FR3001263B1 - Pompe a vide multi-etagee de type seche - Google Patents

Pompe a vide multi-etagee de type seche

Info

Publication number
FR3001263B1
FR3001263B1 FR1350440A FR1350440A FR3001263B1 FR 3001263 B1 FR3001263 B1 FR 3001263B1 FR 1350440 A FR1350440 A FR 1350440A FR 1350440 A FR1350440 A FR 1350440A FR 3001263 B1 FR3001263 B1 FR 3001263B1
Authority
FR
France
Prior art keywords
vacuum pump
dry type
type multi
stage vacuum
stage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR1350440A
Other languages
English (en)
Other versions
FR3001263A1 (fr
Inventor
Stephane Crochet
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum SAS
Original Assignee
Adixen Vacuum Products SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Adixen Vacuum Products SAS filed Critical Adixen Vacuum Products SAS
Priority to FR1350440A priority Critical patent/FR3001263B1/fr
Priority to US14/154,703 priority patent/US20140205482A1/en
Priority to TW103101615A priority patent/TW201437486A/zh
Priority to EP14151450.5A priority patent/EP2767717A1/fr
Priority to KR1020140005952A priority patent/KR20140093635A/ko
Priority to JP2014006328A priority patent/JP2014141966A/ja
Publication of FR3001263A1 publication Critical patent/FR3001263A1/fr
Application granted granted Critical
Publication of FR3001263B1 publication Critical patent/FR3001263B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/06—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for stopping, starting, idling or no-load operation
    • F04C28/065—Capacity control using a multiplicity of units or pumping capacities, e.g. multiple chambers, individually switchable or controllable
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/24—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves or unloading valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
FR1350440A 2013-01-18 2013-01-18 Pompe a vide multi-etagee de type seche Expired - Fee Related FR3001263B1 (fr)

Priority Applications (6)

Application Number Priority Date Filing Date Title
FR1350440A FR3001263B1 (fr) 2013-01-18 2013-01-18 Pompe a vide multi-etagee de type seche
US14/154,703 US20140205482A1 (en) 2013-01-18 2014-01-14 Multi-stage vacuum pump of the dry pump type
TW103101615A TW201437486A (zh) 2013-01-18 2014-01-16 乾式幫浦之多段式真空幫浦
EP14151450.5A EP2767717A1 (fr) 2013-01-18 2014-01-16 Pompe à vide multi-étagée de type sèche
KR1020140005952A KR20140093635A (ko) 2013-01-18 2014-01-17 건식 펌프 타입의 다단식 진공 펌프
JP2014006328A JP2014141966A (ja) 2013-01-18 2014-01-17 多段真空ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1350440A FR3001263B1 (fr) 2013-01-18 2013-01-18 Pompe a vide multi-etagee de type seche

Publications (2)

Publication Number Publication Date
FR3001263A1 FR3001263A1 (fr) 2014-07-25
FR3001263B1 true FR3001263B1 (fr) 2015-02-20

Family

ID=48289292

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1350440A Expired - Fee Related FR3001263B1 (fr) 2013-01-18 2013-01-18 Pompe a vide multi-etagee de type seche

Country Status (6)

Country Link
US (1) US20140205482A1 (fr)
EP (1) EP2767717A1 (fr)
JP (1) JP2014141966A (fr)
KR (1) KR20140093635A (fr)
FR (1) FR3001263B1 (fr)
TW (1) TW201437486A (fr)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6418838B2 (ja) * 2014-07-31 2018-11-07 エドワーズ株式会社 ドライポンプ及び排ガス処理方法
GB2558626A (en) * 2017-01-11 2018-07-18 Edwards Ltd A multiple stage vacuum pump and pump configuring method
DE202017001029U1 (de) * 2017-02-17 2018-05-18 Leybold Gmbh Mehrstufige Wälzkolbenpumpe
DE202017003212U1 (de) * 2017-06-17 2018-09-18 Leybold Gmbh Mehrstufige Wälzkolbenpumpe
DE102018210922A1 (de) * 2018-07-03 2020-01-09 Leybold Gmbh Zwei- oder Mehrwellen-Vakuumpumpe
FR3086705B1 (fr) * 2018-09-27 2020-10-23 Pfeiffer Vacuum Pompe a vide primaire de type seche et procede de controle de l'injection d'un gaz de purge
US11815095B2 (en) * 2019-01-10 2023-11-14 Elival Co., Ltd Power saving vacuuming pump system based on complete-bearing-sealing and dry-large-pressure-difference root vacuuming root pumps
FR3097599B1 (fr) * 2019-06-18 2021-06-25 Pfeiffer Vacuum Pompe à vide primaire de type sèche et procédé de contrôle de l’injection d’un gaz de purge
FR3128747A1 (fr) * 2021-11-03 2023-05-05 Pfeiffer Vacuum Pompe à vide multi-étagée

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61123777A (ja) * 1984-11-16 1986-06-11 Hitachi Ltd 真空ポンプ
DE10046768B4 (de) * 2000-09-21 2011-08-11 Leybold Vakuum GmbH, 50968 Schraubenvakuumpumpe mit Bypass-Ventil
KR100876318B1 (ko) * 2001-09-06 2008-12-31 가부시키가이샤 아루박 진공배기장치 및 진공배기장치의 운전방법
GB0324068D0 (en) * 2003-10-14 2003-11-19 Boc Group Plc Improvements in pumping efficiency
JP2005155540A (ja) * 2003-11-27 2005-06-16 Aisin Seiki Co Ltd 多段ドライ真空ポンプ
JP4767625B2 (ja) * 2005-08-24 2011-09-07 樫山工業株式会社 多段ルーツ式ポンプ

Also Published As

Publication number Publication date
US20140205482A1 (en) 2014-07-24
EP2767717A1 (fr) 2014-08-20
FR3001263A1 (fr) 2014-07-25
KR20140093635A (ko) 2014-07-28
JP2014141966A (ja) 2014-08-07
TW201437486A (zh) 2014-10-01

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Legal Events

Date Code Title Description
PLFP Fee payment

Year of fee payment: 3

PLFP Fee payment

Year of fee payment: 4

CD Change of name or company name

Owner name: PFEIFFER VACUUM, FR

Effective date: 20160120

PLFP Fee payment

Year of fee payment: 5

PLFP Fee payment

Year of fee payment: 6

ST Notification of lapse

Effective date: 20190906