FR2584063B1 - Super purificateur pour le gaz argon et procede de purification de l'argon. - Google Patents
Super purificateur pour le gaz argon et procede de purification de l'argon.Info
- Publication number
- FR2584063B1 FR2584063B1 FR8609025A FR8609025A FR2584063B1 FR 2584063 B1 FR2584063 B1 FR 2584063B1 FR 8609025 A FR8609025 A FR 8609025A FR 8609025 A FR8609025 A FR 8609025A FR 2584063 B1 FR2584063 B1 FR 2584063B1
- Authority
- FR
- France
- Prior art keywords
- argon
- purification
- argon gas
- super purifier
- purifier
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B23/00—Noble gases; Compounds thereof
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Gas Separation By Absorption (AREA)
- Separation Of Gases By Adsorption (AREA)
- Solid-Sorbent Or Filter-Aiding Compositions (AREA)
- Manufacture And Refinement Of Metals (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60140629A JPS623008A (ja) | 1985-06-28 | 1985-06-28 | アルゴンの超精製装置、並びに精製方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2584063A1 FR2584063A1 (fr) | 1987-01-02 |
FR2584063B1 true FR2584063B1 (fr) | 1990-12-21 |
Family
ID=15273137
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR8609025A Expired - Lifetime FR2584063B1 (fr) | 1985-06-28 | 1986-06-23 | Super purificateur pour le gaz argon et procede de purification de l'argon. |
Country Status (10)
Families Citing this family (30)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
IT1227219B (it) * | 1988-09-26 | 1991-03-27 | Getters Spa | Apparecchiatura e metodo relativo per asportare impurezze gassose da gas inerti ed assicurare livelli estremamente bassi di idrogeno |
DE3835825C1 (US20110158925A1-20110630-C00013.png) * | 1988-10-21 | 1990-03-08 | Kernforschungsanlage Juelich Gmbh, 5170 Juelich, De | |
DE3926015A1 (de) * | 1989-08-05 | 1991-02-07 | Messer Griesheim Gmbh | Verfahren zur feinreinigung von gasen |
IT1237944B (it) * | 1990-01-05 | 1993-06-19 | Getters Spa | Metodo per determinare la fine della vita utile di un purificatore di gas inerte e relativa apparecchiatura |
IT1246358B (it) * | 1990-07-12 | 1994-11-17 | Getters Spa | Processo per eliminare impurita' da un gas idruro |
IT1247110B (it) * | 1991-02-28 | 1994-12-12 | Getters Spa | Processo per la purificazione di gas fluorurati |
IT1270875B (it) * | 1993-04-29 | 1997-05-13 | Getters Spa | Procedimento di purificazione dell'idrogeno e purificatore relativo |
US5238469A (en) * | 1992-04-02 | 1993-08-24 | Saes Pure Gas, Inc. | Method and apparatus for removing residual hydrogen from a purified gas |
US6436352B1 (en) | 1993-04-29 | 2002-08-20 | Saes Getter, S.P.A. | Hydrogen purification |
RU2123971C1 (ru) * | 1993-04-29 | 1998-12-27 | Саес Геттерс С.П.А. | Способ удаления газообразных примесей из потока водорода и устройство для его осуществления |
CA2117319A1 (en) * | 1993-07-12 | 1995-01-13 | John D. Baker | Method for the purification of noble gases, nitrogen and hydrogen |
JP3462560B2 (ja) * | 1994-03-04 | 2003-11-05 | 日本パイオニクス株式会社 | 水素ガスの精製方法 |
KR970008347B1 (ko) * | 1994-04-12 | 1997-05-23 | 한국에너지기술연구소 | 암모니아 퍼지가스에서 아르곤 및 수소를 고농도로 분리하는 흡착분리방법과 그 장치 |
WO1997003745A1 (en) * | 1995-07-21 | 1997-02-06 | Ultrapure Systems, Inc. | Single gas purifier vessel and heat exchanger |
DE19528784C1 (de) * | 1995-08-04 | 1996-08-29 | Inst Neuwertwirtschaft Gmbh | Verfahren zur Reinigung von Inertgasen mittels Sorbenzien |
AU2342097A (en) * | 1996-03-28 | 1997-10-17 | Saes Pure Gas, Inc. | Method and apparatus for purifying hydrogen gas |
US6059859A (en) * | 1997-09-19 | 2000-05-09 | Aeronex, Inc. | Method, composition and apparatus for water removal from non-corrosive gas streams |
WO1999019049A2 (en) * | 1997-10-15 | 1999-04-22 | Saes Pure Gas, Inc. | Semiconductor manufacturing system with getter safety device |
US6068685A (en) * | 1997-10-15 | 2000-05-30 | Saes Pure Gas, Inc. | Semiconductor manufacturing system with getter safety device |
WO1999019050A1 (en) | 1997-10-15 | 1999-04-22 | Saes Pure Gas, Inc. | Gas purification system with safety device and method for purifying gases |
