EP3274524A1 - Cabine à atmosphère propre - Google Patents

Cabine à atmosphère propre

Info

Publication number
EP3274524A1
EP3274524A1 EP15790863.3A EP15790863A EP3274524A1 EP 3274524 A1 EP3274524 A1 EP 3274524A1 EP 15790863 A EP15790863 A EP 15790863A EP 3274524 A1 EP3274524 A1 EP 3274524A1
Authority
EP
European Patent Office
Prior art keywords
structural core
clean
cabin
plates
cover
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP15790863.3A
Other languages
German (de)
English (en)
Inventor
Gerhard SPREITZER
Martin KOEPKE
Thomas Bultmann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
M Braun Inertgas Systeme GmbH
Original Assignee
M Braun Inertgas Systeme GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by M Braun Inertgas Systeme GmbH filed Critical M Braun Inertgas Systeme GmbH
Publication of EP3274524A1 publication Critical patent/EP3274524A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • E—FIXED CONSTRUCTIONS
    • E04—BUILDING
    • E04B—GENERAL BUILDING CONSTRUCTIONS; WALLS, e.g. PARTITIONS; ROOFS; FLOORS; CEILINGS; INSULATION OR OTHER PROTECTION OF BUILDINGS
    • E04B1/00—Constructions in general; Structures which are not restricted either to walls, e.g. partitions, or floors or ceilings or roofs
    • E04B1/02—Structures consisting primarily of load-supporting, block-shaped, or slab-shaped elements
    • E04B1/12—Structures consisting primarily of load-supporting, block-shaped, or slab-shaped elements the elements consisting of other material
    • E—FIXED CONSTRUCTIONS
    • E04—BUILDING
    • E04H—BUILDINGS OR LIKE STRUCTURES FOR PARTICULAR PURPOSES; SWIMMING OR SPLASH BATHS OR POOLS; MASTS; FENCING; TENTS OR CANOPIES, IN GENERAL
    • E04H5/00—Buildings or groups of buildings for industrial or agricultural purposes
    • E04H5/02—Buildings or groups of buildings for industrial purposes, e.g. for power-plants or factories
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L1/00—Enclosures; Chambers
    • B01L1/04—Dust-free rooms or enclosures
    • E—FIXED CONSTRUCTIONS
    • E04—BUILDING
    • E04B—GENERAL BUILDING CONSTRUCTIONS; WALLS, e.g. PARTITIONS; ROOFS; FLOORS; CEILINGS; INSULATION OR OTHER PROTECTION OF BUILDINGS
    • E04B1/00—Constructions in general; Structures which are not restricted either to walls, e.g. partitions, or floors or ceilings or roofs
    • E04B1/348—Structures composed of units comprising at least considerable parts of two sides of a room, e.g. box-like or cell-like units closed or in skeleton form
    • E04B1/34815—Elements not integrated in a skeleton
    • E04B1/3483—Elements not integrated in a skeleton the supporting structure consisting of metal
    • E—FIXED CONSTRUCTIONS
    • E04—BUILDING
    • E04H—BUILDINGS OR LIKE STRUCTURES FOR PARTICULAR PURPOSES; SWIMMING OR SPLASH BATHS OR POOLS; MASTS; FENCING; TENTS OR CANOPIES, IN GENERAL
    • E04H15/00—Tents or canopies, in general
    • E04H15/32—Parts, components, construction details, accessories, interior equipment, specially adapted for tents, e.g. guy-line equipment, skirts, thresholds
    • E04H15/62—Pegs, stakes or the like
    • E—FIXED CONSTRUCTIONS
    • E04—BUILDING
    • E04B—GENERAL BUILDING CONSTRUCTIONS; WALLS, e.g. PARTITIONS; ROOFS; FLOORS; CEILINGS; INSULATION OR OTHER PROTECTION OF BUILDINGS
    • E04B1/00—Constructions in general; Structures which are not restricted either to walls, e.g. partitions, or floors or ceilings or roofs
    • E04B1/343—Structures characterised by movable, separable, or collapsible parts, e.g. for transport
    • E04B1/34315—Structures characterised by movable, separable, or collapsible parts, e.g. for transport characterised by separable parts
    • E04B1/34321—Structures characterised by movable, separable, or collapsible parts, e.g. for transport characterised by separable parts mainly constituted by panels
    • E—FIXED CONSTRUCTIONS
    • E04—BUILDING
    • E04B—GENERAL BUILDING CONSTRUCTIONS; WALLS, e.g. PARTITIONS; ROOFS; FLOORS; CEILINGS; INSULATION OR OTHER PROTECTION OF BUILDINGS
    • E04B1/00—Constructions in general; Structures which are not restricted either to walls, e.g. partitions, or floors or ceilings or roofs
    • E04B1/348—Structures composed of units comprising at least considerable parts of two sides of a room, e.g. box-like or cell-like units closed or in skeleton form
    • E04B1/34869—Elements for special technical purposes, e.g. with a sanitary equipment
    • E—FIXED CONSTRUCTIONS
    • E04—BUILDING
    • E04B—GENERAL BUILDING CONSTRUCTIONS; WALLS, e.g. PARTITIONS; ROOFS; FLOORS; CEILINGS; INSULATION OR OTHER PROTECTION OF BUILDINGS
    • E04B1/00—Constructions in general; Structures which are not restricted either to walls, e.g. partitions, or floors or ceilings or roofs
    • E04B2001/0053—Buildings characterised by their shape or layout grid
    • E04B2001/0084—Buildings with non right-angled horizontal layout grid, e.g. triangular or hexagonal
    • E04B2001/0092—Small buildings with hexagonal or similar horizontal cross-section

Definitions

  • the invention relates to a clean gas cabin with a sealed from the environment, surrounded by side walls interior.
  • Such manufacturing processes can be coating processes, for example in semiconductor production, encapsulation steps in LCD or OLED production or production processes of highly pure base materials, for example in medical and pharmaceutical technology and in welding applications, in particular titanium welds.
  • the processes may require clean room conditions, low humidity, an inert gas atmosphere, or a combination of various such and other conditions. It is known to carry out such manufacturing processes or operations in a closed room in which the atmosphere can be adjusted according to the required conditions.
  • the closed room has locks, through which the required materials can be introduced into the enclosed space and the products can be removed.
  • Such a space is formed, for example, in so-called glove boxes, as described sufficiently in the literature (see “clean room technology", 3rd updated and updated ed., Springer, pp. 202-207.)
  • gloveboxes are predominantly made of stainless steel They provide the possibility to carry out the desired working steps within the glovebox via glove feedthroughs
  • appropriate gas feeds or circulation lines are used, with which the glovebox gas is taken, passed through at least one gas treatment unit and then returned to the glovebox. Due to their construction, such gloveboxes, especially for large production units, are difficult to integrate into production lines, since the systems to be enclosed can only be introduced into the glovebox via the intended locks.
