EP2837016B1 - Source de rayons x, son utilisation et procédé pour produire des rayons x - Google Patents

Source de rayons x, son utilisation et procédé pour produire des rayons x Download PDF

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Publication number
EP2837016B1
EP2837016B1 EP12729942.8A EP12729942A EP2837016B1 EP 2837016 B1 EP2837016 B1 EP 2837016B1 EP 12729942 A EP12729942 A EP 12729942A EP 2837016 B1 EP2837016 B1 EP 2837016B1
Authority
EP
European Patent Office
Prior art keywords
housing
ray source
target
rays
target material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP12729942.8A
Other languages
German (de)
English (en)
Other versions
EP2837016A1 (fr
Inventor
Oliver Heid
Timothy Hughes
Jennifer SIRTL
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
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Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Publication of EP2837016A1 publication Critical patent/EP2837016A1/fr
Application granted granted Critical
Publication of EP2837016B1 publication Critical patent/EP2837016B1/fr
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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H01J35/112—Non-rotating anodes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
    • H05G2/001—X-ray radiation generated from plasma
    • H05G2/003—X-ray radiation generated from plasma being produced from a liquid or gas
    • H05G2/005—X-ray radiation generated from plasma being produced from a liquid or gas containing a metal as principal radiation generating component
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/16—Vessels; Containers; Shields associated therewith
    • H01J35/18—Windows
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/08—Targets (anodes) and X-ray converters
    • H01J2235/081—Target material
    • H01J2235/082—Fluids, e.g. liquids, gases
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/18—Windows, e.g. for X-ray transmission

