ES2630064T3 - Fabricación de nanoporos utilizando campos eléctricos potentes - Google Patents
Fabricación de nanoporos utilizando campos eléctricos potentes Download PDFInfo
- Publication number
- ES2630064T3 ES2630064T3 ES13787530.8T ES13787530T ES2630064T3 ES 2630064 T3 ES2630064 T3 ES 2630064T3 ES 13787530 T ES13787530 T ES 13787530T ES 2630064 T3 ES2630064 T3 ES 2630064T3
- Authority
- ES
- Spain
- Prior art keywords
- membrane
- current
- reservoirs
- electrical potential
- fluid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 58
- 230000005684 electric field Effects 0.000 title claims abstract description 41
- 239000012528 membrane Substances 0.000 claims abstract description 122
- 239000011148 porous material Substances 0.000 claims abstract description 48
- 238000000034 method Methods 0.000 claims abstract description 47
- 150000002500 ions Chemical class 0.000 claims abstract description 12
- 238000001514 detection method Methods 0.000 claims abstract description 11
- 239000003989 dielectric material Substances 0.000 claims abstract description 7
- 230000004044 response Effects 0.000 claims abstract description 7
- 239000012530 fluid Substances 0.000 claims description 29
- 239000000463 material Substances 0.000 claims description 12
- 230000008859 change Effects 0.000 claims description 8
- 230000008569 process Effects 0.000 claims description 6
- 239000007788 liquid Substances 0.000 claims description 5
- 230000001105 regulatory effect Effects 0.000 claims description 3
- 229910004205 SiNX Inorganic materials 0.000 description 12
- 239000000243 solution Substances 0.000 description 12
- 230000015572 biosynthetic process Effects 0.000 description 10
- 238000010586 diagram Methods 0.000 description 8
- KWGKDLIKAYFUFQ-UHFFFAOYSA-M lithium chloride Chemical compound [Li+].[Cl-] KWGKDLIKAYFUFQ-UHFFFAOYSA-M 0.000 description 6
- 239000012491 analyte Substances 0.000 description 5
- 230000001276 controlling effect Effects 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 230000007246 mechanism Effects 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 230000004888 barrier function Effects 0.000 description 3
- 230000002427 irreversible effect Effects 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 230000007935 neutral effect Effects 0.000 description 3
- 150000003839 salts Chemical class 0.000 description 3
- 230000007847 structural defect Effects 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 230000005945 translocation Effects 0.000 description 3
- 238000004627 transmission electron microscopy Methods 0.000 description 3
- 230000005641 tunneling Effects 0.000 description 3
- 108020004414 DNA Proteins 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 2
- 239000003125 aqueous solvent Substances 0.000 description 2
- 239000003792 electrolyte Substances 0.000 description 2
- 238000005538 encapsulation Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 2
- 230000005012 migration Effects 0.000 description 2
- 238000013508 migration Methods 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 2
- 239000004810 polytetrafluoroethylene Substances 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 229910052582 BN Inorganic materials 0.000 description 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 102000053602 DNA Human genes 0.000 description 1
- 238000001712 DNA sequencing Methods 0.000 description 1
- 229910021607 Silver chloride Inorganic materials 0.000 description 1
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 description 1
- 238000003917 TEM image Methods 0.000 description 1
