EP3144411A1 - Messvorrichtung und beschichtungsvorrichtung - Google Patents

Messvorrichtung und beschichtungsvorrichtung Download PDF

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Publication number
EP3144411A1
EP3144411A1 EP14891722.2A EP14891722A EP3144411A1 EP 3144411 A1 EP3144411 A1 EP 3144411A1 EP 14891722 A EP14891722 A EP 14891722A EP 3144411 A1 EP3144411 A1 EP 3144411A1
Authority
EP
European Patent Office
Prior art keywords
film
quartz
crystal oscillator
frequency
oscillator sheet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP14891722.2A
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English (en)
French (fr)
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EP3144411B1 (de
EP3144411A4 (de
Inventor
Haidong WU
Qun MA
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BOE Technology Group Co Ltd
Ordos Yuansheng Optoelectronics Co Ltd
Original Assignee
BOE Technology Group Co Ltd
Ordos Yuansheng Optoelectronics Co Ltd
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Publication of EP3144411A1 publication Critical patent/EP3144411A1/de
Publication of EP3144411A4 publication Critical patent/EP3144411A4/de
Application granted granted Critical
Publication of EP3144411B1 publication Critical patent/EP3144411B1/de
Active legal-status Critical Current
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
    • G01B7/063—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using piezoelectric resonators
    • G01B7/066—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using piezoelectric resonators for measuring thickness of coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/542—Controlling the film thickness or evaporation rate
    • C23C14/545—Controlling the film thickness or evaporation rate using measurement on deposited material
    • C23C14/546—Controlling the film thickness or evaporation rate using measurement on deposited material using crystal oscillators

