EP3485168B1 - Verfahren zur druckabsenkung in einem be- und entladeschloss und zugehörige pumpeneinheit - Google Patents

Verfahren zur druckabsenkung in einem be- und entladeschloss und zugehörige pumpeneinheit Download PDF

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Publication number
EP3485168B1
EP3485168B1 EP17735085.7A EP17735085A EP3485168B1 EP 3485168 B1 EP3485168 B1 EP 3485168B1 EP 17735085 A EP17735085 A EP 17735085A EP 3485168 B1 EP3485168 B1 EP 3485168B1
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Prior art keywords
vacuum pump
pressure
pump
rough
secondary vacuum
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EP17735085.7A
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English (en)
French (fr)
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EP3485168A1 (de
Inventor
Eric MANDALLAZ
Christophe SANTI
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Pfeiffer Vacuum SAS
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Pfeiffer Vacuum SAS
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/02—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for several pumps connected in series or in parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/08—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by varying the rotational speed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2210/00—Fluid
    • F04C2210/22—Fluid gaseous, i.e. compressible
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/30—Use in a chemical vapor deposition [CVD] process or in a similar process
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/20—Flow
    • F04C2270/205—Controlled or regulated
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
    • F05B2210/00—Working fluid
    • F05B2210/10—Kind or type
    • F05B2210/12—Kind or type gaseous, i.e. compressible

Definitions

  • the present invention relates to a method of lowering pressure in a lock loading and unloading (or "load-lock" in English) of a substrate, such as a flat screen display ("or flat panel display” in English) or a photovoltaic substrate, from atmospheric pressure to low pressure for loading and unloading the substrate in a treatment chamber maintained at low pressure.
  • a substrate such as a flat screen display ("or flat panel display” in English) or a photovoltaic substrate
  • the present invention also relates to an associated pumping group for the implementation of said pressure lowering method.
  • EP 1,746,287 A1 which recommends choosing a ratio of the respective nominal flow rates of the secondary and primary pumps from 10 to 15.
  • an important step consists in treating a substrate under a controlled atmosphere at very low pressure in a process chamber.
  • the atmosphere surrounding the substrate is first lowered at low pressure by a loading and unloading lock communicating with the process chamber.
  • the airlock includes a sealed enclosure, a first door of which communicates the interior of the enclosure with an area under atmospheric pressure, such as a clean room, for loading at least one substrate.
  • the airlock enclosure is connected to a pumping unit allowing the pressure in the enclosure to be lowered until an appropriate low pressure similar to that prevailing in the process chamber is reached so as to be able to transfer the substrate to the process chamber .
  • the airlock also has a second door for discharging the substrate into the process chamber after being placed under vacuum. This same airlock is generally also used for the pressure rise of the substrate after its treatment, and its unloading at atmospheric pressure.
  • each loading or unloading of substrates requires lowering and then alternately raising the pressure in the airlock enclosure, which implies the frequent intervention of the pumping group. It is also understood that the establishment of the vacuum in the airlock enclosure is not instantaneous and that this constitutes a limit to the overall speed of the manufacturing process. This limit is all the more sensitive when the substrates are large. This is particularly the case, for the manufacture of flat display screens or photovoltaic substrates, the enclosure of the airlock necessarily having the appropriate volume to contain one or more flat screens. For example, currently, the chambers of airlocks used for the manufacture of flat screens have large volumes, generally of the order of 500 to 1000 liters, and sometimes exceeding 5000 liters, which must therefore be pumped as quickly as possible.
  • Particularly powerful pumping groups are used for this, in particular for ensuring pumping at the opening of the airlock, when the pressure in the enclosure is at atmospheric pressure.
  • the pumping unit comprises one or more primary vacuum pumps and a secondary vacuum pump, such as a single-stage vacuum pump of the Roots type.
  • the secondary vacuum pump is arranged upstream of the primary pump in the direction of flow of the gases to be pumped. Its main purpose is to “boost” the overall pumping speed of the low pressure pumping group.