- 239000003929 acidic solution Substances 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 150000001768 cations Chemical class 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000002299 complementary DNA Substances 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 230000001143 conditioned effect Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 229910000365 copper sulfate Inorganic materials 0.000 description 1
- ARUVKPQLZAKDPS-UHFFFAOYSA-L copper(II) sulfate Chemical compound [Cu+2].[O-][S+2]([O-])([O-])[O-] ARUVKPQLZAKDPS-UHFFFAOYSA-L 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000001739 density measurement Methods 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 238000010893 electron trap Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 229910021389 graphene Inorganic materials 0.000 description 1
- 230000036541 health Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 150000004678 hydrides Chemical class 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000010348 incorporation Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 230000002045 lasting effect Effects 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- -1 polytetrafluoroethylene Polymers 0.000 description 1
- 238000006479 redox reaction Methods 0.000 description 1
- 239000012266 salt solution Substances 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- HKZLPVFGJNLROG-UHFFFAOYSA-M silver monochloride Chemical compound [Cl-].[Ag+] HKZLPVFGJNLROG-UHFFFAOYSA-M 0.000 description 1
- 239000011780 sodium chloride Substances 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 238000007619 statistical method Methods 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
- 238000009827 uniform distribution Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
- C25F3/00—Electrolytic etching or polishing
- C25F3/02—Etching
- C25F3/14—Etching locally
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D65/00—Accessories or auxiliary operations, in general, for separation processes or apparatus using semi-permeable membranes
- B01D65/02—Membrane cleaning or sterilisation ; Membrane regeneration
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
- B01D67/0081—After-treatment of organic or inorganic membranes
- B01D67/009—After-treatment of organic or inorganic membranes with wave-energy, particle-radiation or plasma
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
- B81C1/00087—Holes
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
- C25F7/00—Constructional parts, or assemblies thereof, of cells for electrolytic removal of material from objects; Servicing or operating
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0095—Semiconductive materials
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/48—Biological material, e.g. blood, urine; Haemocytometers
- G01N33/483—Physical analysis of biological material
- G01N33/487—Physical analysis of biological material of liquid biological material
- G01N33/48707—Physical analysis of biological material of liquid biological material by electrical means
- G01N33/48721—Investigating individual macromolecules, e.g. by translocation through nanopores
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2321/00—Details relating to membrane cleaning, regeneration, sterilization or to the prevention of fouling
- B01D2321/22—Electrical effects
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2323/00—Details relating to membrane preparation
- B01D2323/42—Details of membrane preparation apparatus
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2325/00—Details relating to properties of membranes
- B01D2325/02—Details relating to pores or porosity of the membranes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2325/00—Details relating to properties of membranes
- B01D2325/02—Details relating to pores or porosity of the membranes
- B01D2325/0282—Dynamic pores-stimuli responsive membranes, e.g. thermoresponsive or pH-responsive