Definitions

  • the present disclosure relates to the field of measurement technology, and in particular to a measurement apparatus and a film-coating device.
  • microelectronic film, optical film, antioxidant film, giant magnetoresistance film and high temperature superconductor film have been widely applied in industry and the daily life.
  • any small change in film thickness may adversely affect the performance of the component due to the increasingly improved integration degree.
  • the properties of the film such as light-transmission performance, conductivity and insulativity, are closely associated with its thickness.
  • the film thickness is directly related to the normal operation of the film, and during the production, it is necessary to acquire the film thickness.
  • the inventor finds that, when the crystal oscillator sheet is adopted, the measurement accuracy is insufficient due to environmental factors.
  • An object of the present disclosure is to provide a measurement apparatus and a film-coating device, so as to improve the accuracy when a film thickness is measured using a crystal oscillator sheet.
  • the present disclosure provides in some embodiments a measurement apparatus for measuring a thickness of a film formed on a to-be-coated module, including a first quartz-crystal oscillator sheet coated with the film during the film-coating, a second quartz-crystal oscillator sheet identical to the first quartz-crystal oscillator sheet and shielded during the film-coating so as not to be coated with the film, an excitation source generation unit configured to generate alternating current and output the alternating current to the first quartz-crystal oscillator sheet and the second quartz-crystal oscillator sheet, a first calculation module configured to calculate a frequency-variation initial value in accordance with a first response signal generated in response to the alternating current by the first quartz-crystal oscillator sheet during the film-coating, a second calculation module configured to calculate a frequency-variation modified value in accordance with a second response signal generated in response to the alternating current by the second quartz-crystal oscillator sheet during the film-coating, and
  • the frequency-variation target value is equal to a difference between the frequency-variation initial value and the frequency-variation modified value.
  • the measurement apparatus further includes a shielding module configured to shield the second quartz-crystal oscillator sheet during the film-coating, so as to prevent the second quartz-crystal oscillator sheet from being coated with the film.
  • the second calculation module is configured to calculate a frequency-variation median value of each second quartz-crystal oscillator sheet in accordance with the second response signal generated in response to the alternating current by each second quartz-crystal oscillator sheet during the film-coating, and calculate a mean value of all the frequency-variation median values as the frequency-variation modified value.
  • the present disclosure provides in some embodiments a film-coating device, including a film-coating machine configured to coat a to-be-coated module with a film, and a measurement apparatus including a first quartz-crystal oscillator sheet coated with the film during the film-coating, a second quartz-crystal oscillator sheet identical to the first quartz-crystal oscillator sheet and shielded during film-coating so as not to be coated with the film, an excitation source generation unit configured to generate alternating current and output the alternating current to the first quartz-crystal oscillator sheet and the second quartz-crystal oscillator sheet, a first calculation module configured to calculate a frequency-variation initial value in accordance with a first response signal generated in response to the alternating current by the first quartz-crystal oscillator sheet during the film-coating, a second calculation module configured to calculate a frequency-variation modified value in accordance with a second response signal generated in response to the alternating current by the second quartz-crystal oscil
  • the frequency-variation target value is equal to a difference between the frequency-variation initial value and the frequency-variation modified value.
  • the film-coating device further includes a shielding module configured to shield the second quartz-crystal oscillator sheet during the film-coating, so as to prevent the second quartz-crystal oscillator sheet from being coated with the film.
  • the first quartz-crystal oscillator sheet and the second quartz-crystal oscillator sheet are arranged in a circular manner
  • the shielding module is a rotatable shielding sheet with a via-hole
  • the rotatable shielding sheet is rotated in such a manner as to enable the via-hole to be above different quartz-crystal oscillator sheets.
  • the film-coating device further includes a controller configured to control a thickness of the film coated by the film-coating machine in accordance with an actual value of the thickness of the film.
  • the film-coating machine includes a vacuum adsorption apparatus including an adsorption surface and configured to adsorb the to-be-coated module, and the first quartz-crystal oscillator sheet and the second quartz-crystal oscillator sheet are arranged at a level identical to the to-be-coated module.
  • the second calculation module is configured to calculate a frequency-variation median value of each second quartz-crystal oscillator sheet in accordance with the second response signal generated in response to the alternating current by each second quartz-crystal oscillator sheet during the film-coating and calculate a mean value of all the frequency-variation median values as the frequency-variation modified value.
  • the first quartz-crystal oscillator sheet is provided so as to obtain an initial value of the film using an existing film thickness measuring method.
  • the frequency variation of the quartz-crystal oscillator sheet is related to both the film thickness and the environmental factors, so the film thickness calculated based on the oscillation frequency variation of the quartz-crystal oscillator sheet coated with the film is inaccurate.
  • the second quartz-crystal oscillator sheet is further provided and shielded during the film-coating so as not to be coated with the film.
  • the modified value may be obtained based on the oscillation frequency variation of the second quartz-crystal oscillator sheet, so as to remove an error in the oscillation frequency variation of the due to the environmental factors from the initial value of the film thickness, thereby to improve the film thickness detection accuracy.
  • a quartz-crystal oscillator sheet not coated with a film is used to measure the influence on the frequency variation due to the environmental factors during the film-coating, so as to improve the measurement accuracy.
  • ⁇ f ⁇ f Q 2 ⁇ f N ⁇ Q ⁇ d f .
  • ⁇ f is the oscillation frequency variation of the quartz-crystal oscillator sheet
  • ⁇ d f is the thickness of the deposited film
  • ⁇ f is a density of the deposited film
  • ⁇ Q is a density of the quartz-crystal oscillator sheet
  • f Q is an inherent resonant frequency of the quartz-crystal oscillator sheet
  • N is a frequency constant of the quartz-crystal oscillator sheet.
  • the oscillation frequency variation of the quartz-crystal oscillator sheet is related to both the thickness of the deposited film and an environmental factor within a film-coating cavity (e.g., temperature, vacuum degree). Hence, it is impossible to obtain the accurate film thickness using the crystal oscillator sheet.
