ATE535800T1 - Sensorvorrichtung und verfahren zu dessen herstellung - Google Patents

Sensorvorrichtung und verfahren zu dessen herstellung

Info

Publication number
ATE535800T1
ATE535800T1 AT09157350T AT09157350T ATE535800T1 AT E535800 T1 ATE535800 T1 AT E535800T1 AT 09157350 T AT09157350 T AT 09157350T AT 09157350 T AT09157350 T AT 09157350T AT E535800 T1 ATE535800 T1 AT E535800T1
Authority
AT
Austria
Prior art keywords
sensor device
producing same
multilayer structure
sensing arrangement
fluidic sample
Prior art date
Application number
AT09157350T
Other languages
English (en)
Inventor
Evelyne Gridelet
Tello Pablo Garcia
Duuren Michiel Van
Nader Akil
Original Assignee
Nxp Bv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nxp Bv filed Critical Nxp Bv
Application granted granted Critical
Publication of ATE535800T1 publication Critical patent/ATE535800T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/48—Biological material, e.g. blood, urine; Haemocytometers
    • G01N33/50—Chemical analysis of biological material, e.g. blood, urine; Testing involving biospecific ligand binding methods; Immunological testing
    • G01N33/53—Immunoassay; Biospecific binding assay; Materials therefor
    • G01N33/543—Immunoassay; Biospecific binding assay; Materials therefor with an insoluble carrier for immobilising immunochemicals
    • G01N33/54366—Apparatus specially adapted for solid-phase testing
    • G01N33/54373—Apparatus specially adapted for solid-phase testing involving physiochemical end-point determination, e.g. wave-guides, FETS, gratings
    • G01N33/5438—Electrodes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
    • B81C1/00087—Holes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/48—Biological material, e.g. blood, urine; Haemocytometers
    • G01N33/483—Physical analysis of biological material
    • G01N33/487—Physical analysis of biological material of liquid biological material
    • G01N33/48707—Physical analysis of biological material of liquid biological material by electrical means
    • G01N33/48721—Investigating individual macromolecules, e.g. by translocation through nanopores
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making

Landscapes

  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Immunology (AREA)
  • Biomedical Technology (AREA)
  • Physics & Mathematics (AREA)
  • Hematology (AREA)
  • Analytical Chemistry (AREA)
  • Molecular Biology (AREA)
  • Urology & Nephrology (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Medicinal Chemistry (AREA)
  • Food Science & Technology (AREA)
  • Pathology (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Microbiology (AREA)
  • Cell Biology (AREA)
  • Biotechnology (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Nanotechnology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Biophysics (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Apparatus Associated With Microorganisms And Enzymes (AREA)
  • Investigating Or Analysing Materials By The Use Of Chemical Reactions (AREA)
AT09157350T 2009-04-03 2009-04-03 Sensorvorrichtung und verfahren zu dessen herstellung ATE535800T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP09157350A EP2237027B1 (de) 2009-04-03 2009-04-03 Sensorvorrichtung und Verfahren zu dessen Herstellung

Publications (1)

Publication Number Publication Date
ATE535800T1 true ATE535800T1 (de) 2011-12-15

Family

ID=41111390

Family Applications (1)

Application Number Title Priority Date Filing Date
AT09157350T ATE535800T1 (de) 2009-04-03 2009-04-03 Sensorvorrichtung und verfahren zu dessen herstellung

Country Status (5)

Country Link
US (1) US8794054B2 (de)
EP (1) EP2237027B1 (de)
CN (1) CN102369430A (de)
AT (1) ATE535800T1 (de)
WO (1) WO2010113090A1 (de)

