EP2767717A1 - Mehrstufen-Trockenvakuumpumpe - Google Patents

Mehrstufen-Trockenvakuumpumpe Download PDF

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Publication number
EP2767717A1
EP2767717A1 EP14151450.5A EP14151450A EP2767717A1 EP 2767717 A1 EP2767717 A1 EP 2767717A1 EP 14151450 A EP14151450 A EP 14151450A EP 2767717 A1 EP2767717 A1 EP 2767717A1
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
valve
pumping
stage
stages
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP14151450.5A
Other languages
English (en)
French (fr)
Inventor
Stéphane Crochet
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum SAS
Original Assignee
Adixen Vacuum Products SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Adixen Vacuum Products SAS filed Critical Adixen Vacuum Products SAS
Publication of EP2767717A1 publication Critical patent/EP2767717A1/de
Withdrawn legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/06—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for stopping, starting, idling or no-load operation
    • F04C28/065—Capacity control using a multiplicity of units or pumping capacities, e.g. multiple chambers, individually switchable or controllable
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/24—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves or unloading valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type

Definitions

  • the present invention relates to a dry multi-stage vacuum pump.
  • the invention applies in particular to a dry type vacuum pump comprising two rotary lobes type "Roots” or “Claw”, or type spiral or screw or another similar principle.
  • the multi-stage vacuum pumps comprise several series pumping stages in which circulates a gas to be pumped between a suction and a discharge.
  • vacuum pumps rotary lobes also known as “Roots” with two or three lobes or double-billed, also known as "Claw”.
  • the rotary lobe pumps comprise two rotors of identical profiles, rotating inside a stator in opposite directions. During rotation, the gas to be pumped is trapped in the free space between the rotors and the stator, and is driven by the rotor to the next stage or after the last stage discharge outlet. The operation is carried out without any mechanical contact between the rotors and the stator, which allows the total absence of oil in the pumping stages.
  • the last pump stages located on the discharge side generally have a generated volume, that is to say a volume of pumped gas, smaller than that of the first stages of the pump. pumping, suction side.
  • the vacuum pump must absorb large initial gas flows, which may not be admitted by the last pump stages on the discharge side. , creating significant pressure differences in the vacuum pump and causing significant energy consumption. This is the case for example for the pumping of loading / unloading lock (or "load lock” in English), where speakers are evacuated cyclically (approximately every 12 seconds) from the atmospheric pressure.
  • One of the aims of the present invention is therefore to propose a dry type vacuum pump that can evacuate the excess gas that occurs when the flow of gas to be pumped becomes too great for the capacities of the vacuum pump, in particular to avoid migration. lubricant to the pumping stages and limit the energy consumption of the vacuum pump.
  • Another object of the present invention is to attenuate the vibrations of rotary shafts supporting the rotors of vacuum pumps that can take place at the start of pumping, following the pressure surge occurring at the opening of the pump. the isolation valve between the chamber to be pumped at atmospheric pressure and the vacuum line under low pressure.
  • Another object of the present invention is to limit the heating of the vacuum pump which can also take place at the time of this initial phase of evacuation.
  • the subject of the invention is a dry multistage multi-stage vacuum pump comprising a plurality of pumping stages respectively comprising an inlet and an outlet, the pumping stages being connected in series between a suction and a discharge of the vacuum pump, characterized in that the vacuum pump further comprises at least one valve configured to unload a pumping stage, said valve being arranged in the upper part of the vacuum pump, on the side of the inlet of the pumping stage.
  • the valve (or "exhaust valve” in English) can reduce significant pressure differences in the pump stages. This protects the seals interposed between the lubricated bearings and the pumping stages. We limit their premature wear and therefore the risk of migration of the lubricant to the pumping stages. Moreover, by reducing the pressure differences in the pumping stages, it limits the heating of the vacuum pump and its energy consumption.
