SG10201606334XA - Fabrication of nanopores using high electric fields - Google Patents

Fabrication of nanopores using high electric fields

Info

Publication number
SG10201606334XA
SG10201606334XA SG10201606334XA SG10201606334XA SG10201606334XA SG 10201606334X A SG10201606334X A SG 10201606334XA SG 10201606334X A SG10201606334X A SG 10201606334XA SG 10201606334X A SG10201606334X A SG 10201606334XA SG 10201606334X A SG10201606334X A SG 10201606334XA
Authority
SG
Singapore
Prior art keywords
nanopores
fabrication
electric fields
high electric
fields
Prior art date
Application number
SG10201606334XA
Inventor
Wing Hei Kwok
Vincent Tabard-Cossa
Kyle Alexander Zarkel Briggs
Original Assignee
Univ Ottawa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Ottawa filed Critical Univ Ottawa
Publication of SG10201606334XA publication Critical patent/SG10201606334XA/en

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25FPROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F3/00Electrolytic etching or polishing
    • C25F3/02Etching
    • C25F3/14Etching locally
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D65/00Accessories or auxiliary operations, in general, for separation processes or apparatus using semi-permeable membranes
    • B01D65/02Membrane cleaning or sterilisation ; Membrane regeneration
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D67/00Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
    • B01D67/0081After-treatment of organic or inorganic membranes
    • B01D67/009After-treatment of organic or inorganic membranes with wave-energy, particle-radiation or plasma
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00023Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
    • B81C1/00087Holes
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25FPROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F7/00Constructional parts, or assemblies thereof, of cells for electrolytic removal of material from objects; Servicing or operating
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00Measuring arrangements characterised by the use of electric or magnetic techniques
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/48Biological material, e.g. blood, urine; Haemocytometers
    • G01N33/483Physical analysis of biological material
    • G01N33/487Physical analysis of biological material of liquid biological material
    • G01N33/48707Physical analysis of biological material of liquid biological material by electrical means
    • G01N33/48721Investigating individual macromolecules, e.g. by translocation through nanopores
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2321/00Details relating to membrane cleaning, regeneration, sterilization or to the prevention of fouling
    • B01D2321/22Electrical effects
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2323/00Details relating to membrane preparation
    • B01D2323/42Details of membrane preparation apparatus
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2325/00Details relating to properties of membranes
    • B01D2325/02Details relating to pores or porosity of the membranes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2325/00Details relating to properties of membranes
    • B01D2325/02Details relating to pores or porosity of the membranes
    • B01D2325/0282Dynamic pores-stimuli responsive membranes, e.g. thermoresponsive or pH-responsive
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00Basic microelectromechanical structures
    • B81B2203/03Static structures
    • B81B2203/0353Holes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y15/00Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N2033/0095Semiconductive materials
SG10201606334XA 2012-05-07 2013-05-07 Fabrication of nanopores using high electric fields SG10201606334XA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201261643651P 2012-05-07 2012-05-07
US201361781081P 2013-03-14 2013-03-14

Publications (1)

Publication Number Publication Date
SG10201606334XA true SG10201606334XA (en) 2016-09-29

Family

ID=49550214

Family Applications (3)

Application Number Title Priority Date Filing Date
SG11201407249XA SG11201407249XA (en) 2012-05-07 2013-05-07 Fabrication of nanopores using high electric fields
SG10201606334XA SG10201606334XA (en) 2012-05-07 2013-05-07 Fabrication of nanopores using high electric fields
SG11201407252UA SG11201407252UA (en) 2012-05-07 2013-05-07 Method for controlling the size of solid-state nanopores

Family Applications Before (1)

Application Number Title Priority Date Filing Date
SG11201407249XA SG11201407249XA (en) 2012-05-07 2013-05-07 Fabrication of nanopores using high electric fields

Family Applications After (1)

Application Number Title Priority Date Filing Date
SG11201407252UA SG11201407252UA (en) 2012-05-07 2013-05-07 Method for controlling the size of solid-state nanopores

Country Status (12)

Country Link
US (2) US9777390B2 (en)
EP (2) EP2847367B1 (en)
JP (3) JP6298450B2 (en)
KR (2) KR102065754B1 (en)
CN (2) CN104411386B (en)
AU (2) AU2013257756B2 (en)
BR (2) BR112014027873B8 (en)
CA (2) CA2872602C (en)
ES (2) ES2630064T3 (en)
MX (2) MX353370B (en)
SG (3) SG11201407249XA (en)
WO (2) WO2013167955A1 (en)