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/03—Static structures
- B81B2203/0353—Holes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y15/00—Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Analytical Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Biochemistry (AREA)
- Pathology (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Manufacturing & Machinery (AREA)
- Biomedical Technology (AREA)
- Electrochemistry (AREA)
- Medicinal Chemistry (AREA)
- Food Science & Technology (AREA)
- Organic Chemistry (AREA)
- Metallurgy (AREA)
- Materials Engineering (AREA)
- Biophysics (AREA)
- Plasma & Fusion (AREA)
- Nanotechnology (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Hematology (AREA)
- Molecular Biology (AREA)
- Urology & Nephrology (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Inorganic Chemistry (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Separation Using Semi-Permeable Membranes (AREA)
- Steroid Compounds (AREA)
- Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201261643651P | 2012-05-07 | 2012-05-07 | |
| US201261643651P | 2012-05-07 | ||
| US201361781081P | 2013-03-14 | 2013-03-14 | |
| US201361781081P | 2013-03-14 | ||
| PCT/IB2013/000891 WO2013167955A1 (en) | 2012-05-07 | 2013-05-07 | Fabrication of nanopores using high electric fields |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ES2630064T3 true ES2630064T3 (es) | 2017-08-17 |
Family
ID=49550214
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| ES13787530.8T Active ES2630064T3 (es) | 2012-05-07 | 2013-05-07 | Fabricación de nanoporos utilizando campos eléctricos potentes |
| ES13787360.0T Active ES2629952T3 (es) | 2012-05-07 | 2013-05-07 | Procedimiento para controlar el tamaño de nanoporos de estado sólido |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| ES13787360.0T Active ES2629952T3 (es) | 2012-05-07 | 2013-05-07 | Procedimiento para controlar el tamaño de nanoporos de estado sólido |
Country Status (12)
| Country | Link |
|---|---|
| US (2) | US9777389B2 (https=) |
| EP (2) | EP2847367B1 (https=) |
| JP (3) | JP6420236B2 (https=) |
| KR (2) | KR102065745B1 (https=) |
| CN (2) | CN104662209B (https=) |
| AU (2) | AU2013257756B2 (https=) |
| BR (2) | BR112014027873B8 (https=) |
| CA (2) | CA2872602C (https=) |
| ES (2) | ES2630064T3 (https=) |
| MX (2) | MX353370B (https=) |
| SG (3) | SG11201407249XA (https=) |
| WO (2) | WO2013167952A1 (https=) |
Families Citing this family (43)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2969918B1 (en) * | 2013-03-15 | 2018-08-22 | President and Fellows of Harvard College | Fabrication of nanopores in atomically-thin membranes by ultra-short electrical pulsing |
| JP6228613B2 (ja) | 2013-12-25 | 2017-11-08 | 株式会社日立製作所 | ナノポア形成方法、ナノポア形成装置及びセット |
| JP6209122B2 (ja) * | 2014-04-02 | 2017-10-04 | 株式会社日立ハイテクノロジーズ | 孔形成方法及び測定装置 |
| DE102014111984B3 (de) * | 2014-08-21 | 2016-01-21 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Fluidische Gigaohm-Dichtung für Transmembranproteinmessungen |
| CA3005143A1 (en) | 2014-12-01 | 2016-06-16 | Cornell University | Nanopore-containing substrates with aligned nanoscale electronic elements and methods of making and using same |
| SG10201906952QA (en) * | 2014-12-19 | 2019-09-27 | Univ Ottawa | Integrating nanopore sensors within microfluidic channel arrays using controlled breakdown |
| SG11201706587TA (en) | 2015-02-24 | 2017-09-28 | Univ Ottawa | Localizing nanopore fabrication on a membrane by laser illumination during controlled breakdown |
| CN104694649A (zh) * | 2015-03-10 | 2015-06-10 | 北京大学 | 一种核酸分子低穿孔速度的纳米孔测序方法及其专用的纳米孔器件 |
| EP3268736B1 (en) * | 2015-03-12 | 2021-08-18 | Ecole Polytechnique Fédérale de Lausanne (EPFL) | Nanopore forming method and uses thereof |
