EP0261296B1 - Vorrichtung zur laserunterstützten, elektrolytischen Metallabscheidung - Google Patents

Vorrichtung zur laserunterstützten, elektrolytischen Metallabscheidung Download PDF

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Publication number
EP0261296B1
EP0261296B1 EP86870135A EP86870135A EP0261296B1 EP 0261296 B1 EP0261296 B1 EP 0261296B1 EP 86870135 A EP86870135 A EP 86870135A EP 86870135 A EP86870135 A EP 86870135A EP 0261296 B1 EP0261296 B1 EP 0261296B1
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EP
European Patent Office
Prior art keywords
capillary
electrolyte
capillary duct
laser
laser beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP86870135A
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English (en)
French (fr)
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EP0261296A1 (de
Inventor
Alain Biernaux
Lucien Diego Laude
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
LAUDE, LUCIEN DIEGO
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Laude Lucien Diego
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Filing date
Publication date
Application filed by Laude Lucien Diego filed Critical Laude Lucien Diego
Priority to EP86870135A priority Critical patent/EP0261296B1/de
Priority to DE8686870135T priority patent/DE3686161D1/de
Priority to US07/137,330 priority patent/US4826583A/en
Publication of EP0261296A1 publication Critical patent/EP0261296A1/de
Application granted granted Critical
Publication of EP0261296B1 publication Critical patent/EP0261296B1/de
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Expired - Lifetime legal-status Critical Current

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    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/02—Electroplating of selected surface areas
    • C25D5/024—Electroplating of selected surface areas using locally applied electromagnetic radiation, e.g. lasers

