EP2834830A1 - Source de rayons x, son utilisation et procédé pour produire des rayons x - Google Patents

Source de rayons x, son utilisation et procédé pour produire des rayons x

Info

Publication number
EP2834830A1
EP2834830A1 EP12729933.7A EP12729933A EP2834830A1 EP 2834830 A1 EP2834830 A1 EP 2834830A1 EP 12729933 A EP12729933 A EP 12729933A EP 2834830 A1 EP2834830 A1 EP 2834830A1
Authority
EP
European Patent Office
Prior art keywords
ray source
target
electron beam
housing
ray
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP12729933.7A
Other languages
German (de)
English (en)
Other versions
EP2834830B1 (fr
Inventor
Oliver Heid
Timothy Hughes
Jennifer SIRTL
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Publication of EP2834830A1 publication Critical patent/EP2834830A1/fr
Application granted granted Critical
Publication of EP2834830B1 publication Critical patent/EP2834830B1/fr
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H01J35/10—Rotary anodes; Arrangements for rotating anodes; Cooling rotary anodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H01J35/112—Non-rotating anodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H01J35/12—Cooling non-rotary anodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/24—Tubes wherein the point of impact of the cathode ray on the anode or anticathode is movable relative to the surface thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/06—Cathode assembly
    • H01J2235/064—Movement of cathode
    • H01J2235/066—Rotation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/08—Targets (anodes) and X-ray converters
    • H01J2235/081—Target material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/10—Drive means for anode (target) substrate
    • H01J2235/1006—Supports or shafts for target or substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/06—Cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H01J35/112—Non-rotating anodes
    • H01J35/116—Transmissive anodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/16—Vessels; Containers; Shields associated therewith
    • H01J35/18—Windows
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/22—X-ray tubes specially designed for passing a very high current for a very short time, e.g. for flash operation

