JP2000274394A5 - - Google Patents
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- Publication number
- JP2000274394A5 JP2000274394A5 JP1999078048A JP7804899A JP2000274394A5 JP 2000274394 A5 JP2000274394 A5 JP 2000274394A5 JP 1999078048 A JP1999078048 A JP 1999078048A JP 7804899 A JP7804899 A JP 7804899A JP 2000274394 A5 JP2000274394 A5 JP 2000274394A5
- Authority
- JP
- Japan
- Prior art keywords
- molecular pump
- rotor
- casing
- turbo molecular
- divided
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000470 constituent Substances 0.000 claims 2
- 238000005086 pumping Methods 0.000 claims 2
- 230000008878 coupling Effects 0.000 claims 1
- 238000010168 coupling process Methods 0.000 claims 1
- 238000005859 coupling reaction Methods 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
Priority Applications (8)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP07804899A JP3788558B2 (ja) | 1999-03-23 | 1999-03-23 | ターボ分子ポンプ |
| SG200001614A SG76003A1 (en) | 1999-03-23 | 2000-03-21 | Turbo-molecular pump |
| TW089105105A TW533276B (en) | 1999-03-23 | 2000-03-21 | Turbo-molecular pump |
| US09/531,894 US6343910B1 (en) | 1999-03-23 | 2000-03-21 | Turbo-molecular pump |
| KR1020000014423A KR20000062974A (ko) | 1999-03-23 | 2000-03-22 | 터보 분자 펌프 |
| EP00106339A EP1039137B1 (en) | 1999-03-23 | 2000-03-23 | Turbo-molecular pump |
| DE60039085T DE60039085D1 (de) | 1999-03-23 | 2000-03-23 | Turbomolekularpumpe |
| US10/035,145 US6585480B2 (en) | 1999-03-23 | 2002-01-04 | Turbo-molecular pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP07804899A JP3788558B2 (ja) | 1999-03-23 | 1999-03-23 | ターボ分子ポンプ |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2000274394A JP2000274394A (ja) | 2000-10-03 |
| JP2000274394A5 true JP2000274394A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 2004-12-24 |
| JP3788558B2 JP3788558B2 (ja) | 2006-06-21 |
Family
ID=13650975
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP07804899A Expired - Fee Related JP3788558B2 (ja) | 1999-03-23 | 1999-03-23 | ターボ分子ポンプ |
Country Status (7)
Families Citing this family (32)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3788558B2 (ja) * | 1999-03-23 | 2006-06-21 | 株式会社荏原製作所 | ターボ分子ポンプ |
| US20060014684A1 (en) * | 2000-03-03 | 2006-01-19 | University Technologies International Inc. | Novel uses of EGF |
| JP3777498B2 (ja) * | 2000-06-23 | 2006-05-24 | 株式会社荏原製作所 | ターボ分子ポンプ |
| US6503050B2 (en) * | 2000-12-18 | 2003-01-07 | Applied Materials Inc. | Turbo-molecular pump having enhanced pumping capacity |
| JP2003254285A (ja) * | 2002-02-28 | 2003-09-10 | Boc Edwards Technologies Ltd | ポンプ装置 |
| US6607351B1 (en) * | 2002-03-12 | 2003-08-19 | Varian, Inc. | Vacuum pumps with improved impeller configurations |
| JP4147042B2 (ja) * | 2002-03-12 | 2008-09-10 | エドワーズ株式会社 | 真空ポンプ |
| JP2003269364A (ja) * | 2002-03-12 | 2003-09-25 | Boc Edwards Technologies Ltd | 真空ポンプ |
| FR2845737B1 (fr) * | 2002-10-11 | 2005-01-14 | Cit Alcatel | Pompe turbomoleculaire a jupe composite |
| GB0229355D0 (en) | 2002-12-17 | 2003-01-22 | Boc Group Plc | Vacuum pumping arrangement |
| JP2005098210A (ja) * | 2003-09-25 | 2005-04-14 | Aisin Seiki Co Ltd | 多段ドライポンプ |
| WO2008035113A1 (en) | 2006-09-22 | 2008-03-27 | Edwards Limited | Vacuum pump |
| GB0618745D0 (en) * | 2006-09-22 | 2006-11-01 | Boc Group Plc | Molecular drag pumping mechanism |
| WO2012172851A1 (ja) * | 2011-06-17 | 2012-12-20 | エドワーズ株式会社 | 真空ポンプとそのロータ |
| EP2775148B1 (en) * | 2011-10-31 | 2019-03-27 | Edwards Japan Limited | Stationary member and vacuum pump |