  • valve is arranged in the upper part of the vacuum pump, on the inlet side of the pumping stage and this has several advantages.
  • the valve comprises for example at least one channel formed in the housing of the vacuum pump connecting a central housing of a pumping stage and opening through a mouth which can be closed by a respective movable shutter of the valve.
  • a first advantage lies in the fact that the manufacture of the casing of the vacuum pump is simplified because there is no need to machine cavities in the casing under the pumping stages to receive the movable shutters lifted from the valve. Indeed, it suffices to provide a channel in the upper part of the stator.
  • the excess gas is easily discharged outside by the canal.
  • the gas to be evacuated is prevented from taking various narrow and sinuous passages, which reduce the conductance, slow down and heat up the gas, sometimes causing significant heating, of the vacuum pump.
  • At least two pumping stages comprise a respective valve.
  • the vacuum pump comprises one or more first valve (s) arranged (s) in the upper part of the vacuum pump on the side of the inputs of the pump stages and one or more second (s) valve (s) arranged in the lower part of the vacuum pump on the outlet side of the pump stages.
  • valves By arranging the valves at the top or bottom in the vacuum pump, one can overcome congestion problems. For example, it is possible to unload two pumping stages from below, and two pumping stages from above, to solve congestion issues in the vacuum pump.
  • all the pumping stages comprise a respective valve.
  • all stages can evacuate excess gas simultaneously, without going through the next pumping stage and autonomously.
  • the jolts of gas flow in the pumping stages which cause the vibrations of the rotary shafts, which can occur in particular at the moment of rotation, are significantly reduced.
  • opening of the isolation valve which separates the chamber to be pumped from the vacuum line at low pressure connected to the vacuum pump.
  • the vacuum pump comprises a housing fixed to the upper part of the vacuum pump housing, covering the valves and connecting the mouths of the channels of the valves to a common outlet. It is thus possible to control the evacuation of the unloaded gases, for example towards the delivery of the vacuum pump.
  • the invention also relates to a multi-stage dry vacuum pump comprising a plurality of pumping stages respectively comprising an inlet and an outlet, the pumping stages being connected in series between suction and delivery of the pump.
  • the vacuum pump further comprises at least two valves configured to unload a respective pumping stage, the valve comprising at least one channel formed in the housing of the vacuum pump connecting a central housing of a pumping stage and opening through a mouth which can be closed by a respective movable shutter of the valve, the movable shutter being selected from a flat disk or a membrane.
  • the invention also relates to a multi-stage dry vacuum pump comprising a plurality of pumping stages respectively comprising an inlet and an outlet, the pumping stages being connected in series between suction and delivery of the pump.
  • the vacuum pump comprises as many valves respectively configured to unload a pumping stage, as pumping stages, to unload all pumping stages.
  • the figures 1 , 2a and 2b illustrate a first embodiment of a dry multi-stage vacuum pump 1.
  • the vacuum pump comprises two rotary shafts 2 carrying rotors 3 rotary lobes type "Roots".
  • the invention also applies to other types of multistage dry type vacuum pumps, such as Claw type or spiral type or screw or other similar principle.
  • the multi-stage vacuum pump 1 comprises several pumping stages, six in this example, TA, T1, T2, T3, T4, TR, connected in series between a suction 4 and a discharge 5 of the vacuum pump 1 and in which a gas to be pumped can circulate.
  • the rotary shafts 2 extend in the pumping stages TA, T1, T2, T3, T4, TR by rotors 3 with rotating lobes and are driven on the discharge stage side TR by an engine.
  • M of the vacuum pump 1 ( figure 1 ).
  • the rotors have identical profiles rotating in a central housing 10 inside the housing 6 in opposite directions.
  • the gas to be pumped is trapped in the free space between the rotors 3 and the casing 6, and is driven by the rotors 3 to the next stage or to the discharge 5 after the last pump stage TR .
  • the vacuum pump 1 is called "dry” because in operation, the rotors 3 rotate inside the casing 6 of the vacuum pump 1 in opposite directions, without any mechanical contact between the rotors 3 and the casing 6, which allows the total absence of oil.