Definitions

  • the invention relates to an X-ray source with a housing in which a target is provided, which can emit X-rays when shot with an electron beam.
  • the invention relates to a method for generating X-radiation in which a housing in the housing
  • the invention also relates to the use of a monochromatic X-ray radiation emitting X-ray source.
  • an X-ray source for example, by an arrangement of electrodes in a housing.
  • An electron beam is generated in the housing by an electrode which has a potential of 0 V ⁇ .
  • an anode is arranged ⁇ that comes as a target for the electron beam to the input sentence. This is at 100 kV.
  • Behind the anode is still a collector, which is at a potential of 10 kV.
  • the anode which serves as a target, can be designed as a thin-walled Gebil ⁇ de.
  • these may comprise a Basisplat ⁇ te of boron, which has a thickness between 10 and ym 200th
  • a thin layer of tungsten with a layer thickness of 0.1 to 5 ⁇ m, which is used as a target.
  • the very thin tungsten layer is exposed to high stress by the electron beam.
  • the object of the invention is to improve the above-angege bene ⁇ X-ray source such that a relatively long service life of the X-ray source is possible without that the target must be replaced. It is another object of the invention to provide a method for operating said X-ray source. Finally, it is an object of the invention to find a use for such an X-ray source.
  • the object of the invention is achieved with the above-mentioned X-ray source according to the invention in that a metal foil is provided as target material, wherein the electron beam and the target are movable relative to each other.
  • the metal foil consists of a light metal or several light metals, in particular aluminum. As light metals within the meaning of the application, the metals and their alloys are to be referred to, whose density is below 5 g / cm 3 .
  • this definition applies to the following light metals: all alkali metals, alkaline earth ⁇ all limetalle except radium, also scandium, yttrium, titanium and aluminum.
  • Other advantageous material groups for forming the metal foil are tungsten, molybdenum and the group of lanthanides. Specifically, this is the element lanthanum, the 14 elements following the lanthanum in the periodic table.
  • the use of a thin metal foil also has the advantage that can be advantageously generate a monochromatic X-ray having the electric ⁇ nenstrahl by excitation of the target the advantage.
  • This is X-radiation, with only one wavelength, which has the advantage that, for example, X-ray images can be reproduced more sharply with monochromatic X-radiation. Therefore, it is also an alternative solution of the invention to use this monochromatic X-ray radiation for transilluminating a body, which must be such that at the wavelength of the monochromatic X-ray radiation used, contrasts of the body appear on the image.
  • the body may be a technical entity (technical or inanimate body) such. For example, a component connection has to be examined, which has to be examined for air influences. Another possibility is the acquisition of X-ray images of a human or animal body.
  • the anode is designed as a band which can be unwound from a first roll and wound onto a second roll on ⁇ .
  • the band-shaped configuration of the Ano ⁇ de has the great advantage that this by simple han- Bungsuzee can be passed to the electron beam. This makes it possible create the aforementioned Relativbewe ⁇ movement between the target and the electron beam.
  • the generating means for the electron beam is made pivotable.
  • pivoting the generating device also moves the electron beam on the target material back and forth, whereby a uniform loading of the entire target material is possible.
  • a pivotable generating device can also be combined with a roller mechanism.
  • the restriction device able to generate particular perpendicularly be pivotable to the movement direction of the belt. This ensures that the tape can be used in its full width, whereby optimal utilization of the target material is possible.
  • the metal foil is made with a thickness of 0.1 .mu.m to 0.5 .mu.m, preferably 0.5 .mu.m.
  • a thickness of 0.1 .mu.m to 0.5 .mu.m, preferably 0.5 .mu.m.
  • Au ⁇ ßerdem has the target material to the electron beam also have placed some resistance, especially thicker target materials allow for better heat distribution.
  • the target in order to generate monochromatic X-ray radiation, the target must be made as thin-walled as possible.
  • FIG 1 shows schematically the generation of monochromatic
  • FIG. 2 shows an embodiment of the invention X-ray light source in schematic section.
  • a metal foil 12 (shown as a detail) is provided as the target 11.
  • An electron beam 13 strikes an atom 15 of the target material with electrons 14 (eg. Aluminum).
  • electrons 14 eg. Aluminum
  • FIG. 2 shows the structure of the X-ray source according to the invention.
  • the X-ray source itself is accommodated in an evacuable housing 19, which has a window 22.
  • the electron beam 13 enters the housing 19. Subsequently, the electric ⁇ nenstrahl impinges on the target 11, this hardly absorbs energy of the electron beam due to its ge ⁇ rings thickness. However, some of the energy is converted by an excitation of the atoms 15 (see Figure 1) in the manner already described in monochromatic X-ray radiation 18, which can leave the housing through the window 22.
  • a so-called E-Gun that is an electron gun vorgese ⁇ hen.
  • This Elect ⁇ Ronen are bundled by a lens 24th
  • the electric field is built up by connecting the target as an anode. This can be operated with a potential of 100 to 300 kV, wherein in addition behind the target, a collector 27 with a potential of 40 to 120 kV is used.
  • the collector electrostatically decelerates the electron beam 13 which has almost completely passed the target 11 and removes the kinetic energy from it.
  • the non ⁇ energetic electrons of the braked beam are absorbed by the collector and removed as electricity.
  • a first roller 28 and a second roller 29 are provided in the housing.
  • the target which is in the form of a band 30, is rolled up and is in a manner not shown by means of an actuator M2 (sitting outside the housing in itself be be known manner on a drive shaft for rotation of the roller 29) driven.
  • the target 11 is unwound from the roll 28 and wound onto the roll 29.
  • dash-dotted lines indicated vacuum locks 31 are provided so that the remaining space of the housing when changing the rollers 28, 29 does not have to be flooded.
  • the rollers 28, 29 are removed by the indicated flaps 32.
  • the electron gun is also via a shaft 33
  • a drive takes place via a motor M1.
  • the shaft 33 is parallel to the plane of the drawing in bearings 34, so that a pivoting of the electron gun leads to the fact that the electron beam 13 over the entire width of the belt 30 ge ⁇ can be pivoted.
  • the drive of the rollers 28, 29 causes the electron beam in the direction of the longitudinal extent of the band 30 can change the point of impact on the target.

Landscapes

  • X-Ray Techniques (AREA)

Abstract

L'invention concerne une source de rayons X dans laquelle peut être produit en particulier un rayonnement X monochromatique. L'invention concerne en outre un procédé pour produire des rayons X ainsi que l'utilisation de ladite source de rayons X pour radiographier des corps. Selon l'invention il est prévu de placer dans un boîtier (19) une feuille métallique en tant que cible (11) qui est bombardée par un faisceau électronique (13). Ce qui a pour effet d'exciter ladite feuille métallique pour émettre un rayonnement X monochromatique (18), ladite cible (11) à paroi relativement mince se modifiant alors à tel point que l'utilisation conforme pour produire le rayonnement X monochromatique n'est plus possible. C'est pourquoi il est avantageusement prévu de pouvoir aussi bien faire pivoter le dispositif de production (26) pour produire le faisceau électronique qu'enrouler la cible sur des rouleaux (28, 29).
EP12729933.7A 2012-06-14 2012-06-14 Source de rayons x, son utilisation et procédé pour produire des rayons x Not-in-force EP2834830B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/EP2012/061297 WO2013185823A1 (fr) 2012-06-14 2012-06-14 Source de rayons x, son utilisation et procédé pour produire des rayons x

Publications (2)

Publication Number Publication Date
EP2834830A1 true EP2834830A1 (fr) 2015-02-11
EP2834830B1 EP2834830B1 (fr) 2017-03-22

Family

ID=46384349

Family Applications (1)

