GB2174509A - Controlling velocity of particles - Google Patents

Controlling velocity of particles Download PDF

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Publication number
GB2174509A
GB2174509A GB08607604A GB8607604A GB2174509A GB 2174509 A GB2174509 A GB 2174509A GB 08607604 A GB08607604 A GB 08607604A GB 8607604 A GB8607604 A GB 8607604A GB 2174509 A GB2174509 A GB 2174509A
Authority
GB
United Kingdom
Prior art keywords
fine particles
pressure
nozzle
ratio
velocity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GB08607604A
Other languages
English (en)
Other versions
GB8607604D0 (en
Inventor
Kenji Ando
Yuji Chiba
Tatsuo Masaki
Masao Sugata
Kuniji Osabe
Osamu Kamiya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP60059619A external-priority patent/JPS61218810A/ja
Priority claimed from JP8540085A external-priority patent/JPS61220763A/ja
Priority claimed from JP8540285A external-priority patent/JPS61220765A/ja
Priority claimed from JP8540185A external-priority patent/JPS61220764A/ja
Application filed by Canon Inc filed Critical Canon Inc
Publication of GB8607604D0 publication Critical patent/GB8607604D0/en
Publication of GB2174509A publication Critical patent/GB2174509A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45563Gas nozzles
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/228Gas flow assisted PVD deposition
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45561Gas plumbing upstream of the reaction chamber
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45582Expansion of gas before it reaches the substrate
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45585Compression of gas before it reaches the substrate
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15DFLUID DYNAMICS, i.e. METHODS OR MEANS FOR INFLUENCING THE FLOW OF GASES OR LIQUIDS
    • F15D1/00Influencing flow of fluids

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Engineering & Computer Science (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Coating Apparatus (AREA)
GB08607604A 1985-03-26 1986-03-26 Controlling velocity of particles Withdrawn GB2174509A (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP60059619A JPS61218810A (ja) 1985-03-26 1985-03-26 微粒子流の流れ制御装置
JP8540085A JPS61220763A (ja) 1985-04-23 1985-04-23 微粒子流の速度調整方法及びそれを用いた微粒子の堆積方法
JP8540285A JPS61220765A (ja) 1985-04-23 1985-04-23 微粒子流の速度制御方法
JP8540185A JPS61220764A (ja) 1985-04-23 1985-04-23 微粒子流の速度制御方法

Publications (2)

Publication Number Publication Date
GB8607604D0 GB8607604D0 (en) 1986-04-30
GB2174509A true GB2174509A (en) 1986-11-05

Family

ID=27463793

Family Applications (1)

Application Number Title Priority Date Filing Date
GB08607604A Withdrawn GB2174509A (en) 1985-03-26 1986-03-26 Controlling velocity of particles

Country Status (3)

Country Link
DE (1) DE3610296A1 (enrdf_load_stackoverflow)
FR (1) FR2579486B1 (enrdf_load_stackoverflow)
GB (1) GB2174509A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2175708B (en) * 1985-05-11 1989-07-05 Canon Kk Reaction apparatus
WO1996004409A1 (en) * 1994-08-01 1996-02-15 Franz Hehmann Selected processing for non-equilibrium light alloys and products
WO1999054515A1 (en) * 1998-04-17 1999-10-28 Barrick Gold Corporation Nozzle for low pressure flash tanks for ore slurry

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5043548A (en) * 1989-02-08 1991-08-27 General Electric Company Axial flow laser plasma spraying

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1057120A (en) * 1964-12-09 1967-02-01 Siemens Ag An arrangement for setting and keeping constant the mass flow of gases
GB1166495A (en) * 1965-12-14 1969-10-08 Siderurgie Fse Inst Rech Device for Regulating the Rate of Flow of Gas
US3507294A (en) * 1966-12-14 1970-04-21 Philco Ford Corp Fluid flow control apparatus
US3556409A (en) * 1967-11-30 1971-01-19 Aga Ab Fluid control device
GB1336253A (en) * 1971-03-11 1973-11-07 Gaz De France Pressure regulating and reducing gas-flow meter for industrial installations
GB1342994A (en) * 1972-07-24 1974-01-10 Clarke Chapman John Thompson L Equalising flow in pipes
US3904505A (en) * 1970-03-20 1975-09-09 Space Sciences Inc Apparatus for film deposition
GB2007388A (en) * 1977-10-14 1979-05-16 Northern Eng Ind Proportioning flow in pipes
EP0064288A1 (en) * 1981-05-04 1982-11-10 Optical Coating Laboratory, Inc. Method and apparatus for the production and utilization of activated molecular beams

