FR2945379B1 - Composant miniature hyperfrequences pour montage en surface - Google Patents

Composant miniature hyperfrequences pour montage en surface

Info

Publication number
FR2945379B1
FR2945379B1 FR0902160A FR0902160A FR2945379B1 FR 2945379 B1 FR2945379 B1 FR 2945379B1 FR 0902160 A FR0902160 A FR 0902160A FR 0902160 A FR0902160 A FR 0902160A FR 2945379 B1 FR2945379 B1 FR 2945379B1
Authority
FR
France
Prior art keywords
metallized
microwave
microwave access
contactless
layers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR0902160A
Other languages
English (en)
Other versions
FR2945379A1 (fr
Inventor
Pierre Franck Alleaume
Claude Toussain
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
United Monolithic Semiconductors SAS
Original Assignee
United Monolithic Semiconductors SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United Monolithic Semiconductors SAS filed Critical United Monolithic Semiconductors SAS
Priority to FR0902160A priority Critical patent/FR2945379B1/fr
Priority to PCT/EP2010/055359 priority patent/WO2010127949A1/fr
Priority to EP10714320A priority patent/EP2430701A1/fr
Priority to CN201080024568.7A priority patent/CN102782934B/zh
Priority to US13/319,078 priority patent/US20120248587A1/en
Priority to JP2012508979A priority patent/JP5707657B2/ja
Publication of FR2945379A1 publication Critical patent/FR2945379A1/fr
Application granted granted Critical
Publication of FR2945379B1 publication Critical patent/FR2945379B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P5/00—Coupling devices of the waveguide type
    • H01P5/02—Coupling devices of the waveguide type with invariable factor of coupling
    • H01P5/022—Transitions between lines of the same kind and shape, but with different dimensions
    • H01P5/028—Transitions between lines of the same kind and shape, but with different dimensions between strip lines
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/02—Containers; Seals
    • H01L23/04—Containers; Seals characterised by the shape of the container or parts, e.g. caps, walls
    • H01L23/043—Containers; Seals characterised by the shape of the container or parts, e.g. caps, walls the container being a hollow construction and having a conductive base as a mounting as well as a lead for the semiconductor body
    • H01L23/047—Containers; Seals characterised by the shape of the container or parts, e.g. caps, walls the container being a hollow construction and having a conductive base as a mounting as well as a lead for the semiconductor body the other leads being parallel to the base
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P5/00—Coupling devices of the waveguide type
    • H01P5/08—Coupling devices of the waveguide type for linking dissimilar lines or devices
    • H01P5/10—Coupling devices of the waveguide type for linking dissimilar lines or devices for coupling balanced with unbalanced lines or devices
    • H01P5/107—Hollow-waveguide/strip-line transitions
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/0213—Electrical arrangements not otherwise provided for
    • H05K1/0237—High frequency adaptations
    • H05K1/0243—Printed circuits associated with mounted high frequency components
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/02—Bonding areas; Manufacturing methods related thereto
    • H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L2224/04042—Bonding areas specifically adapted for wire connectors, e.g. wirebond pads
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10—Bump connectors; Manufacturing methods related thereto
    • H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • H01L2224/161—Disposition
    • H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • H01L2224/321—Disposition
    • H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/32245—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805—Shape
    • H01L2224/4809—Loop shape
    • H01L2224/48091—Arched
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481—Disposition
    • H01L2224/48135—Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
    • H01L2224/48137—Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being arranged next to each other, e.g. on a common substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481—Disposition
    • H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48245—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • H01L2224/48247—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
    • H01L2224/491—Disposition
    • H01L2224/4912—Layout
    • H01L2224/49171—Fan-out arrangements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732—Location after the connecting process
    • H01L2224/73251—Location after the connecting process on different surfaces
    • H01L2224/73265—Layer and wire connectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/00011—Not relevant to the scope of the group, the symbol of which is combined with the symbol of this group
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/00014—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10—Details of semiconductor or other solid state devices to be connected
    • H01L2924/11—Device type
    • H01L2924/14—Integrated circuits
    • H01L2924/141—Analog devices
    • H01L2924/1423—Monolithic Microwave Integrated Circuit [MMIC]
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/03—Conductive materials
    • H05K2201/0332—Structure of the conductor
    • H05K2201/0364—Conductor shape
    • H05K2201/037—Hollow conductors, i.e. conductors partially or completely surrounding a void, e.g. hollow waveguides
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/09—Shape and layout
    • H05K2201/09009—Substrate related
    • H05K2201/09072—Hole or recess under component or special relationship between hole and component
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/10—Details of components or other objects attached to or integrated in a printed circuit board
    • H05K2201/10613—Details of electrical connections of non-printed components, e.g. special leads
    • H05K2201/10621—Components characterised by their electrical contacts
    • H05K2201/10727—Leadless chip carrier [LCC], e.g. chip-modules for cards