  • the flow generated by the secondary vacuum pump can be of the order of five times the flow generated by the primary pump. Due to the strong gas flow at the opening of the airlock, a significant pressure is generated at the discharge of the secondary vacuum pump, which can reach up to 4 bar (or 3 bar relative). This high overpressure causes a very high consumption of the secondary vacuum pump and a congestion at the suction of the primary vacuum pump, constituting a risk of malfunction for both the primary vacuum pump and for the secondary vacuum pump.
  • a known solution consists in arranging a pipe connecting the inlet of the primary vacuum pump to the inlet of the secondary vacuum pump.
  • the pipeline is fitted with a recirculation valve (or “bypass” in English), calibrated to open when the pressure difference between the suction and the discharge of the secondary vacuum pump becomes too large, generally tared for s '' open for a maximum pressure difference between 50 and 80 mbar.
  • the recirculation valve opens at the start of the pressure drop, to circulate the excess gas flow from the discharge to the suction of the secondary vacuum pump.
  • the recirculation valve closes.
  • the pressure drop is therefore only ensured by the primary vacuum pump, the role of the secondary vacuum pump is then only to participate in the "recirculation" of the gas flow.
  • the recirculation valve thus protects the primary vacuum pump by diverting the excess gas flow. This recirculation also thermally protects the secondary vacuum pump by preventing its discharge pressure from becoming too high.
  • the drop in pressure in the airlock then generates the pressure reduction on the discharge of the secondary vacuum pump and the closing of the recirculation valve, thus allowing the secondary vacuum pump to start compressing the gases to be pumped from a pressure in the airlock generally of the order of 200 mbar.
  • the initial overall pumping speed of the pumping unit is low because pumping is only ensured by the primary vacuum pump.
  • the recirculation valve operates in a pulsating manner, opening and closing cyclically very quickly, in particular due to the principle of cyclic pumping of the volumetric secondary vacuum pump. This may result in the risks of premature mechanical wear of the recirculation valve and therefore the risk of leaks. Also, the pulsating operation of the recirculation valve can be the source of noise.
  • the gases which circulate in the pipe of the recirculation valve are hot, due to the compression of the secondary vacuum pump. These recycled hot gases can also contribute to the heating of the secondary vacuum pump.
  • One of the aims of the present invention is therefore to propose a process for lowering pressure in a loading and unloading airlock and an associated pumping unit which at least partially solve the problems of the state of the art, by allowing in particular increase the pumping speed at the start of the pressure drop while reducing the power consumed by the secondary vacuum pump.
  • Another object of the present invention is to protect the primary vacuum pump and the secondary vacuum pump from the risks of damage linked to the excess gas flow when the airlock is opened at atmospheric pressure.
  • Another object of the present invention is to limit the risks of wear of the recirculation valve and the heating of the secondary vacuum pump by the “recycled” hot gases.
  • the subject of the invention is a process for lowering pressure in an airlock for loading and unloading a substrate at atmospheric pressure by a pumping group comprising a primary vacuum pump and a secondary vacuum pump arranged in upstream of said primary vacuum pump in the direction of flow of the gases to be pumped, characterized in that during the pressure drop and until the pressure in the loading and unloading lock reaches a threshold of predefined low pressure, the rotation speed of the secondary vacuum pump is controlled according to an operating parameter of the secondary vacuum pump to increase the flow generated by the secondary vacuum pump so that the flow generated by the pump with no-load secondary is included in a range whose high value corresponds to six times the flow generated by the primary vacuum pump and the low value at 1.3 times the flow generated by the primary vacuum pump.
  • the invention also relates to a pumping unit comprising a primary vacuum pump and a secondary vacuum pump, said secondary vacuum pump being arranged upstream of said primary vacuum pump in the direction of flow of the gases to be pumped and comprising a frequency converter, characterized in that the secondary vacuum pump comprises a control unit connected to the frequency converter, configured to control the speed of rotation of the secondary vacuum pump as a function of a signal representative of a parameter of the secondary vacuum pump, so that during the pressure drop and until the pressure in the loading and unloading airlock reaches a predefined low pressure threshold, the flow generated by the pump secondary vacuum is increased and included in a range whose high value corresponds to six times the flow generated by the primary vacuum pump and the low value, to 1.3 times the flow generated by the primary vacuum pump.
  • the primary vacuum pump comprises a load shedding module of a pumping stage.
