ES2091975T3 - Placa de electrodo y procedimiento para la produccion de la misma. - Google Patents

Placa de electrodo y procedimiento para la produccion de la misma.

Info

Publication number
ES2091975T3
ES2091975T3 ES92109763T ES92109763T ES2091975T3 ES 2091975 T3 ES2091975 T3 ES 2091975T3 ES 92109763 T ES92109763 T ES 92109763T ES 92109763 T ES92109763 T ES 92109763T ES 2091975 T3 ES2091975 T3 ES 2091975T3
Authority
ES
Spain
Prior art keywords
layer
molybdenum
electrode plate
procedure
production
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES92109763T
Other languages
English (en)
Inventor
Masayuki Shimamune
Takashi Enomoto
Toshifumi Yoshioka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Application granted granted Critical
Publication of ES2091975T3 publication Critical patent/ES2091975T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1343—Electrodes
    • G02F1/13439—Electrodes characterised by their electrical, optical, physical properties; materials therefor; method of making
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K2323/00—Functional layers of liquid crystal optical display excluding electroactive liquid crystal layer characterised by chemical composition
    • C09K2323/06—Substrate layer characterised by chemical composition
    • C09K2323/061—Inorganic, e.g. ceramic, metallic or glass
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12736—Al-base component
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12771—Transition metal-base component

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Mathematical Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Liquid Crystal (AREA)
  • Battery Electrode And Active Subsutance (AREA)
  • Secondary Cells (AREA)
  • Inert Electrodes (AREA)

Abstract

SE PRESENTA UNA PLACA DE ELECTRODOS ADECUADA PARA SU USO EN UN DISPOSITIVO ELECTROOPTICO, TAL COMO UN DISPOSITIVO DE CRISTAL LIQUIDO, LA PLACA SE FORMA DISPONIENDO SUCESIVAMENTE SOBRE UN SUBSTRATO UNA PRIMERA CAPA DE UNA PELICULA CONDUCTORA TRANSPARENTE, UNA SEGUNDA CAPA DE MOLIBDENO O DE UNA ALEACION DE MOLIBDENO, UNA TERCERA CAPA DE ALUMINIO O DE UNA ALEACION DE ALUMINIO, Y UNA CUARTA CAPA DE MOLIBDENO O UNA ALEACION DE MOLIBDENO. LA ESTRUCTURA LAMINADA DE ELECTRODOS SE OBTIENE POR UN PROCESO FOTOLITOGRAFICO, SEGUIDO DE LA SEPARACION DE LA FOTORESISTENCIA CON UN LIQUIDO DECAPANTE, DURANTE LA CUAL LA CUARTA CAPA DE MOLIBDENO FUNCIONA COMO PELICULA PROTECTORA PARA LA TERCERA CAPA DE ALUMINIO CONTRA EL LIQUIDO DECAPANTE PARA EVITAR LA FORMACION DE DEFECTOS EN EL ELECTRODO.
ES92109763T 1991-06-12 1992-06-10 Placa de electrodo y procedimiento para la produccion de la misma. Expired - Lifetime ES2091975T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3140107A JP2952075B2 (ja) 1991-06-12 1991-06-12 液晶素子の製造法

Publications (1)

Publication Number Publication Date
ES2091975T3 true ES2091975T3 (es) 1996-11-16

Family

ID=15261098

Family Applications (1)

Application Number Title Priority Date Filing Date
ES92109763T Expired - Lifetime ES2091975T3 (es) 1991-06-12 1992-06-10 Placa de electrodo y procedimiento para la produccion de la misma.

Country Status (6)

Country Link
US (1) US5361153A (es)
EP (1) EP0518296B1 (es)
JP (1) JP2952075B2 (es)
AT (1) ATE142355T1 (es)
DE (1) DE69213338T2 (es)
ES (1) ES2091975T3 (es)

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JP2673460B2 (ja) * 1990-02-26 1997-11-05 キヤノン株式会社 液晶表示素子
JPH08509832A (ja) * 1992-12-14 1996-10-15 ウェスチングハウス・ノーデン・システムズ，インコーポレイテッド 黒ずんだ金属電極を有する昼光下で視やすい薄膜ｅｌディスプレイ
US5539551A (en) * 1992-12-28 1996-07-23 Casio Computer Co., Ltd. LCD TFT drain and source electrodes having ohmic barrier, primary conductor, and liquid impermeable layers and method of making
US5342477A (en) * 1993-07-14 1994-08-30 Micron Display Technology, Inc. Low resistance electrodes useful in flat panel displays
GB2283123B (en) * 1993-10-23 1997-10-22 Samsung Display Devices Co Ltd A method of forming an electrode for a liquid crystal display
US5566011A (en) * 1994-12-08 1996-10-15 Luncent Technologies Inc. Antiflector black matrix having successively a chromium oxide layer, a molybdenum layer and a second chromium oxide layer
US5751391A (en) * 1995-04-27 1998-05-12 Canon Kabushiki Kaisha Liquid crystal device with elongated projection height smaller than liquid crystal thickness and process for producing same
EP0740184A3 (en) 1995-04-28 1998-07-29 Canon Kabushiki Kaisha Liquid crystal device, process for producing same and liquid crystal apparatus
US6320639B1 (en) 1996-03-11 2001-11-20 Canon Kabushiki Kaisha Liquid crystal device and process for production thereof
US6208400B1 (en) * 1996-03-15 2001-03-27 Canon Kabushiki Kaisha Electrode plate having metal electrodes of aluminum or nickel and copper or silver disposed thereon
US5670062A (en) * 1996-06-07 1997-09-23 Lucent Technologies Inc. Method for producing tapered lines
JP2985124B2 (ja) * 1997-06-12 1999-11-29 株式会社日立製作所 液晶表示装置
KR100660811B1 (ko) * 1999-12-31 2006-12-26 엘지.필립스 엘시디 주식회사 액정 표시장치용 배선 형성방법
JP3617458B2 (ja) * 2000-02-18 2005-02-02 セイコーエプソン株式会社 表示装置用基板、液晶装置及び電子機器
JP4943589B2 (ja) * 2001-04-26 2012-05-30 ゲットナー・ファンデーション・エルエルシー 液晶表示装置の製造方法
US8514340B2 (en) 2002-11-08 2013-08-20 Lg Display Co., Ltd. Method of fabricating array substrate having double-layered patterns
KR100883769B1 (ko) * 2002-11-08 2009-02-18 엘지디스플레이 주식회사 액정표시장치용 어레이기판 제조방법
JP4093147B2 (ja) * 2003-09-04 2008-06-04 三菱電機株式会社 エッチング液及びエッチング方法
US7240981B2 (en) 2004-02-27 2007-07-10 Hewlett-Packard Development Company, L.P. Wide array fluid ejection device

