DE3686161D1 - Vorrichtung zur laserunterstuetzten, elektrolytischen metallabscheidung. - Google Patents
Vorrichtung zur laserunterstuetzten, elektrolytischen metallabscheidung.Info
- Publication number
- DE3686161D1 DE3686161D1 DE8686870135T DE3686161T DE3686161D1 DE 3686161 D1 DE3686161 D1 DE 3686161D1 DE 8686870135 T DE8686870135 T DE 8686870135T DE 3686161 T DE3686161 T DE 3686161T DE 3686161 D1 DE3686161 D1 DE 3686161D1
- Authority
- DE
- Germany
- Prior art keywords
- electrolyte
- recovery
- capillary tube
- source
- metal deposition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/02—Electroplating of selected surface areas
- C25D5/024—Electroplating of selected surface areas using locally applied electromagnetic radiation, e.g. lasers
Landscapes
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electroplating Methods And Accessories (AREA)
- Laser Beam Processing (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP86870135A EP0261296B1 (de) | 1986-09-25 | 1986-09-25 | Vorrichtung zur laserunterstützten, elektrolytischen Metallabscheidung |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3686161D1 true DE3686161D1 (de) | 1992-08-27 |
Family
ID=8196548
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8686870135T Expired - Lifetime DE3686161D1 (de) | 1986-09-25 | 1986-09-25 | Vorrichtung zur laserunterstuetzten, elektrolytischen metallabscheidung. |
Country Status (3)
Country | Link |
---|---|
US (1) | US4826583A (de) |
EP (1) | EP0261296B1 (de) |
DE (1) | DE3686161D1 (de) |
Families Citing this family (28)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5292418A (en) * | 1991-03-08 | 1994-03-08 | Mitsubishi Denki Kabushiki Kaisha | Local laser plating apparatus |
WO1993017321A1 (en) * | 1992-02-25 | 1993-09-02 | Unisearch Limited | Electrothermal atomic absorption and preconcentration device |
JP2896726B2 (ja) * | 1992-03-30 | 1999-05-31 | セイコーインスツルメンツ株式会社 | 微細加工装置 |
US8110247B2 (en) * | 1998-09-30 | 2012-02-07 | Optomec Design Company | Laser processing for heat-sensitive mesoscale deposition of oxygen-sensitive materials |
US7938079B2 (en) * | 1998-09-30 | 2011-05-10 | Optomec Design Company | Annular aerosol jet deposition using an extended nozzle |
US7294366B2 (en) * | 1998-09-30 | 2007-11-13 | Optomec Design Company | Laser processing for heat-sensitive mesoscale deposition |
US7108894B2 (en) | 1998-09-30 | 2006-09-19 | Optomec Design Company | Direct Write™ System |
US6636676B1 (en) * | 1998-09-30 | 2003-10-21 | Optomec Design Company | Particle guidance system |
US20050156991A1 (en) * | 1998-09-30 | 2005-07-21 | Optomec Design Company | Maskless direct write of copper using an annular aerosol jet |
US20030020768A1 (en) * | 1998-09-30 | 2003-01-30 | Renn Michael J. | Direct write TM system |
US7045015B2 (en) | 1998-09-30 | 2006-05-16 | Optomec Design Company | Apparatuses and method for maskless mesoscale material deposition |
EP1292414B1 (de) * | 2000-06-13 | 2005-12-14 | Element Six (PTY) Ltd | Verbunddiamantkörper |
US7938341B2 (en) * | 2004-12-13 | 2011-05-10 | Optomec Design Company | Miniature aerosol jet and aerosol jet array |
US20080013299A1 (en) * | 2004-12-13 | 2008-01-17 | Optomec, Inc. | Direct Patterning for EMI Shielding and Interconnects Using Miniature Aerosol Jet and Aerosol Jet Array |
US7674671B2 (en) * | 2004-12-13 | 2010-03-09 | Optomec Design Company | Aerodynamic jetting of aerosolized fluids for fabrication of passive structures |
US20070154634A1 (en) * | 2005-12-15 | 2007-07-05 | Optomec Design Company | Method and Apparatus for Low-Temperature Plasma Sintering |
US9185810B2 (en) * | 2006-06-06 | 2015-11-10 | Second Sight Medical Products, Inc. | Molded polymer comprising silicone and at least one metal trace and a process of manufacturing the same |
US7750076B2 (en) * | 2006-06-07 | 2010-07-06 | Second Sight Medical Products, Inc. | Polymer comprising silicone and at least one metal trace |
US20100310630A1 (en) * | 2007-04-27 | 2010-12-09 | Technische Universitat Braunschweig | Coated surface for cell culture |
TWI482662B (zh) | 2007-08-30 | 2015-05-01 | Optomec Inc | 機械上一體式及緊密式耦合之列印頭以及噴霧源 |
TWI538737B (zh) * | 2007-08-31 | 2016-06-21 | 阿普托麥克股份有限公司 | 材料沉積總成 |
TW200918325A (en) * | 2007-08-31 | 2009-05-01 | Optomec Inc | AEROSOL JET® printing system for photovoltaic applications |
US8887658B2 (en) * | 2007-10-09 | 2014-11-18 | Optomec, Inc. | Multiple sheath multiple capillary aerosol jet |
CN103572341B (zh) * | 2013-09-23 | 2016-01-20 | 江苏大学 | 激光光管电极的电化学复合沉积制造方法与装置 |
WO2016130709A1 (en) | 2015-02-10 | 2016-08-18 | Optomec, Inc. | Fabrication of three-dimensional structures by in-flight curing of aerosols |
CN105081576A (zh) * | 2015-08-25 | 2015-11-25 | 江苏大学 | 一种利用激光空化提高水泵叶轮强度的装置及方法 |
US10632746B2 (en) | 2017-11-13 | 2020-04-28 | Optomec, Inc. | Shuttering of aerosol streams |
CN109732199B (zh) * | 2019-02-25 | 2020-11-20 | 江苏大学 | 一种半导体材料激光电化学背向协同微加工方法及装置 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0048514B1 (de) * | 1980-09-18 | 1984-07-18 | L'Etat belge, représenté par le Secrétaire Général des Services de la Programmation de la Politique Scientifique | Verfahren zum Kristallisieren von Filmen und so erhaltene Filme |
JPS5864368A (ja) * | 1981-10-12 | 1983-04-16 | Inoue Japax Res Inc | 化学メツキ方法 |
JPS59129780A (ja) * | 1983-01-14 | 1984-07-26 | Hitachi Ltd | 選択的加工装置 |
US4497692A (en) * | 1983-06-13 | 1985-02-05 | International Business Machines Corporation | Laser-enhanced jet-plating and jet-etching: high-speed maskless patterning method |
GB2154017B (en) * | 1984-02-03 | 1987-09-30 | Gen Electric | Laser material processing through a fiber optic |
-
1986
- 1986-09-25 DE DE8686870135T patent/DE3686161D1/de not_active Expired - Lifetime
- 1986-09-25 EP EP86870135A patent/EP0261296B1/de not_active Expired - Lifetime
-
1987
- 1987-12-23 US US07/137,330 patent/US4826583A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP0261296B1 (de) | 1992-07-22 |
EP0261296A1 (de) | 1988-03-30 |
US4826583A (en) | 1989-05-02 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8332 | No legal effect for de |