by the notification device. 9. If the system of the scope of patent application No. 8 wherein the batch of data contains a batch of identifiers (I · D .), The process to be performed in the batch, the number of semiconductor wafers in a batch, and the cartridge identifier containing one of the cartridges in the batch. 10. The system of item 9 in the scope of patent application, wherein the instantaneous process Page 26 482967 VI. The scope of patent application information includes the status of the batch, a batch of instructions related to the batch, and a batch of process data related to the batch. The status of the process equipment is related to the process equipment. A batch of operational data is related to the instructions of the process equipment and the execution status of a process operation. 1 1. The system according to item 10 of the scope of patent application, wherein the historical data storage device includes a batch of data sheets related to the batch that has been manufactured, a batch of equipment data sheets related to the manufacturing equipment, and a batch of The network cable and cassette data table related to the network cable of each semiconductor wafer contained in the cassette, and a batch of process operation data table related to the batch in the process stage. 1 2. If the system of item 11 of the scope of patent application, wherein the batch data table includes a batch of status data tables that can be used to store the relevant process data of the batch, the number of wafers in the batch, And the state of the wafers in the batch At · m, a batch of historical data tables, used to store the representative data of semiconductor wafers in the batch and the data of the quantity change; a batch delete the historical data tables of the batch To store the historical data of a batch of deleted batches; a batch of feature tables to store the characteristics of the batch as defined by the operator; a batch of operation instruction tables to store each of the execution of the process operations Operation instructions; a batch of process data tables to store various tribute materials generated during the execution of process operations, a batch of rejected data tables to store a refusal that occurred during a process Page 27 4 ^ 2967 VI. Relevant information of the batch at the time of the application for the scope of the patent application, the reason for the rejection, and the historical data used to manage the rejected event; a batch of re-processing data sheets to store why Relevant information such as the reason for the batch of data must be reprocessed; and a batch of error data sheets, which can be used to store the cause of the error condition when one of them is in error, and for management Historical information on the error condition. 1 3 · If the system of item 12 of the scope of patent application is applied, the equipment / data sheet includes data on the current status of a batch of equipment in the process; a batch of equipment historical data sheets to store the appearance Error conditions in the process equipment; a batch of equipment maintenance data sheets to store relevant information about the maintenance of the process equipment; a batch of equipment operation tables to store the process equipment during its execution Relevant data and various materials related to the process equipment itself; and a historical data sheet of a batch of equipment instructions, when a process equipment failure occurs, there will be a batch of instructions that can be used to store the process instructions processed by the process equipment Related information. 1 4. If the system of item No. 丨 3 of the scope of patent application, the network cable and cassette information table includes a batch of historical data tables of the network cable. When at least one cassette and network cable has an error condition, you can Stores error data that occurred on that cartridge or network cable. 1 5 · The system of item 4 in the patent scope, in which the process-related material list related to the process operation includes a batch of semiconductor wafers that can be used to store the semiconductor wafer. Page 28 482967 VI. Process status data tables such as the status of the scope of patent application or the status of the batch in progress; and a batch of historical data tables to store semiconductor wafers processed by the process equipment The quantity and the required process time. 16. —A method for automatically managing semiconductor production equipment, including a r ~ jfc-zhuang Wx · Γ Shaoxiang · a) Generate a cassette by using the first batch of data transmitted from the production control device After the supply instruction, it sends a cassette supply instruction to the multiple process equipment end and an automatic conveying device end; b) using the process equipment to process a batch of data stored in a roll of cassettes; c) through a Data collection device, and store a batch of real-time process data processed by the process equipment in a data storage device; d) storing the cassette in a cassette storage device by the automatic conveying device E) storing the real-time process data in a historical storage device, wherein the batch of real-time process data is classified into a process by a historical management device. 17. The method according to item 16 of the scope of patent application, further comprising the steps of: f) responding to external demand and submitting a report on relevant information stored in the historical storage device; and g) the report Stored in a report storage device. 18. The method according to item 17 of the scope of patent application, wherein step a) is a package Page 29 482967 6. The scope of patent application includes the following steps: a 1) Enter the first batch of data into an interface device; a2) Upon receiving the first batch of data, the production control device generates a Cassette supply instruction; a3) the cassette supply instruction is transmitted to the process equipment and a control device in the machine; a4) the cassette supply instruction and the second batch of data are respectively transmitted to a transport control device side to control the The automatic conveying device is also transmitted to a control device of a storage device to control the cassette storage device; and a5) directly transmits the cassette supply instruction from the conveyance control device to the cassette conveyance by wireless communication Device. 19 · The method according to item 18 of the scope of patent application, wherein the step a2) includes the following steps: a2 1) transmitting the cassette supply instruction from the production control device side to the equipment control device side; a2 2) from The device control device sends a cassette supply instruction to a device communication device; a2 3) The cassette supply instruction is converted into a machine language at the device communication device; a 2 4) After completing step a 2 3) ' The cassette supply instruction that has been converted into machine language is transmitted to the process equipment end through the intermediate medium; and a2 5) wait for the process equipment to complete its process action. 20. The method according to item 18 of the scope of patent application, wherein the information of the first batch includes an identifier of a batch, and the system to be performed for the first time in the batch Page 30 482967 VI. Scope of patent application, the number of semiconductor wafers in the batch and the identifier of the cassette containing the batch. 