US20140205482A1 - Multi-stage vacuum pump of the dry pump type - Google Patents

Multi-stage vacuum pump of the dry pump type Download PDF

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Publication number
US20140205482A1
US20140205482A1 US14/154,703 US201414154703A US2014205482A1 US 20140205482 A1 US20140205482 A1 US 20140205482A1 US 201414154703 A US201414154703 A US 201414154703A US 2014205482 A1 US2014205482 A1 US 2014205482A1
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United States
Prior art keywords
vacuum pump
pumping
valve
stage
pumping stages
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Abandoned
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US14/154,703
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English (en)
Inventor
Stephane CROCHET
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Pfeiffer Vacuum SAS
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Adixen Vacuum Products SAS
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Filing date
Publication date
Application filed by Adixen Vacuum Products SAS filed Critical Adixen Vacuum Products SAS
Assigned to ADIXEN VACUUM PRODUCTS reassignment ADIXEN VACUUM PRODUCTS ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: CROCHET, STEPHANE
Publication of US20140205482A1 publication Critical patent/US20140205482A1/en
Abandoned legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/06—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for stopping, starting, idling or no-load operation
    • F04C28/065—Capacity control using a multiplicity of units or pumping capacities, e.g. multiple chambers, individually switchable or controllable
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/24—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves or unloading valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type

