IE20030185A1 - Vacuum vaporization device - Google Patents
Vacuum vaporization deviceInfo
- Publication number
- IE20030185A1 IE20030185A1 IE20030185A IE20030185A IE20030185A1 IE 20030185 A1 IE20030185 A1 IE 20030185A1 IE 20030185 A IE20030185 A IE 20030185A IE 20030185 A IE20030185 A IE 20030185A IE 20030185 A1 IE20030185 A1 IE 20030185A1
- Authority
- IE
- Ireland
- Prior art keywords
- accordance
- lubricant
- vapour
- target object
- vaporization device
- Prior art date
Links
- 238000009834 vaporization Methods 0.000 title claims description 40
- 230000008016 vaporization Effects 0.000 title claims description 40
- 239000000314 lubricant Substances 0.000 claims abstract description 98
- 238000009826 distribution Methods 0.000 claims abstract description 54
- 238000000034 method Methods 0.000 claims abstract description 25
- 230000008021 deposition Effects 0.000 claims abstract description 23
- 238000000151 deposition Methods 0.000 claims description 24
- 238000003860 storage Methods 0.000 claims description 21
- 238000010438 heat treatment Methods 0.000 claims description 11
- 238000004519 manufacturing process Methods 0.000 claims description 10
- 239000002245 particle Substances 0.000 claims description 9
- 238000003795 desorption Methods 0.000 claims description 6
- 239000010702 perfluoropolyether Substances 0.000 claims description 6
- 239000011248 coating agent Substances 0.000 claims description 4
- 238000000576 coating method Methods 0.000 claims description 4
- 238000001179 sorption measurement Methods 0.000 claims description 4
- 238000013500 data storage Methods 0.000 claims description 3
- 230000008844 regulatory mechanism Effects 0.000 claims description 3
- 239000004605 External Lubricant Substances 0.000 claims description 2
- 239000011796 hollow space material Substances 0.000 claims description 2
- 230000001050 lubricating effect Effects 0.000 claims description 2
- 238000002336 sorption--desorption measurement Methods 0.000 abstract description 2
- 230000005540 biological transmission Effects 0.000 description 7
- 239000000463 material Substances 0.000 description 6
- 230000000694 effects Effects 0.000 description 4
- 239000000758 substrate Substances 0.000 description 3
- 239000000654 additive Substances 0.000 description 2
- 238000009833 condensation Methods 0.000 description 2
- 230000005494 condensation Effects 0.000 description 2
- 238000004821 distillation Methods 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 229910000851 Alloy steel Inorganic materials 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000002156 adsorbate Substances 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000005461 lubrication Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 239000000080 wetting agent Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/60—Deposition of organic layers from vapour phase
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D5/00—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures
- B05D5/08—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures to obtain an anti-friction or anti-adhesive surface
- B05D5/083—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures to obtain an anti-friction or anti-adhesive surface involving the use of fluoropolymers
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
- G11B5/8408—Processes or apparatus specially adapted for manufacturing record carriers protecting the magnetic layer
Landscapes
- Manufacturing Of Magnetic Record Carriers (AREA)
- Physical Vapour Deposition (AREA)
