NL1015251A1 - System and method for automatically managing semiconductor production bays. System and method for automatic management of semiconductor compartments. - Google Patents

System and method for automatically managing semiconductor production bays. System and method for automatic management of semiconductor compartments.

Info

Publication number
NL1015251A1
NL1015251A1 NL1015251A NL1015251A NL1015251A1 NL 1015251 A1 NL1015251 A1 NL 1015251A1 NL 1015251 A NL1015251 A NL 1015251A NL 1015251 A NL1015251 A NL 1015251A NL 1015251 A1 NL1015251 A1 NL 1015251A1
Authority
NL
Netherlands
Prior art keywords
semiconductor
compartments
automatic management
automatically managing
production bays
Prior art date
Application number
NL1015251A
Other languages
Dutch (nl)
Other versions
NL1015251C2 (en
Inventor
Myung-Seung Son
Won-Soo Cho
Jin-Ho Jang
Original Assignee
Hyundai Electronics Ind
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hyundai Electronics Ind filed Critical Hyundai Electronics Ind
Publication of NL1015251A1 publication Critical patent/NL1015251A1/en
Application granted granted Critical
Publication of NL1015251C2 publication Critical patent/NL1015251C2/nl

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM]
    • G05B19/41875—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM] characterised by quality surveillance of production
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/32—Operator till task planning
    • G05B2219/32074—History of operation of each machine
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/32—Operator till task planning
    • G05B2219/32196—Store audit, history of inspection, control and workpiece data into database
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/35—Nc in input of data, input till input file format
    • G05B2219/35291—Record history, log, journal, audit of machine operation
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Power Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Quality & Reliability (AREA)
  • Automation & Control Theory (AREA)
  • General Factory Administration (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Management, Administration, Business Operations System, And Electronic Commerce (AREA)
  • Control By Computers (AREA)
NL1015251A 1999-05-20 2000-05-19 System and method for automatically managing semiconductor production bays. System and method for automatic management of semiconductor compartments. NL1015251A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1019990018261A KR100303322B1 (en) 1999-05-20 1999-05-20 unity automatization system and method for the semi-conductor line management
KR19990018261 1999-05-20

Publications (2)

Publication Number Publication Date
NL1015251A1 true NL1015251A1 (en) 2000-11-21
NL1015251C2 NL1015251C2 (en) 2004-10-19

Family

ID=19586791

Family Applications (1)

Application Number Title Priority Date Filing Date
NL1015251A NL1015251A1 (en) 1999-05-20 2000-05-19 System and method for automatically managing semiconductor production bays. System and method for automatic management of semiconductor compartments.

Country Status (9)

Country Link
JP (1) JP2001035760A (en)
KR (1) KR100303322B1 (en)
CN (1) CN1213367C (en)
DE (1) DE10024735A1 (en)
FR (1) FR2793916B1 (en)
GB (1) GB2352058B (en)
IT (1) IT1317658B1 (en)
NL (1) NL1015251A1 (en)
TW (1) TW482967B (en)

Families Citing this family (16)

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JP2001176763A (en) * 1999-12-14 2001-06-29 Nec Corp Method and system for automatic process for non-product wafer including product wafer, and record medium on which the method is recorded
EP1391796A4 (en) * 2001-05-24 2007-08-08 Yamatake Corp Process controller, product information collector, and process tracer
ITBO20010330A1 (en) * 2001-05-25 2002-11-25 Gd Spa METHOD FOR ESTIMATING THE EFFICIENCY OF AN AUTOMATIC MACHINE
US7123974B1 (en) * 2002-11-19 2006-10-17 Rockwell Software Inc. System and methodology providing audit recording and tracking in real time industrial controller environment
KR100520062B1 (en) * 2003-03-11 2005-10-11 삼성전자주식회사 Auto guided system and control method thereof
US6931303B2 (en) * 2003-10-02 2005-08-16 Taiwan Semiconductor Manufacturing Co., Ltd. Integrated transport system
JP4673548B2 (en) * 2003-11-12 2011-04-20 東京エレクトロン株式会社 Substrate processing apparatus and control method thereof
JP2005294754A (en) * 2004-04-05 2005-10-20 Toshiba Corp Electron beam drawing apparatus, electron beam drawing method, electronic beam drawing program, and method of manufacturing semiconductor device using direct drawing system
JP2006237365A (en) * 2005-02-25 2006-09-07 Agilent Technol Inc Method and program for managing semiconductor characteristics evaluation device
US7206653B1 (en) * 2005-11-29 2007-04-17 Taiwan Semiconductor Manufacturing Co., Ltd. Wafer-based planning methods and systems for batch-based processing tools
KR100755136B1 (en) 2005-12-28 2007-09-04 동부일렉트로닉스 주식회사 Method for analyzing process status of semiconductor products classified by group title in manufacturing execution system
KR101251855B1 (en) * 2010-02-18 2013-04-10 신닛테츠스미킨 카부시키카이샤 Operation guidance setting support device, operation support system, and computer readable recording media recording computer program
TWI571908B (en) 2014-08-15 2017-02-21 力晶科技股份有限公司 Process control method and process control system
CN109240224B (en) * 2018-08-17 2022-04-15 张家港康得新光电材料有限公司 Material receiving method, device, equipment and storage medium
CN110290194A (en) * 2019-06-20 2019-09-27 苏州工业园区恒越自动化科技有限公司 A kind of SECS communication means based on SEMI standard
CN114924536B (en) * 2022-05-26 2024-01-30 江苏泰治科技股份有限公司 Photovoltaic cell production control method