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EP3261753B1 (en) * 2015-02-24 2020-04-08 The University of Ottawa Localizing nanopore fabrication on a membrane by laser illumination during controlled breakdown
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BR112019022297A2 (en) 2017-04-28 2020-05-26 The University Of Ottawa DETECTION SYSTEM AND STRUCTURE TO CONTROL THE TRANSLOCATION OF A TARGET MOLECULE THROUGH A NANOPORE, METHOD TO CONTROL THE TRANSLOCATION OF A POLYMER TARGET THROUGH A DETECTION MEMBER AND METHOD OF CONTROLING A TRANSMISSION OF A POLICY OF CHANGING A POLYMER'S CHANGE. NANODISPOSITIVE
WO2018209441A1 (en) * 2017-05-17 2018-11-22 The Royal Institution For The Advancement Of Learning / Mcgill University Method and apparatus for making a nanopore in a membrane using an electric field applied via a conductive tip
US10618805B2 (en) 2017-09-22 2020-04-14 Applied Materials, Inc. Method to reduce pore diameter using atomic layer deposition and etching
US10830756B2 (en) 2017-09-22 2020-11-10 Applied Materials, Inc. Method to create a free-standing membrane for biological applications
US10752496B2 (en) 2017-09-22 2020-08-25 Applied Materials, Inc. Pore formation in a substrate
JP6975609B2 (en) * 2017-10-19 2021-12-01 株式会社日立製作所 Hydrophilicity retaining substrate, measuring device, device and hydrophilicity retention method
JP6959121B2 (en) * 2017-12-05 2021-11-02 株式会社日立ハイテク Hole forming method and hole forming device
WO2019109253A1 (en) * 2017-12-05 2019-06-13 清华大学 Method for adjusting effective size of solid-state nanopore in solid-state nanopore system
CN108279312B (en) * 2018-03-08 2021-06-01 冯建东 Nanopore-based proteomics analysis device, serum detection method and application
US11454624B2 (en) 2018-09-28 2022-09-27 Ofer Wilner Nanopore technologies
JP7174614B2 (en) * 2018-12-12 2022-11-17 株式会社日立製作所 Nanopore formation method and analysis method
WO2021260587A1 (en) * 2020-06-23 2021-12-30 The University Of Ottawa Improved techniques for nanopore enlargement and formation
US20230266264A1 (en) * 2020-07-31 2023-08-24 Hitachi High-Tech Corporation Biomolecule analysis method, biomolecule analyzing reagent, and biomolecule analysis device
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JP2022134179A (en) * 2021-03-03 2022-09-15 株式会社日立製作所 Method and device for forming pore

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Also Published As

Publication number Publication date
US9777389B2 (en) 2017-10-03
AU2013257756B2 (en) 2017-05-04
KR20150037748A (en) 2015-04-08
EP2847367B1 (en) 2017-03-29
SG11201407252UA (en) 2014-12-30
CN104662209A (en) 2015-05-27
JP2018187626A (en) 2018-11-29
JP2015517401A (en) 2015-06-22
BR112014027829B1 (en) 2021-03-23
AU2013257756A1 (en) 2014-11-27
WO2013167955A1 (en) 2013-11-14
ES2630064T3 (en) 2017-08-17
CN104662209B (en) 2017-03-15
JP2015525114A (en) 2015-09-03
MX353370B (en) 2018-01-09
EP2846901A1 (en) 2015-03-18
KR102065754B1 (en) 2020-02-11
SG11201407249XA (en) 2014-12-30
KR20150040799A (en) 2015-04-15
AU2013257759A1 (en) 2014-11-27
CA2872600C (en) 2021-11-23
BR112014027873A2 (en) 2017-06-27
MX2014013410A (en) 2015-12-08
CA2872602C (en) 2020-08-25
MX2014013412A (en) 2016-04-07
EP2847367A4 (en) 2016-01-13
CN104411386B (en) 2016-10-12
CA2872602A1 (en) 2013-11-14
BR112014027873B8 (en) 2021-11-03
KR102065745B1 (en) 2020-01-14
CA2872600A1 (en) 2013-11-14
JP6420236B2 (en) 2018-11-07
US9777390B2 (en) 2017-10-03
MX357200B (en) 2018-06-29
JP6298450B2 (en) 2018-03-20
ES2629952T3 (en) 2017-08-16
CN104411386A (en) 2015-03-11
EP2846901B1 (en) 2017-03-29
AU2013257759B2 (en) 2017-07-13
BR112014027829A2 (en) 2017-06-27
BR112014027873B1 (en) 2021-05-25
WO2013167952A1 (en) 2013-11-14
US20150109008A1 (en) 2015-04-23
EP2846901A4 (en) 2016-01-13
EP2847367A1 (en) 2015-03-18
US20150108008A1 (en) 2015-04-23

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