Definitions

  • the invention relates to an automated and flexible apparatus allowing very high definition electroplating of metals. It includes a capillary conduit into which the electrolyte is injected and at the center of which is an optical fiber which channels the laser beam.
  • a laser-assisted electrolysis system accompanied by a jet is already known today.
  • an electrolytic liquid is compressed in a tank.
  • An opening in the wall of the latter allows the liquid to escape in the form of a jet.
  • the laser beam crosses the solution and follows the path traveled by the electrolyte.
  • the assembly, electrolytic jet and laser beam meets a stopping surface on which the metal atoms are deposited.
  • the stop surface can move in three directions in space (x, y, z).
  • the movement is carried out using synchronous stepping motors, for example, the speed of which can be varied along the three axes (x, y, z) and controlled by computer.
  • the present invention aims to remedy these drawbacks.
  • the invention as characterized in the claims, solves the problem of creating an apparatus enabling metallic deposits of excellent quality to be produced quickly and precisely in places that are difficult to access and multiple.
  • the apparatus for the punctual deposition of metals on solid substrates using laser radiation with or without an external electrical source is characterized by the use of laser radiation channeled at the heart of an optical fiber. that we center in a flexible capillary duct; in it circulates the electrolyte containing in dissolution the metal to be deposited, which is thus projected on the substrate at the exit of the capillary conduit in the zone irradiated by the laser radiation.
  • a second capillary containing the previous capillary and its optical fiber collects by suction the liquid containing the non-deposited metal ions.
  • the laser radiation is split into several rays which are channeled at the heart of several optical fibers, each of them being centered in a flexible capillary conduit in which the electrolytic solution circulates which is thus a) projected onto the substrate at the outlet of the capillary in the area irradiated by laser radiation and b) recovered by the second capillary enveloping the assembly formed by the injection capillary and the fiber contained therein.
  • the laser radiation is delivered by a continuous laser, for example, of the Argon Ar+ or Krypton Kr+ type, depending on the type of material to be deposited.
  • the power delivered is between 102 W / cm2 and 106 W / cm2 at the point where the deposition takes place.
  • the optical fiber channeling the laser beam is of a known type operating in single mode or multimode.
  • the useful part of the optical fiber also called the core of the optical fiber, channels the laser beam.
  • the diameter of the fiber core is chosen according to the desired confinement (from 1 ⁇ m to 500 ⁇ m).
  • several separate deposits can be made simultaneously with the same laser source. To this end, the original laser beam is split according to a procedure described in US Pat. No.
  • flexible capillary conduit is understood a pipe made of inert material, for example Teflon®, of external diameter for example 1000 ⁇ m and of internal diameter for example 500 ⁇ m, into which an optical fiber of external diameter for example 125 ⁇ m is introduced.
  • Teflon® Teflon®
  • the choice of a flexible capillary results from the need to conduct the electrolytic solution preferentially to an area of the target under a jet; zone possibly difficult to access or out of direct view of the radiation source, hence the flexibility of the apparatus.
  • the electrolyte circulating in the flexible capillary conduit contains the metal to be deposited in solution.
  • the electrolyte chosen is, for example, of the cyanide and sulfate type respectively. Any other type of electrolyte existing on the market can be chosen without departing from the scope of the present invention.
  • the choice of electrolyte depends on the nature of the metallic film that one wishes to manufacture.
  • the target or the propellant device comprising the chamber containing the liquid and the flexible capillary containing the optical fiber can be manipulated by computer.
  • the automation of the system by computer includes: a) control of the electrolyte (ion concentration, acidity and temperature) by continuous sampling, b) automatic tracing of the deposit by programmed displacement of the target opposite the jet or jet relative to the target (if it is too large in volume), c) control of the stability of the radiation source by photoelectric diode.
  • This automation makes it possible to produce homogeneous deposits, of constant thickness and of pre-established geometry.
  • a reducing substance is added to it, for example (the hypophosphite of Na: NaH2PO2) which brings electrons to the ion system. according to reactions (a) and (b).
  • the reducing substance then plays the same role as the external source of current in the process with electric voltage described above.
  • suction capillary, injection capillary and optical fiber fulfills the same functions as the previous system (with current source), that is to say an apparatus which produces metallic deposits of excellent quality, quickly and precisely in places that are difficult to access and multiple.
  • the advantages obtained thanks to this invention consist in the combined use of the very great flexibility of the electrolytic propulsion system obtained by the use of a capillary conduit and of the very great maneuverability of the optical system thanks to the channeling of the laser beam in an optical fiber.
  • the inertia of the previous system is thus avoided.
  • the box containing the electrolyte and the laser beam is here extremely handy. It also allows you to write miniaturized and diversified metal tracks without any other addition. In places that are difficult to access, its geometry makes it possible to miniaturize it and to mount it jointly with other identical boxes on the same chassis.
  • the electrolyte source and the radiation source being combined at the very end of the capillary, the deposition function can be performed in any place difficult to access, thanks to the flexibility of the capillary / fiber assembly. .
  • Figures 1 and 5 show the general diagram of the apparatus according to the present invention.
  • Figures 2, 3 and 6 respectively represent the electrolytic cell, the positioning of the fiber in the injection capillary, the suction capillary.
  • Figure 4 shows how the switchgear can be integrated into a multi-fiber system.
  • a beam of light (1) supplied by a laser (2) is concentrated using an optical device (3) controlled in the three directions by a manipulator (4) controlled by a computer (5).
  • the concentrated beam is channeled via an optical fiber (6) inside the electrolysis cell (7).
  • the electrolytic liquid (8), containing the metals to be deposited, is brought via a first pump (9) into the electrolysis cell (7).
  • the electrolysis cell (7) is made up of 3 parts.
  • a first part comprises a chamber (10) with constant volume which makes it possible to obtain a constant flow of liquid.
  • a first circular electrode (11) ensures electrical contact in the liquid and creates the ions necessary for the proper functioning of the electrolysis.
  • the second part consists of an electrolytic propulsion cone (12) used for shaping the jet.
  • this cone (12) two models of capillary duct can be fixed: a) simple capillary injection duct (13), b) a double capillary duct (33) which comprises an injection duct (13) and its fiber (6) itself contained in a second capillary suction conduit (32). Different sections (14) of capillary conduit (13) are available. It depends on the desired containment of the repository.
  • the third part (15) ensures on the one hand the fixing of the optical fiber (6) to the electrolysis cell and on the other hand, it makes it possible to compress an O-ring (16) which maintains the perfect sealing of the whole system.
  • the jet (17), comprising the electrolytic liquid (8) and the laser beam (1), is stopped by the surface (18) on which the metal to be electrolysed is deposited.
  • This surface (18) serves as a second electrode for closing the electrical circuit.
  • the electric voltage supplied to the two electrodes (11) and (18) is delivered by a power supply (19).
  • the formation of metal tracks on the stop surface (18) is ensured by the displacement; either of this same surface (18) relative to the jet (17); either by that of the electrolysis cell (7) relative to the surface (18).
  • the displacement xy is obtained by a manipulator xyz (4) computer controlled (5).
  • the laminar flow at the outlet of the flexible capillary conduit (13) is obtained by the positioning (20) of the optical fiber (6) relative to the end of the flexible capillary conduit (13).
  • the area (21) of the jet (17) in which the flow remains laminar until the impact on the target (18) is controlled by a manipulator (4) along the z axis.
  • the electrolyte (8) or (29) is recovered according to two distinct diagrams ( Figure 1 and Figure 5). Both depend on the geometry of the target (18) on which we want to deposit metals.
  • the liquid (22) containing the non-deposited metal ions is collected in a tank (23).
  • a second pump (24) returns the liquid (22) to the origin.
  • the liquid (22) containing the non-deposited metal ions is recovered by suction via a second capillary conduit (32), in contact with the surface of the target (18), Figure 6, and coating the conduit (13) containing the optical fiber (16).
  • the suction is carried out by the pump (24).
  • a valve system (25) and (26) makes it possible to switch the containers (27) and (28). While in one (27) are the metal ions, the second container (28) contains a cleaning solution (29). This cleaning solution (29) subsequently makes it possible to deposit, using the same apparatus, other metals without risk of contamination.
  • a light beam (1) supplied by a single laser (2) can be channeled in several fibers (30). It is thus possible to make several identical or different deposits (in quality and / or in shape) simultaneously with the same laser source (2) by having several electrolysis stations (31) similar to that described above.

