JP6420236B2 - 高電界を用いたナノポアの作製 - Google Patents

高電界を用いたナノポアの作製 Download PDF

Info

Publication number
JP6420236B2
JP6420236B2 JP2015510885A JP2015510885A JP6420236B2 JP 6420236 B2 JP6420236 B2 JP 6420236B2 JP 2015510885 A JP2015510885 A JP 2015510885A JP 2015510885 A JP2015510885 A JP 2015510885A JP 6420236 B2 JP6420236 B2 JP 6420236B2
Authority
JP
Japan
Prior art keywords
membrane
potential
reservoirs
film
electric field
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2015510885A
Other languages
English (en)
Japanese (ja)
Other versions
JP2015525114A (ja
JP2015525114A5 (https=
Inventor
ヘイ クォック ウィング
ヘイ クォック ウィング
タバード−コッサ ヴィンセント
タバード−コッサ ヴィンセント
アレキサンダー ザーケル ブリッグス カイル
アレキサンダー ザーケル ブリッグス カイル
Original Assignee
ジ ユニバーシティ オブ オタワ
ジ ユニバーシティ オブ オタワ
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ジ ユニバーシティ オブ オタワ, ジ ユニバーシティ オブ オタワ filed Critical ジ ユニバーシティ オブ オタワ
Publication of JP2015525114A publication Critical patent/JP2015525114A/ja
Publication of JP2015525114A5 publication Critical patent/JP2015525114A5/ja
Application granted granted Critical
Publication of JP6420236B2 publication Critical patent/JP6420236B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25FPROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F3/00Electrolytic etching or polishing
    • C25F3/02Etching
    • C25F3/14Etching locally
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D65/00Accessories or auxiliary operations, in general, for separation processes or apparatus using semi-permeable membranes
    • B01D65/02Membrane cleaning or sterilisation ; Membrane regeneration
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D67/00Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
    • B01D67/0081After-treatment of organic or inorganic membranes
    • B01D67/009After-treatment of organic or inorganic membranes with wave-energy, particle-radiation or plasma
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00023Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
    • B81C1/00087Holes
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25FPROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F7/00Constructional parts, or assemblies thereof, of cells for electrolytic removal of material from objects; Servicing or operating
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00Measuring arrangements characterised by the use of electric or magnetic techniques
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0095Semiconductive materials
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/48Biological material, e.g. blood, urine; Haemocytometers
    • G01N33/483Physical analysis of biological material
    • G01N33/487Physical analysis of biological material of liquid biological material
    • G01N33/48707Physical analysis of biological material of liquid biological material by electrical means
    • G01N33/48721Investigating individual macromolecules, e.g. by translocation through nanopores
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2321/00Details relating to membrane cleaning, regeneration, sterilization or to the prevention of fouling
    • B01D2321/22Electrical effects
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2323/00Details relating to membrane preparation
    • B01D2323/42Details of membrane preparation apparatus
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2325/00Details relating to properties of membranes
    • B01D2325/02Details relating to pores or porosity of the membranes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2325/00Details relating to properties of membranes
    • B01D2325/02Details relating to pores or porosity of the membranes
    • B01D2325/0282Dynamic pores-stimuli responsive membranes, e.g. thermoresponsive or pH-responsive
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00Basic microelectromechanical structures
    • B81B2203/03Static structures
    • B81B2203/0353Holes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y15/00Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • Pathology (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Manufacturing & Machinery (AREA)
  • Biomedical Technology (AREA)
  • Electrochemistry (AREA)
  • Medicinal Chemistry (AREA)
  • Food Science & Technology (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Materials Engineering (AREA)
  • Biophysics (AREA)
  • Plasma & Fusion (AREA)
  • Nanotechnology (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Hematology (AREA)
  • Molecular Biology (AREA)
  • Urology & Nephrology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Inorganic Chemistry (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
  • Steroid Compounds (AREA)
  • Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
JP2015510885A 2012-05-07 2013-05-07 高電界を用いたナノポアの作製 Active JP6420236B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201261643651P 2012-05-07 2012-05-07
US61/643,651 2012-05-07
US201361781081P 2013-03-14 2013-03-14
US61/781,081 2013-03-14
PCT/IB2013/000891 WO2013167955A1 (en) 2012-05-07 2013-05-07 Fabrication of nanopores using high electric fields