  • the signal representative of an operating parameter of the secondary vacuum pump is for example a parameter of the motor of the secondary vacuum pump, such as the current or the power.
  • the pumping unit comprises a recirculation line connecting the inlet of the primary vacuum pump to the inlet of the secondary vacuum pump, the recirculation line comprising a discharge module configured to open as soon as the suction pressure of the primary vacuum pump exceeds the suction pressure of the secondary vacuum pump by a predefined overshoot value between 100 and 400 mbar.
  • the secondary vacuum pump is for example a ROOTS type vacuum pump.
  • the ratio of the flow rates generated between the primary vacuum pump and the secondary vacuum pump is adapted so that it is optimal. More precisely, a flow generated by the secondary vacuum pump admissible for the high initial gas flow is maintained, that is to say less than six times the flow generated by the primary vacuum pump. Simultaneously, an optimized generated flow is maintained for the primary vacuum pump, that is to say greater than 1.3 times the flow generated by the primary vacuum pump to ensure gas compression as soon as possible.
  • the pressure difference between the suction and the discharge of the secondary vacuum pump then remains less than a value between 150 and 300 mbar.
  • the pipe and the recirculation valve of the device of the prior art, calibrated to open for a pressure differential of the secondary vacuum pump of between 50 and 80 mbar, can then be eliminated.
  • the pumping unit can however include a discharge module configured to open as soon as the pressure difference between the suction and the discharge of the secondary vacuum pump exceeds a higher value, between 100 and 400 mbar , according to the value of the flow rate ratio which is selected and according to the mechanical safety settings, making it possible to protect the vacuum pumps in particular while the speed control is effective.
  • the secondary vacuum pump As soon as the rotation speed of the secondary vacuum pump is controlled, the secondary vacuum pump is no longer "short-circuited", as it was above a pressure of 200mbar in the airlock of the state of the art, but it is used as if it were the real first pumping stage of the primary vacuum pump.
  • the operating characteristics of the secondary vacuum pump are thus adapted to the capacities of the primary vacuum pump so that the secondary vacuum pump can be effective almost from atmospheric pressure. This results in a significant drop in the power consumed as well as an increase in the overall pumping speed of the pumping unit at the start of the pressure drop, and therefore, a reduction in the pressure drop time in the airlock.
  • the pumping speed increases from 20 to 50%, compared to the pumping speed of the devices of the prior art.
  • the overall time of pressure drop in the enclosure of a 500-liter airlock between a pressure close to 1000 mbar at a transfer pressure of the order of 0.1 mbar goes from 25 to 20 seconds, i.e. a reduction of around 20%.
  • the discharge module opens at a higher pressure than the prior art recirculation valve and, subsequently, the flow ratio between the primary and secondary vacuum pumps is optimized, the discharge pressure of the secondary vacuum pump decreases rapidly so that the discharge module is only open for a very short time. Being little used, the discharge module wears less quickly and is less noisy. In addition, little gas circulates in the recirculation line, which prevents overheating of the secondary vacuum pump by hot compressed gases.
  • atmospheric pressure the surrounding pressure outside the airlock for loading and unloading of the substrate, such as the pressure prevailing in a room in which clean room operators work, that is to say a pressure of the order of 10 5 Pascal (1000 mbar) or slightly higher to favor the direction of flow towards the outside of the enclosure.
  • the figure 1 shows an example of a pumping unit 1 intended to be connected to a loading and unloading airlock enclosure (or "load lock” in English) via an isolation valve (not shown).
  • the loading and unloading airlock comprises a sealed enclosure, a first door of which communicates the interior of the enclosure with an area under atmospheric pressure, such as a clean room, for loading at least one large-volume substrate, such as a flat panel display or a photovoltaic substrate.
  • Such airlocks have a volume generally between 500 and 5000 liters.
  • the airlock also includes a second door for discharging the substrate into the process chamber after vacuum, as well as a device for introducing a neutral gas, in particular for returning to atmospheric pressure after treatment of the substrate.
  • the pumping unit 1 comprises a primary vacuum pump 2 and a secondary vacuum pump 3 arranged upstream of the primary vacuum pump 2 in the direction of flow of the gases to be pumped.
