FR2764734B1 - Procede de formation de plots de contact d'un dispositif a semiconducteur - Google Patents

Procede de formation de plots de contact d'un dispositif a semiconducteur

Info

Publication number
FR2764734B1
FR2764734B1 FR9807293A FR9807293A FR2764734B1 FR 2764734 B1 FR2764734 B1 FR 2764734B1 FR 9807293 A FR9807293 A FR 9807293A FR 9807293 A FR9807293 A FR 9807293A FR 2764734 B1 FR2764734 B1 FR 2764734B1
Authority
FR
France
Prior art keywords
semiconductor device
contact plates
forming contact
forming
plates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
FR9807293A
Other languages
English (en)
Other versions
FR2764734A1 (fr
Inventor
Un Yoon Bo
Kwon Jeong In
Seong Lee Won
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Samsung Electronics Co Ltd
Original Assignee
Samsung Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Samsung Electronics Co Ltd filed Critical Samsung Electronics Co Ltd
Publication of FR2764734A1 publication Critical patent/FR2764734A1/fr
Application granted granted Critical
Publication of FR2764734B1 publication Critical patent/FR2764734B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
    • H01L21/7684—Smoothing; Planarisation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
    • H01L21/76819—Smoothing of the dielectric
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3105—After-treatment
    • H01L21/31051—Planarisation of the insulating layers
    • H01L21/31053—Planarisation of the insulating layers involving a dielectric removal step
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
    • H01L21/321—After treatment
    • H01L21/32115—Planarisation
    • H01L21/3212—Planarisation by chemical mechanical polishing [CMP]
FR9807293A 1997-06-11 1998-06-10 Procede de formation de plots de contact d'un dispositif a semiconducteur Expired - Lifetime FR2764734B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR19970024146 1997-06-11
KR1019980014850A KR100266749B1 (ko) 1997-06-11 1998-04-25 반도체 장치의 콘택 플러그 형성 방법

Publications (2)

Publication Number Publication Date
FR2764734A1 FR2764734A1 (fr) 1998-12-18
FR2764734B1 true FR2764734B1 (fr) 2002-11-08

Family

ID=26632828

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9807293A Expired - Lifetime FR2764734B1 (fr) 1997-06-11 1998-06-10 Procede de formation de plots de contact d'un dispositif a semiconducteur

Country Status (9)