  • Each pumping stage TA, T1, T2, T3, T4, TR comprises an input 7 and a respective output 8 ( figure 2a ).
  • the successive pumping stages TA, T1, T2, T3, T4, TR are connected in series one after the other by respective inter-stage channels 9 connecting the output 8 of the pumping stage which precedes the entry 7 of the following floor ( figure 3 ).
  • the first pumping stage TA whose input 7 communicates with the suction 4 of the vacuum pump 1 is also called the "suction stage”.
  • the last pump stage TR whose output 8 communicates with the discharge 5 of the vacuum pump 1 is also called “discharge stage”.
  • the pump stages T1, T2, T3 and T4 connected in series between the suction stage TA and the discharge stage TR are also called intermediate stages.
  • the pumping stages have a generated volume, that is to say a volume of gas pumped, decreasing between the suction stage TA and the discharge stage TR.
  • the inputs 7 of the pump stages TA, T1, T2, T3, T4, TR are arranged in the upper part of the casing 6 of the vacuum pump 1 and the outlets 8 are arranged in the lower part of the casing 6 of the pump. vacuum 1.
  • the gases are driven by the rotors 3 in the central housing 10 from the inlet 7 to the outlet 8 and up in the interstage pipe 9 to the inlet 7 arranged in the upper part of the floor next pumping.
  • the vacuum pump 1 comprises at least one valve configured to unload a pumping stage in order to absorb the high gas flows occurring in particular at the start of the evacuation of an atmospheric pressure vessel connected to the suction 4 of the vacuum pump.
  • the seals interposed between the lubricated bearings and the pumping stages are protected. This limits their premature wear and therefore the risk of migration of the lubricant to the pumping stages. Furthermore, by decreasing the pressure differences in the pumping stages, it also limits the heating of the vacuum pump and its energy consumption.
  • the valve comprises at least one channel 11 and at least one movable shutter of the respective channel ( Figures 2a and 2b ).
  • the channel 11 is formed in the housing 6, it connects the central housing 10 of a pumping stage outside, for example the discharge 5 of the vacuum pump 1.
  • the valve is a passive unloading module, which can take an open or closed position depending on the overpressure in the pumping stage, the open or closed position being dependent on the upstream / downstream pressure difference of the valve.
  • the closed position when the upstream / downstream pressure difference of the valve is less than the calibration threshold of the valve, the movable shutter closes the passage in the channel 11 sealingly.
  • the open position when the upstream / downstream pressure difference of the valve is greater than the setting threshold the excess gas can escape from the pumping stage directly to the outside, bypassing the following pumping stages.
  • the movable shutter comprises a ball 12 and the channel 11 has a frustoconical mouth 13 forming a seat for the ball 12.
  • the ball 12 is for example steel.
  • the frustoconical mouth 13 or the ball 12 may comprise a coating for example of elastomer, such as silicone, which improves their mechanical strength and resistance to the high temperatures of the heated pump.
  • the frustoconical mouth 13 of the channel 11 is closed by the ball 2 which rests on the seat of the channel 11 ( figure 2a ).
  • the ball 12 closes the frustoconical mouth 13 of the channel 11 sealingly.
  • the ball 12 takes off from the seat opening the mouth 13 of the channel 11 ( figure 2b ).
  • the mouth 13 of frustoconical shape also allows the self centering of the ball 12 and its damping when it falls on the seat.
  • the movable shutter is formed by a flat disc 17 for sealingly obstructing the channel 11 as a function of the pressure.
  • the valve may comprise a spring 18 which urges the movable shutter 17 against the mouth of the channel 11 to close it ( figure 4a ). In case of overpressure in the pumping stage, the movable shutter 17 comes off, opening the mouth of the channel 11.
  • the movable shutter comprises for example a ball and a spring is arranged between the shutter and the mouth of the channel 11 (not shown).
  • the movable shutter comprises a membrane 19 ( figure 4b ).
  • the membrane 19 closes the mouth of the channel 11 (see dotted line on the figure 4b ).
  • the diaphragm 19 is deformed by the gas under pressure opening the mouth of the channel 11 ( figure 4b ).
  • the valve comprises a stem valve, such as a motor vehicle engine stem valve.
  • the stem valves comprise a head 20, a collar 21 and a rod 22.
  • the head 20 of the valve of circular shape, acts as a movable shutter of the channel 11.