Definitions

  • the present invention relates to a multi-stage vacuum pump of the dry pump type.
  • the invention notably applies to a dry vacuum pump comprising two shafts with rotary lobes of the “roots” or “claw” type, or even of the scroll or screw type or using another similar principle.
  • Multi-stage vacuum pumps comprise several pumping stages in series through which there circulates a gas that is to be pumped between a suction port and a discharge port.
  • vacuum pumps a distinction is made between those that have rotary lobes which are also known by the name “roots” pumps, having two or three lobes and those with double claws, also known by the name of “claw” pumps.
  • Pumps with rotary lobes comprise two rotors of identical profiles, rotating in opposite directions inside a stator. During the rotation, the gas that is to be pumped is trapped in the empty space comprised between the rotors and the stator, and is driven by the rotor toward the next stage or, after the last stage, to the discharge port outlet. Operation involves no mechanical contact between the rotors and the stator, and this means that there can be a complete absence of oil within the pumping stages.
  • the last pumping stages situated toward the discharge port end generally have a swept volume, which means to say a pumped gas volume, that is smaller than that of the first pumping stages, at the suction port end.
  • the vacuum pump has to absorb significant initial streams of gas that cannot be admitted by the last pumping stages at the discharge port end, thus creating significant pressure differences in the vacuum pump and leading to high power consumption. This is the case, for example, where pumping out a loading/unloading lock (“load lock”), where chambers are brought down from atmospheric pressure to an evacuated state cyclically (approximately every 12 seconds).
  • load lock a loading/unloading lock
  • one subject of the invention is a multi-stage vacuum pump of the dry pump type comprising a plurality of pumping stages respectively comprising an inlet and an outlet, the pumping stages being mounted in series between a suction port and a discharge port of the vacuum pump, characterized in that the vacuum pump further comprises at least one valve configured to dump pressure from a pumping stage, said valve being arranged in the upper part of the vacuum pump, on the same side as the inlet of the pumping stage.
  • valve in the sense of pressure release valve, (or “clapet” in French), (or “exhaust valve”) makes it possible to reduce the significant pressure differences in the pumping stages.
  • the seals fitted between the lubricated bearings and the pumping stages are thus protected. Their premature wear and therefore the risk of lubricant migrating toward the pumping stages are limited.
  • the heating of the vacuum pump and its power consumption are limited.
  • valve is arranged in the upper part of the vacuum pump at the same side as the inlet of the pumping stage, and that offers several advantages.
  • the valve for example, comprises at least one passage formed in the casing of the vacuum pump connecting a central housing of a pumping stage and opening via a mouth that can be closed off by a respective mobile shutter (or “mobile obturator”) of the valve.
  • One first advantage lies in the fact that manufacture of the vacuum pump casing becomes simpler because there is no need to machine cavities in the casing under the pumping stages to accept the lifted mobile shutters of the valve. All that is actually required is the creation of a passage in the upper part of the stator.
  • surplus gas is easily exhausted to the outside via the passage. In effect, this prevents the gas that is to be dumped passing along various narrow and sinuous paths which reduce conductance, slow and heat the gas, causing heating of the vacuum pump that can sometimes be significant.
  • At least two pumping stages comprise a respective valve.
  • the vacuum pump comprises one or several first valve/s arranged in the upper part of the vacuum pump on the same side as the inlets to the pumping stages and one or more second valve/s arranged in the lower part of the vacuum pump on the same side as the outlets of the pumping stages.
  • valves By arranging the valves at the top or at the bottom of the vacuum pump, it is possible to get around problems of space required.
  • two pumping stages can have pressure dumped from the bottom, and two pumping stages from the top, in order to solve the problems of space in the vacuum pump.
  • all the pumping stages comprise a respective valve.
  • all the stages can exhaust the surplus gas simultaneously, without passing through the next pumping stage, and autonomously.
  • surges of the flow of gas in the pumping stages are significantly reduced, these being what cause the vibrations of the rotary shafts that may occur notably at the moment of opening of the isolating valve that separates the chamber that is to be pumped out from the low-pressure vacuum line connected to the vacuum pump.
  • the vacuum pump comprises a case fixed to the upper part of the casing of the vacuum pump, covering the valves and connecting the mouths of the passages of the valves toward a common outlet. It is thus possible to control the exhausting of the dumped gases, for example toward the discharge port of the vacuum pump.
  • a multi-stage vacuum pump of the dry pump type comprising a plurality of pumping stages respectively comprising an inlet and an outlet, the pumping stages being mounted in series between a suction port and a discharge port of the vacuum pump, characterized in that the vacuum pump further comprises at least two valves configured to dump pressure from a respective pumping stage, the valve comprising at least one passage formed in the casing of the vacuum pump connecting a central housing of a pumping stage and opening via a mouth that can be closed off by a respective mobile shutter of the valve, the mobile shutter being chosen from a flat disk and a diaphragm.