  • inert gas housings in a hood design are known.
  • the hoods form with a base plate an enclosed space in which the required atmosphere can be adjusted.
  • the pre-assembled hood is placed on top of the base plate and sealed.
  • Required bushings, locks, upstream chambers and other required units and assemblies are preferably already mounted and tested on the hood.
  • the inert gas housing can therefore be quickly placed at a designated work or production place.
  • the approach of the hood design offers the possibility to operate any plant or plant parts in a closed room, whose atmosphere can be adjusted according to the requirements. This is the size the hood adapted to the particular system.
  • the materials used to construct the inert gas housings are designed so as not to alter the atmosphere inside them, for example due to contamination or outgassing.
  • the enclosure is designed such that no gas exchange between the interior of the inert gas housing and the environment takes place.
  • Inert gas housing made of stainless steel or aluminum are known.
  • a disadvantage of such inert gas housings is their high weight, which results from the described design and the materials used. The high weight on the one hand makes it difficult to put the hood over the respective system from above, because correspondingly load-bearing lifting devices must be present.
  • the inert gas housings increase the floor load in addition to the enclosed system. This makes extensive and costly conversion measures to increase the static of the soil required for insufficient floor load capacity of the building in which the clean gas cabin is to be set up.
  • the object of the invention is achieved in that at least part of the side walls of the clean cask are formed from one or more structural core plates, in particular one or more honeycomb core plates, each with two cover plates and a structural core arranged therebetween, in particular honeycomb core in particular those plate-shaped components are understood that are sandwiched and have two or more cover plates between which a structural core is arranged.
  • the structural core can be any, in particular lightweight, structure. This can be formed for example by a honeycomb core, a wave or meandering material, a foam material or the like.
  • a clean cab according to the present invention is a housing in which a required atmosphere can be adjusted.
  • the housing is constructed gas-tight against its environment.
  • manufacturing processes and operations can be performed, which require a separate atmosphere.
  • corresponding production units such as a robot, or laboratory structures are arranged within the clean cabin.
  • the requirements of the atmosphere may concern their cleanliness, their moisture content or their composition. For example, certain processes can only be carried out under an inert gas atmosphere. Other parameters such as temperature or box pressure may also be adjustable.
  • the clean cab are therefore assigned to corresponding gas treatment units.
  • the clean gas cabin can thus be a cabin with a polygonal base area and an environment sealed by the surrounding walls, with at least one circulation line, taken over the gas of the clean gas, passed through at least one gas treatment unit and then fed back to the clean cab becomes.
  • a box can also be equipped with a laminar flow system
  • Structural core plates have a high flexural rigidity, so that the side walls formed therefrom do not bend under load or bend only slightly elastically. They are due to the cover plates arranged on both sides according to the permeation properties of the used th cover plates in the direction of their surface normal gas-tight.
  • aluminum honeycomb core plates in which the cover plates and the structural core are formed from aluminum, are suitable for producing gas-tight side walls of the clean cabin.
  • the structural core prevents gas within the structural core plate from flowing across its surface normal. This ensures that no gas, for example via the edges or via openings introduced offset into the cover plates, enters the clean gas cabin or can flow out of the clean gas cabin.
  • Structural core plates as a whole can not be easily bent due to their structure, since in this case the outer cover plate would have to be stretched and the inner cover plate would have to be compressed, which leads to corresponding distortions.
  • one cover plate is bent along one corner of the clean cistern and the other cover plate and the structural core are separated or that one of the cover plates is molded in the direction of the other cover plate in the structural core and that the structural core plate bent in Einform Scheme.
  • one cover plate is bent along one corner of the clean cabin and the other cover plate and the structural core are separated, it is still possible to form corners with structural core plates.
  • the cover plate which later lies on the side of the outer angle of the corner, is separated together with the structural core to the opposite cover plate.
  • the inner cover plate is bent along the gap in the outer cover plate and the structural core to the desired angle of the corner of the clean cabin. This widens the gap.
  • the cover plate, which is later located at the inner angle of the corner, and the underlying structural core are separated along the later corner to the opposite cover plate.
  • the gap is to be formed so that it widening in a wedge shape, starting from the non-severed cover plate to the severed cover plate.
  • the required opening angle of the gap is predetermined by the angle of the corner to be formed. Subsequently, the non-severed cover plate is bent along the gap such that it forms an outer angle. The gap is compressed again.
  • the structural core plate is also gas-tight in the region of the formed corner by the respective present, not severed cover plate.
  • the structural core prevents gas, starting from the gap, from spreading within the structural core plate.
  • one of the cover plates is formed in the direction of the other cover plate in the structural core and that the structural core plate is bent in the Einform Scheme, then can be made in a particularly simple manner, a gas-tight Ecktex.
  • the gap formed along a corner of the clean cabin is covered by a corner cover in the split cover plate and in the structural core and / or that the corner cover with two angularly arranged legs respectively on one side of the gap tightly connected to the Strukturkemplatte, in particular, is glued tight.
  • the corner cover increases the stability of the side wall in the area of the corner. It fixes the angle of the corner and prevents this angle from being altered when the side wall is loaded, for example by bending the non-separated cover plate. Furthermore, it causes an additional sealing of the side wall along the corner.
  • a protection of the edges of the side walls against mechanical damage can be achieved that mounted on edges of the structural core plates at the top and bottom of the side walls rails, in particular plugged and tightly connected to the structural core plates, in particular sealed.
  • the profile rails allow a tight connection of the side walls at the bottom and on the lid of the clean cabin.
  • At least one screw receptacle is arranged in the structural core plate and that the screw receptacle is guided through one of the two cover plates and at least part of the structural core of the structural core plate arranged between the cover plates, and / or that the screw receptacle is guided through both cover plates and the structural core and is sealed at least on one side when the fastener is inserted. If only one of the two cover plates is broken from the screw receptacle, the structural core plate in the area of the screw receptacle is still gas-tight. Is it, for example, in an increased mechanical load on the screw, required that both cover plates are broken by the screw, it can be prevented via the seal that passes through the screw receiving gas from the outside into the clean cabin or from the clean cabin to the environment.
  • a gas-tight connection of two adjacent structural core plates can be achieved by connecting two adjoining structural core plates by at least one connecting rail, in that the connecting rail has an application section and in that the application section is tightly connected, in particular tightly bonded, to a respective cover plate of the adjacent structural core plates.
  • the application section of the connecting rail thus forms a gas-tight bridge between the two adjoining structural core plates.
  • the connection of the structural core plates takes place in a straight region of the side wall of the clean gas cabin. Such a connection is easier to seal than a connection in a corner of the clean cabin.
  • sealing elements may be provided between the respective structural core plate and the adjacent contact section of the connecting rail.