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2018108930A Division JP2018187626A (ja) 2012-05-07 2018-06-06 高電界を用いたナノポアの作製

Publications (3)

Publication Number Publication Date
JP2015525114A JP2015525114A (ja) 2015-09-03
JP2015525114A5 JP2015525114A5 (https=) 2017-12-28
JP6420236B2 true JP6420236B2 (ja) 2018-11-07

Family

ID=49550214

Family Applications (3)

Application Number Title Priority Date Filing Date
JP2015510885A Active JP6420236B2 (ja) 2012-05-07 2013-05-07 高電界を用いたナノポアの作製
JP2015510884A Active JP6298450B2 (ja) 2012-05-07 2013-05-07 固体ナノポアの大きさを制御するための方法
JP2018108930A Pending JP2018187626A (ja) 2012-05-07 2018-06-06 高電界を用いたナノポアの作製

Family Applications After (2)

Application Number Title Priority Date Filing Date
JP2015510884A Active JP6298450B2 (ja) 2012-05-07 2013-05-07 固体ナノポアの大きさを制御するための方法
JP2018108930A Pending JP2018187626A (ja) 2012-05-07 2018-06-06 高電界を用いたナノポアの作製

Country Status (12)

Country Link
US (2) US9777389B2 (https=)
EP (2) EP2847367B1 (https=)
JP (3) JP6420236B2 (https=)
KR (2) KR102065745B1 (https=)
CN (2) CN104662209B (https=)
AU (2) AU2013257756B2 (https=)
BR (2) BR112014027873B8 (https=)
CA (2) CA2872602C (https=)
ES (2) ES2630064T3 (https=)
MX (2) MX353370B (https=)
SG (3) SG11201407249XA (https=)
WO (2) WO2013167952A1 (https=)

