AU2013257756B2 - Method for controlling the size of solid-state nanopores - Google Patents

Method for controlling the size of solid-state nanopores Download PDF

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Publication number
AU2013257756B2
AU2013257756B2 AU2013257756A AU2013257756A AU2013257756B2 AU 2013257756 B2 AU2013257756 B2 AU 2013257756B2 AU 2013257756 A AU2013257756 A AU 2013257756A AU 2013257756 A AU2013257756 A AU 2013257756A AU 2013257756 B2 AU2013257756 B2 AU 2013257756B2
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nanopore
electric potential
value
size
current
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Ceased
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AU2013257756A
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AU2013257756A1 (en
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Eric BEAMISH
Michel Godin
Wing Hei KWOK
Vincent TABARD-COSSA
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University of Ottawa
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University of Ottawa
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    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25FPROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F3/00Electrolytic etching or polishing
    • C25F3/02Etching
    • C25F3/14Etching locally
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D65/00Accessories or auxiliary operations, in general, for separation processes or apparatus using semi-permeable membranes
    • B01D65/02Membrane cleaning or sterilisation ; Membrane regeneration
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D67/00Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
    • B01D67/0081After-treatment of organic or inorganic membranes
    • B01D67/009After-treatment of organic or inorganic membranes with wave-energy, particle-radiation or plasma
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00023Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
    • B81C1/00087Holes
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25FPROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F7/00Constructional parts, or assemblies thereof, of cells for electrolytic removal of material from objects; Servicing or operating
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00Measuring arrangements characterised by the use of electric or magnetic techniques
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0095Semiconductive materials
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/48Biological material, e.g. blood, urine; Haemocytometers
    • G01N33/483Physical analysis of biological material
    • G01N33/487Physical analysis of biological material of liquid biological material
    • G01N33/48707Physical analysis of biological material of liquid biological material by electrical means
    • G01N33/48721Investigating individual macromolecules, e.g. by translocation through nanopores
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2321/00Details relating to membrane cleaning, regeneration, sterilization or to the prevention of fouling
    • B01D2321/22Electrical effects
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2323/00Details relating to membrane preparation
    • B01D2323/42Details of membrane preparation apparatus
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2325/00Details relating to properties of membranes
    • B01D2325/02Details relating to pores or porosity of the membranes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2325/00Details relating to properties of membranes
    • B01D2325/02Details relating to pores or porosity of the membranes
    • B01D2325/0282Dynamic pores-stimuli responsive membranes, e.g. thermoresponsive or pH-responsive
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00Basic microelectromechanical structures
    • B81B2203/03Static structures
    • B81B2203/0353Holes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y15/00Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • Pathology (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Manufacturing & Machinery (AREA)
  • Biomedical Technology (AREA)
  • Electrochemistry (AREA)
  • Medicinal Chemistry (AREA)
  • Food Science & Technology (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Materials Engineering (AREA)
  • Biophysics (AREA)
  • Plasma & Fusion (AREA)
  • Nanotechnology (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Hematology (AREA)
  • Molecular Biology (AREA)
  • Urology & Nephrology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Inorganic Chemistry (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
  • Steroid Compounds (AREA)
  • Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
AU2013257756A 2012-05-07 2013-05-07 Method for controlling the size of solid-state nanopores Ceased AU2013257756B2 (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201261643651P 2012-05-07 2012-05-07
US61/643,651 2012-05-07
US201361781081P 2013-03-14 2013-03-14
US61/781,081 2013-03-14
PCT/IB2013/000884 WO2013167952A1 (en) 2012-05-07 2013-05-07 Method for controlling the size of solid-state nanopores

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AU2013257756A1 AU2013257756A1 (en) 2014-11-27
AU2013257756B2 true AU2013257756B2 (en) 2017-05-04

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AU2013257756A Ceased AU2013257756B2 (en) 2012-05-07 2013-05-07 Method for controlling the size of solid-state nanopores
AU2013257759A Ceased AU2013257759B2 (en) 2012-05-07 2013-05-07 Fabrication of nanopores using high electric fields

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AU2013257759A Ceased AU2013257759B2 (en) 2012-05-07 2013-05-07 Fabrication of nanopores using high electric fields

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US (2) US9777389B2 (https=)
EP (2) EP2847367B1 (https=)
JP (3) JP6420236B2 (https=)
KR (2) KR102065745B1 (https=)
CN (2) CN104662209B (https=)
AU (2) AU2013257756B2 (https=)
BR (2) BR112014027873B8 (https=)
CA (2) CA2872602C (https=)
ES (2) ES2630064T3 (https=)
MX (2) MX353370B (https=)
SG (3) SG11201407249XA (https=)
WO (2) WO2013167952A1 (https=)

