JP6420236B2 - 高電界を用いたナノポアの作製 - Google Patents
高電界を用いたナノポアの作製 Download PDFInfo
- Publication number
- JP6420236B2 JP6420236B2 JP2015510885A JP2015510885A JP6420236B2 JP 6420236 B2 JP6420236 B2 JP 6420236B2 JP 2015510885 A JP2015510885 A JP 2015510885A JP 2015510885 A JP2015510885 A JP 2015510885A JP 6420236 B2 JP6420236 B2 JP 6420236B2
- Authority
- JP
- Japan
- Prior art keywords
- membrane
- potential
- reservoirs
- film
- electric field
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
- C25F3/00—Electrolytic etching or polishing
- C25F3/02—Etching
- C25F3/14—Etching locally
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D65/00—Accessories or auxiliary operations, in general, for separation processes or apparatus using semi-permeable membranes
- B01D65/02—Membrane cleaning or sterilisation ; Membrane regeneration
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
- B01D67/0081—After-treatment of organic or inorganic membranes
- B01D67/009—After-treatment of organic or inorganic membranes with wave-energy, particle-radiation or plasma
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
- B81C1/00087—Holes
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
- C25F7/00—Constructional parts, or assemblies thereof, of cells for electrolytic removal of material from objects; Servicing or operating
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0095—Semiconductive materials
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/48—Biological material, e.g. blood, urine; Haemocytometers
- G01N33/483—Physical analysis of biological material
- G01N33/487—Physical analysis of biological material of liquid biological material
- G01N33/48707—Physical analysis of biological material of liquid biological material by electrical means
- G01N33/48721—Investigating individual macromolecules, e.g. by translocation through nanopores
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2321/00—Details relating to membrane cleaning, regeneration, sterilization or to the prevention of fouling
- B01D2321/22—Electrical effects
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2323/00—Details relating to membrane preparation
- B01D2323/42—Details of membrane preparation apparatus
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2325/00—Details relating to properties of membranes
- B01D2325/02—Details relating to pores or porosity of the membranes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2325/00—Details relating to properties of membranes
- B01D2325/02—Details relating to pores or porosity of the membranes
- B01D2325/0282—Dynamic pores-stimuli responsive membranes, e.g. thermoresponsive or pH-responsive
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/03—Static structures
- B81B2203/0353—Holes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y15/00—Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Analytical Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Biochemistry (AREA)
- Pathology (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Manufacturing & Machinery (AREA)
- Biomedical Technology (AREA)
- Electrochemistry (AREA)
- Medicinal Chemistry (AREA)
- Food Science & Technology (AREA)
- Organic Chemistry (AREA)
- Metallurgy (AREA)
- Materials Engineering (AREA)
- Biophysics (AREA)
- Plasma & Fusion (AREA)
- Nanotechnology (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Hematology (AREA)
- Molecular Biology (AREA)
- Urology & Nephrology (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Inorganic Chemistry (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Separation Using Semi-Permeable Membranes (AREA)
- Steroid Compounds (AREA)
- Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201261643651P | 2012-05-07 | 2012-05-07 | |
| US61/643,651 | 2012-05-07 | ||
| US201361781081P | 2013-03-14 | 2013-03-14 | |
| US61/781,081 | 2013-03-14 | ||