  • the structural design can be simplified by the fact that the connecting rail is an extruded profile with a hollow profile and the Anlegeabrate formed thereon and that the adjacent structural core plates are arranged on both sides along the hollow profile and spaced therefrom. Due to the hollow profile high rigidity and stability of the connecting rail is achieved. This results in an additional stiffening of the side walls connected to the connecting rail. The hollow profile further causes an exact positioning of the structural core plates applied thereto.
  • the connecting rail can be easily and inexpensively manufactured in an extrusion process. In order to achieve a lightweight construction of the clean cabin, the connecting rail is preferably made of aluminum.
  • the assembly of the clean cabin can be simplified by at least one of the adjacent structural core plates is inserted and held with its edge in a region between the Anlegeabterrorism and a counter to the Anlegeabterrorism to the hollow profile molded counter rail.
  • the counter rail and the opposing abutment portion form together with the hollow profile of a U-shaped receptacle into which a structural core plate can be inserted and held with its edge.
  • the counter rail thus causes an additional seal and increased stability in the transition region from the structural core plate to the connecting rail.
  • the side walls are directly or indirectly connected to a bottom of the clean cab and that the bottom of one or more as a structural core plates, in particular honeycomb core, running bottom plates is formed.
  • the side walls are gas-tight connected to the ground.
  • a firm, yet gas-tight connection between adjacent floor panels can be achieved by molding or gluing mating floor rails to abutting edges of adjacent floor panels and by sealing the floor rails together.
  • the clean cab is closed at the top by a cover formed from at least one cover plate and that the cover plate is formed from a structural core plate, in particular honeycomb core plates.
  • the structural core plate offers the already described advantages of low weight, high mechanical strength with low deflection and gas tightness.
  • An easy-to-install and tight connection of the side walls with the lid of the clean cabin can be achieved that the side walls are connected with their attached, in particular plugged rails directly or indirectly with the at least one cover plate and / or that between the rails and the cover plate sealing elements are provided and / or that the rails are glued to the cover plate.
  • FIG. 1 is a perspective outside view of a clean cab
  • FIG. 3 shows the clean cab shown in Figures 1 and 2 in an exploded view
  • FIG. 5 shows a detail shown in Figure 3 with a corner of the clean cabin in a perspective exterior view
  • FIG. 6 shows a detail shown in Figure 3 with a corner of the clean cab in a perspective interior view
  • FIG. 7 shows a detail shown in FIG. 3 with a corner of the clean-gas cabin in an external perspective view and in an exploded view
  • 8 shows a detail shown in FIG. 3 with a corner of the clean-gas cabin in a perspective exterior view in the region of two connecting rails
  • FIG. 11 shows a detail shown in FIG. 3 with a vertically arranged one
  • FIG. 12 shows a detail shown in FIG. 3 with a vertically arranged one
  • FIG. 13 shows a detail shown in FIG. 3 with a vertically arranged one
  • FIG. 14 is an exploded view of a detail shown in FIG. 3 in the region of two adjoining floor panels;
  • FIG. 15 is a carrier of the clean cab in a perspective view
  • 16 shows the carrier shown in FIG. 15 in a sectional view looking in the direction of the longitudinal extent of the carrier, FIG.
  • FIG. 17 shows a detail shown in FIG. 3 in the region of a lid of FIG
  • FIG. 18 shows a detail shown in FIG. 3 in the region of a fastening of a supporting construction of the clean-up cabin.
  • FIG. 1 shows a perspective exterior view of a clean cabin 10.
  • a front side 10.1 and a rear side 10.2 of the clean cabin 10 are set free.
  • the clean cab 10 has a polygonal floor plan.
  • the floor plan is hexagonal.
  • side walls 30 are placed on a corresponding hexagonal bottom 20 side walls 30 are placed.
  • the side walls 30 are oriented on positioning elements 21, which are attached to the outside of the floor 20.
  • a first vertical side wall 30.1 is arranged on the left and a first, a second and a third horizontal side wall 30.8, 30.9, 30.10 are provided one above the other. More vertical side walls
  • the first vertical side wall 30.1 comprises a first corner 11.1 of the clean car cabin 10.
  • the three horizontal side walls 30.8, 30.9, 30.10 span a second and a third corner 11.2,
  • a cutout 31 is provided into which an intermediate door 35 is inserted.
  • connecting rails 60 are provided, which by means of Connecting brackets 61 are connected to the side walls 30.1, 30.2, 30.3, 30.4, 30.5, 30.6, 30.7, 30.8, 30.9, 30.10.
  • the lid 40 also has a hexagonal basic structure.
  • the surface of the lid 40 is formed from four cover plates 43.
  • the cover plates 43 are held with fastening elements 44 and edge fastening elements 45.
  • a border 42 Surrounding the cover plates 43, a border 42 is provided, to which a railing 41 is attached.
  • circulation pipes 50.1, 50.2 are fastened in the form of rectangular ducts.
  • the circulation lines 50.1, 50.2 are connected via feeders 51.1, 51.2 and withdrawal points 52.1, 52.2, as shown in Figures 1, 2 and 3, with the interior of the clean cab 10.
  • corresponding openings are provided in the first and the third horizontal side wall 30.8, 30.10 as well as in the second vertical side wall 30.2 shown in FIG.
  • the clean cabin 10 is a sealed relative to its environment housing. Within the clean cab 10 manufacturing equipment or laboratory setups can be arranged, etc. .. Furthermore, in the clean cabin 10, a predetermined atmosphere can be set. For this purpose, a specific gas or a gas mixture having a predetermined composition in the interior of the clean cabin 10 may be present. The gas or gas mixture may be an inert gas. Furthermore, the humidity of the gas or the gas mixture can be adjusted. As an additional requirement, a required clean room class for the clean cabin 10 can be specified. The requirements can apply both individually and in combination. In addition, other atmospheric parameters, such as temperature and pressure, can be adjusted. As a clean gas In accordance with the present invention, an atmosphere meeting the required requirements is to be understood.
  • the clean cabin 10 is equipped with appropriate units for providing or generating this atmosphere.
  • the clean gas cabin 10 the two circulation lines 50.1, 50.2. About this is taken at the sampling points 52.1, 52.2 gas from clean cabin 10 and fed via the feeders 51.1, 51.2 back to the clean cab 10.
  • the gas is supplied to a gas processing unit 55 shown in FIG.
  • the gas conditioning unit 55 is in communication with the interior of the clean gas cabin 10.
  • the gas treated in the gas conditioning unit 55 is supplied to the interior of the clean gas cabin 10 after flowing through the gas conditioning unit 55 via the extraction points 52.1, 52.2, the circulation lines 50.1, 50.2 and the feeders 51.1, 51.2 ,
  • the gas treatment includes the adjustment of the atmosphere required for the interior of the clean gas cabin 10.
  • the clean cab 10 thus allows the implementation of manufacturing processes or operations that require a special atmosphere. Such manufacturing steps can be coating processes, encapsulation processes or the processing or production of highly pure substances, for example in the pharmaceutical sector.
  • the intermediate door 35 may represent a connection to the clean cab 10 connected / connected chamber.
