EP3213337A1 - Tube à rayons x à faisceau métallique - Google Patents

Tube à rayons x à faisceau métallique

Info

Publication number
EP3213337A1
EP3213337A1 EP15820839.7A EP15820839A EP3213337A1 EP 3213337 A1 EP3213337 A1 EP 3213337A1 EP 15820839 A EP15820839 A EP 15820839A EP 3213337 A1 EP3213337 A1 EP 3213337A1
Authority
EP
European Patent Office
Prior art keywords
component
metal
cathode
electron beam
ray tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP15820839.7A
Other languages
German (de)
English (en)
Other versions
EP3213337B1 (fr
Inventor
Oliver Heid
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens Healthcare GmbH
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Publication of EP3213337A1 publication Critical patent/EP3213337A1/fr
Application granted granted Critical
Publication of EP3213337B1 publication Critical patent/EP3213337B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/06—Cathodes
    • H01J35/065—Field emission, photo emission or secondary emission cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H01J35/12—Cooling non-rotary anodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/06—Cathode assembly
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/06—Cathode assembly
    • H01J2235/062—Cold cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/08—Targets (anodes) and X-ray converters
    • H01J2235/081—Target material
    • H01J2235/082—Fluids, e.g. liquids, gases
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/08—Targets (anodes) and X-ray converters
    • H01J2235/086—Target geometry

Definitions

  • the invention relates to a metal-ray X-ray tube according to the preamble of claim 1.
  • Object of the present invention is to provide a metal beam X-ray tube, which is less genröhren than conventional fixed or rotating anode tubes or previous Metallstrahlrönt ⁇ the problem of power density at the impact point of the electron beam hit on the anode component.
  • the metal beam X-ray tube in a vacuum chamber in addition to a cathode component for extracting an electric ⁇ nenstrahls also a provision for extracting the extracting the electron beam from the cathode component.
  • the metal-ray X-ray tube has an anode component formed with a liquid metal beam as a target for the emitted electron beam of the cathode component and a provision for accelerating the emitted from the cathode component electron beam within a vacuum path in the direction and target anode component.
  • the metal beam X-ray tube according to the invention a thin jet of metal as an anode component through which the electrons impinging on the anode component Elect ⁇ Ronen beam are only partly braked.
  • the metal beam X-ray tube according to the invention a knife cut ⁇ cathode as the cathode component with a pointing with a slight inclination downwards in the direction of liquid metal jet of the anode cathode component cutting edge.
  • a metal-ray X-ray tube in which the fast, electrostatically or electrodynamically accelerated primary electrons in a first vacuum path are only partially decelerated in a thin, relatively electron-transparent target medium.
  • a knife-edge cathode which, according to the invention, produces an electron flat jet with thickness matching the metal beam diameter so that a sufficiently large proportion of the electrons issuing from the cathode strike the metal beam.
  • a metal-ray X-ray tube is obtained, which no longer has the disadvantages mentioned above.
  • the light generation efficiency is increased in a particularly advantageous manner.
  • To increase efficiency additionally contributes to a metal beam of the anode component, which is embedded in a second, relatively well electron-permeable and heat-absorbing material or dissolved therein.
  • the dissolution can be carried out, for example, in the form of an alloy or a mixture.
  • the metal beam can have the cylinder shape with a diameter in the order of magnitude of the electron beam diameter, for example 10 to 100 ⁇ m, which is easy to realize, yet with sufficient electron-permeability.
  • the mixture or the alloy should have a low melting point in order to enable liquid jet formation.
  • the improved energy absorption capacity of the anode material redu ⁇ decorates the necessary A nodenst rahl york
  • the sole FIGURE shows a metal-ray X-ray tube 1, which has a vacuum space 2.
  • a cathode component 3 is arranged in the vacuum space 2.
  • the cathode component 3 is used for extracting an electron beam 4.
  • a precaution 5 for extracting the extracting the electron beam 4 is provided by the Kathodenkompo ⁇ component.
  • an anode component 7 formed with a liquid metal jet 6 is provided in the vacuum space 2.
  • the metal stream 6 is the destination for the emitted electron beam 4 of the cathode component 3.
  • a provision 8 is used for accelerating the emitted from the cathode component 3 electron beam 4, at least within a vacuum line 9 in the direction and with target Anodenkompo ⁇ component. 7
  • the metal beam 6 is realized as far as thin metal beam, as the electrons of the electron beam 4 are only partially decelerated by the metal beam 6.
  • the cathode component 3 has a cathode knife edge 10, so that the cathode component 3 can also be referred to as a knife edge cathode.
  • the cathode knife blade 10 is aligned with a slight downward slope in the direction of liquid metal jet 6 of the anode component 7. After the anode component 7, there is a further vacuum gap 11 for the not yet completely decelerated electrons of the electron beam 4.
  • the vacuum system 11 serves to brake the approximately to the anode component 7 only partially braked Elect ⁇ Ronen at least to a stop.
  • this comple ⁇ zend a Energy Weg forungsvorlotung 12th Not specifically recognizable in the figure is that the metal ⁇ beam 6 of the anode component 7 embedded at least in a single second, relatively well electron-permeable and heat-absorbing material 13 or dissolved therein.
  • a knife-edge cathode is used, which is slightly inclined against any existing magnetic field lines.
  • a chemical element of atomic number 30 to 92 is used, for example barium, lanthanum, cerium, bismuth, tungsten and so on and at least one heat-absorbing, relatively electron and X-ray transparent component, for example, a chemical element with atomic number ⁇ 20, for example lithium.
  • the metal beam 6 is injected, for example by means of a Injek ⁇ tors in the electron beam 4, so as to form 14 bremsstrahlung and characteristic radiation in the interaction zone.
  • the transmitted and scattered electrons are decelerated in an electrostatic collector by a counter-E field with energy recovery and collected at low speed.
  • Light-melting metal alloys tend to have a high vapor pressure at elevated temperatures, favoring the deposition of conductive surface layers on, for example, insulators. It is therefore advantageous for a minimal, for interaction with the electric ⁇ nenstrahl 4 to guide the metal beam 6 necessary length through the discharge space and to then enter into a wall cooled condensation and collection container.