  • the part of the head 20 in contact with the seat may have a frustoconical shape complementary to a channel mouth 11 of frustoconical shape (not shown).
  • the rod 22 provides vertical guidance of the valve in the channel 11.
  • valve comprises two bypass channels and two respective movable shutters instead of one (not shown).
  • Two by-pass assemblies are used to off-load a large flow of gas while maintaining a small footprint.
  • the valve is arranged in the upper part of the vacuum pump 1, the side of the inlet 7 of the pumping stage.
  • the valve makes it possible to evacuate the surplus gas by the top rather than the bottom and this has several advantages.
  • the manufacture of the casing 6 of the vacuum pump is simplified because there is no need to machine cavities in the casing 6 under the pumping stages TA, T1, T2, T3, T4, TR to receive the shutters movable raised flap. Indeed, it suffices to provide a channel 10 in the upper part of the stator 6. It may further cover the assembly in a sealed manner by a housing 15 to ensure the path of the discharged gas for example to the discharge 5 of the pump empty 1.
  • the excess gas is easily discharged outside by the channel 10.
  • the gas to be vented is avoided to take various narrow and sinuous passages, which reduce the conductance, slow down and warm the gas, causing sometimes significant heating of the vacuum pump.
  • At least two pumping stages comprise a respective valve.
  • one or more first valve (s) 23 are arranged in the upper part of the vacuum pump on the side of the inputs 7 of the pump stages TA, T1, T2, T3, T4, TR and one or more second (s) valve (s) 24 are arranged (s) in the lower part of the vacuum pump on the side of the outputs 8 pumping stages TA, T1, T2, T3, T4, TR.
  • the suction side pump stages having the largest generated volumes, comprise a respective valve to off the surplus gas.
  • two first valves 23 are arranged in the upper part of the vacuum pump on the inlet side 7 of the first two pump stages TA, T1 and two second valves 24 are arranged in the lower part of the pump. vacuum pump on the output side 8 of the pump stages T2, T3.
  • the first two valves 23 and the two second valves 24 are consecutive in this example.
  • valves By arranging the valves at the top or bottom in the vacuum pump, the space available in the vacuum pump can be adapted as best as possible.
  • valves 23 are all arranged in the upper part of the vacuum pump on the inlet side 7 of the pump stages TA, T1, T2, T3, T4, TR or all in the lower part of the pump. empty on the output side 8 of the pump stages TA, T1, T2, T3, T4, TR (not shown).
  • FIGS. 5a and 5b represent another embodiment in which all the pumping stages TA, T1, T2, T3, T4, TR comprise a respective valve.
  • the vacuum pump comprises for example a housing 15 fixed to the upper part of the housing 6 of the vacuum pump 1 covering the valves and connecting the channels 11 to a common outlet 16.
  • the common outlet 16 is for example connected to the discharge 5 of the vacuum pump.
  • the housing 15 is thus arranged above the movable shutters. It is fixed to the casing 6 by conventional fastening means. It is for example made of a single piece, cast iron as the casing 6 of the vacuum pump 1.
  • the mouths 13 are closed ( figure 5a ).
  • the movable shutters, schematized by balls 12 on the Figures 5a and 5 , pressing in the mouths 13 prevent the pumped gas from short-circuiting the following pumping stages.
  • the pumped gas follows the path represented by the dashed arrows on the figure 3a the gas to be pumped is sucked by the six pumping stages TA, T1, T2, T3, T4, TR and exits at the outlet 5 of the vacuum pump 1.
  • the surplus gas raises the balls 12 of their respective seats, clearing the mouths 13 of the channel 11.
  • the gas is then evacuated from the pump stages TA, T1, T2, T3, T4, TR to the common output 16.
  • all the pumping stages TA, T1, T2, T3, T4, TR can evacuate the excess gas simultaneously, without passing through the next pumping stage and autonomously.
  • Figures 5a and 5b represent a multi-stage vacuum pump for which all the pump stages are relieved from above, on the pump stage inputs side, other embodiments can be made to unload all the pump stages.
  • all pumping stages can be relieved from below, on the discharge side of the pumping stages.
  • certain pumping stages can be relieved from the top of the suction side of the pumping stages and from the bottom of the discharge side of the pumping stages.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
EP14151450.5A 2013-01-18 2014-01-16 Mehrstufen-Trockenvakuumpumpe Withdrawn EP2767717A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1350440A FR3001263B1 (fr) 2013-01-18 2013-01-18 Pompe a vide multi-etagee de type seche