  • the side walls 30.1, 30.2, 30.3, 30.4, 30.5, 30.6, 30.7, 30.8, 30.9, 30.10 are formed from structural core plates 12, as described in more detail with reference to FIG.
  • the side walls 30.1, 30.2, 30.3, 30.4, 30.5, 30.6, 30.7, 30.8, 30.9, 30.10 be executed as honeycomb core plates or as aluminum honeycomb core plates.
  • Structural core plates have a multilayer structure. As shown in Figure 4, at least two spaced cover plates 12.1, 12.2 are connected flat with a structural core 12.3.
  • the cover plates 12.1, 12.2 and the structural core 12.3 are made of aluminum in the present embodiment.
  • the structural core 12.3 is designed as a honeycomb core.
  • the clean cabin 10 thus has a significantly lower weight than a clean cabin 10 made with solid aluminum or stainless steel walls.
  • the ground load which results from the weight of the converted plant parts and the clean cabin 10 significantly reduced.
  • the clean cab 10 can thus be used in buildings with low soil load capacity.
  • a lighter weight facilitates the installation of the clean cabin 10 at its place of use, since this requires no lifting devices or lifting devices with a low load capacity.
  • the cover plates 43 are made of structural core plates 12, in the present embodiment of aluminum honeycomb core plates.
  • FIG. 2 shows the clean cab 10 shown in FIG. 1 in a perspective interior view. Here is the insight into the clean cab 10 from the back of 10.2.
  • a gas supply channel 53 is mounted along the side walls 30.1, 30.2, 30.3, 30.4, 30.5, 30.6, 30.7, 30.8, 30.9, 30.10.
  • the gas supply channel 53 is connected to the bottom 20 and the side walls 30.1, 30.2, 30.3, 30.4, 30.5, 30.6, 30.7, 30.8, 30.9, 30.10.
  • the first feed 52.1 and the second feed 52.2 of the circulation lines shown in FIG 50.1, 50.2 lead into the gas supply channel 53. This is connected via perforated grille 54, which are arranged laterally and on top of the gas supply channel 53, connected to the interior of the clean cabin 10.
  • connecting rails 60 are arranged, which in each case have an integrally formed hollow profile 60.2 to the interior of the clean cab 10.
  • the side walls 30.8, 30.9, 30.10 abut against the hollow profiles 60.2.
  • the structure of the connecting rails 60 of the embodiment shown is enlarged and shown in section in Figure 9.
  • a support structure 70 On the support structure 70, a ceiling 13 is fixed down, which is at least partially designed as a perforated ceiling.
  • filters (and possibly temperature control devices in the form of water-air heat exchanger) 56 of the gas conditioning unit 55 are stored.
  • a substructure 46 Above the filter (heat exchanger), a substructure 46 is arranged, on which the cover 40 of the clean cabin 10 is mounted.
  • the support structure 70 and the substructure 46 are constructed with beams 80 which are fixed to the side walls 30.1, 30.2, 30.3, 30.4, 30.5, 30.6, 30.7, 30.8, 30.9, 30.10.
  • the manufacturing equipment or laboratory setups etc. can be placed on the floor 20 of the clean cabin 10.
  • the production plant or the laboratory structure can be, for example, a robot that performs one or more work steps in the set atmosphere of the clean gas cabin 10.
  • the gas is removed via the removal points 52.1, 52.2 the interior of the clean cabin 10 and fed via the feeders 51.1, 51.2 the interior again.
  • the gas is sucked through the filters 56 into the space between the cover 13 and the cover 40 and then the circulation lines 50.1, 50.2 supplied.
  • the ceiling 13 is executed perforated below the filter 56.
  • the ceiling 13 may be recessed below the filter 56.
  • the interior of the clean cab 10 is thus traversed from top to bottom of the gas.
  • corresponding fans are provided in the circulation lines 50.1, 50.2 not shown.
  • FIG. 3 shows the clean cab 10 shown in FIGS. 1 and 2 in an exploded view.
  • a fourth corner 11.4 of the clean cab 10 is disposed within the seventh vertical side wall 30.7.
  • a fifth corner 11.5 extends within the fifth vertical side wall 30.5, while a sixth corner 11.6 runs along the third vertical side wall 30.3.
  • the abutting edges between the side walls 30.1, 30.2, 30.3, 30.4, 30.5, 30.6, 30.7, 30.8, 30.9, 30.10 do not run along the corners 11.1, 11.2, 11.3, 11.4, 11.5, 11.6 of the clean cabin 10. They are along rectilinear sections the outer wall of the clean cabin 10 is arranged.
  • the transitions between the side walls 30.1, 30.2, 30.3, 30.4, 30.5, 30.6, 30.7, 30.8, 30.9, 30.10 can be well sealed.
  • mounting rails 71 are attached to attach the support structure 70.
  • the bottom 20 is formed of adjacent bottom plates 22.1, 22.2, 22.3. In the present embodiment, three bottom plates 22.1, 22.2, 22.3 are provided. In order to reduce the weight of the clean cabin 10, the bottom plates 22.1, 22.2, 22.3 of structural core plates 12, in the present embodiment of aluminum honeycomb core plates, formed.
  • the sections V, VI, VII, VIII, X, XI, XII, XIII, XIV, XVII, XVIII are shown enlarged in Figures 5, 6, 7, 8, 10, 11, 12, 13, 14, 17 and 18 ,
  • the bottom plates 22.1, 22.2, 22.3 are connected to the bottom 22 and the positioning elements 21 are attached.
  • the manufacturing facility or lab setup is positioned on the floor 22.
  • the side walls are 30.1, 30.2, 30.3, 30.4, 30.5, 30.6, 30.7, 30.8, 30.9, 30.10 set up and connected by means of the connecting rails 60 with each other and with the bottom plates 22.1, 22.2, 22.3 gastight.
  • the side walls 30.1, 30.2, 30.3, 30.4, 30.5, 30.6, 30.7, 30.8, 30.9, 30.10 lie on one side against the positioning elements 21.
  • the mounting rails 71 are attached to the side walls 30.1, 30.2, 30.3, 30.4, 30.5, 30.6, 30.7, 30.8, 30.9, 30.10 and the support structure 70 is inserted.
  • the aggregates of the gas conditioning unit 55 are installed.
  • the lid 40 is placed and gas-tight with the side walls 30.1, 30.2, 30.3, 30.4, 30.5, 30.6, 30.7, 30.8, 30.9, 30.10 connected. Additions, like the intermediate door 35, are mounted.
  • other assemblies such as the circulation lines 50.1, 50.2, the gas supply channel 53, the border 42 and the railing 41, attached.
  • the procedure offers the advantage that no prefabricated hood must be transported as a whole, but the individual components are installed on site. Hoists are therefore not required and the transport of the components to the site is easy and therefore inexpensive.