  • the primary vacuum pump 2 comprises for example a multi-stage dry vacuum pump, with rotary lobes such as of the Roots type with two or three lobes (bi-lobes, tri-lobes). According to other embodiments not described, the primary vacuum pump comprises several pumps in series or in parallel. In addition, other conventional pumping principles can be used for the primary vacuum pump.
  • the primary vacuum pump 2 shown diagrammatically on the figure 1 comprises for example five pumping stages T1, T2, T3, T4, T5, connected in series one after the other with a generated flow decreasing with the position of the pumping stage in the series, and between which a gas to be pumped between an inlet 4 and an outlet 5.
  • a "Roots" rotary lobe vacuum pump comprises two rotors of identical profiles, carried by two shafts extending in the pumping stages T1, T2, T3, T4, T5 and driven by a pump motor.
  • primary vacuum 2 (not shown) to rotate inside a stator in the opposite direction.
  • the sucked gas is trapped in the free space between the rotors and the stator, then it is pushed back.
  • the operation is carried out without any mechanical contact between the rotors and the stator of the primary vacuum pump 2, which allows the total absence of oil in the pumping stages T1, T2, T3, T4, T5.
  • the first pumping stage T1 of the primary vacuum pump 2 has a generated flow rate So1 of the order of 600 m 3 / h
  • the second pumping stage T2 has a generated flow rate So2 of the order of 400m 3 / h
  • the third pumping stage T3 has a generated flow So3 of the order of 200m 3 / h
  • the last two pumping stages T4 and T5 have a generated flow So4, So5 of the order of 100m 3 / h.
  • the flow rates generated varying as a function of the pressure range, these values correspond to the maximum values, at constant pumping flow, with a speed of rotation of the primary vacuum pump 2 in fixed operation and of the order of 65 Hz.
  • the primary vacuum pump 2 also comprises a non-return valve 6 at the outlet of the last pumping stage T5, at the level of the discharge 5, to prevent the return of the gases pumped into the primary vacuum pump 2.
  • the secondary vacuum pump 3 is, like the primary vacuum pump 2, a volumetric vacuum pump, that is to say a vacuum pump which, using pistons, rotors, vanes, valves, sucks, transfers and then expels the gas to be pumped.
  • the secondary vacuum pump 3 is for example a single-stage vacuum pump (having only one pumping stage), with rotors such as the Roots type or of a similar principle, such as the Claw type.
  • the maximum flow generated SoR of the secondary vacuum pump 3 is for example of the order of 3000 m 3 / h at maximum rotation speed (ie at about 70 Hz), in the optimal pressure range.
  • the secondary vacuum pump 3 comprises a motor 7, such as an asynchronous motor, a frequency converter 8 for controlling the motor 7 driving the rotors and a control unit 9 connected to the frequency converter 8.
  • a motor 7 such as an asynchronous motor
  • a frequency converter 8 for controlling the motor 7 driving the rotors
  • a control unit 9 connected to the frequency converter 8.
  • control unit 9 is configured to control the speed of rotation of the rotors of the secondary vacuum pump 3 as a function of a signal representative of an operating parameter of the secondary vacuum pump 3 to increase the flow generated so that the flow generated by the secondary vacuum pump SoR is understood in a range whose high value corresponds to six times the flow generated by the Sol primary vacuum pump and the low value at 1.3 times the flow generated by the Sol primary vacuum pump.
  • the predefined low pressure threshold is for example 20 mbar. Below this, the speed of rotation of the secondary vacuum pump 3 is controlled to its maximum value, that is to say 70 Hz in the present example.
  • the pressure difference between the suction and the discharge of the secondary vacuum pump then remains less than a value between 150 and 300 mbar.
  • the signal representative of an operating parameter is for example the discharge pressure of the secondary vacuum pump P1 or a parameter of the motor 7 of the secondary vacuum pump 3.
  • the parameter of the motor 7 of the secondary vacuum pump 3 can be the current, representative of the power consumed, or directly the power consumed. These signals can be received from the variable speed drive 8 connected to the motor 7.