2 1. The method according to item 18 of the scope of patent application, wherein the information of the second batch includes an identifier of the cassette (I.D.), the location of the cassette to be supplied and the loading, and the loading into the cassette s position. 22. The method of claim 16 of the 'Patent Scope,' wherein step b) includes the following steps: / b 1) The second batch of data is transmitted from the control device side of the storage device through the intermediate medium of the instruction. To the cassette storage device end; b 2) preparing the supply cassette according to the data content of the second batch; b3) transmitting the cassette supply instruction and the second batch of data from the transport control device end to the automatic transport device B4) move the automatic conveying device, that is, extract the cassette from the cassette storage device and deliver it to the process equipment ready to supply the cassette to it; b5) provide the cassette to the process equipment; and b6) proceed The manufacturing process is indicated by the batch of data contained in the cassette. 2 3. If the method of applying for the special item No. 16 is applied, the step c) includes the following steps: cl) The real-time process data is transmitted to the communication device end of the device by using the command intermediate medium device. C2) After the real-time process data is converted into a standard type message for semiconductor device communication, it is directly transmitted from the device communication device end to the device control device end; Page 31 482967 VI. Application scope c 3) Send the process data from the equipment control device to the production control device; and c4) Transfer the conversion data from the production control device to the data collection device and use the The instantaneous process data of the conversion is completed directly. 02. The method of item 16 of the patent application scope includes the following steps: d 1) If the process equipment has been completed, the box will be withdrawn to the production control. Device; d2) generating a third batch of data from the production control device, and then separately and the control device end in the machine; d3) by using the control device in the machine to send to the transport control Device; d4) controlling the process equipment so as to stack the materials into the cassette, and then waiting for the process; d5) transferring the card conveying device end from the conveying control device end; and d6) directly by the automatic conveying device, The cassette is then stored in the cassette storage 25. The method of item 24 of the patent application includes the following steps: Immediate completion of the conversion is completed. The data collection device is stored in the data storage device, and the process in step d) is to request a cassette withdrawal instruction, which is transmitted to the process equipment and the third batch of data has been processed. The batch equipment has completed its process cartridge withdrawal instruction to the automatic withdrawal device from the process equipment. The step dl ·) is a package Page 32 482967 VI. Application scope of patent d 1 1) If the process equipment has completed the process, request through the intermediate medium of the instruction to withdraw a cassette to the production control device at the communication device side of the equipment; d 1 2 ). Convert the withdrawal request of the card to a standard type message for semiconductor device communication, and then transfer the instruction of the conversion completion table from the device communication device side to the lie control device side; and dl 3) control from the device The device side will complete the conversion requirements and send the content to the production control device side. 2 6. The method according to item 24 of the patent application scope, wherein the step d2) includes the following steps: d2 1) A cassette withdrawal instruction is generated from the production device side, and then transmitted to the equipment communication device side; d22 ) Send a cassette withdrawal instruction from the equipment control device to the equipment communication device; d23) After converting the cassette withdrawal instruction to machine language, use the intermediate device of the instruction to send the cassette withdrawal instruction to the process The equipment side; and d24) transmitting the cassette withdrawal instruction to the control device side in the machine. 2 7 · If the method according to item 26 of the patent application scope, the third batch of data includes the identifier of the cassette to be withdrawn, the process equipment ready to withdraw from the cassette and the cassette to be supplied. One of the process equipment. 2 8. The method according to item 24 of the scope of patent application, wherein step d 6) includes the following steps: Page 33, 482967 VI. Application scope-d 6 1) From the conveying control device, g appears to be π north into the flat, and the r thorn meter sets a card recall withdrawal order containing the third batch of data to the automatic conveying device. D 6 2) Withdraw from the card in accordance with the second batch + one;-Brother Yidu-person's data content from the process equipment end card E stored in the card g storage device; d D 4) will contain Store the card, transfer it from the card storage device to the Xifeng card // Ningzang device, and find the location data of the card and the main control unit of the production control device, and d 6 5) The updated data stored in Zhuang are transmitted to the location of the production control device and T-shirt. 29. If the method of the scope of application for the patent No. 16 includes the following steps: Step A) Step 1) Extraction Already stored in the process data of this property, and then stored in the instantaneous storage device; Yi Hongbei is stored in the temporary storage. 2) The department transfers it from the production control device. ~ ^, Immediate /% sexual placement in storage; and Bedin 10 Seeking to historical management (3) from the temporary storage, and then the immediateness = fetching the instantaneous process storage device. The clothing king-shell material directly § has been recorded in the historical altar 30. A kind of computer-readable money-type instruction system is directly built on the κ media storage program instructions, and this process manages the semiconductor production machine: H In order to carry out-to automatically a) by using the following sounds to include the following steps:--control the first transfer of the first set of funds. ^ 482967 VI, after the scope of patent application, and the generation of cassette supply instructions, A cassette supply instruction will be sent to a plurality of process equipment ends and an automatic conveying device side; b) using the process equipment to process a batch of data stored in a roll of cassettes; c) through a data Gather the device, and store a batch of instant process data processed by the process equipment in a data storage device; d) store the cassette in a cassette by the automatic conveying device In the storage device; and e) storing the real-time process data in a historical storage device, wherein the batch of real-time process data is classified by a historical management device for the process. 3 1. The computer-readable media as described in item 30 of the scope of patent application, further including the following steps: f) responding to external requirements and submitting relevant information stored in the historical storage device A report; and g) storing the report in a report storage device.