  • Yet another object of the invention is a multi-stage vacuum pump of the dry pump type comprising a plurality of pumping stages respectively comprising an inlet and an outlet, the pumping stages being mounted in series between a suction port and a discharge port of the vacuum pump, characterized in that the vacuum pump comprises as many valves respectively configured to dump pressure from a pumping stage as there are pumping stages, so as to dump pressure from all of the pumping stages.
  • FIG. 1 is a perspective view of a first example of a multi-stage vacuum pump
  • FIG. 2 a depicts a schematic view in cross section of a multi-stage vacuum pump with a valve according to the first example in the closed position
  • FIG. 2 b depicts a view similar to FIG. 2 a , with the valve in the open position
  • FIG. 3 depicts a schematic view of a second example of a multi-stage vacuum pump
  • FIG. 4 a depicts another example of valve
  • FIG. 4 b depicts another example of valve
  • FIG. 4 c depicts another example of valve
  • FIG. 5 a depicts a simplified schematic view of a multi-stage vacuum pump according to a third embodiment, which has as many valves as there are pumping stages, the valves being in the closed position, and
  • FIG. 5 b depicts a view similar to FIG. 5 a with the valves in the open position.
  • FIGS. 1 , 2 a and 2 b illustrate a first embodiment of a multi-stage vacuum pump of the dry pump type 1 .
  • the vacuum pump comprises two rotary shafts 2 bearing rotary lobed rotors 3 of the “roots” type.
  • the invention also applies to other types of multi-stage vacuum pump of the dry pump type, such as “claw” pumps, scroll pumps, screw pumps or pumps using another similar principle.
  • the multi-stage vacuum pump 1 comprises several pumping stages, six in this example, TA, T 1 , T 2 , T 3 , T 4 , TR, mounted in series between a suction port 4 and a discharge port 5 of the vacuum pump 1 and through which a gas that is to be pumped can circulate.
  • the rotary shafts 2 extend through the pumping stages TA, T 1 , T 2 , T 3 , T 4 , TR in the form of rotary-lobed rotors 3 and are driven from the side of the discharge port TR by a motor M of the vacuum pump 1 ( FIG. 1 ).
  • the rotors have identical profiles, rotating in a central housing 10 inside the casing 6 in opposite directions. As they rotate, the gas that is to be pumped is trapped in the empty space comprised between the rotors 3 and the casing 6 , and is driven by the rotors 3 toward the next stage or toward the discharge port 5 after the last pumping stage TR.
  • the vacuum pump 1 is referred to as a “dry” pump because, in operation, the rotors 3 rotate inside the casing 6 of the vacuum pump 1 in opposite directions, with no mechanical contact between the rotors 3 and the casing 6 , allowing a complete absence of oil.
  • Each pumping stage TA, T 1 , T 2 , T 3 , T 4 , TR comprises a respective inlet 7 and a respective outlet 8 ( FIG. 2 a ).
  • the successive pumping stages TA, T 1 , T 2 , T 3 , T 4 , TR are connected in series one after the other by respective inter-stage pipes 9 that connect the outlet 8 of the preceding pumping stage to the inlet 7 of the next stage ( FIG. 3 ).
  • the first pumping stage TA, the inlet 7 of which communicates with the suction port 4 of the vacuum pump 1 is also referred to as the “suction stage”.
  • the last pumping stage TR, the outlet 8 of which communicates with the discharge port 5 of the vacuum pump 1 is also referred to as the “discharge stage”.
  • the pumping stages T 1 , T 2 , T 3 and T 4 mounted in series between the suction stage TA and the discharge stage TR are also referred to as intermediate stages.
  • the pumping stages have a swept volume, i.e. a pumped gas volume, that decreases between the suction stage TA and the discharge stage TR.
  • the inlets 7 of the pumping stages TA, T 1 , T 2 , T 3 , T 4 , TR are arranged in the upper part of the casing 6 of the vacuum pump 1 and the outlets 8 are arranged in the lower part of the casing 6 of the vacuum pump 1 .
  • the gases are driven by the rotors 3 in the central housing 10 from the inlet 7 toward the outlet 8 then go up in the inter-stage pipe 9 toward the inlet 7 arranged in the upper part of the next pumping stage.
  • the vacuum pump 1 comprises at least one valve configured to dump pressure from (or “délester” in French), (or to “unballast”), a pumping stage in order to absorb the large streams of gas that arise notably when starting to evacuate a chamber at atmospheric pressure that is connected to the suction port 4 of the vacuum pump.
  • the valve comprises at least one passage 11 and at least one mobile shutter for closing off the respective passage ( FIGS. 2 a and 2 b ).
  • the passage 11 is formed in the casing 6 , and connects the central housing 10 of a pumping stage to the outside, for example to the discharge port 5 of the vacuum pump 1 .
  • the valve is a passive dump module, able to adopt an open or closed position according to the overpressure in the pumping stage, the open or closed position being dependent on the pressure difference between the upstream and downstream sides of the valve.
  • the closed position when the pressure difference between the upstream and downstream sides of the valve is below a valve calibration threshold, the mobile shutter closes off the passage 11 in a fluidtight manner.
  • the open position when the pressure difference between the upstream and downstream sides of the valve is above the valve calibration threshold, the surplus gas can be exhausted from the pumping stage directly to the outside, bypassing the next pumping stages.
  • the mobile shutter comprises a ball 12 and the passage 11 has a frustoconical mouth 13 forming a seat for the ball 12 .
  • the frustoconical mouth 13 of the passage 11 is closed by the ball 2 which rests on the seat of the passage 11 ( FIG. 2 a ).
  • the ball 12 closes the frustoconical mouth 13 of the passage 11 in a fluidtight manner.
  • the ball 12 lifts from the seat, opening the mouth 13 of the passage 11 ( FIG. 2 b ).
  • the frustoconically shaped mouth 13 also automatically centers the ball 12 and cushions its fall back down onto the seat.
  • the mobile shutter is formed by a flat disk 17 that in a fluidtight manner closes off the passage 11 depending on the pressure.