Families Citing this family (43)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2969918B1 (en) * 2013-03-15 2018-08-22 President and Fellows of Harvard College Fabrication of nanopores in atomically-thin membranes by ultra-short electrical pulsing
JP6228613B2 (ja) 2013-12-25 2017-11-08 株式会社日立製作所 ナノポア形成方法、ナノポア形成装置及びセット
JP6209122B2 (ja) * 2014-04-02 2017-10-04 株式会社日立ハイテクノロジーズ 孔形成方法及び測定装置
DE102014111984B3 (de) * 2014-08-21 2016-01-21 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Fluidische Gigaohm-Dichtung für Transmembranproteinmessungen
CA3005143A1 (en) 2014-12-01 2016-06-16 Cornell University Nanopore-containing substrates with aligned nanoscale electronic elements and methods of making and using same
SG10201906952QA (en) * 2014-12-19 2019-09-27 Univ Ottawa Integrating nanopore sensors within microfluidic channel arrays using controlled breakdown
SG11201706587TA (en) 2015-02-24 2017-09-28 Univ Ottawa Localizing nanopore fabrication on a membrane by laser illumination during controlled breakdown
CN104694649A (zh) * 2015-03-10 2015-06-10 北京大学 一种核酸分子低穿孔速度的纳米孔测序方法及其专用的纳米孔器件
EP3268736B1 (en) * 2015-03-12 2021-08-18 Ecole Polytechnique Fédérale de Lausanne (EPFL) Nanopore forming method and uses thereof
EP3067693A1 (en) 2015-03-12 2016-09-14 Ecole Polytechnique Federale de Lausanne (EPFL) Nanopore forming method and uses thereof
BR112017021256A2 (pt) 2015-04-03 2018-06-26 Abbott Laboratories dispositivos e métodos para a análise de amostras
WO2016161402A1 (en) 2015-04-03 2016-10-06 Abbott Laboratories Devices and methods for sample analysis
GB201508669D0 (en) 2015-05-20 2015-07-01 Oxford Nanopore Tech Ltd Methods and apparatus for forming apertures in a solid state membrane using dielectric breakdown
WO2017004463A1 (en) 2015-07-01 2017-01-05 Abbott Laboratories Devices and methods for sample analysis
WO2018067878A1 (en) 2016-10-05 2018-04-12 Abbott Laboratories Devices and methods for sample analysis
CN109791138B (zh) * 2016-10-12 2021-01-08 豪夫迈·罗氏有限公司 纳米孔电压方法
WO2018105123A1 (ja) * 2016-12-09 2018-06-14 株式会社日立ハイテクノロジーズ ナノポア形成方法、ナノポア形成装置及び生体分子計測装置
JP6877466B2 (ja) * 2017-01-10 2021-05-26 株式会社日立ハイテク ナノポアを用いた電流計測装置及び電流計測方法
EP3369474A1 (en) * 2017-03-01 2018-09-05 Helmholtz-Zentrum Geesthacht Zentrum für Material- und Küstenforschung GmbH Isoporous block copolymer membranes in flat sheet geometry