Families Citing this family (43)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2969918B1 (en) * 2013-03-15 2018-08-22 President and Fellows of Harvard College Fabrication of nanopores in atomically-thin membranes by ultra-short electrical pulsing
JP6228613B2 (ja) 2013-12-25 2017-11-08 株式会社日立製作所 ナノポア形成方法、ナノポア形成装置及びセット
JP6209122B2 (ja) * 2014-04-02 2017-10-04 株式会社日立ハイテクノロジーズ 孔形成方法及び測定装置
DE102014111984B3 (de) * 2014-08-21 2016-01-21 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Fluidische Gigaohm-Dichtung für Transmembranproteinmessungen
CA3005143A1 (en) 2014-12-01 2016-06-16 Cornell University Nanopore-containing substrates with aligned nanoscale electronic elements and methods of making and using same
SG10201906952QA (en) * 2014-12-19 2019-09-27 Univ Ottawa Integrating nanopore sensors within microfluidic channel arrays using controlled breakdown
SG11201706587TA (en) 2015-02-24 2017-09-28 Univ Ottawa Localizing nanopore fabrication on a membrane by laser illumination during controlled breakdown
CN104694649A (zh) * 2015-03-10 2015-06-10 北京大学 一种核酸分子低穿孔速度的纳米孔测序方法及其专用的纳米孔器件
EP3268736B1 (en) * 2015-03-12 2021-08-18 Ecole Polytechnique Fédérale de Lausanne (EPFL) Nanopore forming method and uses thereof
EP3067693A1 (en) 2015-03-12 2016-09-14 Ecole Polytechnique Federale de Lausanne (EPFL) Nanopore forming method and uses thereof
BR112017021256A2 (pt) 2015-04-03 2018-06-26 Abbott Laboratories dispositivos e métodos para a análise de amostras
WO2016161402A1 (en) 2015-04-03 2016-10-06 Abbott Laboratories Devices and methods for sample analysis
GB201508669D0 (en) 2015-05-20 2015-07-01 Oxford Nanopore Tech Ltd Methods and apparatus for forming apertures in a solid state membrane using dielectric breakdown
WO2017004463A1 (en) 2015-07-01 2017-01-05 Abbott Laboratories Devices and methods for sample analysis
WO2018067878A1 (en) 2016-10-05 2018-04-12 Abbott Laboratories Devices and methods for sample analysis
CN109791138B (zh) * 2016-10-12 2021-01-08 豪夫迈·罗氏有限公司 纳米孔电压方法
WO2018105123A1 (ja) * 2016-12-09 2018-06-14 株式会社日立ハイテクノロジーズ ナノポア形成方法、ナノポア形成装置及び生体分子計測装置
JP6877466B2 (ja) * 2017-01-10 2021-05-26 株式会社日立ハイテク ナノポアを用いた電流計測装置及び電流計測方法
EP3369474A1 (en) * 2017-03-01 2018-09-05 Helmholtz-Zentrum Geesthacht Zentrum für Material- und Küstenforschung GmbH Isoporous block copolymer membranes in flat sheet geometry
NO20170513A1 (en) * 2017-03-29 2018-06-04 Condalign As A method for forming av body comprising at least one through-going passage
CN110741093A (zh) 2017-04-28 2020-01-31 渥太华大学 控制通过纳米孔的分子的移位
WO2018209441A1 (en) * 2017-05-17 2018-11-22 The Royal Institution For The Advancement Of Learning / Mcgill University Method and apparatus for making a nanopore in a membrane using an electric field applied via a conductive tip
US10618805B2 (en) 2017-09-22 2020-04-14 Applied Materials, Inc. Method to reduce pore diameter using atomic layer deposition and etching
US10752496B2 (en) 2017-09-22 2020-08-25 Applied Materials, Inc. Pore formation in a substrate
US10830756B2 (en) 2017-09-22 2020-11-10 Applied Materials, Inc. Method to create a free-standing membrane for biological applications
JP6975609B2 (ja) * 2017-10-19 2021-12-01 株式会社日立製作所 親水性保持基材、計測装置、デバイスおよび親水性保持方法
WO2019109253A1 (zh) * 2017-12-05 2019-06-13 清华大学 调控固态纳米孔系统中固态纳米孔有效尺寸的方法
JP6959121B2 (ja) * 2017-12-05 2021-11-02 株式会社日立ハイテク 孔形成方法及び孔形成装置
CN108279312B (zh) * 2018-03-08 2021-06-01 冯建东 一种基于纳米孔的蛋白质组学分析装置及血清检测方法及应用
US11454624B2 (en) 2018-09-28 2022-09-27 Ofer Wilner Nanopore technologies
EP3894056B1 (en) * 2018-12-11 2025-01-29 F. Hoffmann-La Roche AG Systems and methods for self-limiting protein pore insertion in a membrane
JP7174614B2 (ja) * 2018-12-12 2022-11-17 株式会社日立製作所 ナノポア形成方法及び分析方法
US11981557B2 (en) 2020-04-17 2024-05-14 Southern Methodist University Ohmic nanopore fabrication and real-time cleaning
WO2021260587A1 (en) * 2020-06-23 2021-12-30 The University Of Ottawa Improved techniques for nanopore enlargement and formation
WO2022024335A1 (ja) * 2020-07-31 2022-02-03 株式会社日立ハイテク 生体分子分析方法、生体分子分析試薬及び生体分子分析デバイス
JP7440375B2 (ja) * 2020-08-19 2024-02-28 株式会社日立製作所 孔形成方法及び孔形成装置
JP7543174B2 (ja) * 2021-03-03 2024-09-02 株式会社日立製作所 ポア形成方法、およびポア形成装置
CN116536745B (zh) * 2022-05-20 2025-02-07 武汉铢寸科技有限公司 在膜中制造纳米孔的方法、装置及叠加电场的生成装置
US20260015237A1 (en) * 2023-05-12 2026-01-15 Massachusetts Institute Of Technology Cascaded compression of the size distribution of zero-dimensional nanostructures
WO2025111147A1 (en) 2023-11-21 2025-05-30 Abbott Laboratories Two-dimensional matrix droplet array
CN117817059A (zh) * 2023-12-14 2024-04-05 南京工业职业技术大学 含活性金属成分非晶合金微细电解加工离子扩散控制方法
GB2644084A (en) 2024-09-16 2026-03-18 Oxford Nanopore Tech Plc Augmented consensus and variant calling
GB202413747D0 (en) 2024-09-18 2024-10-30 Oxford Nanopore Tech Plc Preprocessing nanopore signals