  • the hood of the clean cabin 10 consisting of the side walls 30.1, 30.2, 30.3, 30.4, 30.5, 30.6, 30.7, 30.8, 30.9, 30.10, the support structure 70 and the substructure 46 with the cover 40, preassembled.
  • the support structure 70 and the substructure 46 with the cover 40 preassembled.
  • further components and assemblies can be pre-assembled on the hood.
  • the floor 20 is constructed, the positioning elements 21 attached thereto and set up the manufacturing plant or the laboratory setup on it. Subsequently, the pre-assembled hood is placed on top of the ground 20 from above.
  • the advantage here is that the hood can be tested in advance in their function and tightness. Furthermore, the structure can be done quickly on site and thus, for example, without long interruptions of an ongoing production.
  • Figure 4 shows a corner 11 of the clean cab 10 in a sectional view from above.
  • the corner 11 is representative of the already introduced corners 11.1, 11.2, 11.3, 11.4, 11.5, 11.6.
  • a structural core plate 12 is formed from two spaced-apart cover plates 12.1, 12.2 and a structural core 12.3.
  • the structural core 12.3 connects the two cover plates 12.1, 12.2.
  • the structural core plate 12 forms the corner 11.
  • the outer second cover plate 12.2 and the structural core 12.3 according to the invention are separated along the corner 11.
  • the inner ones te cover plate 12.1 is bent along the edge 11.
  • the inner first cover plate 12.1 is bent along the edge 11 such that it forms an inner angle on its side facing away from the structural core 12.3.
  • an opened gap 32 forms along the dividing line of the first cover plate 12. 1 and the structural core 12. 3. This is covered by a corner cover 33.
  • the corner cover 33 is formed by two mutually angled legs 33.1, 33.2. The angle corresponds to the required angle of the edge 11 of the clean cabin 10.
  • the legs 33.1, 33.2 are each connected on one side of the gap 32 with the outer second cover plate 12.1 of the structural core plate 12, in particular glued.
  • the structural corrugated board 12 Due to its structure, the structural corrugated board 12 has a high stability and flexural stiffness with at the same time low dead weight. Therefore, a clean cab 10 can be constructed with a very low weight over conventional wall materials such as solid aluminum or stainless steel.
  • structural core plates 12 are gas-tight. Even between the cover plates 12.1, 12.2, gas can not flow within the structural core 12.3 transversely to the surface normal of the structural core plate 11, since the structural core elements are tightly connected in this direction to one another and to the cover plates 12.1, 12.2.
  • structural core plates 12 are provided with a honeycomb core as a structural core 12.3. Honeycomb cores lead to a high flexural rigidity of the structural core plates 12, while they can be made gas-tight transversely to the surface normal of the structural matrices 12.
  • the structural core plate 12 Since only the outer second cover plate 12.2 and the structural core 12.3 were separated to form the edge 11 and the inner first cover plate 12.1 was not separated according to the invention, but merely bent, the structural core plate 12 remains gas-tight in the region of the edge 11. This is a basic prerequisite for use as side wall 30.1, 30.2, 30.3, 30.4, 30.5, 30.6, 30.7, 30.8, 30.9, 30.10 a clean cab 10. Since the structural core plate 12 is transversely to the surface normal gas-tight, no gas can be introduced through the gap 32 and transverse to the structural core plate 12 to a possible, spaced from the corner 11 breakthrough of the inner first cover plate 12.1 and thus into the interior of the clean cab 10 arrive.
  • the corner cover 33 By the corner cover 33, the angle of the edge 11 is set and stabilized. In addition, the corner cover 33 seals the area of the gap 32. It also prevents the inner first cover plate 12.1 from being accidentally damaged from outside by the gap 32.
  • the corner cover 33 is a curved along its longitudinal extent rail, in particular made of aluminum.
  • the structural element plate 12 is designed as an aluminum honeycomb core plate.
  • the cover plates 12.1, 12.2 and the structural core 12.3 are made of aluminum.
  • the structural core 12.3 has a honeycomb structure.
  • dense, mechanically very stable side walls 30.1, 30.2, 30.3, 30.4, 30.5, 30.6, 30.7, 30.8, 30.9, 30.10 are obtained.
  • Aluminum is advantageously inert to most of the atmospheres required within the clean tank 10.
  • FIG. 5 shows a section V shown in FIG. 3 with a second corner 11. 2 of the clean cabin 10 in a perspective external view.
  • the corner cover is glued to the outer second cover plate 12.2 of the structural core plate 12.
  • two profiled rails 62 are attached.
  • the first horizontal side wall 30.8 is inserted into receiving regions 62.2 of the adjacent profiled rails 62.
  • double-sided two support strips 62.1 are formed in one piece on the uprights. receiving areas 62.2 formed.
  • the mitred profiled rails 62 abut each other.
  • the profile rails 62 cover the open edges of the structural core plate 12 designed as side walls 30.1, 30.2, 30.3, 30.4, 30.5, 30.6, 30.7, 30.8, 30.9, 30.10 upwards.
  • the support strips 62.1 contact surfaces to the overlying cover 40.
  • the contact surfaces can be tight, for example by gluing or by clamping, connected to the cover 40.
  • For sealing seals can be arranged along the contact surfaces.
  • the contact areas between the rails 62 and the side walls 30.1, 30.2, 30.3, 30.4, 30.5, 30.6, 30.7, 30.8, 30.9, 30.10 are sealed.
  • sealing elements may be provided within the receiving areas 62.2 or the side walls 30.1, 30.2, 30.3, 30.4, 30.5, 30.6, 30.7, 30.8, 30.9, 30.10 are adhesively bonded to the profile rail 62 in the area of the receiving areas 62.2.
  • FIG. 6 shows a section VI shown in FIG. 3 with a fifth corner 11.5 of the clean cab 10 in a perspective interior view.
  • the section VI thus corresponds to the representation of Figure 5, but with a view of the inner angle of a corner 11.1, 11.2, 11.3, 11.4, 11.5, 11.6 in the region of the upper end of a side wall 30.1, 30.2, 30.3, 30.4, 30.5, 30.6, 30.7, 30.8, 30.9, 30.10.
  • the fifth vertical side wall 30.5 is designed as a structural core plate 12.
  • the inner first cover plate 12.1 of the structural core plate 12 is bent along the fifth corner 11.5, so that an inner angle is formed. Since the inner first cover plate 12.1 is not broken through in the region of the fifth corner 11.5, the area of the fifth corner 11.5 remains gas-tight.
  • FIG. 7 shows a detail VII shown in FIG. 3 with a second corner 11. 2 of the clean cabin 10 in a perspective exterior view and in an exploded view.
  • the rails 62 are mitred according to the angle of the second corner 11.2. They have the downwardly open receiving areas 62.2, with which they are plugged onto the upper edge of the horizontal section shown in the first section VII 7.8.
  • the edge cover 33 is cut as an aluminum profile to the height of the corner area to be covered. Along the second corner 11.2, the gap 32 formed by the separation of the outer second cover plate 12.2 and the structural core 12.3 after the bending of the eighth side wall 30.8 is uncovered.