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4974166A (en) * 1987-05-18 1990-11-27 Asyst Technologies, Inc. Processing systems with intelligent article tracking
JP3309997B2 (en) * 1991-09-05 2002-07-29 株式会社日立製作所 Compound processing equipment
JP2724082B2 (en) * 1992-12-18 1998-03-09 シャープ株式会社 Data analysis support system for VLSI process
JPH06203040A (en) * 1992-12-28 1994-07-22 Honda Motor Co Ltd Manufacturing history managing system
JPH06338552A (en) * 1993-05-31 1994-12-06 Sony Corp Semiconductor simulation device
IT1272036B (en) * 1993-11-05 1997-06-11 Marelli Autronica REGISTRATION SYSTEM FOR A PRODUCTION LINE.
US5654896A (en) * 1994-10-31 1997-08-05 Ixys Corp Performance prediction method for semiconductor power modules and ICS
US5591299A (en) * 1995-04-28 1997-01-07 Advanced Micro Devices, Inc. System for providing integrated monitoring, control and diagnostics functions for semiconductor spray process tools
US5659467A (en) * 1996-06-26 1997-08-19 Texas Instruments Incorporated Multiple model supervisor control system and method of operation
JP2800795B2 (en) * 1996-08-05 1998-09-21 日本電気株式会社 Production control method and production control device
KR100211671B1 (en) * 1996-11-11 1999-08-02 윤종용 Management method and system for semiconductor device fabrication equipment
US5862054A (en) * 1997-02-20 1999-01-19 Taiwan Semiconductor Manufacturing Company, Ltd. Process monitoring system for real time statistical process control
KR19980068469A (en) * 1997-02-20 1998-10-15 김광호 Semiconductor facility integrated control system
KR19980074797A (en) * 1997-03-27 1998-11-05 윤종용 Management Method of Equipment for Semiconductor Manufacturing
JPH10335193A (en) * 1997-05-30 1998-12-18 Toshiba Corp Manufacturing process specification generation/operation system, process data generation system, and method for manufacturing semiconductor device
WO2000036479A1 (en) * 1998-12-16 2000-06-22 Speedfam-Ipec Corporation An equipment virtual controller

Also Published As

Publication number Publication date
ITMI20001128A0 (en) 2000-05-22
JP2001035760A (en) 2001-02-09
ITMI20001128A1 (en) 2001-11-22
TW482967B (en) 2002-04-11
DE10024735A1 (en) 2001-02-01
GB2352058A (en) 2001-01-17
GB0012374D0 (en) 2000-07-12
KR100303322B1 (en) 2001-09-26
GB2352058B (en) 2003-08-13
NL1015251C2 (en) 2004-10-19
CN1213367C (en) 2005-08-03
FR2793916B1 (en) 2005-06-03
FR2793916A1 (en) 2000-11-24
IT1317658B1 (en) 2003-07-15
CN1278621A (en) 2001-01-03
KR20000074361A (en) 2000-12-15

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Legal Events

Date Code Title Description
AD1A A request for search or an international type search has been filed
RD2N Patents in respect of which a decision has been taken or a report has been made (novelty report)

Effective date: 20040618

PD2B A search report has been drawn up
V1 Lapsed because of non-payment of the annual fee

Effective date: 20101201