Country Link
US (1) US6121146A (fr)
JP (1) JPH1131745A (fr)
KR (1) KR100266749B1 (fr)
CN (1) CN1127123C (fr)
DE (1) DE19826031C2 (fr)
FR (1) FR2764734B1 (fr)
GB (1) GB2326281B (fr)
NL (1) NL1009351C2 (fr)
TW (1) TW396576B (fr)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6727170B2 (en) * 1998-02-16 2004-04-27 Renesas Technology Corp. Semiconductor device having an improved interlayer conductor connections and a manufacturing method thereof
JPH11233621A (ja) * 1998-02-16 1999-08-27 Mitsubishi Electric Corp 半導体装置及びその製造方法
US6218306B1 (en) 1998-04-22 2001-04-17 Applied Materials, Inc. Method of chemical mechanical polishing a metal layer
KR100268459B1 (ko) * 1998-05-07 2000-10-16 윤종용 반도체 장치의 콘택 플러그 형성 방법
JP2000294640A (ja) 1999-04-09 2000-10-20 Oki Electric Ind Co Ltd 半導体装置の製造方法
FR2795236B1 (fr) * 1999-06-15 2002-06-28 Commissariat Energie Atomique Procede de realisation d'interconnexions notamment en cuivre pour dispositifs micro-electroniques
US6225226B1 (en) * 1999-12-13 2001-05-01 Taiwan Semiconductor Manufacturing Company Method for processing and integrating copper interconnects
US6420267B1 (en) * 2000-04-18 2002-07-16 Infineon Technologies Ag Method for forming an integrated barrier/plug for a stacked capacitor
KR100373356B1 (ko) * 2000-06-30 2003-02-25 주식회사 하이닉스반도체 반도체장치 제조방법
KR100399064B1 (ko) * 2000-06-30 2003-09-26 주식회사 하이닉스반도체 반도체 소자 제조방법
DE10208714B4 (de) 2002-02-28 2006-08-31 Infineon Technologies Ag Herstellungsverfahren für einen Kontakt für eine integrierte Schaltung
JP4034115B2 (ja) * 2002-05-14 2008-01-16 富士通株式会社 半導体装置の製造方法
TW519858B (en) * 2002-05-20 2003-02-01 Via Tech Inc Printing method for manufacturing through hole and circuit of circuit board
JP3918933B2 (ja) * 2002-12-06 2007-05-23 Ｊｓｒ株式会社 化学機械研磨ストッパー、その製造方法および化学機械研磨方法
CN1315189C (zh) * 2003-05-06 2007-05-09 旺宏电子股份有限公司 字符线交接点布局结构
US6909131B2 (en) * 2003-05-30 2005-06-21 Macronix International Co., Ltd. Word line strap layout structure
DE102006030265B4 (de) * 2006-06-30 2014-01-30 Globalfoundries Inc. Verfahren zum Verbessern der Planarität einer Oberflächentopographie in einer Mikrostruktur
KR100955838B1 (ko) 2007-12-28 2010-05-06 주식회사 동부하이텍 반도체 소자 및 그 배선 제조 방법
DE102010028460B4 (de) 2010-04-30 2014-01-23 Globalfoundries Dresden Module One Limited Liability Company & Co. Kg Verfahren zum Herstellen eines Halbleiterbauelements mit einer reduzierten Defektrate in Kontakten, das Austauschgateelektrodenstrukturen unter Anwendung einer Zwischendeckschicht aufweist
CN103160781B (zh) * 2011-12-16 2015-07-01 中国科学院兰州化学物理研究所 模具钢表面多层梯度纳米复合类金刚石薄膜的制备方法
CN104233222B (zh) * 2014-09-26 2016-06-29 厦门大学 一种直接在Si衬底上生长六方氮化硼二维薄膜的方法
KR102406583B1 (ko) * 2017-07-12 2022-06-09 삼성전자주식회사 반도체 장치

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1989000503A1 (fr) * 1987-07-21 1989-01-26 Storage Technology Corporation Commande des fonctions d'imprimantes par identification de bande
JPH0682660B2 (ja) * 1987-08-17 1994-10-19 インターナシヨナル・ビジネス・マシーンズ・コーポレーシヨン 導電性スタツドを形成する方法
US4879257A (en) * 1987-11-18 1989-11-07 Lsi Logic Corporation Planarization process
US5094972A (en) * 1990-06-14 1992-03-10 National Semiconductor Corp. Means of planarizing integrated circuits with fully recessed isolation dielectric
US5124780A (en) * 1991-06-10 1992-06-23 Micron Technology, Inc. Conductive contact plug and a method of forming a conductive contact plug in an integrated circuit using laser planarization
US5246884A (en) * 1991-10-30 1993-09-21 International Business Machines Corporation Cvd diamond or diamond-like carbon for chemical-mechanical polish etch stop
US5244534A (en) * 1992-01-24 1993-09-14 Micron Technology, Inc. Two-step chemical mechanical polishing process for producing flush and protruding tungsten plugs
DE4311484A1 (de) * 1992-04-09 1993-10-14 Micron Technology Inc Verfahren zur Bildung einer leitfähigen Struktur auf der Oberfläche eines Substrats
US5356513A (en) * 1993-04-22 1994-10-18 International Business Machines Corporation Polishstop planarization method and structure
EP0660393B1 (fr) * 1993-12-23 2000-05-10 STMicroelectronics, Inc. Méthode et structure de diélectrique pour faciliter la surgravure de métal sans endommager le diélectrique intermédiaire
JPH07221292A (ja) * 1994-02-04 1995-08-18 Citizen Watch Co Ltd 半導体装置およびその製造方法
US5573633A (en) * 1995-11-14 1996-11-12 International Business Machines Corporation Method of chemically mechanically polishing an electronic component
US5885899A (en) * 1995-11-14 1999-03-23 International Business Machines Corporation Method of chemically mechanically polishing an electronic component using a non-selective ammonium hydroxide slurry
US5773314A (en) * 1997-04-25 1998-06-30 Motorola, Inc. Plug protection process for use in the manufacture of embedded dynamic random access memory (DRAM) cells
US5915189A (en) * 1997-08-22 1999-06-22 Samsung Electronics Co., Ltd. Manufacturing method for semiconductor memory device having a storage node with surface irregularities