| PCT/IB2013/000891 WO2013167955A1 (en) | 2012-05-07 | 2013-05-07 | Fabrication of nanopores using high electric fields |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018108930A Division JP2018187626A (ja) | 2012-05-07 | 2018-06-06 | 高電界を用いたナノポアの作製 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2015525114A JP2015525114A (ja) | 2015-09-03 |
| JP2015525114A5 JP2015525114A5 (https=) | 2017-12-28 |
| JP6420236B2 true JP6420236B2 (ja) | 2018-11-07 |
Family
ID=49550214
Family Applications (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015510885A Active JP6420236B2 (ja) | 2012-05-07 | 2013-05-07 | 高電界を用いたナノポアの作製 |
| JP2015510884A Active JP6298450B2 (ja) | 2012-05-07 | 2013-05-07 | 固体ナノポアの大きさを制御するための方法 |
| JP2018108930A Pending JP2018187626A (ja) | 2012-05-07 | 2018-06-06 | 高電界を用いたナノポアの作製 |
Family Applications After (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015510884A Active JP6298450B2 (ja) | 2012-05-07 | 2013-05-07 | 固体ナノポアの大きさを制御するための方法 |
| JP2018108930A Pending JP2018187626A (ja) | 2012-05-07 | 2018-06-06 | 高電界を用いたナノポアの作製 |
Country Status (12)
| Country | Link |
|---|---|
| US (2) | US9777389B2 (https=) |
| EP (2) | EP2847367B1 (https=) |
| JP (3) | JP6420236B2 (https=) |
| KR (2) | KR102065745B1 (https=) |
| CN (2) | CN104662209B (https=) |
| AU (2) | AU2013257756B2 (https=) |
| BR (2) | BR112014027873B8 (https=) |
| CA (2) | CA2872602C (https=) |
| ES (2) | ES2630064T3 (https=) |
| MX (2) | MX353370B (https=) |
| SG (3) | SG11201407249XA (https=) |
| WO (2) | WO2013167952A1 (https=) |
Families Citing this family (43)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2969918B1 (en) * | 2013-03-15 | 2018-08-22 | President and Fellows of Harvard College | Fabrication of nanopores in atomically-thin membranes by ultra-short electrical pulsing |
| JP6228613B2 (ja) | 2013-12-25 | 2017-11-08 | 株式会社日立製作所 | ナノポア形成方法、ナノポア形成装置及びセット |
| JP6209122B2 (ja) * | 2014-04-02 | 2017-10-04 | 株式会社日立ハイテクノロジーズ | 孔形成方法及び測定装置 |
| DE102014111984B3 (de) * | 2014-08-21 | 2016-01-21 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Fluidische Gigaohm-Dichtung für Transmembranproteinmessungen |
| CA3005143A1 (en) | 2014-12-01 | 2016-06-16 | Cornell University | Nanopore-containing substrates with aligned nanoscale electronic elements and methods of making and using same |
| SG10201906952QA (en) * | 2014-12-19 | 2019-09-27 | Univ Ottawa | Integrating nanopore sensors within microfluidic channel arrays using controlled breakdown |
| SG11201706587TA (en) | 2015-02-24 | 2017-09-28 | Univ Ottawa | Localizing nanopore fabrication on a membrane by laser illumination during controlled breakdown |
| CN104694649A (zh) * | 2015-03-10 | 2015-06-10 | 北京大学 | 一种核酸分子低穿孔速度的纳米孔测序方法及其专用的纳米孔器件 |
| EP3268736B1 (en) * | 2015-03-12 | 2021-08-18 | Ecole Polytechnique Fédérale de Lausanne (EPFL) | Nanopore forming method and uses thereof |
| EP3067693A1 (en) | 2015-03-12 | 2016-09-14 | Ecole Polytechnique Federale de Lausanne (EPFL) | Nanopore forming method and uses thereof |
| BR112017021256A2 (pt) | 2015-04-03 | 2018-06-26 | Abbott Laboratories | dispositivos e métodos para a análise de amostras |
| WO2016161402A1 (en) | 2015-04-03 | 2016-10-06 | Abbott Laboratories | Devices and methods for sample analysis |
| GB201508669D0 (en) | 2015-05-20 | 2015-07-01 | Oxford Nanopore Tech Ltd | Methods and apparatus for forming apertures in a solid state membrane using dielectric breakdown |
| WO2017004463A1 (en) | 2015-07-01 | 2017-01-05 | Abbott Laboratories | Devices and methods for sample analysis |
| WO2018067878A1 (en) | 2016-10-05 | 2018-04-12 | Abbott Laboratories | Devices and methods for sample analysis |
| CN109791138B (zh) * | 2016-10-12 | 2021-01-08 | 豪夫迈·罗氏有限公司 | 纳米孔电压方法 |
| WO2018105123A1 (ja) * | 2016-12-09 | 2018-06-14 | 株式会社日立ハイテクノロジーズ | ナノポア形成方法、ナノポア形成装置及び生体分子計測装置 |
