FR2789516B1 - Procede et dispositif pour la detection de defauts dans des microstructures - Google Patents

Procede et dispositif pour la detection de defauts dans des microstructures

Info

Publication number
FR2789516B1
FR2789516B1 FR0000171A FR0000171A FR2789516B1 FR 2789516 B1 FR2789516 B1 FR 2789516B1 FR 0000171 A FR0000171 A FR 0000171A FR 0000171 A FR0000171 A FR 0000171A FR 2789516 B1 FR2789516 B1 FR 2789516B1
Authority
FR
France
Prior art keywords
microstructures
detecting defects
defects
detecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0000171A
Other languages
English (en)
Other versions
FR2789516A1 (fr
Inventor
Chiwoei Wayne Lo
Pierre Perez
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Schlumberger Technologies Inc
Original Assignee
Schlumberger Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Schlumberger Technologies Inc filed Critical Schlumberger Technologies Inc
Publication of FR2789516A1 publication Critical patent/FR2789516A1/fr
Application granted granted Critical
Publication of FR2789516B1 publication Critical patent/FR2789516B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/266—Measurement of magnetic- or electric fields in the object; Lorentzmicroscopy
    • H01J37/268—Measurement of magnetic- or electric fields in the object; Lorentzmicroscopy with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/004—Charge control of objects or beams
    • H01J2237/0048—Charging arrangements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/28—Scanning microscopes
    • H01J2237/2809—Scanning microscopes characterised by the imaging problems involved
    • H01J2237/281—Bottom of trenches or holes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/28—Scanning microscopes
    • H01J2237/2813—Scanning microscopes characterised by the application
    • H01J2237/2817—Pattern inspection
FR0000171A 1999-01-08 2000-01-07 Procede et dispositif pour la detection de defauts dans des microstructures Expired - Fee Related FR2789516B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/226,962 US6232787B1 (en) 1999-01-08 1999-01-08 Microstructure defect detection

Publications (2)

Publication Number Publication Date
FR2789516A1 FR2789516A1 (fr) 2000-08-11
FR2789516B1 true FR2789516B1 (fr) 2008-08-08

Family

ID=22851192

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0000171A Expired - Fee Related FR2789516B1 (fr) 1999-01-08 2000-01-07 Procede et dispositif pour la detection de defauts dans des microstructures

Country Status (6)

Country Link
US (1) US6232787B1 (fr)
JP (2) JP5336683B2 (fr)
KR (1) KR100707542B1 (fr)
DE (1) DE10000361A1 (fr)
FR (1) FR2789516B1 (fr)
TW (1) TW460999B (fr)

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Also Published As

Publication number Publication date
KR20000053398A (ko) 2000-08-25
KR100707542B1 (ko) 2007-04-13
JP2013243368A (ja) 2013-12-05
DE10000361A1 (de) 2000-07-13
JP2000208579A (ja) 2000-07-28
JP5619959B2 (ja) 2014-11-05
JP5336683B2 (ja) 2013-11-06
US6232787B1 (en) 2001-05-15
FR2789516A1 (fr) 2000-08-11
TW460999B (en) 2001-10-21

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