  • the control of the secondary vacuum pump 3 is autonomous since it requires neither information from the loading and unloading lock, nor addition of pressure sensor to the inlet inlet 4 of the primary vacuum pump 2.
  • the control of the rotational speed of the rotors of the secondary vacuum pump 3 as a function of a signal representative of an operating parameter of the secondary vacuum pump 3 is a closed loop control: when the discharge pressure P1 or the motor current 7 or the power increases and the generated flow approaches or exceeds the high value of the authorized range, the speed of rotation is slowed down, even decreased.
  • the pumping unit 1 also comprises a pipe 10 connecting the inlet 4 of the primary vacuum pump 2 to the inlet inlet 11 of the secondary vacuum pump 3.
  • the pipe 10 includes a discharge module, such as a valve 12 or a valve controlled by the treatment unit 9, configured to open as soon as the pressure difference between the suction and the discharge of the secondary vacuum pump 3 exceeds a predefined overshoot value ⁇ P, between 100 and 400 mbar, the overshoot value ⁇ P being defined according to the ratio of the generated flows retained and according to the mechanical safety settings.
  • a discharge module such as a valve 12 or a valve controlled by the treatment unit 9 configured to open as soon as the pressure difference between the suction and the discharge of the secondary vacuum pump 3 exceeds a predefined overshoot value ⁇ P, between 100 and 400 mbar, the overshoot value ⁇ P being defined according to the ratio of the generated flows retained and according to the mechanical safety settings.
  • the pressure difference of the secondary vacuum pump 3 is always less than a pressure of the order of 250 mbar.
  • the discharge module is therefore configured to open as soon as the suction pressure of the primary vacuum pump P1 exceeds the suction pressure of the secondary vacuum pump Pasp by an overshoot value ⁇ P predefined for example at 300mbar .
  • the primary vacuum pump 2 is designed to be able to absorb and transfer this strong gas flow with the power consumed. as low as possible.
  • the primary vacuum pump 2 includes a load shedding module of a pumping stage.
  • the flow generated from the secondary vacuum pump SoR is adapted to correspond to the flow generated from the primary vacuum pump Sol, that is to say the flow generated by the first pumping stage T1 of the pump primary vacuum 2, the second or third pumping stage T2, T3 can in turn limit the overall generated flow rate of the primary vacuum pump 2.
  • the primary vacuum pump 2 can punctually absorb flows of significant pumping corresponding in this example to a suction pressure P1 limited to the opening pressure of the discharge module, that is to say 300 mbar
  • the load shedding module is connected to the output of a pumping stage low pressure, such as the second pumping stage T2.
  • the load-shedding module comprises for example a channel 13 connecting the output of the low pressure stage (T1 or T2) to the discharge 5 of the primary vacuum pump 2.
  • the channel 13 is provided with a valve 14.
  • the rotation speed of the secondary vacuum pump 3 is at a reduced fixed rotation speed, for example of the order of 30 Hz in order to limit the electrical consumption.
  • the lock opens the isolation valve isolating the enclosure at atmospheric pressure from the pumping unit 1 (tl).
  • the secondary vacuum pump 3 compresses the excess gas coming from the enclosure, causing the discharge pressure of the secondary vacuum pump P1 to increase and the speed to decrease of rotation (curve V on the figure 2 ).
  • the discharge module of the pipe 10 opens, thereby limiting the increase in the discharge pressure of the pump to secondary vacuum P1.
  • the gas flow is absorbed by the first two pumping stages T1, T2 of the primary vacuum pump 2, then is evacuated at the outlet of the second pumping stage T2, towards the discharge 5 of the primary vacuum pump 2 by the module load shedding.
  • the processing unit 9 can start a pressure down cycle.
  • the processing unit 9 controls the speed of rotation of the secondary vacuum pump 3 (curve V on the figure 2 ) as a function of an operating parameter of the secondary vacuum pump 3, such as the power consumed by the motor 7, (curve P on the figures 2 and 3 ), to increase the flow generated by the secondary vacuum pump SoR so that the flow generated by the secondary vacuum pump SoR remains greater than 1.3 times the flow generated by the primary vacuum pump Sol and less than 4.5 times the flow generated by the Sol primary vacuum pump in the example shown in the figure 3 (curve R).