Application Number Title Priority Date Filing Date
EP12729933.7A Not-in-force EP2834830B1 (fr) 2012-06-14 2012-06-14 Source de rayons x, son utilisation et procédé pour produire des rayons x

Country Status (7)

Country Link
US (1) US9761405B2 (fr)
EP (1) EP2834830B1 (fr)
JP (1) JP6076473B2 (fr)
KR (1) KR101874029B1 (fr)
CN (1) CN104350573B (fr)
RU (1) RU2611051C2 (fr)
WO (1) WO2013185823A1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6478288B2 (ja) * 2014-09-12 2019-03-06 株式会社リガク Ｘ線発生装置及びｘ線分析装置
WO2023039774A1 (fr) * 2021-09-16 2023-03-23 Shenzhen Xpectvision Technology Co., Ltd. Procédés d'imagerie utilisant de multiples faisceaux de rayonnement

Family Cites Families (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2204773A1 (de) 1972-02-02 1973-08-09 Einighammer Verfahren zur leistungssteigerung von roentgenroehren sowie vorrichtung zur durchfuehrung des verfahrens
US4281269A (en) 1977-04-27 1981-07-28 Ledley Robert S Microfocus X-ray tube
US4344013A (en) * 1979-10-23 1982-08-10 Ledley Robert S Microfocus X-ray tube
JPS57182953A (en) * 1981-05-06 1982-11-11 Esu Retsudorei Robaato Microminiature focus x-ray tube
JPS6244940A (ja) * 1985-08-22 1987-02-26 Shimadzu Corp Ｘ線源
US4764826A (en) 1985-12-17 1988-08-16 Eastman Kodak Company Tape cassette and cooperating apparatus
JPH01239740A (ja) 1988-03-18 1989-09-25 Japan Atom Energy Res Inst 制動ｘ線発生用ターゲット装置
JPH0297799A (ja) 1988-10-03 1990-04-10 Tlv Co Ltd フロート弁
JPH0624160Y2 (ja) * 1989-01-17 1994-06-22 日新ハイボルテージ株式会社 Ｘ線発生装置
JPH04253148A (ja) * 1991-01-29 1992-09-08 Rigaku Corp Ｘ線発生装置
SU1829882A1 (ru) * 1991-04-25 1995-10-27 Институт атомной энергетики им.И.К.Курчатова Устройство вывода пучка заряженных частиц на мишень
NL9401560A (nl) 1994-09-26 1996-05-01 Rijnhuizen Plasmafysica Werkwijze en inrichting voor het generen van straling en atomaire deeltjes.
US5668848A (en) 1996-01-16 1997-09-16 Jamar Technology Co X-ray target tape system
GB9620160D0 (en) * 1996-09-27 1996-11-13 Bede Scient Instr Ltd X-ray generator
JPH1164598A (ja) 1997-08-26 1999-03-05 Shimadzu Corp レーザプラズマｘ線源
JP2001256909A (ja) * 2000-03-10 2001-09-21 Shimadzu Corp Ｘ線発生装置
DE10057599C5 (de) 2000-11-21 2015-02-19 Kolbus Gmbh & Co. Kg Vorrichtung zum Herstellen von Bucheinbanddecken
JP4174626B2 (ja) 2002-07-19 2008-11-05 株式会社島津製作所 Ｘ線発生装置
AU2003302786A1 (en) * 2002-12-11 2004-06-30 Koninklijke Philips Electronics N.V. X-ray source for generating monochromatic x-rays
GB0309371D0 (en) 2003-04-25 2003-06-04 Cxr Ltd X-Ray tubes
RU2257638C1 (ru) 2004-06-17 2005-07-27 Кузнецов Вадим Львович Рентгеновская трубка (варианты)
EP1831911A2 (fr) 2004-12-21 2007-09-12 Nanodynamics-88 Incorporated Procede de production de materiau de feuille cible pour tubes a rayons x
JP2009170306A (ja) * 2008-01-17 2009-07-30 Shimadzu Corp Ｘ線管装置
CN101413905B (zh) 2008-10-10 2011-03-16 深圳大学 X射线微分干涉相衬成像系统
US8406378B2 (en) * 2010-08-25 2013-03-26 Gamc Biotech Development Co., Ltd. Thick targets for transmission x-ray tubes

Also Published As

Publication number Publication date
RU2014152540A (ru) 2016-08-10
CN104350573B (zh) 2017-05-10
JP6076473B2 (ja) 2017-02-08
EP2834830B1 (fr) 2017-03-22
JP2015523685A (ja) 2015-08-13
CN104350573A (zh) 2015-02-11
KR20150023009A (ko) 2015-03-04
US20150170869A1 (en) 2015-06-18
RU2611051C2 (ru) 2017-02-21
WO2013185823A1 (fr) 2013-12-19
KR101874029B1 (ko) 2018-07-05
US9761405B2 (en) 2017-09-12

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