| JP6877466B2 (ja) * | 2017-01-10 | 2021-05-26 | 株式会社日立ハイテク | ナノポアを用いた電流計測装置及び電流計測方法 |
| EP3369474A1 (en) * | 2017-03-01 | 2018-09-05 | Helmholtz-Zentrum Geesthacht Zentrum für Material- und Küstenforschung GmbH | Isoporous block copolymer membranes in flat sheet geometry |
| NO20170513A1 (en) * | 2017-03-29 | 2018-06-04 | Condalign As | A method for forming av body comprising at least one through-going passage |
| CN110741093A (zh) | 2017-04-28 | 2020-01-31 | 渥太华大学 | 控制通过纳米孔的分子的移位 |
| WO2018209441A1 (en) * | 2017-05-17 | 2018-11-22 | The Royal Institution For The Advancement Of Learning / Mcgill University | Method and apparatus for making a nanopore in a membrane using an electric field applied via a conductive tip |
| US10618805B2 (en) | 2017-09-22 | 2020-04-14 | Applied Materials, Inc. | Method to reduce pore diameter using atomic layer deposition and etching |
| US10752496B2 (en) | 2017-09-22 | 2020-08-25 | Applied Materials, Inc. | Pore formation in a substrate |
| US10830756B2 (en) | 2017-09-22 | 2020-11-10 | Applied Materials, Inc. | Method to create a free-standing membrane for biological applications |
| JP6975609B2 (ja) * | 2017-10-19 | 2021-12-01 | 株式会社日立製作所 | 親水性保持基材、計測装置、デバイスおよび親水性保持方法 |
| WO2019109253A1 (zh) * | 2017-12-05 | 2019-06-13 | 清华大学 | 调控固态纳米孔系统中固态纳米孔有效尺寸的方法 |
| JP6959121B2 (ja) * | 2017-12-05 | 2021-11-02 | 株式会社日立ハイテク | 孔形成方法及び孔形成装置 |
| CN108279312B (zh) * | 2018-03-08 | 2021-06-01 | 冯建东 | 一种基于纳米孔的蛋白质组学分析装置及血清检测方法及应用 |
| US11454624B2 (en) | 2018-09-28 | 2022-09-27 | Ofer Wilner | Nanopore technologies |
| EP3894056B1 (en) * | 2018-12-11 | 2025-01-29 | F. Hoffmann-La Roche AG | Systems and methods for self-limiting protein pore insertion in a membrane |
| JP7174614B2 (ja) * | 2018-12-12 | 2022-11-17 | 株式会社日立製作所 | ナノポア形成方法及び分析方法 |
| US11981557B2 (en) | 2020-04-17 | 2024-05-14 | Southern Methodist University | Ohmic nanopore fabrication and real-time cleaning |
| WO2021260587A1 (en) * | 2020-06-23 | 2021-12-30 | The University Of Ottawa | Improved techniques for nanopore enlargement and formation |
| WO2022024335A1 (ja) * | 2020-07-31 | 2022-02-03 | 株式会社日立ハイテク | 生体分子分析方法、生体分子分析試薬及び生体分子分析デバイス |
| JP7440375B2 (ja) * | 2020-08-19 | 2024-02-28 | 株式会社日立製作所 | 孔形成方法及び孔形成装置 |
| JP7543174B2 (ja) * | 2021-03-03 | 2024-09-02 | 株式会社日立製作所 | ポア形成方法、およびポア形成装置 |
| CN116536745B (zh) * | 2022-05-20 | 2025-02-07 | 武汉铢寸科技有限公司 | 在膜中制造纳米孔的方法、装置及叠加电场的生成装置 |
| US20260015237A1 (en) * | 2023-05-12 | 2026-01-15 | Massachusetts Institute Of Technology | Cascaded compression of the size distribution of zero-dimensional nanostructures |
| WO2025111147A1 (en) | 2023-11-21 | 2025-05-30 | Abbott Laboratories | Two-dimensional matrix droplet array |
| CN117817059A (zh) * | 2023-12-14 | 2024-04-05 | 南京工业职业技术大学 | 含活性金属成分非晶合金微细电解加工离子扩散控制方法 |
| GB2644084A (en) | 2024-09-16 | 2026-03-18 | Oxford Nanopore Tech Plc | Augmented consensus and variant calling |
| GB202413747D0 (en) | 2024-09-18 | 2024-10-30 | Oxford Nanopore Tech Plc | Preprocessing nanopore signals |
Family Cites Families (25)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02173278A (ja) * | 1988-12-26 | 1990-07-04 | Hitachi Ltd | 微細加工方法及びその装置 |
| JPH09316692A (ja) * | 1996-05-30 | 1997-12-09 | Fine Ceramics Center | 微細孔を有するアルミナ膜及びその製造法 |
| JP3902883B2 (ja) * | 1998-03-27 | 2007-04-11 | キヤノン株式会社 | ナノ構造体及びその製造方法 |
| US7258838B2 (en) | 1999-06-22 | 2007-08-21 | President And Fellows Of Harvard College | Solid state molecular probe device |
| DE10044565B4 (de) | 2000-09-08 | 2005-06-30 | Gesellschaft für Schwerionenforschung mbH | Elektrolytische Zelle, deren Verwendung und Verfahren zum Ätzen einer in der Zelle eingespannten Membran sowie Verfahren zum Schalten einer geätzten, in der Zelle eingespannten Membran von Durchgang auf Sperrung und umgekehrt |
| JP2003001462A (ja) | 2000-09-13 | 2003-01-08 | Hamamatsu Photonics Kk | レーザ加工装置 |