  • first and second horizontal side walls 30.8, 30.9 connecting rails 60 are provided between the stacked first and second horizontal side walls 30.8, 30.9 connecting rails 60. These are mounted on the first and second horizontal side walls 30.8, 30.9 by means of the connection clips 61 and suitable fastening elements, in particular screws.
  • FIG. 8 shows a section VIII, shown in FIG. 3, with a second corner 11. 2 of the clean cabin 10 in a perspective external view in the region of two connecting rails 60.
  • the connecting rails 60 are disposed between the first and second horizontal side walls 30.8, 30.9. In this case, the connecting rails 60 are in abutment with portions 60.1 over a large area at the first and the second horizontal side wall 30.8, 30.9.
  • the connecting rails 60 are secured to the first and second horizontal side walls 30.8, 30.9 by means of the connecting brackets 61.
  • the connecting brackets 61 have holes 61.1. Through the drilling 61.1 fastening elements, in particular screws, can be guided, with which the connection clips 61 on the side walls 30.1, 30.2, 30.3,
  • the area between the abutment sections 60.1 and the side walls 30.1, 30.2, 30.3, 30.4, 30.5, 30.6, 30.7, 30.8, 30.9, 30.10 is preferably sealed.
  • sealing elements may be provided between the abutment sections 60.1 and the side walls 30.1, 30.2, 30.3, 30.4, 30.5, 30.6, 30.7, 30.8, 30.9, 30.10 or the abutment sections 60.1 may be provided with the side walls 30.1, 30.2, 30.3, 30.4,
  • the connecting rails 60 thus enable a gastight connection between adjacent side walls 30.1, 30.2, 30.3, 30.4, 30.5, 30.6, 30.7, 30.8, 30.9, 30.10.
  • the connecting rails 60 are mitred.
  • FIG. 9 shows two side walls 30.1, 30.2, 30.3, 30.4, 30.5, 30.6, 30.7, 30.8, 30.9, 30.10 abutting one another at the ends with a connecting rail 60 shown in FIG. 8 in a sectional view. Shown is an impact area between the first and the second horizontal side wall 30.8, 30.9.
  • the connecting rail 60 is formed from a hollow profile 60.2 and the integrally formed thereon Anlegeabites 60.1. Opposite to the feed section 60.1 is on the side of the second horizontal side wall 30.9 a counter rail 60.3 formed on the hollow section 60.2.
  • the counter rail 60.3 is spaced according to the thickness of the second horizontal side wall 30.9 of the Anlegeabêt 60.1. Between the Anlegeabites 60.1, theellesschiende 60.3 and the hollow section 60.2 thus forms a U-shaped area encompassed in the the second horizontal side wall 30.9 is inserted. At the end, the first and the second horizontal side wall 30.8, 30.9 rest against the hollow profile 60.2.
  • the hollow profile 60.2 thus provides the distance between the first and the second horizontal side wall 30.8, 30.9.
  • the connecting rail 60 rests with its Anlegeabêt 60.1 from the outside to the first and the second horizontal side wall 30.8, 30.9.
  • the connection clip 61 spans the application section 60.1 transversely to its longitudinal extent. Laterally of the Anlegeabitess 60.1, the holes 61.1 are introduced into the connecting bracket 61. In alignment with the holes 61.1 are screw receptacles 34 in the first and the second horizontal side wall 30.8, 30.9 introduced.
  • the connecting bracket 61 is connected to the first and second horizontal side walls 30.8, 30.9 by bolts, not shown, which are guided through the bores 61.1 of the connecting bracket 61 into the bolt seats 34. Thus, the connecting rail 60 is held.
  • the connecting bracket 61 prevents the first and second horizontal side walls 30.8, 30.9 from moving apart.
  • the area between the connecting rail 60 and the first and the second horizontal side wall is 30.8, 30.9 sealed, for example by sealing elements or by gluing. It is conceivable that the side wall 30.9 is sealed glued into the U-shaped receptacle.
  • the second side wall 30.8 can be supported on the contact section 60.1 with the interposition of a seal extending in the longitudinal direction of the profile. It is advisable to arrange the seal on the hollow section 60.2 facing away from the edge portion of the Anlegeabêtes 60.1. It can then move laterally over the landing section when compressed.
  • the projecting area can then likewise be used for sealing purposes. For example, this can be used to produce a sealing closure at a component that adjoins the connecting rail at a right angle or at an angle.
  • the screw receivers 34 pierce the first and the second horizontal side wall 30.8, 30.9 completely.
  • sealing elements are provided, which seal the screw receptacles 34 after the screws are mounted.
  • the screw receivers 34 may be guided only to the inner first cover plate 12.1 of the structural core plate 12.
  • the inner first cover plate 12.1 remains closed thereby, so that no gas can penetrate through the screw receptacles 34 or leave the clean cabin 10.
  • the structural core 12.3 prevents gas, starting from the screw receptacles 34, from spreading transversely to the first or second horizontal sidewalls 30.8, 30.9.
  • the counter rail 63.3 simplifies the assembly of the clean cabin 10.
  • the connecting rail 60 can first be attached to one of the side walls to be connected 30.1, 30.2, 30.3, 30.4, 30.5, 30.6, 30.7, 30.8, 30.9, 30.10.
  • the connecting rail 60 is held.
  • the adjoining side wall 30.1, 30.2, 30.3, 30.4, 30.5, 30.6, 30.7, 30.8, 30.9, 30.10 can be connected to the connecting rail 60.
  • FIG. 10 shows an excerpt X shown in FIG. 3 with a vertically arranged connecting rail 60 in an external view.
  • the vertically arranged connecting rail 60 connects the illustrated first vertical side wall 30.1 with the three horizontal side walls shown in FIG.
  • FIG. 11 shows an excerpt XI shown in FIG. 3 with a vertically arranged connecting rail 60 and an upper end of a first vertical side wall 30.1 in an external view.
  • the first vertical side wall 30.1 is covered by the lid 40 of the clean cab 10 back from the plugged rail 62.
  • a guide element 63 is inserted with a socket 63.2 in the open end of the hollow profile 60.2 of the connecting rail 60.
  • a foot 63.1 is formed at the nozzle 63.2 .
  • the foot 63.1 has the same profile as the support strip 62.1 of the adjacent rail 62.
  • the foot 63.1 and the support strip 62.1 thus form a continuous surface. This is aligned with the lid 40.
  • the guide element 63 and the rail 62 thus allow a tight connection of the side walls 30.1, 30.2,
  • FIG. 12 shows an excerpt XII shown in FIG. 3 with a vertically arranged connecting rail 60 and a lower termination of a first vertical side wall 30.1 in an external view.
  • a profiled rail 62 is also arranged at the lower end thereof and a guide element 63, which is inserted with its stub 63.2 into the hollow chamber profile 60.2 of the connecting rail 60, is arranged in its extension.
