HK1036699A1 - Surface acoustic wave devices and method for manufacturing the same - Google Patents

Surface acoustic wave devices and method for manufacturing the same

Info

Publication number
HK1036699A1
HK1036699A1 HK01107560A HK01107560A HK1036699A1 HK 1036699 A1 HK1036699 A1 HK 1036699A1 HK 01107560 A HK01107560 A HK 01107560A HK 01107560 A HK01107560 A HK 01107560A HK 1036699 A1 HK1036699 A1 HK 1036699A1
Authority
HK
Hong Kong
Prior art keywords
manufacturing
same
acoustic wave
surface acoustic
wave devices
Prior art date
Application number
HK01107560A
Other languages
English (en)
Inventor
Peter Wright
Original Assignee
Thomson Csf
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thomson Csf filed Critical Thomson Csf
Publication of HK1036699A1 publication Critical patent/HK1036699A1/xx

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders; Supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1064—Mounting in enclosures for surface acoustic wave [SAW] devices
    • H03H9/1092—Mounting in enclosures for surface acoustic wave [SAW] devices the enclosure being defined by a cover cap mounted on an element forming part of the surface acoustic wave [SAW] device on the side of the IDT's
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves
    • H03H3/10—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves for obtaining desired frequency or temperature coefficient
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/02574—Characteristics of substrate, e.g. cutting angles of combined substrates, multilayered substrates, piezoelectrical layers on not-piezoelectrical substrate
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02637—Details concerning reflective or coupling arrays
    • H03H9/02779—Continuous surface reflective arrays
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/66—Phase shifters
    • H03H9/68—Phase shifters using surface acoustic waves
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
HK01107560A 1998-12-30 2001-10-30 Surface acoustic wave devices and method for manufacturing the same HK1036699A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR9816661A FR2788176B1 (fr) 1998-12-30 1998-12-30 Dispositif a ondes acoustiques guidees dans une fine couche de materiau piezo-electrique collee par une colle moleculaire sur un substrat porteur et procede de fabrication
PCT/FR1999/003239 WO2000041299A1 (fr) 1998-12-30 1999-12-21 Dispositif a ondes acoustiques guidees dans une fine couche de materiau piezo-electrique collee par une colle moleculaire sur un substrat porteur et procede de fabrication

Publications (1)

Publication Number Publication Date
HK1036699A1 true HK1036699A1 (en) 2002-01-11

Family

ID=9534704

Family Applications (1)

Application Number Title Priority Date Filing Date
HK01107560A HK1036699A1 (en) 1998-12-30 2001-10-30 Surface acoustic wave devices and method for manufacturing the same

Country Status (10)

Country Link
US (1) US6445265B1 (ja)
EP (1) EP1060562B1 (ja)
JP (1) JP2002534886A (ja)
KR (1) KR20010083777A (ja)
CN (1) CN1129230C (ja)
CA (1) CA2321905A1 (ja)
DE (1) DE69923667T2 (ja)
FR (1) FR2788176B1 (ja)
HK (1) HK1036699A1 (ja)
WO (1) WO2000041299A1 (ja)

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US6621379B1 (en) * 2001-11-29 2003-09-16 Clarisay, Incorporated Hermetic package for surface acoustic wave device and method of manufacturing the same
US6767749B2 (en) * 2002-04-22 2004-07-27 The United States Of America As Represented By The Secretary Of The Navy Method for making piezoelectric resonator and surface acoustic wave device using hydrogen implant layer splitting
KR100431767B1 (ko) * 2002-06-08 2004-05-17 엘지이노텍 주식회사 슬릿탄성파를 이용한 압력 센서
JP2004129222A (ja) * 2002-07-31 2004-04-22 Murata Mfg Co Ltd 圧電部品およびその製造方法
JP3892370B2 (ja) * 2002-09-04 2007-03-14 富士通メディアデバイス株式会社 弾性表面波素子、フィルタ装置及びその製造方法
JP2004186868A (ja) * 2002-12-02 2004-07-02 Fujitsu Media Device Kk 弾性表面波素子、それを有する送信フィルタ及び受信フィルタ、並びにそれらを有するデュプレクサ
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JP2004304622A (ja) * 2003-03-31 2004-10-28 Fujitsu Media Device Kk 弾性表面波デバイス及びその製造方法
JP2004336503A (ja) 2003-05-09 2004-11-25 Fujitsu Media Device Kk 弾性表面波素子及びその製造方法
JP3774782B2 (ja) * 2003-05-14 2006-05-17 富士通メディアデバイス株式会社 弾性表面波素子の製造方法
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JP4743258B2 (ja) * 2008-10-31 2011-08-10 株式会社村田製作所 圧電デバイスの製造方法
JP4821834B2 (ja) * 2008-10-31 2011-11-24 株式会社村田製作所 圧電性複合基板の製造方法
WO2010067794A1 (ja) * 2008-12-10 2010-06-17 株式会社村田製作所 圧電性複合基板の製造方法、および圧電素子の製造方法
JP2010161671A (ja) * 2009-01-09 2010-07-22 Murata Mfg Co Ltd 圧電デバイスの製造方法
JP5277975B2 (ja) * 2009-01-14 2013-08-28 株式会社村田製作所 複合基板の製造方法
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JP2010166371A (ja) * 2009-01-16 2010-07-29 Murata Mfg Co Ltd 圧電デバイスの製造方法
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JP5152410B2 (ja) 2009-06-09 2013-02-27 株式会社村田製作所 圧電デバイスの製造方法
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CN102577120B (zh) * 2009-10-13 2015-04-01 株式会社村田制作所 声表面波装置
JP5569537B2 (ja) * 2009-11-26 2014-08-13 株式会社村田製作所 圧電デバイスの製造方法
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Also Published As

Publication number Publication date
CN1294780A (zh) 2001-05-09
DE69923667D1 (de) 2005-03-17
EP1060562A1 (fr) 2000-12-20
FR2788176A1 (fr) 2000-07-07
WO2000041299A1 (fr) 2000-07-13
CA2321905A1 (fr) 2000-07-13
JP2002534886A (ja) 2002-10-15
KR20010083777A (ko) 2001-09-01
CN1129230C (zh) 2003-11-26
US6445265B1 (en) 2002-09-03
FR2788176B1 (fr) 2001-05-25
DE69923667T2 (de) 2006-04-06
EP1060562B1 (fr) 2005-02-09

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Effective date: 20091221