  • the processing unit 9 controls the increase in the speed of rotation (curve V on the figure 2 between tl and t2), causing the increase in the ratio of the flow rates generated from 1, 3 to 4, 5.
  • the power consumed then stabilizes around 17kW ( figure 3 ). This power consumed is due to the maintenance of effective compression at the discharge of the secondary vacuum pump 3 and, mechanically and thermally acceptable, for the primary vacuum pump 2 and the secondary vacuum pump 3.
  • a safety limit can be provided for the power consumed by the secondary vacuum pump 3. If the value of the motor parameter 7 of the secondary vacuum pump 3 is greater than a predefined safety threshold beyond a second predetermined duration, the reduction in the rotation speed of the secondary vacuum pump 3 is forced. This precaution applies more particularly in the case of airlocks of large volumes, for example greater than 100 m 3 , for which the pumping groups have been designed for small volumes of the order of 2m 3 to 20m 3 . This protects against thermal overheating of the secondary vacuum pump 3.
  • the ratio of the flow generated by the secondary vacuum pump SoR to the flow generated by the primary vacuum pump Sol remains between 1, 3 and 4, 5.
  • Maintaining the ratio of the generated flows lower than 4.5 allows the flow generated by the secondary vacuum pump SoR to be admissible by the primary vacuum pump 2. This limits overconsumption and the secondary vacuum pump 3 still ensures compression.
  • the pressure difference between the suction and the discharge of the secondary vacuum pump 3 then remains less than a value between 150 and 350 mbar.
  • the secondary vacuum pump 3 is no longer "short-circuited", as it was in a device of the prior art.
  • the secondary vacuum pump 3 of the pumping group 1 according to the invention is on the contrary, used as if it were the real first pumping stage of the primary vacuum pump 2 thanks to the adapted ratio of the flow rates generated SoR and Sol.
  • the secondary vacuum pump 3 is therefore effective almost from atmospheric pressure (curve A on the figure 4 from tl).
  • the efficiency of the secondary vacuum pump of the device of the prior art catches up with that of the secondary vacuum pump 3 of the pumping unit 1 that around 5 mbar (tb).
  • the discharge module being only little used, the discharge module wears less quickly and is less noisy. Likewise, little gas circulates in the recirculation line 10, which prevents overheating of the secondary vacuum pump 3 by these previously compressed hot gases.
  • the setpoint for the rotation speed of the secondary vacuum pump 3 is fixed at its maximum value 70 Hz.
  • the discharge pressure of the secondary vacuum pump P1 decreases, reducing the power consumed by the secondary vacuum pump (curve P of figures 2 and 3 ).
  • the power consumed is of the order of 2 kW.
  • pumping by the primary and secondary vacuum pumps 2, 3 can be carried out conventionally without adapting the speed of rotation of the secondary vacuum pump 3 because the pumping flows and the power consumed are weak.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Claims (12)

  1. Verfahren zur Druckabsenkung in einer Beschickungs- und Ausgabeschleuse für ein Substrat bei atmosphärischem Druck durch ein Pumpenaggregat (1), das eine primäre Vakuumpumpe (2) und eine sekundäre Vakuumpumpe (3), die in der Strömungsrichtung der zu pumpenden Gase stromaufwärts der primären Vakuumpumpe (2) angeordnet ist, aufweist, dadurch gekennzeichnet, dass während der Druckabsenkung, bis der Druck in der Beschickungs- und Ausgabeschleuse einen vordefinierten Niederdruck-Schwellenwert erreicht, die Drehzahl der sekundären Vakuumpumpe (3) in Abhängigkeit von einem Betriebsparameter der sekundären Vakuumpumpe (3) gesteuert wird, um die von der sekundären Vakuumpumpe erzeugte Förderleistung (SoR) zu erhöhen, und zwar derart, dass die von der sekundären Vakuumpumpe erzeugte Förderleistung (SoR) in einem Bereich bleibt, dessen oberer Wert dem Sechsfachen der von der primären Vakuumpumpe erzeugten Förderleistung (Sol) und dessen unterer Wert dem 1,3-fachen der von der primären Vakuumpumpe erzeugten Förderleistung (Sol) entspricht.