  • the foot 63.1 of the guide member 63 and the support strip 62.1 of the adjacent rail 62 form a continuous surface. This is aligned with the floor 20 of the clean cabin.
  • the guide member 63 and the rails thus allow a tight connection of the side walls 30.1, 30.2, 30.3, 30.4, 30.5, 30.6, 30.7, 30.8, 30.9, 30.10 with the bottom 20 along its lower Edges and in the region of adjacent side walls 30.1, 30.2, 30.3, 30.4, 30.5, 30.6, 30.7, 30.8, 30.9, 30.10.
  • FIG. 13 shows an extract XIII shown in FIG. 3 with a vertically arranged connecting rail 60 and a lower termination of the fifth and the sixth vertical side wall 30.5, 30.6 in an interior view.
  • the fifth and the sixth vertical side wall 30.5, 30.6 are inserted with their lower edges in the receiving areas 62.2 of the associated profile rails 62. Between the fifth and the sixth vertical side wall 30.5, 30.6, the connecting rail 60 is arranged.
  • the fifth vertical side wall 30.5 is inserted into the U-shaped area formed by the counter rail 60.3, the contact section 60.1 arranged opposite this, and the hollow section 60.2, shown in FIG. Opposite to the counter rail 60.3, a mounting bracket 64 is applied to the hollow profile 60.2.
  • the mounting bracket 64 is connected to the hollow profile 60.2.
  • the mounting bracket 64 is connected to the sixth vertical side wall 30.6.
  • the guide element 63 is at least partially inserted with its socket 63.2 in the hollow section 60.2 of the connecting rail 60.
  • the nozzle 63.2 is adapted in its outer contour to the contour of the cavity of the hollow profile 60.2, in which the nozzle 63.2 is inserted.
  • a stop is provided which limits how far the nozzle 63.2 can be inserted into the hollow profile 60.2.
  • the support strips 62.1 of the profile rail 62 and the foot 63.1 of the guide element 63 form a continuous, the floor 20 of the clean cab 10 zuge- turned surface, with which they rest against the bottom 20.
  • the rail 62 and thus the fifth and the sixth vertical side wall 30.5, 30.6 are connected to the floor with retaining clips 65, which are fixed to the bottom 20 and the support strip 62.1 of the rail 62 at a portion.
  • FIG. 14 shows a section XIV shown in FIG. 3 in the region of two adjoining bottom plates 22.1, 22.2 in an exploded view.
  • interlocking floor rails 23.1, 23.2 are mounted.
  • the bottom rails 23.1, 23.2 have receptacles for connecting elements, with which the bottom rails 23.1, 23.2 can be connected.
  • the bottom rails 23.1, 23.2 are designed as separate components, which are frontally attached to the bottom plates 22.1, 22.2, in particular glued, are. According to an alternative embodiment, the bottom rails 23.1, 23.2 may also be integrally formed on the bottom plates 22.1, 22.2.
  • positioning element 21 is provided at the edge of the bottom plates 23.1.
  • the side walls 30.1, 30.2, 30.3, 30.4, 30.5, 30.6, 30.7, 30.8, 30.9, 30.10 positioned with their rails 62 on the floor 20 and fixed.
  • FIG. 15 shows a carrier 80 of the clean cab 10 in a perspective view.
  • the carrier 80 is formed as a double-T-carrier with a first belt 81, a web 82 and a second belt 83. Along the web 82, the carrier 80 mounting holes 84. At the end, a chamfer 81.1 is attached to the first belt 81.
  • the carrier 80 is constructed from structural core plates 12.
  • the first and the second belt 81, 83 and the web 82 are made of appropriately cut structural core plates 12.
  • both the straps 81, 83 as well as the web of aluminum honeycomb core plates are constructed.
  • the carrier 80 As a result of the production of the carrier 80 from structural core plates 12, it is possible to save considerable weight in comparison with a conventional carrier 80 in a solid construction. Due to the high bending stiffness of the structural core plates 12 used and the structure in the form of a double-T-carrier, a highly load-bearing carrier 80 is obtained, which bends only slightly under load.
  • the support 80 made of structural core plates 12 may also be designed as a simple T-beam or as a carrier 80 with a U-profile or an L-profile or other profile known for the carrier 80.
  • FIG. 16 shows the carrier 80 shown in FIG. 15 in a sectional view with a view in the direction of the longitudinal extension of the carrier 80.
  • the first belt 81 and the second belt 83 are connected by means of connecting angle 85 with the web 82.
  • the connection angle 85 extend over the length of the support 80. They lie with a bearing surface on the web 82 and with a second bearing surface on the respective belt 81, 83 at.
  • each belt 81, 83 associated with two oppositely disposed on the web 82 connecting angle 85.
  • the connecting brackets 85 are fixedly connected to the web 82 and the respective belt 81, 83.
  • the connection angles 85 are glued to the web 82 and / or to the belt 81, 83.
  • connection angle 85 As shown for the double-T-carrier, along the abutting regions between the assembled structural core plates 12 are arranged.
  • the connection angle 85 can be provided both as an inner angle and as an outer angle.
  • the mounting holes 84 are introduced in the embodiment shown along the web 82 in the first belt 81.
  • connection angle 85 Due to the connection angle 85, the straps 81, 83 can be easily and quickly connected to the web 82.
  • the large-area bonding of the connection angle 85 with the belts 81, 83 and the web 82 leads to a solid, load-bearing connection.
  • connection angle 85 attached on both sides of the web 82 a tilting of the straps 81, 83 with respect to the web 82 can be reliably avoided in the case of one-sided loading of the carrier 80.
  • the cover plates 43 are connected to the carrier 80.
  • the mounting bores 84 are guided only through the structural core 12.3 to the second cover plate 12.2.
  • the second cover plate 12.2 is not broken.
  • the mounting holes 84 due to a simpler production through both cover plates 12.1, 12.2 out, their arrangement along the web 82 prevents gas exchange between the inside and the outside of the clean cab 10.
  • the transitions from the web 82 to the first belt 81 are sealed.
  • FIG. 17 shows a section XVII shown in FIG. 3 in the region of the cover 40 of the clean cabin 10.
  • the cover plates 43 formed from structural core plates 12 are each framed by a frame 43.1.
  • the frame 43.1 has a U-profile and is attached to the edges of the cover plates 43, in particular glued. As a result, a tight connection between the frame 43.1 and the respective cover plate 43 is obtained.
  • the cover plates 43 are made of structural core plates 12, in particular of aluminum honeycomb core plates.
  • the cover plates 43 rest with their frames 43.1 on the first belt 81 of a carrier 80 shown in FIGS. 15 and 16. In this case, attached to the first belt 81 chamfer 81 is aligned with the outer edge of the lid 40.
  • the carrier 80 is part of the substructure 46 of the lid 40 shown in FIG. 2.