Family Cites Families (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02173278A (ja) * 1988-12-26 1990-07-04 Hitachi Ltd 微細加工方法及びその装置
JPH09316692A (ja) * 1996-05-30 1997-12-09 Fine Ceramics Center 微細孔を有するアルミナ膜及びその製造法
JP3902883B2 (ja) * 1998-03-27 2007-04-11 キヤノン株式会社 ナノ構造体及びその製造方法
US7258838B2 (en) 1999-06-22 2007-08-21 President And Fellows Of Harvard College Solid state molecular probe device
DE10044565B4 (de) 2000-09-08 2005-06-30 Gesellschaft für Schwerionenforschung mbH Elektrolytische Zelle, deren Verwendung und Verfahren zum Ätzen einer in der Zelle eingespannten Membran sowie Verfahren zum Schalten einer geätzten, in der Zelle eingespannten Membran von Durchgang auf Sperrung und umgekehrt
JP2003001462A (ja) 2000-09-13 2003-01-08 Hamamatsu Photonics Kk レーザ加工装置
US6592742B2 (en) * 2001-07-13 2003-07-15 Applied Materials Inc. Electrochemically assisted chemical polish
US6706203B2 (en) 2001-10-30 2004-03-16 Agilent Technologies, Inc. Adjustable nanopore, nanotome, and nanotweezer
EP1592641B1 (en) * 2003-02-03 2018-03-07 President and Fellows of Harvard College Controlled fabrication of gaps in electrically conducting structures
ES2729378T3 (es) * 2003-12-24 2019-11-04 Univ California Ablación de tejido con electroporación irreversible
EP1721657A1 (en) 2005-05-13 2006-11-15 SONY DEUTSCHLAND GmbH A method of fabricating a polymeric membrane having at least one pore
JP4925670B2 (ja) 2006-01-16 2012-05-09 埼玉県 チタン系金属製品の製造方法
US7777505B2 (en) * 2006-05-05 2010-08-17 University Of Utah Research Foundation Nanopore platforms for ion channel recordings and single molecule detection and analysis
US7849581B2 (en) * 2006-05-05 2010-12-14 University Of Utah Research Foundation Nanopore electrode, nanopore membrane, methods of preparation and surface modification, and use thereof
DE102006035072B4 (de) 2006-07-28 2009-03-12 Westfälische Wilhelms-Universität Münster Vorrichtung und Verfahren zum Erfassen von Partikeln mit Pipette und Nanopore
AU2008236694B2 (en) * 2007-04-04 2014-01-23 The Regents Of The University Of California Compositions, devices, systems, and methods for using a nanopore
FR2927169B1 (fr) 2008-02-05 2013-01-11 Commissariat Energie Atomique Procede de fonctionnalisation de la surface d'un pore
US20100122907A1 (en) 2008-05-06 2010-05-20 Government of the United States of America, Single molecule mass or size spectrometry in solution using a solitary nanopore
ATE535800T1 (de) * 2009-04-03 2011-12-15 Nxp Bv Sensorvorrichtung und verfahren zu dessen herstellung
EP3196645B1 (en) 2009-09-18 2019-06-19 President and Fellows of Harvard College Bare single-layer graphene membrane having a nanopore enabling high-sensitivity molecular detection and analysis
AU2010324532B2 (en) 2009-11-25 2015-02-26 Cms Innovations Pty Ltd Membrane and membrane separation system
DE102010025968B4 (de) * 2010-07-02 2016-06-02 Schott Ag Erzeugung von Mikrolöchern
US9422154B2 (en) * 2010-11-02 2016-08-23 International Business Machines Corporation Feedback control of dimensions in nanopore and nanofluidic devices
KR20120133653A (ko) * 2011-05-31 2012-12-11 삼성전자주식회사 나노 센서, 이의 제조 방법 및 이를 사용하여 표적 분자를 검출하는 방법
EP2969918B1 (en) 2013-03-15 2018-08-22 President and Fellows of Harvard College Fabrication of nanopores in atomically-thin membranes by ultra-short electrical pulsing