  2. Verfahren zur Druckabsenkung nach dem vorhergehenden Anspruch, dadurch gekennzeichnet, dass der Betriebsparameter der sekundären Vakuumpumpe (3) ein Parameter des Motors (7) der sekundären Vakuumpumpe (3) ist.
  3. Verfahren zur Druckabsenkung nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass begonnen wird, die Drehzahl der sekundären Vakuumpumpe (3) in Abhängigkeit von einem Betriebsparameter der sekundären Vakuumpumpe (3) zu steuern, wenn erkannt wird, dass der Wert eines Betriebsparameters der sekundären Vakuumpumpe (3) während einer ersten vordefinierten Dauer einen vordefinierten Startschwellenwert überschreitet.
  4. Verfahren zur Druckabsenkung nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass, falls der Wert eines Betriebsparameters der sekundären Vakuumpumpe (3) länger als während einer zweiten vorbestimmten Dauer höher als ein vordefinierter Sicherheitsschwellenwert ist, die Verringerung der Drehzahl der sekundären Vakuumpumpe (3) erzwungen wird.
  5. Verfahren zur Druckabsenkung nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass, falls der Wert eines Betriebsparameters der sekundären Vakuumpumpe (3) länger als während einer dritten vorbestimmten Dauer niedriger als ein vordefinierter Warteschwellenwert ist, die Drehzahl der sekundären Vakuumpumpe (3) auf eine verminderte feste Drehzahl gesteuert wird.
  6. Pumpenaggregat, welches eine primäre Vakuumpumpe (2) und eine sekundäre Vakuumpumpe (3) aufweist, wobei die sekundäre Vakuumpumpe (3) in der Strömungsrichtung der zu pumpenden Gase stromaufwärts der primären Vakuumpumpe (2) angeordnet ist und einen Frequenzregler (8) aufweist, dadurch gekennzeichnet, dass die sekundäre Vakuumpumpe (3) eine mit dem Frequenzregler (8) verbundene Steuereinheit (9) aufweist, die dafür ausgelegt ist, die Drehzahl der sekundären Vakuumpumpe (3) in Abhängigkeit von einem Signal zu steuern, das für einen Betriebsparameter der sekundären Vakuumpumpe (3) repräsentativ ist, und zwar derart, dass während der Druckabsenkung, bis der Druck in der Beschickungs- und Ausgabeschleuse einen vordefinierten Niederdruck-Schwellenwert erreicht, die von der sekundären Vakuumpumpe erzeugte Förderleistung (SoR) erhöht wird und in einem Bereich liegt, dessen oberer Wert dem Sechsfachen der von der primären Vakuumpumpe erzeugten Förderleistung (Sol) und dessen unterer Wert dem 1,3-fachen der von der primären Vakuumpumpe erzeugten Förderleistung (Sol) entspricht.
  7. Pumpenaggregat nach Anspruch 6, dadurch gekennzeichnet, dass die primäre Vakuumpumpe (2) ein Entlastungsmodul einer Pumpstufe (T1, T2) aufweist.
  8. Pumpenaggregat nach einem der Ansprüche 6 oder 7, dadurch gekennzeichnet, dass das Signal, das für einen Betriebsparameter der sekundären Vakuumpumpe (3) repräsentativ ist, ein Parameter des Motors (7) der sekundären Vakuumpumpe (3) ist.
  9. Pumpenaggregat nach Anspruch 8, dadurch gekennzeichnet, dass der Parameter des Motors (7) der sekundären Vakuumpumpe (3) der Strom ist.
  10. Pumpenaggregat nach Anspruch 8, dadurch gekennzeichnet, dass der Parameter des Motors (7) der sekundären Vakuumpumpe (3) die Leistung ist.
  11. Pumpenaggregat nach einem der Ansprüche 6 bis 10, dadurch gekennzeichnet, dass es eine Rückführleitung (10) aufweist, die den Ansaugeinlass (4) der primären Vakuumpumpe (2) mit dem Einlass (11) der sekundären Vakuumpumpe (3) verbindet, wobei die Rückführleitung (10) ein Entlademodul aufweist, das dafür ausgelegt ist, sich zu öffnen, sobald der Ansaugdruck der primären Vakuumpumpe (P1) den Ansaugdruck der sekundären Vakuumpumpe (Pasp) um einen vordefinierten Überschreitungswert (ΔP) überschreitet, der zwischen 100 und 400 mbar liegt.