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  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electroplating Methods And Accessories (AREA)
  • Laser Beam Processing (AREA)

Claims (4)

  1. Apparatur mit dem Zweck der elektrolytischen Punkt-Anlagerumg von Metallen auf Feststoff-Substrate (18) mittels Laserstrahlung (2), mit oder ohne Zufuhr elektrischer Energie (19), gekennzeichnet durch den Einsatz einer Laserstrahlung (2), welche durch eine Lichtleitfaser (6) geleitet wird, die in einem flexiblen Kapillarröhrchen (13) zentriert ist; in letzterem zirkuliert die Elektrolytlösung mit dem anzulagernden Metall; der Elektrolyt wird so am Ende des Kapillarröhrchens (13) in der laserbestrahlten Zone (2) auf das Substrat (18) gespritzt.
  2. Apparatur nach Anspruch 1, dadurch gekennzeichnet daß der Elektrolyt (8) (oder (29)) nach seinem Auftreffen auf das Substrat (18) in einer ersten Phase mittels eines zweiten Kapillarröhrchens (32) aufgefangen wird, welches mit dem Substrat (18) in Kontakt ist und das Kapillarröhrchen (13) ummantelt, welches die Lichtleitfaser (6) enthält; das Kapillarröhrchen (32) saugt den Elektrolyten (8) (oder (29)) nach dessen Auftreffen auf die Zielfläche (18) an; in einer zweiten Phase wird der Elektrolyt (8) wieder eingesetzt.
  3. Apparatur nach Ansprüchen 1 und 2, dadurch gekennzeichnet daß die Laserstrahlung (2) in mehrere Strahlen gebrochen wird, die durch mehrere Lichtleitfasern (30) geleitet werden, von denen jede einzelne in einem flexiblen Kapillarröhrchen (13) zentriert ist; in letzterem zirkuliert die Elektrolytlösung (8) (oder (29)), die so am Ende des flexiblen Kapillarröhrchens (13) in der laserbestrahlten Zone (2) auf das Substrat (18) gespritzt wird; der Elektrolyt (8) (oder (29)) wird durch ein ansaugendes Kapillarröhrchen (32) wieder aufgefangen.
  4. Apparatur mit dem Zweck der elektrolytischen Anlagerung von Metallen auf Feststoff-Substrate (18) mittels Laserstrahlung (2), mit oder ohne Zufuhr elektrischer Energie (19), nach Anspruch 1, 2 oder 3, dadurch gekennzeichnet daß der Zielbereich (18) oder eine Projektionsvorrichtung, die eine mit Flüssigkeit (8) gefüllte Kammer (10) enthält, und das flexible Haarröhrchen (13) mit der Lichtleitfaser (6) und ggf. auch das ansaugende Kapillarröhrchen (32) durch einen Computer gesteuert werden können.
EP86870135A 1986-09-25 1986-09-25 Vorrichtung zur laserunterstützten, elektrolytischen Metallabscheidung Expired - Lifetime EP0261296B1 (de)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP86870135A EP0261296B1 (de) 1986-09-25 1986-09-25 Vorrichtung zur laserunterstützten, elektrolytischen Metallabscheidung
DE8686870135T DE3686161D1 (de) 1986-09-25 1986-09-25 Vorrichtung zur laserunterstuetzten, elektrolytischen metallabscheidung.
US07/137,330 US4826583A (en) 1986-09-25 1987-12-23 Apparatus for pinpoint laser-assisted electroplating of metals on solid substrates