Landscapes

  • X-Ray Techniques (AREA)

Abstract

L'invention concerne un tube à rayons X à faisceau métallique qui est moins affecté que les tubes classiques par le problème de la densité de puissance au point d'impact du faisceau d'électrons sur le composant anodique. Le tube à rayons X à faisceau métallique comporte pour cela comme composant anodique (7) un faisceau métallique (6) si mince qu'un faisceau d'électrons (4), incident au faisceau métallique (6), n'est que partiellement ralenti par celui-ci. En outre, il est prévu comme composant cathodique une cathode en lame de couteau qui comporte une lame cathodique (10) qui pointe avec une légère inclinaison vers le bas en direction du faisceau métallique liquide (6) du composant anodique (7).
EP15820839.7A 2014-12-22 2015-12-18 Tube à rayons x à faisceau métallique Active EP3213337B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102014226813.3A DE102014226813A1 (de) 2014-12-22 2014-12-22 Metallstrahlröntgenröhre
PCT/EP2015/080504 WO2016102370A1 (fr) 2014-12-22 2015-12-18 Tube à rayons x à faisceau métallique

Publications (2)

Publication Number Publication Date
EP3213337A1 true EP3213337A1 (fr) 2017-09-06
EP3213337B1 EP3213337B1 (fr) 2020-10-07

Family

ID=55072621

Family Applications (1)

Application Number Title Priority Date Filing Date
EP15820839.7A Active EP3213337B1 (fr) 2014-12-22 2015-12-18 Tube à rayons x à faisceau métallique

Country Status (5)

Country Link
US (1) US10586673B2 (fr)
EP (1) EP3213337B1 (fr)
CN (1) CN107004552B (fr)
DE (1) DE102014226813A1 (fr)
WO (1) WO2016102370A1 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3214635A1 (fr) * 2016-03-01 2017-09-06 Excillum AB Source de rayons x cible liquide avec outil de mélange à jet
US10748736B2 (en) * 2017-10-18 2020-08-18 Kla-Tencor Corporation Liquid metal rotating anode X-ray source for semiconductor metrology
EP3671802A1 (fr) 2018-12-20 2020-06-24 Excillum AB Collecteur d'électrons doté d'une partie d'impact oblique

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IL42763A0 (en) 1972-09-18 1973-10-25 Bendix Corp A field emission x-ray tube
US4953191A (en) 1989-07-24 1990-08-28 The United States Of America As Represented By The United States Department Of Energy High intensity x-ray source using liquid gallium target
US5052034A (en) 1989-10-30 1991-09-24 Siemens Aktiengesellschaft X-ray generator
SE510133C2 (sv) * 1996-04-25 1999-04-19 Jettec Ab Laser-plasma röntgenkälla utnyttjande vätskor som strålmål
DE60143527D1 (de) * 2000-07-28 2011-01-05 Jettec Ab Verfahren und vorrichtung zur erzeugung von röntgenstrahlung
JP3866063B2 (ja) 2001-07-31 2007-01-10 独立行政法人科学技術振興機構 Ｘ線発生方法及びその装置
DE102004015590B4 (de) 2004-03-30 2008-10-09 GE Homeland Protection, Inc., Newark Anodenmodul für eine Flüssigmetallanoden-Röntgenquelle sowie Röntgenstrahler mit einem Anodenmodul
DE102008026938A1 (de) * 2008-06-05 2009-12-17 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Strahlungsquelle und Verfahren zum Erzeugen von Röntgenstrahlung
US7929667B1 (en) * 2008-10-02 2011-04-19 Kla-Tencor Corporation High brightness X-ray metrology
EP2415065A1 (fr) * 2009-04-03 2012-02-08 Excillum AB Fourniture d'une cible en métal liquide en génération de rayons x
JP5694558B2 (ja) 2010-12-22 2015-04-01 エクシルム・エービーＥｘｃｉｌｌｕｍ ＡＢ Ｘ線源での電子ビームの整列および合焦
US8908833B2 (en) * 2010-12-28 2014-12-09 Rigaku Corporation X-ray generator
DE102013209447A1 (de) 2013-05-22 2014-11-27 Siemens Aktiengesellschaft Röntgenquelle und Verfahren zur Erzeugung von Röntgenstrahlung

Also Published As

Publication number Publication date
DE102014226813A1 (de) 2016-06-23
CN107004552B (zh) 2018-12-18
WO2016102370A1 (fr) 2016-06-30
US20170345611A1 (en) 2017-11-30
EP3213337B1 (fr) 2020-10-07
CN107004552A (zh) 2017-08-01
US10586673B2 (en) 2020-03-10

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