  12. Pumpenaggregat nach einem der Ansprüche 6 bis 11, dadurch gekennzeichnet, dass die sekundäre Vakuumpumpe (3) eine Roots-Vakuumpumpe ist.
EP17735085.7A 2016-07-13 2017-06-29 Verfahren zur druckabsenkung in einem be- und entladeschloss und zugehörige pumpeneinheit Active EP3485168B1 (de)

Applications Claiming Priority (2)

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FR1656782A FR3054005B1 (fr) 2016-07-13 2016-07-13 Procede de descente en pression dans un sas de chargement et de dechargement et groupe de pompage associe
PCT/EP2017/066178 WO2018010970A1 (fr) 2016-07-13 2017-06-29 Procédé de descente en pression dans un sas de chargement et de déchargement et groupe de pompage associé

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CN (1) CN109477485B (de)
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IT201800021148A1 (it) * 2018-12-27 2020-06-27 D V P Vacuum Tech S P A Pompa ausiliaria volumetrica per la generazione del vuoto.
FR3098869B1 (fr) * 2019-07-17 2021-07-16 Pfeiffer Vacuum Groupe de pompage
BE1028087B1 (nl) * 2020-02-24 2021-09-21 Atlas Copco Airpower Nv Werkwijze voor het aansturen van een vacuümsysteem en vacuümsysteem
BE1028135B1 (nl) * 2020-03-10 2021-10-11 Atlas Copco Airpower Nv Werkwijze en inrichting voor het regelen van de pompsnelheid, computerprogramma en een door een computer leesbaar medium waarop het computerprogramma is opgeslagen daarbij toegepast en een pomp
FR3112171B1 (fr) * 2020-10-16 2022-07-08 Pfeiffer Vacuum Procédé de contrôle d’une puissance de fonctionnement d’une pompe à vide et pompe à vide
FR3129992B1 (fr) * 2021-12-08 2023-12-01 Pfeiffer Vacuum Groupe de pompage, dispositif et procédé de pompage et de traitement

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3639512A1 (de) * 1986-11-20 1988-06-01 Alcatel Hochvakuumtechnik Gmbh Vakuumpumpsystem mit einer waelzkolbenpumpe
JP4218756B2 (ja) * 2003-10-17 2009-02-04 株式会社荏原製作所 真空排気装置
JP2006342688A (ja) * 2005-06-07 2006-12-21 Ebara Corp 真空排気システム
FR2888894A1 (fr) * 2005-07-20 2007-01-26 Alcatel Sa Pompage rapide d'enceinte avec economie d'energie
FR2940322B1 (fr) * 2008-12-19 2011-02-11 Alcatel Lucent Procede de descente en pression dans un sas de chargement et de dechargement et equipement associe
FR2952683B1 (fr) * 2009-11-18 2011-11-04 Alcatel Lucent Procede et dispositif de pompage a consommation d'energie reduite
JP5684894B2 (ja) * 2011-03-11 2015-03-18 アルバック機工株式会社 真空ポンプ、真空排気装置及び真空ポンプの運転方法
CN104302922B (zh) * 2012-06-28 2017-08-08 斯特林工业咨询有限公司 用于排空腔室的泵装置和方法
FR3017425A1 (fr) * 2014-02-12 2015-08-14 Adixen Vacuum Products Systeme de pompage et procede de descente en pression dans un sas de chargement et de dechargement

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
None *

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WO2018010970A1 (fr) 2018-01-18
TWI723186B (zh) 2021-04-01
TW201804083A (zh) 2018-02-01
KR20190022880A (ko) 2019-03-06
FR3054005A1 (fr) 2018-01-19
EP3485168A1 (de) 2019-05-22
KR102404612B1 (ko) 2022-05-31
CN109477485B (zh) 2020-07-10
CN109477485A (zh) 2019-03-15
FR3054005B1 (fr) 2018-08-24

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