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP86870135A EP0261296B1 (de) 1986-09-25 1986-09-25 Vorrichtung zur laserunterstützten, elektrolytischen Metallabscheidung

Publications (2)

Publication Number Publication Date
EP0261296A1 EP0261296A1 (de) 1988-03-30
EP0261296B1 true EP0261296B1 (de) 1992-07-22

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EP86870135A Expired - Lifetime EP0261296B1 (de) 1986-09-25 1986-09-25 Vorrichtung zur laserunterstützten, elektrolytischen Metallabscheidung

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US (1) US4826583A (de)
EP (1) EP0261296B1 (de)
DE (1) DE3686161D1 (de)

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JP2896726B2 (ja) * 1992-03-30 1999-05-31 セイコーインスツルメンツ株式会社 微細加工装置
US7045015B2 (en) 1998-09-30 2006-05-16 Optomec Design Company Apparatuses and method for maskless mesoscale material deposition
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US8110247B2 (en) * 1998-09-30 2012-02-07 Optomec Design Company Laser processing for heat-sensitive mesoscale deposition of oxygen-sensitive materials
DK1292414T3 (da) * 2000-06-13 2006-01-30 Element Six Pty Ltd Sammensatte diamantmasser
US7674671B2 (en) 2004-12-13 2010-03-09 Optomec Design Company Aerodynamic jetting of aerosolized fluids for fabrication of passive structures
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US20080013299A1 (en) * 2004-12-13 2008-01-17 Optomec, Inc. Direct Patterning for EMI Shielding and Interconnects Using Miniature Aerosol Jet and Aerosol Jet Array
US20070154634A1 (en) * 2005-12-15 2007-07-05 Optomec Design Company Method and Apparatus for Low-Temperature Plasma Sintering
US9185810B2 (en) * 2006-06-06 2015-11-10 Second Sight Medical Products, Inc. Molded polymer comprising silicone and at least one metal trace and a process of manufacturing the same
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TWI482662B (zh) 2007-08-30 2015-05-01 Optomec Inc 機械上一體式及緊密式耦合之列印頭以及噴霧源
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US8887658B2 (en) * 2007-10-09 2014-11-18 Optomec, Inc. Multiple sheath multiple capillary aerosol jet
CN103572341B (zh) * 2013-09-23 2016-01-20 江苏大学 激光光管电极的电化学复合沉积制造方法与装置
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CN105081576A (zh) * 2015-08-25 2015-11-25 江苏大学 一种利用激光空化提高水泵叶轮强度的装置及方法
KR20200087196A (ko) 2017-11-13 2020-07-20 옵토멕 인코포레이티드 에어로졸 스트림의 셔터링
CN109732199B (zh) * 2019-02-25 2020-11-20 江苏大学 一种半导体材料激光电化学背向协同微加工方法及装置

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Publication number Publication date
EP0261296A1 (de) 1988-03-30
DE3686161D1 (de) 1992-08-27
US4826583A (en) 1989-05-02

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