Also Published As

Publication number Publication date
NL1009351C2 (nl) 2000-02-23
JPH1131745A (ja) 1999-02-02
FR2764734A1 (fr) 1998-12-18
DE19826031A1 (de) 1998-12-17
GB2326281B (en) 2000-07-12
US6121146A (en) 2000-09-19
CN1127123C (zh) 2003-11-05
DE19826031C2 (de) 2002-12-05
KR100266749B1 (ko) 2000-09-15
NL1009351A1 (nl) 1998-12-14
GB2326281A (en) 1998-12-16
GB9812552D0 (en) 1998-08-05
KR19990006403A (ko) 1999-01-25
CN1203444A (zh) 1998-12-30
TW396576B (en) 2000-07-01

Similar Documents

Publication Publication Date Title
FR2764734B1 (fr) Procede de formation de plots de contact d'un dispositif a semiconducteur
FR2736474B1 (fr) Procede pour fabriquer un dispositif laser a semi-conducteur et dispositif laser a semi-conducteur
FR2780200B1 (fr) Dispositif et procede de formation d'un dispositif presentant une cavite a atmosphere controlee
FR2788881B1 (fr) Procede d'implantation de dispositif a semiconducteurs
FR2747304B1 (fr) Procede de fabrication d'un dispositif exothermique pour rechauffer les pieds et dispositif exothermique pour rechauffer les pieds
FR2767603B1 (fr) Procede de fabrication d'un dispositif a semiconducteur sur un substrat semiconducteur
FR2773417B1 (fr) Procede de formation d'un contact auto-aligne dans un dipositif a semiconducteur
FR2745637B1 (fr) Dispositif capteur chimique a semiconducteur et procede de formation d'un thermocouple pour ce dispositif
FR2784229B1 (fr) Procede de formation d'un contact autoaligne dans un dispositif a semiconducteur
GB9501897D0 (en) Method for forming a photoresist pattern of semiconductor device
FR2802676B1 (fr) Procede et dispositif de deploiement d'une supervision distribuee
FR2746183B1 (fr) Dispositif capteur chimique a semiconducteur et procede de formation d'un dispositif capteur chimique a semiconducteur
FR2765137B1 (fr) Procede et dispositif pour fabriquer d'etroites bandes de placage
FR2743931B1 (fr) Procede et dispositif de fabrication d'un cable
FR2779008B1 (fr) Procede de fabrication d'un dispositif a semiconducteur
FR2752380B1 (fr) Procede de fabrication d'un dispositif a liberation controlee
FR2782839B1 (fr) Procede de fabrication d'un dispositif a semiconducteur
FR2582446B1 (fr) Dispositif semi-conducteur photosensible et procede de fabrication d'un tel procede
FR2737607B1 (fr) Procede de fabrication d'un dispositif a semi-conducteur de puissance a transistor
GB9806935D0 (en) Method of forming a semiconductor device
FR2753629B1 (fr) Procede et dispositif de desinfection d'un conduit
FR2721847B1 (fr) Procede et dispositif pour fabriquer une plaque enduite
FR2741189B1 (fr) Procede de fabrication d'un dispositif d'emission a effet de champ
FR2742592B1 (fr) Dispositif laser a semi-conducteurs et procede pour sa fabrication
GB2308737B (en) Method of forming a contact hole of a semiconductor device

Legal Events

Date Code Title Description
PLFP Fee payment

Year of fee payment: 19

PLFP Fee payment

Year of fee payment: 20