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JPS60188925A (ja) * 1984-03-09 1985-09-26 Canon Inc 光学変調素子の製造法
JPS60220316A (ja) * 1984-04-16 1985-11-05 Canon Inc 液晶光学素子
US4979805A (en) * 1984-07-23 1990-12-25 Canon Kabushiki Kaisha Ferroelectric liquid crystal device containing optically active azo or azoxy benzene type mesomorphic compound with extended life
JPS61147232A (ja) * 1984-12-20 1986-07-04 Canon Inc 液晶素子
JPS61260222A (ja) * 1985-05-15 1986-11-18 Canon Inc 液晶素子
US4775225A (en) * 1985-05-16 1988-10-04 Canon Kabushiki Kaisha Liquid crystal device having pillar spacers with small base periphery width in direction perpendicular to orientation treatment
JPS6259922A (ja) * 1985-09-10 1987-03-16 Canon Inc 強誘電性液晶素子
JPH0685032B2 (ja) * 1985-10-17 1994-10-26 キヤノン株式会社 カイラルスメクティック液晶素子
US4709934A (en) * 1985-12-18 1987-12-01 Kabushiki Kaisha Showa Seisakusho Vehicle leveling system
EP0226218B1 (en) * 1985-12-18 1993-07-14 Canon Kabushiki Kaisha Liquid crystal device
JP2654940B2 (ja) * 1985-12-24 1997-09-17 キヤノン株式会社 電気光学素子の製造方法
US4682758A (en) * 1986-03-05 1987-07-28 Keystone International, Inc. Disk/stem connection apparatus for butterfly valve
JPS62284334A (ja) * 1986-06-03 1987-12-10 Canon Inc 液晶装置
US4773738A (en) * 1986-08-27 1988-09-27 Canon Kabushiki Kaisha Optical modulation device using ferroelectric liquid crystal and AC and DC driving voltages
NL8702508A (nl) * 1986-10-22 1988-05-16 Toppan Printing Co Ltd Electrodeplaat voor kleurenweergeefinrichting.
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JPS63289533A (ja) * 1987-05-22 1988-11-28 Oki Electric Ind Co Ltd 液晶ディスプレイ装置
US5000545A (en) * 1987-05-28 1991-03-19 Canon Kabushiki Kaisha Liquid crystal device with metal electrode partially overlying transparent electrode
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JP2770944B2 (ja) * 1987-08-19 1998-07-02 キヤノン株式会社 液晶素子
US5005953A (en) * 1987-10-06 1991-04-09 Canon Kabushiki Kaisha High contrast liquid crystal element
JP2566807B2 (ja) * 1987-11-11 1996-12-25 キヤノン株式会社 光学活性物質、その製造方法およびそれを含む液晶組成物
JP2610467B2 (ja) * 1987-11-12 1997-05-14 キヤノン株式会社 液晶性化合物、それを含有する液晶組成物およびそれを使用した液晶素子
JPH01179915A (ja) * 1988-01-11 1989-07-18 Canon Inc 液晶素子
US5034151A (en) * 1988-03-28 1991-07-23 Canon Kabushiki Kaisha Mesomorphic compound, ferroelectric liquid crystal composition containing same and ferroelectric liquid crystal device
EP0347913B1 (en) * 1988-06-23 1997-09-03 Canon Kabushiki Kaisha Liquid crystal device
DE3841843C1 (es) * 1988-12-13 1990-02-15 Th. Goldschmidt Ag, 4300 Essen, De
JP2801269B2 (ja) * 1989-07-10 1998-09-21 キヤノン株式会社 化合物およびこれを含む液晶組成物およびこれを使用した液晶素子
JP2763339B2 (ja) * 1989-07-31 1998-06-11 キヤノン株式会社 液晶組成物およびこれを使用した液晶素子
JP2673460B2 (ja) * 1990-02-26 1997-11-05 キヤノン株式会社 液晶表示素子
JP3158343B2 (ja) * 1997-06-13 2001-04-23 エフ・ディ−・ケイ株式会社 双方向流体弁モータおよびその製造方法

Also Published As

Publication number Publication date
JPH04365012A (ja) 1992-12-17
EP0518296B1 (en) 1996-09-04
ATE142355T1 (de) 1996-09-15
JP2952075B2 (ja) 1999-09-20
DE69213338D1 (de) 1996-10-10
US5361153A (en) 1994-11-01
DE69213338T2 (de) 1997-02-06
EP0518296A2 (en) 1992-12-16
EP0518296A3 (en) 1993-01-20

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