- Magnetic Record Carriers (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE10211573A DE10211573A1 (de) | 2002-03-15 | 2002-03-15 | Vakuumverdampfungseinrichtung |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| IE20030185A1 true IE20030185A1 (en) | 2003-09-17 |
Family
ID=7714121
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| IE20030185A IE20030185A1 (en) | 2002-03-15 | 2003-03-12 | Vacuum vaporization device |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US7155115B2 (enExample) |
| JP (1) | JP4384866B2 (enExample) |
| DE (1) | DE10211573A1 (enExample) |
| GB (1) | GB2389546A (enExample) |
| IE (1) | IE20030185A1 (enExample) |
| SG (1) | SG110028A1 (enExample) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4344631B2 (ja) * | 2004-03-02 | 2009-10-14 | 長州産業株式会社 | 有機物薄膜堆積用分子線源 |
| KR101094001B1 (ko) * | 2005-07-20 | 2011-12-15 | 쵸슈 산교 가부시키가이샤 | 유기물 박막퇴적용 분자빔원 |
| US20080241366A1 (en) * | 2007-03-29 | 2008-10-02 | Intevac Corporation | Apparatus for and method of applying lubricant coatings to magnetic disks via a vapor flow path including a selectively opened and closed shutter |
| US20080241367A1 (en) * | 2007-03-29 | 2008-10-02 | Intevac Corporation | Apparatus for and method of applying lubricant coatings to magnetic disks via a vapor flow path including a selectively opened and closed shutter |
| US20090047417A1 (en) * | 2007-03-30 | 2009-02-19 | Barnes Michael S | Method and system for vapor phase application of lubricant in disk media manufacturing process |
| KR101046520B1 (ko) | 2007-09-07 | 2011-07-04 | 어플라이드 머티어리얼스, 인코포레이티드 | 내부 챔버 상의 부산물 막 증착을 제어하기 위한 ｐｅｃｖｄ 시스템에서의 소스 가스 흐름 경로 제어 |
| KR102144321B1 (ko) | 2011-10-21 | 2020-08-31 | 에바텍 아크티엔게젤샤프트 | 직접 액상 증착 |
| JP2014075166A (ja) | 2012-10-04 | 2014-04-24 | Showa Denko Kk | 磁気記録媒体の製造方法及び装置 |
| JP6118114B2 (ja) | 2013-01-15 | 2017-04-19 | 昭和電工株式会社 | 磁気記録媒体の製造方法及び装置 |
| JP2014146400A (ja) | 2013-01-29 | 2014-08-14 | Showa Denko Kk | 磁気記録媒体の製造方法 |
| JP2014146401A (ja) | 2013-01-29 | 2014-08-14 | Showa Denko Kk | 磁気記録媒体の製造方法及び装置 |
| JP6118130B2 (ja) | 2013-02-25 | 2017-04-19 | 昭和電工株式会社 | 磁気記録媒体の製造方法及び装置 |
| JP6175265B2 (ja) | 2013-04-02 | 2017-08-02 | 昭和電工株式会社 | 磁気記録媒体の製造方法 |
Family Cites Families (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4125086A (en) * | 1977-01-06 | 1978-11-14 | The United States Of America As Represented By The Secretary Of The Army | Nozzle beam type metal vapor source |
| US4412508A (en) * | 1980-12-15 | 1983-11-01 | The United States Of America As Represented By The Secretary Of The Army | Nozzle beam source for vapor deposition |
| US4383645A (en) * | 1980-12-15 | 1983-05-17 | Allied Corporation | Vapor sprayer and process for providing a volatile fluid as a vapor spray |
| US4392453A (en) * | 1981-08-26 | 1983-07-12 | Varian Associates, Inc. | Molecular beam converters for vacuum coating systems |
| CH654596A5 (de) * | 1983-09-05 | 1986-02-28 | Balzers Hochvakuum | Verdampferzelle. |
| FR2562099B1 (fr) * | 1984-03-30 | 1986-06-20 | Commissariat Energie Atomique | Cellule d'evaporation d'un compose liquide adaptee a l'epitaxie par jets moleculaires |
| JPS63310792A (ja) * | 1987-06-12 | 1988-12-19 | Nissin Electric Co Ltd | 分子線エピタキシ−装置の原料補給装置 |
| US5336324A (en) * | 1991-12-04 | 1994-08-09 | Emcore Corporation | Apparatus for depositing a coating on a substrate |
| DE4342574C1 (de) | 1993-12-14 | 1995-04-13 | Hilmar Weinert | Bandbedampfungsanlage |
| US5562965A (en) | 1995-06-07 | 1996-10-08 | Seagate Technologies, Inc. | Vapor lubrication of fractionated lubricant on thin film discs |
| US6011904A (en) * | 1997-06-10 | 2000-01-04 | Board Of Regents, University Of Texas | Molecular beam epitaxy effusion cell |
| GB2342100B (en) | 1997-07-25 | 2002-12-04 | Seagate Technology | Method and apparatus for zone lubrication of magnetic media |