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* Cited by examiner, † Cited by third party
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KR101648417B1 (ko) * 2010-05-14 2016-08-16 서울대학교산학협력단 절연된 박막 전극의 전위 측정을 통한 나노포어 입자 검출기
KR101910978B1 (ko) * 2011-06-22 2018-10-24 삼성전자주식회사 나노 센서 및 그의 제조 방법
US8541849B2 (en) * 2012-02-14 2013-09-24 Genia Technologies, Inc. Noise shielding techniques for ultra low current measurements in biochemical applications
WO2013167952A1 (en) * 2012-05-07 2013-11-14 The University Of Ottawa Method for controlling the size of solid-state nanopores
EP2682745B1 (de) * 2012-07-06 2019-05-15 Stichting IMEC Nederland Überwachung von Flüssigkeitsgehalt
DE102012217228A1 (de) * 2012-09-25 2014-03-27 Siemens Aktiengesellschaft Herstellungsverfahren für ein Nanoporen-aufweisendes Teil und entsprechendes Nanoporen-aufweisendes Teil
US9093594B2 (en) 2012-10-17 2015-07-28 Robert Bosch Gmbh Multi-stack film bolometer
US9322820B2 (en) * 2013-03-14 2016-04-26 Wisconsin Alumni Research Foundation System and apparatus for nanopore sequencing
US10004434B1 (en) * 2013-03-15 2018-06-26 Georgetown University Microfluidic systems for electrochemical transdermal analyte sensing using a capillary-located electrode
US9161712B2 (en) * 2013-03-26 2015-10-20 Google Inc. Systems and methods for encapsulating electronics in a mountable device
US10006899B2 (en) 2014-03-25 2018-06-26 Genia Technologies, Inc. Nanopore-based sequencing chips using stacked wafer technology
WO2017023931A1 (en) 2015-08-03 2017-02-09 Georgetown University Apparatus and method for delivery of antimicrobial during a transdermal sampling and delivery process
JP6831839B2 (ja) * 2015-10-14 2021-02-17 エスエフシー フルーイディクス、インコーポレイテッド 溶液中の電気活性種の存在又は流れを検出する電気信号の測定
TWI618930B (zh) * 2015-10-27 2018-03-21 財團法人工業技術研究院 氣體感測裝置及氣體感測方法
US10669579B2 (en) * 2016-07-15 2020-06-02 International Business Machines Corporation DNA sequencing with stacked nanopores
CN114078795B (zh) * 2020-08-13 2024-10-22 中芯国际集成电路制造(上海)有限公司 晶圆焊垫结构及其形成方法
EP4075131B1 (de) 2021-04-16 2025-03-19 Imec VZW Nanoporentransistor für biosensorik
US12105136B2 (en) * 2021-09-09 2024-10-01 Kla Corporation Method for determining material parameters of a multilayer test sample
US20240210343A1 (en) * 2022-12-23 2024-06-27 Imec Vzw Nanopore sensing device with multiple sensing layers

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5795782A (en) 1995-03-17 1998-08-18 President & Fellows Of Harvard College Characterization of individual polymer molecules based on monomer-interface interactions
WO2000078668A1 (en) 1999-06-22 2000-12-28 President And Fellows Of Harvard College Control of solid state dimensional features
US20060134713A1 (en) * 2002-03-21 2006-06-22 Lifescan, Inc. Biosensor apparatus and methods of use
US20050019784A1 (en) * 2002-05-20 2005-01-27 Xing Su Method and apparatus for nucleic acid sequencing and identification
US7250115B2 (en) 2003-06-12 2007-07-31 Agilent Technologies, Inc Nanopore with resonant tunneling electrodes
CN100595581C (zh) * 2004-09-10 2010-03-24 株式会社村田制作所 液体中物质检测传感器及使用它的液体中物质检测装置
US7417418B1 (en) 2005-06-14 2008-08-26 Ayliffe Harold E Thin film sensor
US7741142B2 (en) * 2005-11-22 2010-06-22 Hewlett-Packard Development Company, L.P. Method of fabricating a biosensor
US7553730B2 (en) * 2006-07-14 2009-06-30 Agilent Technologies, Inc. Methods of fabrication employing nanoscale mandrels
US7867782B2 (en) * 2006-10-19 2011-01-11 Agilent Technologies, Inc. Nanoscale moiety placement methods

Also Published As

Publication number Publication date
WO2010113090A1 (en) 2010-10-07
US20120060589A1 (en) 2012-03-15
EP2237027B1 (de) 2011-11-30
CN102369430A (zh) 2012-03-07
US8794054B2 (en) 2014-08-05
EP2237027A1 (de) 2010-10-06

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