| TWI586893B (zh) * | 2011-11-30 | 2017-06-11 | Edwards Japan Ltd | Vacuum pump |
| JP6353195B2 (ja) * | 2013-05-09 | 2018-07-04 | エドワーズ株式会社 | 固定円板および真空ポンプ |
| JP6435338B2 (ja) | 2013-10-16 | 2018-12-05 | エーエスエムエル ネザーランズ ビー.ブイ. | 放射源、リソグラフィ装置、デバイス製造方法、センサシステム及びセンシング方法 |
| JP6228839B2 (ja) * | 2013-12-26 | 2017-11-08 | エドワーズ株式会社 | 真空排気機構、複合型真空ポンプ、および回転体部品 |
| JP6586275B2 (ja) * | 2015-01-30 | 2019-10-02 | エドワーズ株式会社 | 真空ポンプ |
| JP6433812B2 (ja) * | 2015-02-25 | 2018-12-05 | エドワーズ株式会社 | アダプタ及び真空ポンプ |
| GB2545423B (en) * | 2015-12-14 | 2019-06-26 | Edwards Ltd | Vacuum pump |
| CN106015034A (zh) * | 2016-07-11 | 2016-10-12 | 中国工程物理研究院机械制造工艺研究所 | 一种高压比复合分子泵 |
| GB201715151D0 (en) | 2017-09-20 | 2017-11-01 | Edwards Ltd | A drag pump and a set of vacuum pumps including a drag pump |
| JP7668613B2 (ja) * | 2019-02-04 | 2025-04-25 | エドワーズ株式会社 | 真空ポンプ |
| CN110014217A (zh) * | 2019-05-16 | 2019-07-16 | 江苏博联硕焊接技术有限公司 | 一种扩散焊用夹具及涡轮分子泵转子的扩散焊接方法 |
| JP7357564B2 (ja) * | 2020-02-07 | 2023-10-06 | エドワーズ株式会社 | 真空ポンプ、及び、真空ポンプ構成部品 |
| JP7546410B2 (ja) * | 2020-08-07 | 2024-09-06 | エドワーズ株式会社 | 真空ポンプおよび真空ポンプ用回転翼 |
| CN114673671B (zh) * | 2020-12-25 | 2024-04-02 | 广东美的白色家电技术创新中心有限公司 | 风机和吸尘装置 |
| CN114352553B (zh) * | 2021-12-31 | 2024-01-09 | 北京中科科仪股份有限公司 | 一种旋涡机构及复合分子泵 |
| CN114593075B (zh) * | 2022-03-15 | 2023-03-24 | 北京中科科仪股份有限公司 | 一种分子泵 |
| EP4155550A1 (de) * | 2022-12-30 | 2023-03-29 | Pfeiffer Vacuum Technology AG | Vakuumpumpe und verfahren zum betreiben einer vakuumpumpe |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0129709A3 (en) * | 1983-04-26 | 1985-03-06 | Anelva Corporation | Combinational molecular pump capable of readily being cleaned |
| US4732529A (en) * | 1984-02-29 | 1988-03-22 | Shimadzu Corporation | Turbomolecular pump |
| DE3410905A1 (de) * | 1984-03-24 | 1985-10-03 | Leybold-Heraeus GmbH, 5000 Köln | Einrichtung zur foerderung von gasen bei subatmosphaerischen druecken |
| JPS61247893A (ja) * | 1985-04-26 | 1986-11-05 | Hitachi Ltd | 真空ポンプ |
| JP2556320B2 (ja) | 1987-03-18 | 1996-11-20 | セイコ−精機株式会社 | 真空ポンプ |
| DE4216237A1 (de) * | 1992-05-16 | 1993-11-18 | Leybold Ag | Gasreibungsvakuumpumpe |
| DE4314418A1 (de) * | 1993-05-03 | 1994-11-10 | Leybold Ag | Reibungsvakuumpumpe mit unterschiedlich gestalteten Pumpenabschnitten |
| DE4314419A1 (de) * | 1993-05-03 | 1994-11-10 | Leybold Ag | Reibungsvakuumpumpe mit Lagerabstützung |
| JP3098139B2 (ja) * | 1993-06-17 | 2000-10-16 | 株式会社大阪真空機器製作所 | 複合分子ポンプ |
| DE29516599U1 (de) * | 1995-10-20 | 1995-12-07 | Leybold AG, 50968 Köln | Reibungsvakuumpumpe mit Zwischeneinlaß |
| IT1281025B1 (it) * | 1995-11-10 | 1998-02-11 | Varian Spa | Pompa turbomolecolare. |
| GB9609281D0 (en) * | 1996-05-03 | 1996-07-10 | Boc Group Plc | Improved vacuum pumps |
| DE19632874A1 (de) * | 1996-08-16 | 1998-02-19 | Leybold Vakuum Gmbh | Reibungsvakuumpumpe |
| JP3788558B2 (ja) * | 1999-03-23 | 2006-06-21 | 株式会社荏原製作所 | ターボ分子ポンプ |
-
1999
- 1999-03-23 JP JP07804899A patent/JP3788558B2/ja not_active Expired - Fee Related
-
2000
- 2000-03-21 TW TW089105105A patent/TW533276B/zh not_active IP Right Cessation
- 2000-03-21 SG SG200001614A patent/SG76003A1/en unknown
- 2000-03-21 US US09/531,894 patent/US6343910B1/en not_active Expired - Lifetime
- 2000-03-22 KR KR1020000014423A patent/KR20000062974A/ko not_active Withdrawn
- 2000-03-23 DE DE60039085T patent/DE60039085D1/de not_active Expired - Fee Related
- 2000-03-23 EP EP00106339A patent/EP1039137B1/en not_active Expired - Lifetime
-
2002
- 2002-01-04 US US10/035,145 patent/US6585480B2/en not_active Expired - Lifetime