| US6214410B1 (en) | 1997-09-09 | 2001-04-10 | Seagate Technology Llc | Vacuum assisted lubrication of magnetic recording media |
| JPH11172418A (ja) | 1997-12-12 | 1999-06-29 | Ulvac Corp | 成膜装置 |
| US6264751B1 (en) | 1998-05-18 | 2001-07-24 | Hoya Corporation | Mechanism for performing water repellency processing on both sides simultaneously |
| US6183831B1 (en) | 1998-08-20 | 2001-02-06 | Intevac, Inc. | Hard disk vapor lube |
| JP2000068055A (ja) * | 1998-08-26 | 2000-03-03 | Tdk Corp | 有機ｅｌ素子用蒸発源、この有機ｅｌ素子用蒸発源を用いた有機ｅｌ素子の製造装置および製造方法 |
| JP4112702B2 (ja) | 1998-09-11 | 2008-07-02 | 株式会社アルバック | 成膜装置 |
| DE19843818A1 (de) * | 1998-09-24 | 2000-03-30 | Leybold Systems Gmbh | Bedampfungsvorrichtung für Vakuum-Bedampfungsanlagen |
| KR100368319B1 (ko) * | 1998-12-30 | 2003-03-17 | 주식회사 하이닉스반도체 | 액체운송장치 |
| JP2000200781A (ja) * | 1999-01-07 | 2000-07-18 | Ebara Corp | 液体原料気化装置及び方法 |
| JP3782255B2 (ja) | 1999-04-28 | 2006-06-07 | 株式会社アルバック | 有機化合物用の蒸着源、及び蒸着装置 |
| US6596085B1 (en) * | 2000-02-01 | 2003-07-22 | Applied Materials, Inc. | Methods and apparatus for improved vaporization of deposition material in a substrate processing system |
-
2002
- 2002-03-15 DE DE10211573A patent/DE10211573A1/de not_active Withdrawn
- 2002-04-09 US US10/119,541 patent/US7155115B2/en not_active Expired - Fee Related
-
2003
- 2003-03-12 IE IE20030185A patent/IE20030185A1/en not_active IP Right Cessation
- 2003-03-14 SG SG200301288A patent/SG110028A1/en unknown
- 2003-03-14 GB GB0305900A patent/GB2389546A/en not_active Withdrawn
- 2003-03-17 JP JP2003072406A patent/JP4384866B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| US7155115B2 (en) | 2006-12-26 |
| DE10211573A1 (de) | 2003-10-16 |
| GB0305900D0 (en) | 2003-04-23 |
| JP2004002971A (ja) | 2004-01-08 |
| SG110028A1 (en) | 2005-04-28 |
| US20030175422A1 (en) | 2003-09-18 |
| JP4384866B2 (ja) | 2009-12-16 |
| GB2389546A (en) | 2003-12-17 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| IE20030185A1 (en) | Vacuum vaporization device | |
| Alamri | The growth of CdTe thin film by close space sublimation system | |
| JPH0627329B2 (ja) | 導電および誘電性固体薄膜のガスジェット付着方法および装置とそれによって製造される生産物 | |
| CN101681844B (zh) | 在非平面表面上沉积材料的方法 | |
| WO2009034131A3 (en) | Method and arrangement for providing chalcogens | |
| AU2002356523A1 (en) | Method and apparatus application of metallic alloy coatings | |
| US10053765B2 (en) | Apparatus and method for coating with solid-state powder | |
| US6808741B1 (en) | In-line, pass-by method for vapor lubrication | |
| Lackner | Industrially-scaled large-area and high-rate tribological coating by pulsed laser deposition | |
| CN102421930B (zh) | 用于通过高压蒸发进行高速率涂覆的方法和设备 | |
| Paulmier et al. | Tribological behaviour of diamond-like coatings: effect of active gases in atomic and molecular states | |
| CN1141187C (zh) | 区域润滑磁性介质的方法和设备 | |
| JPS6029936A (ja) | 磁気記録媒体およびその製法 | |
| CN107868936A (zh) | 滑动构件及其制造方法 | |
| US8728242B2 (en) | Single disc vapor lubrication | |
| US6613151B1 (en) | Single disc vapor lubrication | |
| US20080050521A1 (en) | Apparatus & method for vapor phase lubrication of recording media with reduced lubricant consumption | |
| JP7162801B2 (ja) | 流体のシール構造、シール部品、シール部品を備えた装置 | |
| JP3758248B2 (ja) | 化合物薄膜の形成方法 | |
| JP2002080212A (ja) | オニオンフラーレンの生成方法 | |
| JP2004127445A (ja) | 両面成膜用スピンコート装置 | |
| JPH0254754A (ja) | 傾斜組成制御膜の形成法 | |
| JP2007036289A (ja) | 真空処理方法 | |
| Azarmi et al. | Numerical Design of an Adaptive-pressure Plasma Coating Process | |
| JP2002030421A (ja) | 超微粒子膜の生成方法および生成装置 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM9A | Patent lapsed through non-payment of renewal fee |