ES533329A0 - Procedimiento y aparato de chapado o ataque quimico de un substrato utilizando un liquido de tratamiento y un haz energetico, tal como un laser. - Google Patents

Procedimiento y aparato de chapado o ataque quimico de un substrato utilizando un liquido de tratamiento y un haz energetico, tal como un laser.

Info

Publication number
ES533329A0
ES533329A0 ES533329A ES533329A ES533329A0 ES 533329 A0 ES533329 A0 ES 533329A0 ES 533329 A ES533329 A ES 533329A ES 533329 A ES533329 A ES 533329A ES 533329 A0 ES533329 A0 ES 533329A0
Authority
ES
Spain
Prior art keywords
substrate
plating
laser
procedure
treatment liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
ES533329A
Other languages
English (en)
Other versions
ES8606525A1 (es
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of ES8606525A1 publication Critical patent/ES8606525A1/es
Publication of ES533329A0 publication Critical patent/ES533329A0/es
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/02—Electroplating of selected surface areas
    • C25D5/024—Electroplating of selected surface areas using locally applied electromagnetic radiation, e.g. lasers
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/02—Electroplating of selected surface areas
    • C25D5/026—Electroplating of selected surface areas using locally applied jets of electrolyte
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F3/00—Electrolytic etching or polishing
    • C25F3/02—Etching
    • C25F3/14—Etching locally
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
    • H05K3/06—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
    • H05K3/068—Apparatus for etching printed circuits
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/22—Secondary treatment of printed circuits
    • H05K3/24—Reinforcing the conductive pattern
    • H05K3/241—Reinforcing the conductive pattern characterised by the electroplating method; means therefor, e.g. baths or apparatus

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electrochemistry (AREA)
  • Electromagnetism (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • General Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Electroplating Methods And Accessories (AREA)
  • ing And Chemical Polishing (AREA)
  • Chemically Coating (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Heterocyclic Carbon Compounds Containing A Hetero Ring Having Oxygen Or Sulfur (AREA)
  • Weting (AREA)
ES533329A 1983-06-13 1984-06-12 Procedimiento y aparato de chapado o ataque quimico de un substrato utilizando un liquido de tratamiento y un haz energetico, tal como un laser. Expired ES8606525A1 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/504,016 US4497692A (en) 1983-06-13 1983-06-13 Laser-enhanced jet-plating and jet-etching: high-speed maskless patterning method

Publications (2)

Publication Number Publication Date
ES8606525A1 ES8606525A1 (es) 1986-04-01
ES533329A0 true ES533329A0 (es) 1986-04-01

Family

ID=24004519

Family Applications (1)

Application Number Title Priority Date Filing Date
ES533329A Expired ES8606525A1 (es) 1983-06-13 1984-06-12 Procedimiento y aparato de chapado o ataque quimico de un substrato utilizando un liquido de tratamiento y un haz energetico, tal como un laser.

Country Status (8)

Country Link
US (1) US4497692A (es)
EP (1) EP0128401B1 (es)
JP (1) JPS6122633A (es)
AT (1) ATE31087T1 (es)
CA (1) CA1259947A (es)
DE (1) DE3467779D1 (es)
ES (1) ES8606525A1 (es)
IE (1) IE55633B1 (es)