Definitions

  • the invention relates to an X-ray source with a housing in which a target is provided, which can emit X-ray radiation under bombardment with an electron beam.
  • the invention relates to a method for generating X-ray radiation, wherein in a housing of an X-ray source, a target is bombarded with an electron beam.
  • the invention also relates to a use of a monochromatic X-ray radiation emitting X-ray source.
  • an X-ray source can be realized, for example, by an arrangement of electrodes in a housing.
  • An electron beam is generated in the housing by an electrode having a potential of 0V.
  • this electrode is arranged an anode, which is used as a target for the electron beam radiation. This is at 100 kV.
  • Behind the anode is still a collector, which is at a potential of 10 kV. If the electron beam strikes the anode, X-ray radiation is released, which can be coupled out of the housing through a suitable window (transparent to the X-ray radiation) and put to use.
  • the anode which serves as a target, can be designed as a thin-walled structure.
  • this may have a base plate of boron, which has a thickness between 10 and 200 microns.
  • a thin layer of tungsten with a layer thickness of 0.1 to 5 ⁇ m is applied, which is used as a target.
  • the very thin tungsten layer is exposed to high stress by the electron beam.
  • a laser beam is used to evaporate a supplied medium.
  • a medium for example, a molten metal can be used, which is applied to the outer surface of two electrodes. In the vapor, a plasma is ignited with the aid of the electrodes and the X-ray radiation is decoupled.
  • An X-ray source according to the preamble of claim 1 is made Bearden et al, Rev. Sci. Instr. 35, pages 1681-1683 (1964 ) known.
  • the object of the invention is to improve the above-mentioned X-ray source in such a way that a comparatively long service life of the X-ray source is possible without the target having to be replaced. It is another object of the invention to provide a method for operating said X-ray source. Finally, it is an object of the invention to find a use for such an X-ray source.
  • a plasma acting as an anode in the form of an ionized metal vapor can be generated in the housing as target, a target material and an evaporator device being provided in the housing for generating the metal vapor.
  • the target material can be solid or liquid.
  • the evaporator device this is evaporated, so that a metal vapor is formed in the housing.
  • X-rays can be generated by bombardment with an electron beam.
  • the object is also achieved by the above-described method for generating X-radiation, wherein a metal vapor is generated as the target in an evaporator device, wherein a target material is provided for generating the metal vapor.
  • a metal vapor is generated as the target in an evaporator device, wherein a target material is provided for generating the metal vapor.
  • the object is also achieved by the use of a more monochromatic X-ray radiation emitting X-ray source according to one of claims 1 to 7 for transilluminating a body which forms differentiable contrasts at the wavelength of the X-ray used.
  • the body may be a technical body, such as a component connection, to be inspected for errors in the connection. It is also possible that a human or animal body is examined.
  • the wavelength of the monochromatic X-ray must be suitably selected to form contrasts.
  • the use of monochromatic X-radiation in comparison to X-radiation with a wavelength spectrum has the advantage that sharper images can be generated, which allow more accurate statements about the examined object.
  • the housing has an evaporation chamber for a metal to be evaporated, which is connected via an opening, in particular a nozzle, with a residual volume of the housing.
  • This construction has the advantage that the metal vapor can be metered comparatively accurately via the nozzle.
  • the shape of the cloud can be influenced, for example, via the nozzle shape.
  • the evaporation chamber is advantageously separated from the residual volume of the housing. This facilitates, for example, cleaning measures that are necessary in parts of the housing due to the fact that the metal vapor can deposit on the chamber walls.
  • an electrode for igniting an arc between the electrode and the target material is provided as the evaporator device.
  • This evaporator device is located in the housing, in which also the resulting metal vapor through the electron beam to emit X-rays should be stimulated. It should be mentioned as an advantage that such a housing unit is simple in construction. This can be easily replaced, for example, in the occurrence of impurities by deposition of metal vapor.
  • a simple electrode as an electron emitter.
  • the excitation of the plasma-shaped target is effected by a high-current discharge from the electrode.
  • a window is arranged, which is transparent to the X-radiation to be generated. Through this window, the resulting X-ray radiation can advantageously be decoupled from the housing and fed to a planned use.
  • the metal vapor consists of a light metal or several light metals, in particular aluminum.
  • the metals and their alloys are to be referred to, whose density is below 5 g / cm 3 .
  • this definition applies to the following light metals: all alkali metals, all alkaline earth metals except radium, as well as scandium, yttrium, titanium and aluminum.
  • Other advantageous material groups for forming the metal vapor are tungsten, molybdenum and the group of lanthanides.
  • the emission spectrum of the K-shell is essential in the selection of the target material. This is advantageously matched with the application. Specifically, this is the element lanthanum, the 14 elements following the lanthanum in the periodic table.
  • metal vapor also has the advantage that can be generated by exciting the target with the electron beam advantageously a monochromatic X-ray. It is X-rays, with only one wavelength, which has the advantage that, for example Make X-ray pictures sharper with monochromatic X-rays. Therefore, it is also an alternative solution of the invention to use this monochromatic X-ray for transilluminating a body, which must be such that appear at the wavelength of the monochromatic X-ray radiation used in the figure contrasts of the body.
  • the body may be a technical entity (technical or inanimate body) such. B. act a component connection, which must be examined for air influences out. Another possibility is the acquisition of X-ray images of a human or animal body.
  • FIG. 1 there is shown an X-ray source in which a housing 11 is provided in which a metal vapor cloud 12 can be generated as a target for X-radiation 21.
  • a housing 11 In addition to this housing 12, there is an evaporation chamber 13 in which a liquid target material 14 is vaporized by an electric arc 15.
  • the target material can by the energy input of the arc 15 before be liquefied evaporating.
  • electrodes 16 and a voltage source 17 are provided.
  • the evaporator device 18 formed by the evaporation chamber 13 is completed by a nozzle 19, which is formed in the partition wall between a generating space 20 for a monochromatic X-ray 21 formed by the housing 11 and the evaporation chamber 13.
  • the housing 11 is separated from the evaporation chamber 13 by an electrically insulating layer 22.
  • an electron gun 24 is provided, wherein the electron beam 23 enters the housing 11.
  • the electron beam interacts with the gaseous target and is electrostatically decelerated and collected by a collector 28.
  • a window 29 there is a window 29, through which the resulting X-ray radiation 21 can be coupled out of the housing 11.
  • the electron gun 24 has a cathode 30 which is at a potential of 0V. This emits the electron beam 23, which is focused by a lens 31, is decoupled from the electron gun.
  • the driving force for this is a potential, which is built up by placing the ionized, gaseous target at a potential of +100 to +300 kV.
  • the collector 28 is at a potential between +40 and +120 kV.
  • FIG. 2 an alternative embodiment of the X-ray source is shown.
  • the case 11 used here has only a housing space 33, both the function of the evaporator device 18 and the function of the generating space 20 according to FIG. 1 takes over.
  • the target material 14 which is also melted and vaporized by the electrodes 16 by means of the arc 15.
  • the electrodes 16 are as in FIG. 1 Insulated with insulators 34 from the residual housing electrically.
  • the electrodes 16 according to FIG. 2 are powered by an AC voltage source 35, wherein the arc is stabilized by a ballast 36. The stabilization of the arc is required so that the cloud used as a target is continuously filled with evaporating target material.
  • a metering device as the nozzle 19 according to FIG. 1 namely missing in the embodiment according to FIG. 2 ,
  • FIG. 1 also shown in more detail.
  • a lanthanum atom with its nucleus 56 is shown.
  • the K shell 37 of the atom is shown, on which an electron 38 is located. This is excited by excitation of the electron beam and raised to a higher shell 39. When it recovers, it emits the monochromatic X-ray 21.
  • FIG. 2 As an electron emitter comes according to FIG. 2 no electron gun 24, but a simple electrode 40 is used, these, as already to FIG. 1 described, is at a potential of 0V. Both the electrode 40 and the collector 28 are arranged in an outer housing 41, which has an additional window 42, via which the X-radiation 21 can be coupled out.
  • the housing 11 is easily inserted into the outer housing 41.
  • a plurality of the housings 11 can be kept in reserve, for example, to allow a quick replacement when the housing 11 has to be cleaned or the target material 14 has been consumed.
  • a plurality of housings to be provided with different target materials 14 in order to be able to quickly convert the X-ray radiation source for the generation of monochromatic X-radiation of other wavelengths.
  • a conversion is of course also in the structure according to FIG. 1 possible.