Also Published As

Publication number Publication date
CN104411386A (zh) 2015-03-11
JP2015525114A (ja) 2015-09-03
EP2847367A1 (en) 2015-03-18
CA2872600C (en) 2021-11-23
CA2872600A1 (en) 2013-11-14
KR20150040799A (ko) 2015-04-15
ES2629952T3 (es) 2017-08-16
MX353370B (es) 2018-01-09
AU2013257756B2 (en) 2017-05-04
AU2013257759A1 (en) 2014-11-27
EP2847367A4 (en) 2016-01-13
WO2013167952A1 (en) 2013-11-14
AU2013257756A1 (en) 2014-11-27
CN104662209A (zh) 2015-05-27
SG10201606334XA (en) 2016-09-29
ES2630064T3 (es) 2017-08-17
CA2872602A1 (en) 2013-11-14
BR112014027829A2 (pt) 2017-06-27
BR112014027873A2 (pt) 2017-06-27
KR102065745B1 (ko) 2020-01-14
EP2846901B1 (en) 2017-03-29
EP2846901A4 (en) 2016-01-13
SG11201407249XA (en) 2014-12-30
KR20150037748A (ko) 2015-04-08
CA2872602C (en) 2020-08-25
CN104662209B (zh) 2017-03-15
MX357200B (es) 2018-06-29
EP2846901A1 (en) 2015-03-18
US9777390B2 (en) 2017-10-03
CN104411386B (zh) 2016-10-12
MX2014013412A (es) 2016-04-07
JP6298450B2 (ja) 2018-03-20
EP2847367B1 (en) 2017-03-29
BR112014027873B1 (pt) 2021-05-25
KR102065754B1 (ko) 2020-02-11
US20150108008A1 (en) 2015-04-23
SG11201407252UA (en) 2014-12-30
US9777389B2 (en) 2017-10-03
BR112014027873B8 (pt) 2021-11-03
JP2015517401A (ja) 2015-06-22
MX2014013410A (es) 2015-12-08
JP2018187626A (ja) 2018-11-29
AU2013257759B2 (en) 2017-07-13
BR112014027829B1 (pt) 2021-03-23
WO2013167955A1 (en) 2013-11-14
US20150109008A1 (en) 2015-04-23

Similar Documents

Publication Publication Date Title
JP6420236B2 (ja) 高電界を用いたナノポアの作製
Kwok et al. Nanopore fabrication by controlled dielectric breakdown
KR102144995B1 (ko) 그래핀 나노포어를 포함하는 나노포어 소자 및 그 제조 방법
Kovarik et al. Effect of conical nanopore diameter on ion current rectification
Zeng et al. Rectification of protein translocation in truncated pyramidal nanopores
Nam et al. Ionic field effect transistors with sub-10 nm multiple nanopores
Kalman et al. Control of ionic transport through gated single conical nanopores
Hyun et al. Probing access resistance of solid‐state nanopores with a scanning‐probe microscope tip
CN105368938B (zh) 一种基于电击穿在氮化硅薄膜上精确制备纳米孔的方法
CN107207246A (zh) 具有对齐的纳米级电子元件的含纳米孔的基板及其制备和使用方法
JP2010502935A (ja) ナノ細孔粒子分析器およびその準備と使用の方法
JP2015525114A5 (https=)
CN107530638A (zh) 在受控击穿期间通过激光照射而在膜上定位纳米孔制造
KR101987556B1 (ko) 유연성 나노-포어 소자 및 이의 제조 방법
KR20140012506A (ko) 비대칭 전해질 농도를 이용하여 생물분자를 분석하는 방법
Kawaguchi et al. Enhanced nanoparticle sensing in a highly viscous nanopore
US11224842B2 (en) Method and apparatus for making a nanopore in a membrane using an electric field applied via a conductive tip
WO2021260587A1 (en) Improved techniques for nanopore enlargement and formation
EP2908128A1 (en) Molecular sensing device
Hu et al. Detection and analysis of DNA recapture through a solid-state nanopore
CN113548641A (zh) 一种限域介电击穿固态纳米孔器件的制备方法及其产品和应用
Joshi et al. Electromigration of charged polystyrene beads through silicon nanopores filled with low ionic strength solutions
JP2009258039A (ja) 電荷検出器および電荷検出方法

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20150114

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20150225

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A821

Effective date: 20150225

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20160317

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20170125

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20170207

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20170502

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20170613

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20170913

A524 Written submission of copy of amendment under article 19 pct

Free format text: JAPANESE INTERMEDIATE CODE: A524

Effective date: 20171113

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20180206

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20180606

A911 Transfer to examiner for re-examination before appeal (zenchi)

Free format text: JAPANESE INTERMEDIATE CODE: A911

Effective date: 20180727

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20180821

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20180906

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20180925

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20181011

R150 Certificate of patent or registration of utility model

Ref document number: 6420236

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250