| EP3067693A1 (en) | 2015-03-12 | 2016-09-14 | Ecole Polytechnique Federale de Lausanne (EPFL) | Nanopore forming method and uses thereof |
| BR112017021256A2 (pt) | 2015-04-03 | 2018-06-26 | Abbott Laboratories | dispositivos e métodos para a análise de amostras |
| WO2016161402A1 (en) | 2015-04-03 | 2016-10-06 | Abbott Laboratories | Devices and methods for sample analysis |
| GB201508669D0 (en) | 2015-05-20 | 2015-07-01 | Oxford Nanopore Tech Ltd | Methods and apparatus for forming apertures in a solid state membrane using dielectric breakdown |
| WO2017004463A1 (en) | 2015-07-01 | 2017-01-05 | Abbott Laboratories | Devices and methods for sample analysis |
| WO2018067878A1 (en) | 2016-10-05 | 2018-04-12 | Abbott Laboratories | Devices and methods for sample analysis |
| CN109791138B (zh) * | 2016-10-12 | 2021-01-08 | 豪夫迈·罗氏有限公司 | 纳米孔电压方法 |
| WO2018105123A1 (ja) * | 2016-12-09 | 2018-06-14 | 株式会社日立ハイテクノロジーズ | ナノポア形成方法、ナノポア形成装置及び生体分子計測装置 |
| JP6877466B2 (ja) * | 2017-01-10 | 2021-05-26 | 株式会社日立ハイテク | ナノポアを用いた電流計測装置及び電流計測方法 |
| EP3369474A1 (en) * | 2017-03-01 | 2018-09-05 | Helmholtz-Zentrum Geesthacht Zentrum für Material- und Küstenforschung GmbH | Isoporous block copolymer membranes in flat sheet geometry |
| NO20170513A1 (en) * | 2017-03-29 | 2018-06-04 | Condalign As | A method for forming av body comprising at least one through-going passage |
| CN110741093A (zh) | 2017-04-28 | 2020-01-31 | 渥太华大学 | 控制通过纳米孔的分子的移位 |
| WO2018209441A1 (en) * | 2017-05-17 | 2018-11-22 | The Royal Institution For The Advancement Of Learning / Mcgill University | Method and apparatus for making a nanopore in a membrane using an electric field applied via a conductive tip |
| US10618805B2 (en) | 2017-09-22 | 2020-04-14 | Applied Materials, Inc. | Method to reduce pore diameter using atomic layer deposition and etching |
| US10752496B2 (en) | 2017-09-22 | 2020-08-25 | Applied Materials, Inc. | Pore formation in a substrate |
| US10830756B2 (en) | 2017-09-22 | 2020-11-10 | Applied Materials, Inc. | Method to create a free-standing membrane for biological applications |
| JP6975609B2 (ja) * | 2017-10-19 | 2021-12-01 | 株式会社日立製作所 | 親水性保持基材、計測装置、デバイスおよび親水性保持方法 |
| WO2019109253A1 (zh) * | 2017-12-05 | 2019-06-13 | 清华大学 | 调控固态纳米孔系统中固态纳米孔有效尺寸的方法 |
| JP6959121B2 (ja) * | 2017-12-05 | 2021-11-02 | 株式会社日立ハイテク | 孔形成方法及び孔形成装置 |
| CN108279312B (zh) * | 2018-03-08 | 2021-06-01 | 冯建东 | 一种基于纳米孔的蛋白质组学分析装置及血清检测方法及应用 |
| US11454624B2 (en) | 2018-09-28 | 2022-09-27 | Ofer Wilner | Nanopore technologies |
| EP3894056B1 (en) * | 2018-12-11 | 2025-01-29 | F. Hoffmann-La Roche AG | Systems and methods for self-limiting protein pore insertion in a membrane |
| JP7174614B2 (ja) * | 2018-12-12 | 2022-11-17 | 株式会社日立製作所 | ナノポア形成方法及び分析方法 |
| US11981557B2 (en) | 2020-04-17 | 2024-05-14 | Southern Methodist University | Ohmic nanopore fabrication and real-time cleaning |
| WO2021260587A1 (en) * | 2020-06-23 | 2021-12-30 | The University Of Ottawa | Improved techniques for nanopore enlargement and formation |
| WO2022024335A1 (ja) * | 2020-07-31 | 2022-02-03 | 株式会社日立ハイテク | 生体分子分析方法、生体分子分析試薬及び生体分子分析デバイス |
| JP7440375B2 (ja) * | 2020-08-19 | 2024-02-28 | 株式会社日立製作所 | 孔形成方法及び孔形成装置 |
| JP7543174B2 (ja) * | 2021-03-03 | 2024-09-02 | 株式会社日立製作所 | ポア形成方法、およびポア形成装置 |
| CN116536745B (zh) * | 2022-05-20 | 2025-02-07 | 武汉铢寸科技有限公司 | 在膜中制造纳米孔的方法、装置及叠加电场的生成装置 |
| US20260015237A1 (en) * | 2023-05-12 | 2026-01-15 | Massachusetts Institute Of Technology | Cascaded compression of the size distribution of zero-dimensional nanostructures |
| WO2025111147A1 (en) | 2023-11-21 | 2025-05-30 | Abbott Laboratories | Two-dimensional matrix droplet array |
| CN117817059A (zh) * | 2023-12-14 | 2024-04-05 | 南京工业职业技术大学 | 含活性金属成分非晶合金微细电解加工离子扩散控制方法 |