NO20170513A1 (en) * 2017-03-29 2018-06-04 Condalign As A method for forming av body comprising at least one through-going passage
CN110741093A (zh) 2017-04-28 2020-01-31 渥太华大学 控制通过纳米孔的分子的移位
WO2018209441A1 (en) * 2017-05-17 2018-11-22 The Royal Institution For The Advancement Of Learning / Mcgill University Method and apparatus for making a nanopore in a membrane using an electric field applied via a conductive tip
US10618805B2 (en) 2017-09-22 2020-04-14 Applied Materials, Inc. Method to reduce pore diameter using atomic layer deposition and etching
US10752496B2 (en) 2017-09-22 2020-08-25 Applied Materials, Inc. Pore formation in a substrate
US10830756B2 (en) 2017-09-22 2020-11-10 Applied Materials, Inc. Method to create a free-standing membrane for biological applications
JP6975609B2 (ja) * 2017-10-19 2021-12-01 株式会社日立製作所 親水性保持基材、計測装置、デバイスおよび親水性保持方法
WO2019109253A1 (zh) * 2017-12-05 2019-06-13 清华大学 调控固态纳米孔系统中固态纳米孔有效尺寸的方法
JP6959121B2 (ja) * 2017-12-05 2021-11-02 株式会社日立ハイテク 孔形成方法及び孔形成装置
CN108279312B (zh) * 2018-03-08 2021-06-01 冯建东 一种基于纳米孔的蛋白质组学分析装置及血清检测方法及应用
US11454624B2 (en) 2018-09-28 2022-09-27 Ofer Wilner Nanopore technologies
EP3894056B1 (en) * 2018-12-11 2025-01-29 F. Hoffmann-La Roche AG Systems and methods for self-limiting protein pore insertion in a membrane
JP7174614B2 (ja) * 2018-12-12 2022-11-17 株式会社日立製作所 ナノポア形成方法及び分析方法
US11981557B2 (en) 2020-04-17 2024-05-14 Southern Methodist University Ohmic nanopore fabrication and real-time cleaning
WO2021260587A1 (en) * 2020-06-23 2021-12-30 The University Of Ottawa Improved techniques for nanopore enlargement and formation
WO2022024335A1 (ja) * 2020-07-31 2022-02-03 株式会社日立ハイテク 生体分子分析方法、生体分子分析試薬及び生体分子分析デバイス
JP7440375B2 (ja) * 2020-08-19 2024-02-28 株式会社日立製作所 孔形成方法及び孔形成装置
JP7543174B2 (ja) * 2021-03-03 2024-09-02 株式会社日立製作所 ポア形成方法、およびポア形成装置
CN116536745B (zh) * 2022-05-20 2025-02-07 武汉铢寸科技有限公司 在膜中制造纳米孔的方法、装置及叠加电场的生成装置
US20260015237A1 (en) * 2023-05-12 2026-01-15 Massachusetts Institute Of Technology Cascaded compression of the size distribution of zero-dimensional nanostructures
WO2025111147A1 (en) 2023-11-21 2025-05-30 Abbott Laboratories Two-dimensional matrix droplet array
CN117817059A (zh) * 2023-12-14 2024-04-05 南京工业职业技术大学 含活性金属成分非晶合金微细电解加工离子扩散控制方法
GB2644084A (en) 2024-09-16 2026-03-18 Oxford Nanopore Tech Plc Augmented consensus and variant calling
GB202413747D0 (en) 2024-09-18 2024-10-30 Oxford Nanopore Tech Plc Preprocessing nanopore signals