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE811900C (de) * 1948-10-02 1951-08-23 Metallgesellschaft Ag Verfahren zur Erleichterung der Kaltverformung von hochlegierten Staehlen
NL100168C (enrdf_load_stackoverflow) * 1955-05-02 1900-01-01
FR1518843A (fr) * 1967-02-13 1968-03-29 Radiotechnique Coprim Rtc Dispositif pour le dépôt de couches minces sur des supports semi-conducteurs
FR2108856A1 (fr) * 1970-10-13 1972-05-26 Siderurgie Fse Inst Rech Procede pour l'introduction de combustibles auxilliaires dans un haut fourneau et tuyere pour la mise en oeuvre de ce procede
FR2288282A1 (fr) * 1974-10-15 1976-05-14 Siderurgie Fse Inst Rech Tuyere pour l'injection de combustible auxiliaire dans les fours a cuve
DE2843408B1 (de) * 1978-10-05 1980-02-28 Prof Durst Franz J Verfahren zum Herstellen feinster Fluessigkeitstropfen
US4416421A (en) * 1980-10-09 1983-11-22 Browning Engineering Corporation Highly concentrated supersonic liquified material flame spray method and apparatus
JPS6015698B2 (ja) * 1981-09-30 1985-04-20 日本真空技術株式会社 ノズル付蒸発器
JPS5956504A (ja) * 1982-09-27 1984-04-02 Kobe Steel Ltd 溶鉱炉送風羽口

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1057120A (en) * 1964-12-09 1967-02-01 Siemens Ag An arrangement for setting and keeping constant the mass flow of gases
GB1166495A (en) * 1965-12-14 1969-10-08 Siderurgie Fse Inst Rech Device for Regulating the Rate of Flow of Gas
US3507294A (en) * 1966-12-14 1970-04-21 Philco Ford Corp Fluid flow control apparatus
US3556409A (en) * 1967-11-30 1971-01-19 Aga Ab Fluid control device
US3904505A (en) * 1970-03-20 1975-09-09 Space Sciences Inc Apparatus for film deposition
GB1336253A (en) * 1971-03-11 1973-11-07 Gaz De France Pressure regulating and reducing gas-flow meter for industrial installations
GB1342994A (en) * 1972-07-24 1974-01-10 Clarke Chapman John Thompson L Equalising flow in pipes
GB2007388A (en) * 1977-10-14 1979-05-16 Northern Eng Ind Proportioning flow in pipes
EP0064288A1 (en) * 1981-05-04 1982-11-10 Optical Coating Laboratory, Inc. Method and apparatus for the production and utilization of activated molecular beams

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2175708B (en) * 1985-05-11 1989-07-05 Canon Kk Reaction apparatus
WO1996004409A1 (en) * 1994-08-01 1996-02-15 Franz Hehmann Selected processing for non-equilibrium light alloys and products
US6908516B2 (en) 1994-08-01 2005-06-21 Franz Hehmann Selected processing for non-equilibrium light alloys and products
WO1999054515A1 (en) * 1998-04-17 1999-10-28 Barrick Gold Corporation Nozzle for low pressure flash tanks for ore slurry
US6110255A (en) * 1998-04-17 2000-08-29 Barrick Gold Corporation Nozzle for low pressure flash tanks for ore slurry
US6482250B1 (en) 1998-04-17 2002-11-19 Barrick Gold Corporation Nozzle for low pressure flash tanks for ore slurry

Also Published As

Publication number Publication date
DE3610296C2 (enrdf_load_stackoverflow) 1991-05-02
GB8607604D0 (en) 1986-04-30
FR2579486B1 (fr) 1989-05-26
DE3610296A1 (de) 1986-10-02
FR2579486A1 (fr) 1986-10-03

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Legal Events

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WAP Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1)