| US6592742B2 (en) * | 2001-07-13 | 2003-07-15 | Applied Materials Inc. | Electrochemically assisted chemical polish |
| US6706203B2 (en) | 2001-10-30 | 2004-03-16 | Agilent Technologies, Inc. | Adjustable nanopore, nanotome, and nanotweezer |
| EP1592641B1 (en) * | 2003-02-03 | 2018-03-07 | President and Fellows of Harvard College | Controlled fabrication of gaps in electrically conducting structures |
| ES2729378T3 (es) * | 2003-12-24 | 2019-11-04 | Univ California | Ablación de tejido con electroporación irreversible |
| EP1721657A1 (en) | 2005-05-13 | 2006-11-15 | SONY DEUTSCHLAND GmbH | A method of fabricating a polymeric membrane having at least one pore |
| JP4925670B2 (ja) | 2006-01-16 | 2012-05-09 | 埼玉県 | チタン系金属製品の製造方法 |
| US7777505B2 (en) * | 2006-05-05 | 2010-08-17 | University Of Utah Research Foundation | Nanopore platforms for ion channel recordings and single molecule detection and analysis |
| US7849581B2 (en) * | 2006-05-05 | 2010-12-14 | University Of Utah Research Foundation | Nanopore electrode, nanopore membrane, methods of preparation and surface modification, and use thereof |
| DE102006035072B4 (de) | 2006-07-28 | 2009-03-12 | Westfälische Wilhelms-Universität Münster | Vorrichtung und Verfahren zum Erfassen von Partikeln mit Pipette und Nanopore |
| AU2008236694B2 (en) * | 2007-04-04 | 2014-01-23 | The Regents Of The University Of California | Compositions, devices, systems, and methods for using a nanopore |
| FR2927169B1 (fr) | 2008-02-05 | 2013-01-11 | Commissariat Energie Atomique | Procede de fonctionnalisation de la surface d'un pore |
| US20100122907A1 (en) | 2008-05-06 | 2010-05-20 | Government of the United States of America, | Single molecule mass or size spectrometry in solution using a solitary nanopore |
| ATE535800T1 (de) * | 2009-04-03 | 2011-12-15 | Nxp Bv | Sensorvorrichtung und verfahren zu dessen herstellung |
| EP3196645B1 (en) | 2009-09-18 | 2019-06-19 | President and Fellows of Harvard College | Bare single-layer graphene membrane having a nanopore enabling high-sensitivity molecular detection and analysis |
| AU2010324532B2 (en) | 2009-11-25 | 2015-02-26 | Cms Innovations Pty Ltd | Membrane and membrane separation system |
| DE102010025968B4 (de) * | 2010-07-02 | 2016-06-02 | Schott Ag | Erzeugung von Mikrolöchern |
| US9422154B2 (en) * | 2010-11-02 | 2016-08-23 | International Business Machines Corporation | Feedback control of dimensions in nanopore and nanofluidic devices |
| KR20120133653A (ko) * | 2011-05-31 | 2012-12-11 | 삼성전자주식회사 | 나노 센서, 이의 제조 방법 및 이를 사용하여 표적 분자를 검출하는 방법 |
| EP2969918B1 (en) | 2013-03-15 | 2018-08-22 | President and Fellows of Harvard College | Fabrication of nanopores in atomically-thin membranes by ultra-short electrical pulsing |
-
2013
- 2013-05-07 ES ES13787530.8T patent/ES2630064T3/es active Active
- 2013-05-07 JP JP2015510885A patent/JP6420236B2/ja active Active
- 2013-05-07 AU AU2013257756A patent/AU2013257756B2/en not_active Ceased
- 2013-05-07 KR KR1020147033950A patent/KR102065745B1/ko active Active
- 2013-05-07 US US14/399,071 patent/US9777389B2/en active Active
- 2013-05-07 WO PCT/IB2013/000884 patent/WO2013167952A1/en not_active Ceased
- 2013-05-07 BR BR112014027873A patent/BR112014027873B8/pt not_active IP Right Cessation
- 2013-05-07 ES ES13787360.0T patent/ES2629952T3/es active Active
- 2013-05-07 SG SG11201407249XA patent/SG11201407249XA/en unknown
- 2013-05-07 US US14/399,091 patent/US9777390B2/en active Active
- 2013-05-07 AU AU2013257759A patent/AU2013257759B2/en not_active Ceased
- 2013-05-07 WO PCT/IB2013/000891 patent/WO2013167955A1/en not_active Ceased
- 2013-05-07 JP JP2015510884A patent/JP6298450B2/ja active Active
- 2013-05-07 SG SG10201606334XA patent/SG10201606334XA/en unknown
- 2013-05-07 EP EP13787530.8A patent/EP2847367B1/en active Active
- 2013-05-07 MX MX2014013410A patent/MX353370B/es active IP Right Grant