Abstract

L'invention concerne un composant miniature hyperfréquences comportant : - une puce hyperfréquence MMIC (100) encapsulée dans un boîtier individuel (222) pour montage en surface capable de fonctionner à une fréquence F0 très supérieures à 45GHz; - au moins un accès hyperfréquence sans contact (124), par couplage électromagnétique assurant la transmission de signaux de couplage à une fréquence de travail F0, Le composant comporte un circuit intégré multicouches passif (220) ayant des couches métallisées et des couches en matériau diélectrique (140, 142, 144), une face supérieure (224), une face inférieure (225) métallisée, la face inférieure métallisée comportant, du côté de l'accès hyperfréquence sans contact (124), une ouverture (236) dans la métallisation pour le passage des ondes électromagnétiques de couplage par l'accès hyperfréquence sans contact et, entre deux couches de matériau diélectrique, une couche métallisée (146) ayant au moins un conducteur électrique (148) de couplage électromagnétique connecté aux éléments électroniques de la puce (100), ledit conducteur électrique de couplage (148) étant situé au niveau de l'accès hyperfréquence sans contact (124) pour assurer la transmission de signaux hyperfréquences par couplage électromagnétique à la fréquence de travail F0. Applications : radars automobiles, communications à haut débit.
FR0902160A 2009-05-05 2009-05-05 Composant miniature hyperfrequences pour montage en surface Active FR2945379B1 (fr)

Priority Applications (6)

Application Number Priority Date Filing Date Title
FR0902160A FR2945379B1 (fr) 2009-05-05 2009-05-05 Composant miniature hyperfrequences pour montage en surface
PCT/EP2010/055359 WO2010127949A1 (fr) 2009-05-05 2010-04-22 Composant miniature hyperfrequences pour montage en surface
EP10714320A EP2430701A1 (fr) 2009-05-05 2010-04-22 Composant miniature hyperfrequences pour montage en surface
CN201080024568.7A CN102782934B (zh) 2009-05-05 2010-04-22 用于表面安装的微型微波部件
US13/319,078 US20120248587A1 (en) 2009-05-05 2010-04-22 Miniature Microwave Component for Surface-Mounting
JP2012508979A JP5707657B2 (ja) 2009-05-05 2010-04-22 表面装着用の小型マイクロ波部品

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0902160A FR2945379B1 (fr) 2009-05-05 2009-05-05 Composant miniature hyperfrequences pour montage en surface

Publications (2)

Publication Number Publication Date
FR2945379A1 FR2945379A1 (fr) 2010-11-12
FR2945379B1 true FR2945379B1 (fr) 2011-07-22

Family

ID=41509761

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0902160A Active FR2945379B1 (fr) 2009-05-05 2009-05-05 Composant miniature hyperfrequences pour montage en surface

Country Status (6)

Country Link
US (1) US20120248587A1 (fr)
EP (1) EP2430701A1 (fr)
JP (1) JP5707657B2 (fr)
CN (1) CN102782934B (fr)
FR (1) FR2945379B1 (fr)
WO (1) WO2010127949A1 (fr)