  • the present disclosure provides in some embodiments a measurement apparatus for measuring a thickness of a film formed on a to-be-coated module, which includes first quartz-crystal oscillator sheet coated with the film during the film-coating, a second quartz-crystal oscillator sheet identical to the first quartz-crystal oscillator sheet and shielded during the film-coating so as not to be coated with the film, an excitation source generation unit configured to generate alternating current and output the alternating current to the first quartz-crystal oscillator sheet and the second quartz-crystal oscillator sheet, a first calculation module configured to calculate a frequency-variation initial value in accordance with a first response signal generated in response to the alternating current by the first quartz-crystal oscillator sheet during the film-coating, a second calculation module configured to calculate a frequency-variation modified value in accordance with a second response signal generated in response to the alternating current by the second quartz-crystal oscillator sheet during the film-coating, and a third calculation module
  • the first quartz-crystal oscillator sheet is provided so as to obtain an initial value of the film using an existing film thickness measuring method.
  • the frequency variation of the quartz-crystal oscillator sheet is related to both the film thickness and the environmental factors, so the film thickness calculated based on the oscillation frequency variation of the quartz-crystal oscillator sheet coated with the film is inaccurate.
  • the second quartz-crystal oscillator sheet is further provided and shielded during the film-coating so as not to be coated with the film.
  • the modified value may be obtained based on the oscillation frequency variation of the second quartz-crystal oscillator sheet, so as to remove an error in the oscillation frequency variation of the due to the environmental factors from the initial value of the film thickness, and obtain the frequency variation target value in an accurate manner, thereby to accurately calculate the film thickness in accordance with the frequency variation target value capable of accurately reflecting the change in the film thickness.
  • the frequency-variation target value is equal to a difference between the frequency-variation initial value and the frequency-variation modified value.
  • a shielding mechanism may be provided in the measurement apparatus to shield the second quartz-crystal oscillator sheet during the film-coating, so as to prevent the second quartz-crystal oscillator sheet from being coated with the film.
  • the shielding mechanism may also be arranged on a film-coating machine, which will be described hereinafter.
  • the second calculation module is configured to calculate a frequency-variation median value of each second quartz-crystal oscillator sheet in accordance with the second response signal generated in response to the alternating current by each second quartz-crystal oscillator sheet during the film-coating, and calculate a mean value of all the frequency-variation median values as the frequency-variation modified value.
  • the present disclosure further provides in some embodiments a film-coating device, which includes a film-coating machine configured to coat a to-be-coated module with a film, and a measurement apparatus.
  • the measurement apparatus includes a first quartz-crystal oscillator sheet coated with the film during the film-coating, a second quartz-crystal oscillator sheet identical to the first quartz-crystal oscillator sheet and shielded during film-coating so as not to be coated with the film, an excitation source generation unit configured to generate alternating current and output the alternating current to the first quartz-crystal oscillator sheet and the second quartz-crystal oscillator sheet, a first calculation module configured to calculate a frequency-variation initial value in accordance with a first response signal generated in response to the alternating current by the first quartz-crystal oscillator sheet during the film-coating, a second calculation module configured to calculate a frequency-variation modified value in accordance with a second response signal generated in response to the alternating current by the second quartz
  • the frequency-variation target value is equal to a difference between the frequency-variation initial value and the frequency-variation modified value.
  • the film-coating device further includes a shielding module configured to shield the second quartz-crystal oscillator sheet during the film-coating, so as to prevent the second quartz-crystal oscillator sheet from being coated with the film.
  • the first quartz-crystal oscillator sheet 101 and the second quartz-crystal oscillator sheet 102 are arranged in a circular manner
  • the shielding module is a rotatable shielding sheet 103 with a via-hole 104
  • the rotatable shielding sheet 103 is rotated in such a manner as to enable the via-hole 104 to be above different quartz-crystal oscillator sheets.
  • first quartz-crystal oscillator sheet and the second quartz-crystal oscillator sheet refer to the sheets with respect to a certain film-coating operation. As shown in Fig.1 , the first quartz-crystal oscillator sheet is located at the top, and the other quartz-crystal oscillator sheets are the second quartz-crystal oscillator sheets.
  • the first quartz-crystal oscillator sheet is the one on the left, and the other quartz-crystal oscillator sheets are the second quartz-crystal oscillator sheets.
  • the quartz-crystal oscillator sheets may be replaced after at least three film-coating operations.
  • the film-coating device further includes a controller configured to control a thickness of the film coated by the film-coating machine in accordance with an actual value of the thickness of the film.
  • an evaporation temperature and a material feeding speed may be controlled.
  • the quartz-crystal oscillator sheets may be arranged at any position within the film-coating cavity.
  • the films formed on the quartz-crystal oscillator sheets and the to-be-coated module may be of different thicknesses.
  • a modification factor needs to be provided so as to modify the film thickness.
  • the film-coating machine includes a vacuum adsorption apparatus 205 including an adsorption surface and configured to adsorb the to-be-coated module.
  • the quartz-crystal oscillator sheets and the to-be-coated module are arranged at the same level, i.e., the first quartz-crystal oscillator sheet and the second quartz-crystal oscillator sheet are arranged at a level identical to the to-be-coated module.
  • the second calculation module is configured to calculate a frequency-variation median value of each second quartz-crystal oscillator sheet in accordance with the second response signal generated in response to the alternating electric current by each second quartz-crystal oscillator sheet during the film-coating, and calculate a mean value of all the frequency-variation median values as the frequency-variation modified value.
  • Fig.2 is a schematic view showing the film-coating device for vacuum evaporation according to one embodiment of the present disclosure.
  • initial oscillation frequencies f 1 and f 2 of the quartz-crystal oscillator sheet 201 and the quartz-crystal oscillator sheet 202 are measured at first.
  • the quartz-crystal oscillator sheet 201 is shielded by a shielding plate so as not to be coated with the film during the film-coating, while the quartz-crystal oscillator sheet 202 is exposed and a film may be formed on surfaces of the quartz-crystal oscillator sheet 202 and the to-be-coated module 204 through an evaporation gas generated by a crucible.
  • the quartz-crystal oscillator sheet 202 and the to-be-coated module 204 are arranged at the same level.
  • ⁇ f' f 1 '-f1