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • X-Ray Techniques (AREA)

Claims (8)

  1. Source de rayons X comprenant un boîtier (11) dans lequel est prévue une cible (12) qui, sous un bombardement de faisceau d'électrons (23), peut émettre des rayons X, dans laquelle une vapeur métallique ionisée peut être engendrée en tant que cible (12) dans le boîtier, dans laquelle un matériau cible (14) et un dispositif de vaporisation (18) sont utilisés pour engendrer la vapeur métallique dans le boîtier (11),
    caractérisée en ce que
    l'on utilise en tant que dispositif de vaporisation (18) une électrode (16) pour l'allumage d'un arc électrique entre l'électrode (16) et le matériau cible (14).
  2. Source de rayons X selon la revendication 1,
    caractérisée en ce que
    le boîtier comprend une chambre de vaporisation (13) pour un métal à vaporiser, qui est reliée par une ouverture, en particulier une buse (19), à un volume résiduel du boîtier (11).
  3. Source de rayons X selon l'une des revendications précédentes,
    caractérisée en ce que
    le boîtier (11) comprend une première fenêtre (25) dans la paroi, qui est transparente pour le faisceau d'électrons (23).
  4. Source de rayons X selon l'une des revendications précédentes,
    caractérisée en ce que
    dans la paroi du boîtier (11) est disposée une fenêtre (29) qui est transparente pour les rayons X à engendrer.
  5. Source de rayons X selon l'une des revendications précédentes,
    caractérisée en ce que
    le matériau cible est constitué d'un métal léger, en particulier d'aluminium.
  6. Source de rayons X selon l'une des revendications 1 à 4, caractérisée en ce que
    le matériau cible est constitué d'un lanthanide, de tungstène, de molybdène ou d'un alliage d'au moins deux des métaux cités.
  7. Procédé pour engendrer des rayons X, dans lequel, dans le boîtier (11) d'une source de rayons X, une cible (12) est bombardée par un faisceau d'électrons (23) et émet des rayons X,
    dans lequel une vapeur métallique est engendrée en tant que cible (12) dans un dispositif de vaporisation (18) dans le boîtier (11), dans lequel un matériau cible (14) est utilisé pour engendrer la vapeur métallique,
    caractérisé en ce que
    l'on utilise en tant que dispositif de vaporisation (18) une électrode (16) pour l'allumage d'un arc électrique entre l'électrode (16) et le matériau cible (14).
  8. Utilisation d'une source de rayons X émettant des rayons X monochromatiques selon l'une des revendications 1 à 6, pour l'éclairage interne d'un corps qui crée des contrastes différenciables du fait des longueurs d'onde des rayons X utilisés.
EP12729942.8A 2012-06-15 2012-06-15 Source de rayons x, son utilisation et procédé pour produire des rayons x Active EP2837016B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/EP2012/061479 WO2013185840A1 (fr) 2012-06-15 2012-06-15 Source de rayons x, son utilisation et procédé pour produire des rayons x