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JP2896726B2 (ja) * 1992-03-30 1999-05-31 セイコーインスツルメンツ株式会社 微細加工装置
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DE4408660A1 (de) * 1993-10-26 1995-04-27 Bayer Ag Mischungen mit selbstschmierenden Eigenschaften
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US6284108B1 (en) 1998-08-31 2001-09-04 Louis DiFrancesco Method and apparatus for momentum plating
US7294366B2 (en) * 1998-09-30 2007-11-13 Optomec Design Company Laser processing for heat-sensitive mesoscale deposition
US8110247B2 (en) * 1998-09-30 2012-02-07 Optomec Design Company Laser processing for heat-sensitive mesoscale deposition of oxygen-sensitive materials
US20050156991A1 (en) * 1998-09-30 2005-07-21 Optomec Design Company Maskless direct write of copper using an annular aerosol jet
US7108894B2 (en) * 1998-09-30 2006-09-19 Optomec Design Company Direct Write™ System
US6636676B1 (en) * 1998-09-30 2003-10-21 Optomec Design Company Particle guidance system
US7938079B2 (en) * 1998-09-30 2011-05-10 Optomec Design Company Annular aerosol jet deposition using an extended nozzle
US7045015B2 (en) 1998-09-30 2006-05-16 Optomec Design Company Apparatuses and method for maskless mesoscale material deposition
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US8496799B2 (en) * 2005-02-08 2013-07-30 The Trustees Of Columbia University In The City Of New York Systems and methods for in situ annealing of electro- and electroless platings during deposition
US8529738B2 (en) * 2005-02-08 2013-09-10 The Trustees Of Columbia University In The City Of New York In situ plating and etching of materials covered with a surface film
JP2008537782A (ja) * 2005-04-08 2008-09-25 ザ トラスティーズ オブ コロンビア ユニヴァーシティ イン ザ シティ オブ ニューヨーク めっき浴およびエッチング浴を監視する方法
JP4844715B2 (ja) * 2005-08-25 2011-12-28 澁谷工業株式会社 ハイブリッドレーザ加工装置
WO2007027907A2 (en) * 2005-09-02 2007-03-08 The Trustees Of Columbia University In The City Of New York A system and method for obtaining anisotropic etching of patterned substrates
CN100414002C (zh) * 2005-10-10 2008-08-27 上海工程技术大学 高速电喷镀装置
US20070154634A1 (en) * 2005-12-15 2007-07-05 Optomec Design Company Method and Apparatus for Low-Temperature Plasma Sintering
DE102006003606A1 (de) * 2006-01-25 2007-07-26 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren und Vorrichtung zum Strukturieren einer Oberflächenschicht
JP5017882B2 (ja) * 2006-02-22 2012-09-05 澁谷工業株式会社 ハイブリッドレーザ加工方法
DE102006030588A1 (de) * 2006-07-03 2008-01-10 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Flüssigkeitsstrahlgeführtes Ätzverfahren zum Materialabtrag an Festkörpern sowie dessen Verwendung
CN100388997C (zh) * 2006-09-18 2008-05-21 南京航空航天大学 喷射液束电解-激光复合加工方法及其装置
WO2008070786A1 (en) * 2006-12-06 2008-06-12 The Trustees Of Columbia University In The City Of New York Microfluidic systems and methods for screening plating and etching bath compositions
US8530784B2 (en) * 2007-02-01 2013-09-10 Orbotech Ltd. Method and system of machining using a beam of photons
US20100310630A1 (en) * 2007-04-27 2010-12-09 Technische Universitat Braunschweig Coated surface for cell culture
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JP4961468B2 (ja) * 2009-10-29 2012-06-27 三星ダイヤモンド工業株式会社 レーザー加工方法、被加工物の分割方法およびレーザー加工装置
US8985050B2 (en) * 2009-11-05 2015-03-24 The Trustees Of Columbia University In The City Of New York Substrate laser oxide removal process followed by electro or immersion plating
US9025285B1 (en) * 2009-12-16 2015-05-05 Magnecomp Corporation Low resistance interface metal for disk drive suspension component grounding
US9583125B1 (en) 2009-12-16 2017-02-28 Magnecomp Corporation Low resistance interface metal for disk drive suspension component grounding
JP5220914B2 (ja) * 2011-05-25 2013-06-26 株式会社スギノマシン レーザー加工装置
US8764515B2 (en) * 2012-05-14 2014-07-01 United Technologies Corporation Component machining method and assembly
CN103572341B (zh) * 2013-09-23 2016-01-20 江苏大学 激光光管电极的电化学复合沉积制造方法与装置
CN103590080A (zh) * 2013-11-28 2014-02-19 铜陵学院 一种激光强化喷射电沉积快速成形加工装置及方法
US10092980B1 (en) 2014-05-30 2018-10-09 Avonisys Ag Method for coupling a laser beam into a liquid-jet
US8859988B1 (en) * 2014-05-30 2014-10-14 Jens Guenter Gaebelein Method for coupling a laser beam into a liquid-jet
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Also Published As

Publication number Publication date
CA1259947A (en) 1989-09-26
US4497692A (en) 1985-02-05
EP0128401A2 (en) 1984-12-19
IE841438L (en) 1984-12-13
ES8606525A1 (es) 1986-04-01
JPH0138372B2 (es) 1989-08-14
DE3467779D1 (en) 1988-01-07
IE55633B1 (en) 1990-12-05
ATE31087T1 (de) 1987-12-15
JPS6122633A (ja) 1986-01-31
EP0128401B1 (en) 1987-11-25
EP0128401A3 (en) 1985-05-15

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Legal Events

Date Code Title Description
FD1A Patent lapsed

Effective date: 19970401