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DE102010063167B4 (de) * 2010-12-15 2022-02-24 Endress+Hauser SE+Co. KG Mit hochfrequenten Mikrowellen arbeitendes Füllstandsmessgerät
US8912090B2 (en) 2012-10-08 2014-12-16 Marki Microwave, Inc. Mixer fabrication technique and system using the same
WO2014128761A1 (fr) * 2013-02-22 2014-08-28 Nec Corporation Transition à large bande entre une ligne de transmission planaire et un guide d'ondes
US9356332B2 (en) * 2013-04-29 2016-05-31 Infineon Technologies Ag Integrated-circuit module with waveguide transition element
JP2014217014A (ja) * 2013-04-30 2014-11-17 株式会社東芝 無線装置
CN103413803B (zh) * 2013-07-10 2016-01-20 中国电子科技集团公司第四十一研究所 一种混合集成电路及其制造方法
KR20150075347A (ko) * 2013-12-25 2015-07-03 가부시끼가이샤 도시바 반도체 패키지, 반도체 모듈 및 반도체 디바이스
JP2015149650A (ja) 2014-02-07 2015-08-20 株式会社東芝 ミリ波帯用半導体パッケージおよびミリ波帯用半導体装置
JP2015149649A (ja) 2014-02-07 2015-08-20 株式会社東芝 ミリ波帯用半導体パッケージおよびミリ波帯用半導体装置
JP6269127B2 (ja) * 2014-02-07 2018-01-31 富士通株式会社 高周波モジュール及びその製造方法
JP6372113B2 (ja) * 2014-03-17 2018-08-15 富士通株式会社 高周波モジュール及びその製造方法
US9583811B2 (en) * 2014-08-07 2017-02-28 Infineon Technologies Ag Transition between a plastic waveguide and a semiconductor chip, where the semiconductor chip is embedded and encapsulated within a mold compound
JP2019047141A (ja) 2016-03-29 2019-03-22 日本電産エレシス株式会社 マイクロ波ｉｃ導波路装置モジュール、レーダ装置およびレーダシステム
JP2019054315A (ja) 2016-04-28 2019-04-04 日本電産エレシス株式会社 実装基板、導波路モジュール、集積回路実装基板、マイクロ波モジュール、レーダ装置およびレーダシステム
CN106129029A (zh) * 2016-07-14 2016-11-16 中国电子科技集团公司第五十五研究所 应用于Ku波段的陶瓷四边扁平无引脚型外壳
JP6602324B2 (ja) 2017-01-17 2019-11-06 株式会社東芝 無線装置
JP6602326B2 (ja) 2017-02-06 2019-11-06 株式会社東芝 無線装置
JP2019012999A (ja) * 2017-06-30 2019-01-24 日本電産株式会社 導波路装置モジュール、マイクロ波モジュール、レーダ装置およびレーダシステム
WO2020241831A1 (fr) * 2019-05-31 2020-12-03 京セラ株式会社 Carte imprimée et procédé de fabrication d'une carte imprimée
CN113540768B (zh) * 2020-04-20 2024-04-05 成都恪赛科技有限公司 一种应用于微波系统的连接结构
WO2022005542A1 (fr) * 2020-06-29 2022-01-06 Hrl Laboratories, Llc Procédé et appareil permettant d'augmenter une portée de radar
RU2749572C1 (ru) * 2020-09-14 2021-06-15 Акционерное общество "Научно-производственное предприятие "Исток" имени А.И. Шокина" (АО "НПП "Исток" им. Шокина") Корпус СВЧ для изделия полупроводниковой электронной техники СВЧ
EP4016620A1 (fr) * 2020-12-16 2022-06-22 Nxp B.V. Package avec une puce de circuit intégré et un dispositif d'excitation de guide d'ondes
CN114050387B (zh) * 2021-10-30 2022-10-28 西南电子技术研究所（中国电子科技集团公司第十研究所） 微系统电磁场微调介质腔体结构

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Also Published As

Publication number Publication date
CN102782934B (zh) 2015-05-20
JP5707657B2 (ja) 2015-04-30
FR2945379A1 (fr) 2010-11-12
US20120248587A1 (en) 2012-10-04
EP2430701A1 (fr) 2012-03-21
CN102782934A (zh) 2012-11-14
WO2010127949A1 (fr) 2010-11-11
JP2012526434A (ja) 2012-10-25

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