US6733571B1 (en) * | 1999-07-12 | 2004-05-11 | Saes Pure Gas, Inc. | Gas purification system with an integrated hydrogen sorption and filter assembly |
IT1319667B1 (it) * | 2000-11-17 | 2003-10-23 | Getters Spa | Metodo per la misura della concentrazione di azoto in argon mediantespettroscopia di mobilita' ionica. |
ITMI20011193A1 (it) | 2001-06-06 | 2002-12-06 | Getters Spa | Metodo per la misura mediante spettroscopia di mobilita' ionica dellaconcentrazione di acqua in argon, idrogeno, azoto e elio |
JP4520372B2 (ja) * | 2005-06-21 | 2010-08-04 | シーケーディ株式会社 | 精製筒及び空気又は不活性ガスの循環精製装置 |
DE102009024055A1 (de) | 2009-06-05 | 2010-12-09 | Netzsch-Gerätebau GmbH | Thermoanalysevorrichtung und Thermoanalyseverfahren |
CN104291284B (zh) * | 2014-10-09 | 2016-06-22 | 昆明物理研究所 | 一种超纯氩气在线净化系统及方法 |
US10071336B1 (en) | 2017-01-24 | 2018-09-11 | Northrop Grumman Systems Corporation | Gas purification getter construction for airborne and space applications |
JP2018150246A (ja) * | 2017-03-10 | 2018-09-27 | 国立大学法人東北大学 | 有機化合物析出方法 |
CN114193028A (zh) * | 2021-11-26 | 2022-03-18 | 中国核工业第五建设有限公司 | 保护气纯度提高装置、保护气提纯方法、焊接保护方法 |
CN115231533A (zh) * | 2022-08-09 | 2022-10-25 | 上海交通大学 | 低氡放射率高温高纯惰性气体纯化器 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB961925A (en) * | 1959-04-10 | 1964-06-24 | Western Detail Manufacturers L | Improvements relating to the purification of argon and helium gas |
FR1539693A (fr) * | 1966-06-07 | 1968-09-20 | Japan Pure Hydrogen Company Lt | Procédé d'enlèvement des impuretés dans les gaz rares |
BE792561A (en) * | 1972-12-11 | 1973-03-30 | Getters Spa | Gas purifier - esp for rare gases and hydrogen with regeneration system for absorber cartridges |
IT1110271B (it) * | 1979-02-05 | 1985-12-23 | Getters Spa | Lega ternaria getterante non evaporabile e metodo di suo impiego per l'assorbimento di acqua,vapore d'acqua,di altri gas |
IT1115156B (it) * | 1979-04-06 | 1986-02-03 | Getters Spa | Leghe zr-fe per l'assorbimento di idrogeno a basse temperature |
IT1198325B (it) * | 1980-06-04 | 1988-12-21 | Getters Spa | Struttura e composizione getteranti,particolarmente adatti per basse temperature |
JPS59107910A (ja) * | 1982-12-10 | 1984-06-22 | Toshiba Corp | アルゴンガスの精製方法 |
FR2557810A1 (fr) * | 1984-01-05 | 1985-07-12 | Analyseurs Epurateur Sarl Ste | Procede non polluant pour eliminer les traces d'impuretes contenues dans les gaz rares portes a haute temperature |
-
1985
- 1985-06-28 JP JP60140629A patent/JPS623008A/ja active Granted
-
1986
- 1986-06-23 FR FR8609025A patent/FR2584063B1/fr not_active Expired - Lifetime
- 1986-06-23 DE DE3621014A patent/DE3621014C2/de not_active Expired - Lifetime
- 1986-06-23 CA CA000512228A patent/CA1300344C/en not_active Expired - Fee Related
- 1986-06-26 KR KR1019860005145A patent/KR930006691B1/ko not_active IP Right Cessation
- 1986-06-26 BE BE2/61003A patent/BE904997A/fr not_active IP Right Cessation
- 1986-06-26 GB GB08615618A patent/GB2177079A/en active Granted
- 1986-06-27 NL NL8601691A patent/NL192260C/nl not_active IP Right Cessation
- 1986-06-27 SE SE8602869A patent/SE463511B/sv not_active IP Right Cessation
- 1986-06-27 IT IT20962/86A patent/IT1190142B/it active
Also Published As
Publication number | Publication date |
---|---|
DE3621014A1 (de) | 1987-01-08 |
BE904997A (fr) | 1986-10-16 |
KR930006691B1 (ko) | 1993-07-22 |
SE8602869L (sv) | 1986-12-29 |
JPH0456771B2 (US20110158925A1-20110630-C00013.png) | 1992-09-09 |
IT1190142B (it) | 1988-02-10 |
FR2584063A1 (fr) | 1987-01-02 |
NL192260B (nl) | 1996-12-02 |
GB2177079A (en) | 1987-01-14 |
NL192260C (nl) | 1997-04-03 |
DE3621014C2 (de) | 1995-05-11 |
IT8620962A0 (it) | 1986-06-27 |
CA1300344C (en) | 1992-05-12 |
GB2177079B (US20110158925A1-20110630-C00013.png) | 1989-12-20 |
NL8601691A (nl) | 1987-01-16 |
GB8615618D0 (en) | 1986-07-30 |
IT8620962A1 (it) | 1987-12-27 |
KR870000239A (ko) | 1987-02-17 |
SE463511B (sv) | 1990-12-03 |
SE8602869D0 (sv) | 1986-06-27 |
JPS623008A (ja) | 1987-01-09 |
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