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110174629A1 (en) * 2008-02-05 2011-07-21 Comm. A L'Energie Atom. et aux Energies Alterna Method for functionalising the wall of a pore
US20120103821A1 (en) * 2010-11-02 2012-05-03 International Business Machines Corporation Feedback control of dimensions in nanopore and nanofluidic devices

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02173278A (ja) * 1988-12-26 1990-07-04 Hitachi Ltd 微細加工方法及びその装置
JPH09316692A (ja) * 1996-05-30 1997-12-09 Fine Ceramics Center 微細孔を有するアルミナ膜及びその製造法
JP3902883B2 (ja) * 1998-03-27 2007-04-11 キヤノン株式会社 ナノ構造体及びその製造方法
US7258838B2 (en) 1999-06-22 2007-08-21 President And Fellows Of Harvard College Solid state molecular probe device
DE10044565B4 (de) 2000-09-08 2005-06-30 Gesellschaft für Schwerionenforschung mbH Elektrolytische Zelle, deren Verwendung und Verfahren zum Ätzen einer in der Zelle eingespannten Membran sowie Verfahren zum Schalten einer geätzten, in der Zelle eingespannten Membran von Durchgang auf Sperrung und umgekehrt
JP2003001462A (ja) 2000-09-13 2003-01-08 Hamamatsu Photonics Kk レーザ加工装置
US6592742B2 (en) * 2001-07-13 2003-07-15 Applied Materials Inc. Electrochemically assisted chemical polish
US6706203B2 (en) 2001-10-30 2004-03-16 Agilent Technologies, Inc. Adjustable nanopore, nanotome, and nanotweezer
EP1592641B1 (en) * 2003-02-03 2018-03-07 President and Fellows of Harvard College Controlled fabrication of gaps in electrically conducting structures
ES2729378T3 (es) * 2003-12-24 2019-11-04 Univ California Ablación de tejido con electroporación irreversible
EP1721657A1 (en) 2005-05-13 2006-11-15 SONY DEUTSCHLAND GmbH A method of fabricating a polymeric membrane having at least one pore
JP4925670B2 (ja) 2006-01-16 2012-05-09 埼玉県 チタン系金属製品の製造方法
US7777505B2 (en) * 2006-05-05 2010-08-17 University Of Utah Research Foundation Nanopore platforms for ion channel recordings and single molecule detection and analysis
US7849581B2 (en) * 2006-05-05 2010-12-14 University Of Utah Research Foundation Nanopore electrode, nanopore membrane, methods of preparation and surface modification, and use thereof
DE102006035072B4 (de) 2006-07-28 2009-03-12 Westfälische Wilhelms-Universität Münster Vorrichtung und Verfahren zum Erfassen von Partikeln mit Pipette und Nanopore
AU2008236694B2 (en) * 2007-04-04 2014-01-23 The Regents Of The University Of California Compositions, devices, systems, and methods for using a nanopore
US20100122907A1 (en) 2008-05-06 2010-05-20 Government of the United States of America, Single molecule mass or size spectrometry in solution using a solitary nanopore
ATE535800T1 (de) * 2009-04-03 2011-12-15 Nxp Bv Sensorvorrichtung und verfahren zu dessen herstellung
EP3196645B1 (en) 2009-09-18 2019-06-19 President and Fellows of Harvard College Bare single-layer graphene membrane having a nanopore enabling high-sensitivity molecular detection and analysis
AU2010324532B2 (en) 2009-11-25 2015-02-26 Cms Innovations Pty Ltd Membrane and membrane separation system
DE102010025968B4 (de) * 2010-07-02 2016-06-02 Schott Ag Erzeugung von Mikrolöchern
KR20120133653A (ko) * 2011-05-31 2012-12-11 삼성전자주식회사 나노 센서, 이의 제조 방법 및 이를 사용하여 표적 분자를 검출하는 방법
EP2969918B1 (en) 2013-03-15 2018-08-22 President and Fellows of Harvard College Fabrication of nanopores in atomically-thin membranes by ultra-short electrical pulsing

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110174629A1 (en) * 2008-02-05 2011-07-21 Comm. A L'Energie Atom. et aux Energies Alterna Method for functionalising the wall of a pore
US20120103821A1 (en) * 2010-11-02 2012-05-03 International Business Machines Corporation Feedback control of dimensions in nanopore and nanofluidic devices

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CN104411386A (zh) 2015-03-11
JP2015525114A (ja) 2015-09-03
EP2847367A1 (en) 2015-03-18
CA2872600C (en) 2021-11-23
CA2872600A1 (en) 2013-11-14
KR20150040799A (ko) 2015-04-15
ES2629952T3 (es) 2017-08-16
MX353370B (es) 2018-01-09
AU2013257759A1 (en) 2014-11-27
EP2847367A4 (en) 2016-01-13
WO2013167952A1 (en) 2013-11-14
AU2013257756A1 (en) 2014-11-27
CN104662209A (zh) 2015-05-27
SG10201606334XA (en) 2016-09-29
ES2630064T3 (es) 2017-08-17
CA2872602A1 (en) 2013-11-14
BR112014027829A2 (pt) 2017-06-27
BR112014027873A2 (pt) 2017-06-27
KR102065745B1 (ko) 2020-01-14
EP2846901B1 (en) 2017-03-29
EP2846901A4 (en) 2016-01-13
SG11201407249XA (en) 2014-12-30
KR20150037748A (ko) 2015-04-08
CA2872602C (en) 2020-08-25
CN104662209B (zh) 2017-03-15
MX357200B (es) 2018-06-29
EP2846901A1 (en) 2015-03-18
US9777390B2 (en) 2017-10-03
CN104411386B (zh) 2016-10-12
MX2014013412A (es) 2016-04-07
JP6298450B2 (ja) 2018-03-20
EP2847367B1 (en) 2017-03-29
BR112014027873B1 (pt) 2021-05-25
KR102065754B1 (ko) 2020-02-11
US20150108008A1 (en) 2015-04-23
SG11201407252UA (en) 2014-12-30
US9777389B2 (en) 2017-10-03
BR112014027873B8 (pt) 2021-11-03
JP2015517401A (ja) 2015-06-22
MX2014013410A (es) 2015-12-08
JP2018187626A (ja) 2018-11-29
JP6420236B2 (ja) 2018-11-07
AU2013257759B2 (en) 2017-07-13
BR112014027829B1 (pt) 2021-03-23
WO2013167955A1 (en) 2013-11-14
US20150109008A1 (en) 2015-04-23

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