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)
  • Physical Vapour Deposition (AREA)
EP14891722.2A 2014-05-13 2014-09-01 Messvorrichtung und beschichtungsvorrichtung Active EP3144411B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN201410200994 2014-05-13
PCT/CN2014/085658 WO2015172463A1 (zh) 2014-05-13 2014-09-01 一种测量装置及镀膜设备

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EP3144411A1 true EP3144411A1 (de) 2017-03-22
EP3144411A4 EP3144411A4 (de) 2017-10-18
EP3144411B1 EP3144411B1 (de) 2020-03-11

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US (1) US20160216099A1 (de)
EP (1) EP3144411B1 (de)
CN (1) CN104165573B (de)
WO (1) WO2015172463A1 (de)

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CN105002474B (zh) * 2015-07-30 2017-10-03 东莞市华星镀膜科技有限公司 一种维持镀膜机连续工作的晶振片更换系统及其更换工艺
CN105486215A (zh) * 2015-12-15 2016-04-13 苏州晶鼎鑫光电科技有限公司 一种镀膜膜厚监测方法
CN105908133B (zh) * 2016-04-29 2018-07-31 成都西沃克真空科技有限公司 一种共蒸设备
CN106092002A (zh) * 2016-06-07 2016-11-09 应达利电子股份有限公司 用于成膜厚度监测的石英晶体谐振器、监测仪及监测方法
CN108291291A (zh) * 2016-10-25 2018-07-17 应用材料公司 用于测量沉积率的测量组件、蒸发源、沉积设备及其方法
CN107565062B (zh) * 2017-07-20 2019-10-11 武汉华星光电半导体显示技术有限公司 膜厚监控仪与蒸镀机
KR101870581B1 (ko) * 2017-09-29 2018-06-22 캐논 톡키 가부시키가이샤 수정진동자의 수명 판정방법, 막두께 측정장치, 성막방법, 성막장치, 및 전자 디바이스 제조방법
CN107779822B (zh) * 2017-10-30 2019-12-03 深圳市华星光电半导体显示技术有限公司 蒸镀装置与蒸镀方法
CN108893710B (zh) * 2018-07-26 2020-07-21 京东方科技集团股份有限公司 掩模板、蒸镀掩模板组件及其制造方法、蒸镀设备
CN108823545B (zh) * 2018-09-07 2020-11-24 京东方科技集团股份有限公司 晶振探头结构和蒸镀装置
JP7253352B2 (ja) * 2018-10-22 2023-04-06 キヤノントッキ株式会社 成膜装置、下地膜形成方法、および成膜方法
CN111101098B (zh) * 2018-10-26 2021-11-16 合肥欣奕华智能机器有限公司 一种蒸镀控制方法及蒸镀控制系统
CN109797372B (zh) * 2019-03-28 2021-04-20 京东方科技集团股份有限公司 一种镀膜检测装置、镀膜设备及检测片切换方法
CN110670044B (zh) * 2019-11-27 2021-10-01 昆山国显光电有限公司 成膜厚度检测装置、检测方法以及蒸镀设备
CN111238358B (zh) * 2020-02-25 2021-06-04 山东大学 基于电阻值测试的刀具涂层厚度测量电极、装置及方法
CN111829428B (zh) * 2020-06-17 2022-02-15 华中科技大学 一种双石英晶振膜厚控制仪及误差校正方法
CN112697081B (zh) * 2020-12-15 2022-10-21 江苏集萃有机光电技术研究所有限公司 一种膜厚测量系统及方法
CN113278945B (zh) * 2021-05-10 2023-09-01 布勒莱宝光学设备（北京）有限公司 一种膜厚监控装置、镀膜设备及膜厚监控方法

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Publication number Publication date
EP3144411B1 (de) 2020-03-11
CN104165573B (zh) 2016-05-11
CN104165573A (zh) 2014-11-26
EP3144411A4 (de) 2017-10-18
WO2015172463A1 (zh) 2015-11-19
US20160216099A1 (en) 2016-07-28

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