| GB2644084A (en) | 2024-09-16 | 2026-03-18 | Oxford Nanopore Tech Plc | Augmented consensus and variant calling |
| GB202413747D0 (en) | 2024-09-18 | 2024-10-30 | Oxford Nanopore Tech Plc | Preprocessing nanopore signals |
Family Cites Families (25)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02173278A (ja) * | 1988-12-26 | 1990-07-04 | Hitachi Ltd | 微細加工方法及びその装置 |
| JPH09316692A (ja) * | 1996-05-30 | 1997-12-09 | Fine Ceramics Center | 微細孔を有するアルミナ膜及びその製造法 |
| JP3902883B2 (ja) * | 1998-03-27 | 2007-04-11 | キヤノン株式会社 | ナノ構造体及びその製造方法 |
| US7258838B2 (en) | 1999-06-22 | 2007-08-21 | President And Fellows Of Harvard College | Solid state molecular probe device |
| DE10044565B4 (de) | 2000-09-08 | 2005-06-30 | Gesellschaft für Schwerionenforschung mbH | Elektrolytische Zelle, deren Verwendung und Verfahren zum Ätzen einer in der Zelle eingespannten Membran sowie Verfahren zum Schalten einer geätzten, in der Zelle eingespannten Membran von Durchgang auf Sperrung und umgekehrt |
| JP2003001462A (ja) | 2000-09-13 | 2003-01-08 | Hamamatsu Photonics Kk | レーザ加工装置 |
| US6592742B2 (en) * | 2001-07-13 | 2003-07-15 | Applied Materials Inc. | Electrochemically assisted chemical polish |
| US6706203B2 (en) | 2001-10-30 | 2004-03-16 | Agilent Technologies, Inc. | Adjustable nanopore, nanotome, and nanotweezer |
| EP1592641B1 (en) * | 2003-02-03 | 2018-03-07 | President and Fellows of Harvard College | Controlled fabrication of gaps in electrically conducting structures |
| ES2729378T3 (es) * | 2003-12-24 | 2019-11-04 | Univ California | Ablación de tejido con electroporación irreversible |
| EP1721657A1 (en) | 2005-05-13 | 2006-11-15 | SONY DEUTSCHLAND GmbH | A method of fabricating a polymeric membrane having at least one pore |
| JP4925670B2 (ja) | 2006-01-16 | 2012-05-09 | 埼玉県 | チタン系金属製品の製造方法 |
| US7777505B2 (en) * | 2006-05-05 | 2010-08-17 | University Of Utah Research Foundation | Nanopore platforms for ion channel recordings and single molecule detection and analysis |
| US7849581B2 (en) * | 2006-05-05 | 2010-12-14 | University Of Utah Research Foundation | Nanopore electrode, nanopore membrane, methods of preparation and surface modification, and use thereof |
| DE102006035072B4 (de) | 2006-07-28 | 2009-03-12 | Westfälische Wilhelms-Universität Münster | Vorrichtung und Verfahren zum Erfassen von Partikeln mit Pipette und Nanopore |
| AU2008236694B2 (en) * | 2007-04-04 | 2014-01-23 | The Regents Of The University Of California | Compositions, devices, systems, and methods for using a nanopore |
| FR2927169B1 (fr) | 2008-02-05 | 2013-01-11 | Commissariat Energie Atomique | Procede de fonctionnalisation de la surface d'un pore |
| US20100122907A1 (en) | 2008-05-06 | 2010-05-20 | Government of the United States of America, | Single molecule mass or size spectrometry in solution using a solitary nanopore |
| ATE535800T1 (de) * | 2009-04-03 | 2011-12-15 | Nxp Bv | Sensorvorrichtung und verfahren zu dessen herstellung |
| EP3196645B1 (en) | 2009-09-18 | 2019-06-19 | President and Fellows of Harvard College | Bare single-layer graphene membrane having a nanopore enabling high-sensitivity molecular detection and analysis |
| AU2010324532B2 (en) | 2009-11-25 | 2015-02-26 | Cms Innovations Pty Ltd | Membrane and membrane separation system |
| DE102010025968B4 (de) * | 2010-07-02 | 2016-06-02 | Schott Ag | Erzeugung von Mikrolöchern |
| US9422154B2 (en) * | 2010-11-02 | 2016-08-23 | International Business Machines Corporation | Feedback control of dimensions in nanopore and nanofluidic devices |
| KR20120133653A (ko) * | 2011-05-31 | 2012-12-11 | 삼성전자주식회사 | 나노 센서, 이의 제조 방법 및 이를 사용하여 표적 분자를 검출하는 방법 |
| EP2969918B1 (en) | 2013-03-15 | 2018-08-22 | President and Fellows of Harvard College | Fabrication of nanopores in atomically-thin membranes by ultra-short electrical pulsing |