  • the valve may comprise a spring 18 which urges the mobile shutter 17 against the mouth of the passage 11 to close it ( FIG. 4 a ). In the event of an overpressure in the pumping stage, the mobile shutter 17 lifts, opening the mouth of the passage 11 .
  • the mobile shutter comprises for example a ball and a spring is arranged between the shutter and the mouth of the passage 11 (not depicted).
  • the mobile shutter comprises a diaphragm 19 ( FIG. 4 b ).
  • the diaphragm 19 closes the mouth of the passage 11 (see dotted lines in FIG. 4 b ).
  • the diaphragm 19 is deformed by the overpressure gas, opening the mouth of the passage 11 ( FIG. 4 b ).
  • the valve comprises a poppet valve, like a motor vehicle engine poppet valve.
  • the poppet valves comprise a head 20 , a collar 21 and a stem 22 .
  • the valve head 20 of circular shape, acts as the mobile shutter that closes off the passage 11 .
  • the head 20 presses against the valve seat formed by the mouth of the passage 11 to provide sealing and correct centering of the valve.
  • That part of the head 20 that is in contact with the seat may have a frustoconical shape that complements a frustoconical shape of the mouth of the passage 11 (not depicted).
  • the stem 22 provides the vertical guidance of the valve in the passage 11 .
  • valve may comprise two passages bypassing one another, and two respective mobile shutters rather than just one (not depicted). Two set ups bypassing one another are then used to dump a significant stream of gas, maintaining a compact layout.
  • the valve is arranged in the upper part of the vacuum pump 1 , on the same side as the inlet 7 of the pumping stage.
  • the valve allows the surplus gas to be exhausted from the top rather than from the bottom and this offers several advantages.
  • the manufacture of the casing 6 of the vacuum pump is simplified because there is no need to machine cavities in the casing 6 under the pumping stages TA, T 1 , T 2 , T 3 , T 4 , TR in order to accept the lifted mobile shutters of the valve. Indeed, all that is required is the creation of a passage 10 in the upper part of the stator 6 . Furthermore, the assembly can be kept in a fluidtight manner by a case 15 to ensure the path followed by the dumped gases, for example, toward the discharge port 5 of the vacuum pump 1 .
  • the surplus gas can easily be exhausted to the outside by the passage 10 . This then prevents the dumped gas from following various narrow and sinuous paths which reduce conductance, slow and heat the gas, causing heating of the vacuum pump that can sometimes be significant.
  • one or more first valve/s 23 are arranged in the upper part of the vacuum pump on the same side as the inlets 7 of the pumping stages TA, T 1 , T 2 , T 3 , T 4 , TR and one or more second valve/s 24 are arranged in the lower part of the vacuum pump on the same side as the outlets 8 of the pumping stages TA, T 1 , T 2 , T 3 , T 4 , TR.
  • two first valves 23 are arranged in the upper part of the vacuum pump on the same side as the inlets 7 of the two first pumping stages TA, T 1 and two second valves 24 are arranged in the lower part of the vacuum pump on the same side as the outlets 8 of the pumping stages T 2 , T 3 .
  • the two first valves 23 and the two second valves 24 are consecutive in this example.
  • valves 23 are all arranged in the upper part of the vacuum pump on the same side as the inlets 7 of the pumping stages TA, T 1 , T 2 , T 3 , T 4 , TR or all arranged in the lower part of the vacuum pump on the same side as the outlets 8 of the pumping stages TA, T 1 , T 2 , T 3 , T 4 , TR (this is not depicted).
  • FIGS. 5 a and 5 b depict another embodiment in which all the pumping stages TA, T 1 , T 2 , T 3 , T 4 , TR comprise a respective valve.
  • the vacuum pump comprises, for example, a case 15 fixed to the upper part of the casing 6 of the vacuum pump 1 covering the valves and connecting the passages 11 to a common outlet 16 .
  • the common outlet 16 is, for example, connected to the discharge port 5 of the vacuum pump.
  • the case 15 is thus arranged on top of the mobile shutters. It is fixed to the casing 6 by conventional means of attachment. It is, for example, made of a single piece, as a casting like the casing 6 of the vacuum pump 1 .
  • the mouths 13 are closed ( FIG. 5 a ).
  • the mobile shutters depicted schematically as balls 12 in FIGS. 5 a and 5 , resting in the mouths 13 prevent the pumped gas from bypassing the next pumping stages.
  • the pumped gas follows the path depicted by the dotted arrows in FIG. 3 a : the gas to be pumped is sucked in by the six pumping stages TA, T 1 , T 2 , T 3 , T 4 , TR and leaves from the discharge port 5 of the vacuum pump 1 .
  • the surplus gas When there is a surplus of gas, namely when the stream of gas becomes too great for the pumping capability of the vacuum pump 1 , for example, when pumping out from atmospheric pressure, the surplus gas lifts the balls 12 off their respective seat, uncovering the mouths 13 of the passage 11 . The gas is then exhausted from the pumping stages TA, T 1 , T 2 , T 3 , T 4 , TR to the common outlet 16 .
  • the balls 12 drop back down onto the mouths 13 which guide them into the center, cushioning their fall.
  • all the pumping stages TA, T 1 , T 2 , T 3 , T 4 , TR are able to exhaust surplus gas simultaneously, without this passing through the next pumping stage, and can do so autonomously.
  • all the pumping stages may have gas dumped from the bottom, on the same side as the discharge port of the pumping stages.
  • certain pumping stages can have gas dumped from the top on the same side as the suction port of the pumping stages and others from the bottom on the same side as the discharge port of the pumping stages.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
US14/154,703 2013-01-18 2014-01-14 Multi-stage vacuum pump of the dry pump type Abandoned US20140205482A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR1350440 2013-01-18
FR1350440A FR3001263B1 (fr) 2013-01-18 2013-01-18 Pompe a vide multi-etagee de type seche