Publications (2)

Publication Number Publication Date
EP2837016A1 EP2837016A1 (fr) 2015-02-18
EP2837016B1 true EP2837016B1 (fr) 2016-08-17

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Application Number Title Priority Date Filing Date
EP12729942.8A Active EP2837016B1 (fr) 2012-06-15 2012-06-15 Source de rayons x, son utilisation et procédé pour produire des rayons x

Country Status (7)

Country Link
US (1) US9659738B2 (fr)
EP (1) EP2837016B1 (fr)
JP (1) JP5976208B2 (fr)
KR (1) KR101866173B1 (fr)
CN (1) CN104364876B (fr)
RU (1) RU2015100936A (fr)
WO (1) WO2013185840A1 (fr)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8331534B2 (en) 2009-04-16 2012-12-11 Silver Eric H Monochromatic X-ray methods and apparatus
DE102015215690A1 (de) * 2015-08-18 2017-03-09 Siemens Healthcare Gmbh Emitteranordnung
EP3385976A1 (fr) * 2017-04-05 2018-10-10 Excillum AB Surveillance de vapeur
KR20240055138A (ko) 2017-05-19 2024-04-26 이매진 싸이언티픽, 인크. 단색 엑스선 영상 시스템 및 방법
EP3493239A1 (fr) * 2017-12-01 2019-06-05 Excillum AB Source de rayons x et procédé de génération de rayons x
US10818467B2 (en) 2018-02-09 2020-10-27 Imagine Scientific, Inc. Monochromatic x-ray imaging systems and methods
CA3129632A1 (fr) 2018-02-09 2019-08-15 Imagine Scientific, Inc. Systemes et procedes d'imagerie par rayons x monochromatiques
WO2020056281A1 (fr) 2018-09-14 2020-03-19 Imagine Scientific, Inc. Systèmes de composant de rayons x monochromatiques et procédés
EP3751594A1 (fr) * 2019-06-11 2020-12-16 Siemens Healthcare GmbH Tube a rayons x
WO2023039774A1 (fr) * 2021-09-16 2023-03-23 Shenzhen Xpectvision Technology Co., Ltd. Procédés d'imagerie utilisant de multiples faisceaux de rayonnement

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63168942A (ja) 1986-12-27 1988-07-12 Hitachi Ltd プラズマｘ線源
DE19905802A1 (de) * 1999-02-12 2000-08-17 Philips Corp Intellectual Pty Röntgenröhre
JP3734019B2 (ja) 2001-04-10 2006-01-11 独立行政法人科学技術振興機構 プラズマｘ線管
GB0309371D0 (en) 2003-04-25 2003-06-04 Cxr Ltd X-Ray tubes
DE10342239B4 (de) 2003-09-11 2018-06-07 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren und Vorrichtung zum Erzeugen von Extrem-Ultraviolettstrahlung oder weicher Röntgenstrahlung
EP2415065A1 (fr) * 2009-04-03 2012-02-08 Excillum AB Fourniture d'une cible en métal liquide en génération de rayons x
US8331534B2 (en) * 2009-04-16 2012-12-11 Silver Eric H Monochromatic X-ray methods and apparatus
RU2484549C2 (ru) 2010-10-25 2013-06-10 Российская Федерация, от имени которой выступает Государственная корпорация по атомной энергии "Росатом" Лазерно-плазменный генератор многозарядных ионов

Also Published As

Publication number Publication date
CN104364876B (zh) 2017-05-17
EP2837016A1 (fr) 2015-02-18
US9659738B2 (en) 2017-05-23
WO2013185840A1 (fr) 2013-12-19
JP5976208B2 (ja) 2016-08-23
CN104364876A (zh) 2015-02-18
US20150170868A1 (en) 2015-06-18
JP2015523686A (ja) 2015-08-13
RU2015100936A (ru) 2016-08-10
KR101866173B1 (ko) 2018-06-11
KR20150023025A (ko) 2015-03-04

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