-
2013
- 2013-05-07 ES ES13787530.8T patent/ES2630064T3/es active Active
- 2013-05-07 JP JP2015510885A patent/JP6420236B2/ja active Active
- 2013-05-07 AU AU2013257756A patent/AU2013257756B2/en not_active Ceased
- 2013-05-07 KR KR1020147033950A patent/KR102065745B1/ko active Active
- 2013-05-07 US US14/399,071 patent/US9777389B2/en active Active
- 2013-05-07 WO PCT/IB2013/000884 patent/WO2013167952A1/en not_active Ceased
- 2013-05-07 BR BR112014027873A patent/BR112014027873B8/pt not_active IP Right Cessation
- 2013-05-07 ES ES13787360.0T patent/ES2629952T3/es active Active
- 2013-05-07 SG SG11201407249XA patent/SG11201407249XA/en unknown
- 2013-05-07 US US14/399,091 patent/US9777390B2/en active Active
- 2013-05-07 AU AU2013257759A patent/AU2013257759B2/en not_active Ceased
- 2013-05-07 WO PCT/IB2013/000891 patent/WO2013167955A1/en not_active Ceased
- 2013-05-07 JP JP2015510884A patent/JP6298450B2/ja active Active
- 2013-05-07 SG SG10201606334XA patent/SG10201606334XA/en unknown
- 2013-05-07 EP EP13787530.8A patent/EP2847367B1/en active Active
- 2013-05-07 MX MX2014013410A patent/MX353370B/es active IP Right Grant
- 2013-05-07 BR BR112014027829-6A patent/BR112014027829B1/pt not_active IP Right Cessation
- 2013-05-07 KR KR1020147033949A patent/KR102065754B1/ko active Active
- 2013-05-07 SG SG11201407252UA patent/SG11201407252UA/en unknown
- 2013-05-07 MX MX2014013412A patent/MX357200B/es active IP Right Grant
- 2013-05-07 CN CN201380036177.0A patent/CN104662209B/zh active Active
- 2013-05-07 EP EP13787360.0A patent/EP2846901B1/en active Active
- 2013-05-07 CA CA2872602A patent/CA2872602C/en active Active
- 2013-05-07 CA CA2872600A patent/CA2872600C/en active Active
- 2013-05-07 CN CN201380036310.2A patent/CN104411386B/zh active Active
-
2018
- 2018-06-06 JP JP2018108930A patent/JP2018187626A/ja active Pending
Also Published As
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| ES2630064T3 (es) | Fabricación de nanoporos utilizando campos eléctricos potentes | |
| CN103293209B (zh) | 一种离子敏传感器及其制作方法 | |
| Krapf et al. | Fabrication and characterization of nanopore-based electrodes with radii down to 2 nm | |
| US9537157B2 (en) | Nanodevices for generating power from molecules and batteryless sensing | |
| KR20120069720A (ko) | 고감도 분자 탐지 및 분석을 가능하게 하는 나노공극을 가지는 베어, 단일층 그래핀 멤브레인 | |
| CN105368938B (zh) | 一种基于电击穿在氮化硅薄膜上精确制备纳米孔的方法 | |
| CN105408241A (zh) | 通过超短电脉冲在原子级薄膜中产生纳米孔 | |
| WO2010033087A1 (en) | Electronic device with channel, electrodes and semiconductor formed on respective bonded substrates | |
| BR112012006182B1 (pt) | dispositivo de corte tendo pelo menos um bloco de corte unipolar, comportando uma ponte de contatos e disjuntor, comportando esse dispositivo | |
| US20160374585A1 (en) | Three-dimensional bio-medical probe sensing and contacting structures with addressibility and tunability | |
| Robinson et al. | Electrical and electrochemical characterization of proton transfer at the interface between chitosan and PdH x | |
| KR101987556B1 (ko) | 유연성 나노-포어 소자 및 이의 제조 방법 | |
| WO2014210306A1 (en) | Three-dimensional bio-medical probe sensing and contacting structures with addressiblity and tunability | |
| RU196523U1 (ru) | Газочувствительный сенсор на основе углеродных наноструктур | |
| EP2908128A1 (en) | Molecular sensing device | |
| Wang et al. | Development of stretchable membrane based nanofilters using patterned arrays of vertically grown carbon nanotubes | |
| WO2021260587A1 (en) | Improved techniques for nanopore enlargement and formation | |
| Nguyen et al. | Integrated microelectrode pore cavity device in silicon (111) | |
| Zhang et al. | Diode characteristic of electrolyte-oxide-semiconductor structure for potential chemical and biological applications |