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US20140205482A1 true US20140205482A1 (en) 2014-07-24

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US14/154,703 Abandoned US20140205482A1 (en) 2013-01-18 2014-01-14 Multi-stage vacuum pump of the dry pump type

Country Status (6)

Country Link
US (1) US20140205482A1 (fr)
EP (1) EP2767717A1 (fr)
JP (1) JP2014141966A (fr)
KR (1) KR20140093635A (fr)
FR (1) FR3001263B1 (fr)
TW (1) TW201437486A (fr)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20170204860A1 (en) * 2014-07-31 2017-07-20 Edwards Japan Limited Dry pump and exhaust gas treatment method
WO2018130819A1 (fr) * 2017-01-11 2018-07-19 Edwards Limited Pompe à vide à étages multiples et procédé de configuration de pompe
US20210270270A1 (en) * 2018-07-03 2021-09-02 Leybold Gmbh Dual or multi-shaft vacuum pump
US20210372404A1 (en) * 2019-01-10 2021-12-02 Raymond Zhou Shaw Power saving vacuuming pump system based on complete-bearing-sealing and dry-large-pressure-difference root vacuuming root pumps
US11255328B2 (en) * 2017-02-17 2022-02-22 Leybold Gmbh Multi-stage rotary lobe pump
US20220372979A1 (en) * 2019-06-18 2022-11-24 Pfeiffer Vacuum Dry-type primary vacuum pump and method for controlling the injection of a purging gas
US11585342B2 (en) * 2018-09-27 2023-02-21 Pfeiffer Vacuum Primary vacuum pump of dry type and method for controlling the injection of a purge gas

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE202017003212U1 (de) * 2017-06-17 2018-09-18 Leybold Gmbh Mehrstufige Wälzkolbenpumpe
FR3128747A1 (fr) * 2021-11-03 2023-05-05 Pfeiffer Vacuum Pompe à vide multi-étagée

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61123777A (ja) * 1984-11-16 1986-06-11 Hitachi Ltd 真空ポンプ
DE10046768B4 (de) * 2000-09-21 2011-08-11 Leybold Vakuum GmbH, 50968 Schraubenvakuumpumpe mit Bypass-Ventil
KR100876318B1 (ko) * 2001-09-06 2008-12-31 가부시키가이샤 아루박 진공배기장치 및 진공배기장치의 운전방법
GB0324068D0 (en) * 2003-10-14 2003-11-19 Boc Group Plc Improvements in pumping efficiency
JP2005155540A (ja) * 2003-11-27 2005-06-16 Aisin Seiki Co Ltd 多段ドライ真空ポンプ
JP4767625B2 (ja) * 2005-08-24 2011-09-07 樫山工業株式会社 多段ルーツ式ポンプ

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20170204860A1 (en) * 2014-07-31 2017-07-20 Edwards Japan Limited Dry pump and exhaust gas treatment method
US11592025B2 (en) * 2014-07-31 2023-02-28 Edwards Japan Limited Dry pump and exhaust gas treatment method
WO2018130819A1 (fr) * 2017-01-11 2018-07-19 Edwards Limited Pompe à vide à étages multiples et procédé de configuration de pompe
US11255328B2 (en) * 2017-02-17 2022-02-22 Leybold Gmbh Multi-stage rotary lobe pump
US20210270270A1 (en) * 2018-07-03 2021-09-02 Leybold Gmbh Dual or multi-shaft vacuum pump
US11585342B2 (en) * 2018-09-27 2023-02-21 Pfeiffer Vacuum Primary vacuum pump of dry type and method for controlling the injection of a purge gas
US20210372404A1 (en) * 2019-01-10 2021-12-02 Raymond Zhou Shaw Power saving vacuuming pump system based on complete-bearing-sealing and dry-large-pressure-difference root vacuuming root pumps
US11815095B2 (en) * 2019-01-10 2023-11-14 Elival Co., Ltd Power saving vacuuming pump system based on complete-bearing-sealing and dry-large-pressure-difference root vacuuming root pumps
US20220372979A1 (en) * 2019-06-18 2022-11-24 Pfeiffer Vacuum Dry-type primary vacuum pump and method for controlling the injection of a purging gas
US11725659B2 (en) * 2019-06-18 2023-08-15 Pfeiffer Vacuum Dry-type primary vacuum pump and method for controlling the injection of a purging gas

Also Published As

Publication number Publication date
FR3001263A1 (fr) 2014-07-25
FR3001263B1 (fr) 2015-02-20
JP2014141966A (ja) 2014-08-07
TW201437486A (zh) 2014-10-01
KR20140093635A (ko) 2014-07-28
EP2767717A1 (fr) 2014-08-20

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