  • the cover plates 43 are fastened to the carrier 80 by means of the fastening elements 44.
  • the fastening elements 44 has two laterally spaced clamping sections 44.1. Between the clamping portions 44.1 a U-shaped bent mounting portion 44.2 is formed, in accordance with the in the first web 81 of the carrier 80 introduced mounting holes 84 holes not shown are introduced.
  • the fastener 44 is bolted to the support 80 with appropriate screws.
  • the clamping portions 44.1 surround the frame 43.1 of the adjacent cover plates 43 and clamp them to the carrier 80.
  • the adjacent cover plates 43 are spaced apart by the fastening portion 44.2 and thus fixed in position.
  • edge fasteners 45 are arranged at the outer edge of the lid 40, as shown in Figure 1, edge fasteners 45 are arranged.
  • An edge fastening element 45 is bent in an S shape and has a clamping leg 45.1 and a fastening leg 45.2.
  • the clamping leg 45.1 surrounds the outer frame 43.1 of the cover plate 43.
  • the fastening leg 45.2 is fastened to the upper profile rails 62, not shown in the present illustration, of the side walls 30.1, 30.2, 30.3, 30.4, 30.5, 30.6, 30.7, 30.8, 30.9, 30.10.
  • the frame 43.1 of the cover plate 43 is clamped between the clamping leg 45.1 and the support strip 62.1 of the respective rail 62.
  • the lid is securely held on the side walls 30.1, 30.2, 30.3, 30.4, 30.5, 30.6, 30.7, 30.8, 30.9, 30.10.
  • the support area of the frame 43.1 is sealed on the support 80 and the rail 62.
  • FIG. 18 shows a detail XVIII shown in FIG. 3 in the region of an attachment of the carrying structure 70 of the clean-gas cabin 10.
  • the carrying structure 70 serves to support the gas conditioning unit 55 shown in FIG. 2 and the filters 56 provided therein.
  • FIG. 1 Shown is the attachment of the support structure 70 in the region of the fifth corner 11.5 of the clean cabin 10.
  • U-shaped mounting rail 71 is attached on the fifth vertical side wall 30.5 already shown in Figure 3.
  • a support pad 72 is attached on the mounting rail 71.
  • the carrier support 72 forms a Half shell, in which a support 80 of the support structure 70 is inserted.
  • an upper leg of the fastening rail 71 is recessed, so that the carrier 80 can be inserted into the support support 72.
  • the recess is covered with a cover 73.
  • the carrier 80 is thus securely fixed to the fifth vertical side wall 30.5.
  • the supports 80 of the support structure 70 shown in Figure 3 are on the side walls 30.1, 30.2, 30.3, 30.4, 30.5, 30.6, 30.7, 30.8, 30.9, 30.10 support pads 72 attached.
  • the carriers 80 of the support structure 70 are connected to the carrier supports 72, in particular screwed.
  • the mounting holes 84 of the support 80 of the support structure 70 are mounted laterally of the web 82 of the support 80 as a through hole. Fixing screws of the filters 56 can thus be guided through the mounting holes 84 and screwed from below with a nut. Since the support structure 70 is arranged in the interior of the clean gas cabin 10, no additional sealing measures are required in this case.
  • the clean gas cabin 10 which is manufactured predominantly from structural core plates 12 and shown in FIGS. 1 to 18, has a very low weight in comparison to known clean gas cabins.
  • the clean cab 10 can be easily transported and placed.
  • the demands on the floor load at their place of installation can be reduced.
  • the interior of the clean cab 10 is sealed from the environment.
  • the required atmosphere in the interior of the clean cab 10 can be set and maintained become.
  • Critical processes and work steps can thus be carried out in a suitable atmosphere.
  • a built-up according to the concept shown clean cabin 10 can be easily adapted in size to the particular requirements.
  • the size and number of the provided bottom plates 22.1, 22.2, 22.3, side walls 30.1, 30.2, 30.3, 30.4, 30.5, 30.6, 30.7, 30.8, 30.9, 30.10 and cover plates 43 and the required support structures 70 can be designed accordingly.
  • the floor plan of the clean cabin 10 can be adapted from the hexagonal shape shown to any other polygonal shapes.

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Abstract

L'invention concerne une cabine à atmosphère propre (10) présentant un espace interne isolé de l'environnement entouré par des parois latérales (30, 30.1-30.10) isolées de l'environnement. Selon l'invention, une partie au moins des parois latérales de la cabine à atmosphère propre est constituée par un ou de plusieurs panneaux à âme structurée (12), en particulier un ou plusieurs panneaux à âme en nid d'abeilles comprenant deux panneaux de recouvrement (12.1, 12.2) respectifs entre lesquels est disposé une âme structurée (12.3), en particulier une âme en nid d'abeille, et le long d'un angle de la cabine à atmosphère propre, un des panneaux de recouvrement est plié tandis que l'autre panneau de recouvrement et l'âme structurée sont sectionnés. La construction de la cabine à atmosphère propre à partir de panneaux à âme structurée permet de réduire notablement le poids de la cabine à atmosphère propre.
EP15790863.3A 2015-03-24 2015-10-26 Cabine à atmosphère propre Withdrawn EP3274524A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102015104376.9A DE102015104376A1 (de) 2015-03-24 2015-03-24 Reingaskabine
PCT/EP2015/074763 WO2016150526A1 (fr) 2015-03-24 2015-10-26 Cabine à atmosphère propre

Publications (1)

Publication Number Publication Date
EP3274524A1 true EP3274524A1 (fr) 2018-01-31

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Application Number Title Priority Date Filing Date
EP15790863.3A Withdrawn EP3274524A1 (fr) 2015-03-24 2015-10-26 Cabine à atmosphère propre

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EP (1) EP3274524A1 (fr)
JP (1) JP2018512522A (fr)
KR (1) KR20170102333A (fr)
CN (1) CN107371371B (fr)
DE (1) DE102015104376A1 (fr)
WO (1) WO2016150526A1 (fr)

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WO2021030568A1 (fr) * 2019-08-15 2021-02-18 G-Con Manufacturing, Inc. Toit à panneaux amovibles pour salle blanche modulaire autonome et mobile
AU2020329233B2 (en) * 2019-08-15 2022-07-07 G-Con Manufacturing, Inc. Removable panel roof for modular, self-contained, mobile clean room
US11624182B2 (en) 2019-08-15 2023-04-11 G-Con Manufacturing, Inc. Removable panel roof for modular, self-contained, mobile clean room
US11492795B2 (en) 2020-08-31 2022-11-08 G-Con Manufacturing, Inc. Ballroom-style cleanroom assembled from modular buildings

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JP2018512522A (ja) 2018-05-17
WO2016150526A1 (fr) 2016-09-29
CN107371371B (zh) 2020-04-17
KR20170102333A (ko) 2017-09-08
CN107371371A (zh) 2017-11-21
DE102015104376A1 (de) 2016-09-29

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