Publications (1)

Publication Number Publication Date
EP2767717A1 true EP2767717A1 (de) 2014-08-20

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Family Applications (1)

Application Number Title Priority Date Filing Date
EP14151450.5A Withdrawn EP2767717A1 (de) 2013-01-18 2014-01-16 Mehrstufen-Trockenvakuumpumpe

Country Status (6)

Country Link
US (1) US20140205482A1 (de)
EP (1) EP2767717A1 (de)
JP (1) JP2014141966A (de)
KR (1) KR20140093635A (de)
FR (1) FR3001263B1 (de)
TW (1) TW201437486A (de)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018228784A1 (de) * 2017-06-17 2018-12-20 Leybold Gmbh Mehrstufige wälzkolbenpumpe
FR3128747A1 (fr) * 2021-11-03 2023-05-05 Pfeiffer Vacuum Pompe à vide multi-étagée

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6418838B2 (ja) * 2014-07-31 2018-11-07 エドワーズ株式会社 ドライポンプ及び排ガス処理方法
GB2558626A (en) * 2017-01-11 2018-07-18 Edwards Ltd A multiple stage vacuum pump and pump configuring method
DE202017001029U1 (de) * 2017-02-17 2018-05-18 Leybold Gmbh Mehrstufige Wälzkolbenpumpe
DE102018210922A1 (de) * 2018-07-03 2020-01-09 Leybold Gmbh Zwei- oder Mehrwellen-Vakuumpumpe
FR3086705B1 (fr) * 2018-09-27 2020-10-23 Pfeiffer Vacuum Pompe a vide primaire de type seche et procede de controle de l'injection d'un gaz de purge
US11815095B2 (en) * 2019-01-10 2023-11-14 Elival Co., Ltd Power saving vacuuming pump system based on complete-bearing-sealing and dry-large-pressure-difference root vacuuming root pumps
FR3097599B1 (fr) * 2019-06-18 2021-06-25 Pfeiffer Vacuum Pompe à vide primaire de type sèche et procédé de contrôle de l’injection d’un gaz de purge

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61123777A (ja) * 1984-11-16 1986-06-11 Hitachi Ltd 真空ポンプ
DE10046768A1 (de) * 2000-09-21 2002-04-11 Leybold Vakuum Gmbh Schraubenvakuumpumpe mit Bypass-Ventil
US20040173312A1 (en) * 2001-09-06 2004-09-09 Kouji Shibayama Vacuum exhaust apparatus and drive method of vacuum apparatus
WO2005040614A1 (en) * 2003-10-14 2005-05-06 The Boc Group Plc Multistage vacuum pump with improved efficiency
EP1536140A1 (de) * 2003-11-27 2005-06-01 Aisin Seiki Kabushiki Kaisha Mehrstufige trockene Vakuumpumpe
US20070048162A1 (en) * 2005-08-24 2007-03-01 Kashiyama Industries, Ltd. Multistage root type pump

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61123777A (ja) * 1984-11-16 1986-06-11 Hitachi Ltd 真空ポンプ
DE10046768A1 (de) * 2000-09-21 2002-04-11 Leybold Vakuum Gmbh Schraubenvakuumpumpe mit Bypass-Ventil
US20040173312A1 (en) * 2001-09-06 2004-09-09 Kouji Shibayama Vacuum exhaust apparatus and drive method of vacuum apparatus
WO2005040614A1 (en) * 2003-10-14 2005-05-06 The Boc Group Plc Multistage vacuum pump with improved efficiency
EP1536140A1 (de) * 2003-11-27 2005-06-01 Aisin Seiki Kabushiki Kaisha Mehrstufige trockene Vakuumpumpe
US20070048162A1 (en) * 2005-08-24 2007-03-01 Kashiyama Industries, Ltd. Multistage root type pump

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018228784A1 (de) * 2017-06-17 2018-12-20 Leybold Gmbh Mehrstufige wälzkolbenpumpe
FR3128747A1 (fr) * 2021-11-03 2023-05-05 Pfeiffer Vacuum Pompe à vide multi-étagée
WO2023078598A1 (en) * 2021-11-03 2023-05-11 Pfeiffer Vacuum Multistage vacuum pump

Also Published As

Publication number Publication date
TW201437486A (zh) 2014-10-01
JP2014141966A (ja) 2014-08-07
KR20140093635A (ko) 2014-07-28
FR3001263A1 (fr) 2014-07-25
FR3001263B1 (fr) 2015-02-20
US20140205482A1 (en) 2014-07-24

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