- 2013-05-07 BR BR112014027829-6A patent/BR112014027829B1/pt not_active IP Right Cessation
- 2013-05-07 KR KR1020147033949A patent/KR102065754B1/ko active Active
- 2013-05-07 SG SG11201407252UA patent/SG11201407252UA/en unknown
- 2013-05-07 MX MX2014013412A patent/MX357200B/es active IP Right Grant
- 2013-05-07 CN CN201380036177.0A patent/CN104662209B/zh active Active
- 2013-05-07 EP EP13787360.0A patent/EP2846901B1/en active Active
- 2013-05-07 CA CA2872602A patent/CA2872602C/en active Active
- 2013-05-07 CA CA2872600A patent/CA2872600C/en active Active
- 2013-05-07 CN CN201380036310.2A patent/CN104411386B/zh active Active
-
2018
- 2018-06-06 JP JP2018108930A patent/JP2018187626A/ja active Pending
Also Published As
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP6420236B2 (ja) | 高電界を用いたナノポアの作製 | |
| Kwok et al. | Nanopore fabrication by controlled dielectric breakdown | |
| KR102144995B1 (ko) | 그래핀 나노포어를 포함하는 나노포어 소자 및 그 제조 방법 | |
| Kovarik et al. | Effect of conical nanopore diameter on ion current rectification | |
| Zeng et al. | Rectification of protein translocation in truncated pyramidal nanopores | |
| Nam et al. | Ionic field effect transistors with sub-10 nm multiple nanopores | |
| Kalman et al. | Control of ionic transport through gated single conical nanopores | |
| Hyun et al. | Probing access resistance of solid‐state nanopores with a scanning‐probe microscope tip | |
| CN105368938B (zh) | 一种基于电击穿在氮化硅薄膜上精确制备纳米孔的方法 | |
| CN107207246A (zh) | 具有对齐的纳米级电子元件的含纳米孔的基板及其制备和使用方法 | |
| JP2010502935A (ja) | ナノ細孔粒子分析器およびその準備と使用の方法 | |
| JP2015525114A5 (https=) | ||
| CN107530638A (zh) | 在受控击穿期间通过激光照射而在膜上定位纳米孔制造 | |
| KR101987556B1 (ko) | 유연성 나노-포어 소자 및 이의 제조 방법 | |
| KR20140012506A (ko) | 비대칭 전해질 농도를 이용하여 생물분자를 분석하는 방법 | |
| Kawaguchi et al. | Enhanced nanoparticle sensing in a highly viscous nanopore | |
| US11224842B2 (en) | Method and apparatus for making a nanopore in a membrane using an electric field applied via a conductive tip | |
| WO2021260587A1 (en) | Improved techniques for nanopore enlargement and formation | |
| EP2908128A1 (en) | Molecular sensing device | |
| Hu et al. | Detection and analysis of DNA recapture through a solid-state nanopore | |
| CN113548641A (zh) | 一种限域介电击穿固态纳米孔器件的制备方法及其产品和应用 | |
| Joshi et al. | Electromigration of charged polystyrene beads through silicon nanopores filled with low ionic strength solutions | |
| JP2009258039A (ja) | 電荷検出器および電荷検出方法 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20150114 Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20150225 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A821 Effective date: 20150225 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20160317 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20170125 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20170207 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20170502 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20170613 |
|
| A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20170913 |
|
| A524 | Written submission of copy of amendment under article 19 pct |
Free format text: JAPANESE INTERMEDIATE CODE: A524 Effective date: 20171113 |
|
| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20180206 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20180606 |
|
| A911 | Transfer to examiner for re-examination before appeal (zenchi) |
Free format text: JAPANESE INTERMEDIATE CODE: A911 Effective date: 20180727 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20180821 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20180906 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20180925 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20181011 |
|
| R150 | Certificate of patent or registration of utility model |
Ref document number: 6420236 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |