EP3213337B1 - Tube à rayons x à faisceau métallique - Google Patents

Tube à rayons x à faisceau métallique Download PDF

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Publication number
EP3213337B1
EP3213337B1 EP15820839.7A EP15820839A EP3213337B1 EP 3213337 B1 EP3213337 B1 EP 3213337B1 EP 15820839 A EP15820839 A EP 15820839A EP 3213337 B1 EP3213337 B1 EP 3213337B1
Authority
EP
European Patent Office
Prior art keywords
component
cathode
electron beam
metal jet
ray tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP15820839.7A
Other languages
German (de)
English (en)
Other versions
EP3213337A1 (fr
Inventor
Oliver Heid
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens Healthcare GmbH
Original Assignee
Siemens Healthcare GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Healthcare GmbH filed Critical Siemens Healthcare GmbH
Publication of EP3213337A1 publication Critical patent/EP3213337A1/fr
Application granted granted Critical
Publication of EP3213337B1 publication Critical patent/EP3213337B1/fr
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/06—Cathodes
    • H01J35/065—Field emission, photo emission or secondary emission cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H01J35/12—Cooling non-rotary anodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/06—Cathode assembly
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/06—Cathode assembly
    • H01J2235/062—Cold cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/08—Targets (anodes) and X-ray converters
    • H01J2235/081—Target material
    • H01J2235/082—Fluids, e.g. liquids, gases
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/08—Targets (anodes) and X-ray converters
    • H01J2235/086—Target geometry

Definitions

  • the invention relates to a metal beam X-ray tube according to the preamble of claim 1.
  • the maintenance of the solid or liquid state of aggregation of the anode material at the focal point of the electron beam is known to be achieved by transporting the material of the rotating anode or the metal beam at the focal point of the electron beam through the focal point with sufficient speed.
  • the electrons are slowed down to a standstill, although only high-energy electrons produce the desired short-wave X-ray radiation.
  • Complete deceleration is an unfavorable process in terms of focal spot power deposition and also efficiency.
  • the object of the present invention is to propose a metal beam X-ray tube that has less of the problem of power density at the point of impact than conventional fixed or rotating anode tubes or previous metal beam X-ray tubes of the electron beam on the anode component is affected.
  • the metal beam X-ray tube has a provision for extracting the electron beam from the cathode component in addition to a cathode component for extracting an electron beam in a vacuum space.
  • the metal beam X-ray tube has an anode component formed with a liquid metal beam as a target for the emitted electron beam of the cathode component and a provision for accelerating the electron beam emitted by the cathode component within a vacuum path in the direction and with the target anode component.
  • the metal beam X-ray tube according to the invention has a thin metal beam as the anode component, by means of which the electrons of the electron beam impinging on the anode component are only partially decelerated.
  • the metal beam X-ray tube according to the invention has a knife-edge cathode as the cathode component with a cathode cutting edge pointing with a slight downward slope in the direction of the liquid metal beam of the anode component.
  • a metal beam X-ray tube is thus proposed in which the fast primary electrons, which are electrostatically or electrodynamically accelerated in a first vacuum path, are only partially decelerated in a thin, relatively electron-transparent target medium.
  • the thin light-generating anode material can only absorb very little energy.
  • Physically very thin anode materials are required, for example 0.1 to 10 ⁇ m thick.
  • liquid metal jets are very difficult to produce in a shape other than round. This also limits the focal spot diameter to a very small size.
  • a knife-edge cathode is therefore used in combination with the correspondingly thin metal beam of the anode component, which according to the invention generates a flat electron beam with a thickness matching the metal beam diameter, so that a sufficiently large proportion of the electrons emerging from the cathode hit the metal beam.
  • a metal beam of the anode component which is embedded or dissolved in a second, relatively good electron-permeable and heat-absorbing material, also helps to increase efficiency.
  • the dissolution can take place, for example, in the form of an alloy or a mixture.
  • this enables anodes that are physically relatively thick but electron-optically thin and have a high specific energy absorption capacity.
  • the metal beam can have the easily realizable cylindrical shape with a diameter in the order of magnitude of the electron beam diameter, e.g. 10 to 100 ⁇ m have, nevertheless, sufficient electron kinetic transmission.
  • the mixture or the alloy should have a low melting point in order to enable liquid jet formation.
  • the improved energy absorption capacity of the anode material reduces the necessary anode beam speed and / or enables higher power deposition and thus luminance of the focal point.
  • the single figure shows a metal beam X-ray tube 1 which has a vacuum space 2.
  • a cathode component 3 is arranged in the vacuum space 2.
  • the cathode component 3 serves to extract an electron beam 4.
  • a provision 5 for extracting the electron beam 4 from the cathode component 3 is provided in the vacuum space 2.
  • an anode component 7 formed with a liquid metal jet 6 is provided in the vacuum space 2.
  • the metal beam 6 is the target for the electron beam 4 emitted by the cathode component 3.
  • a provision 8 is used to accelerate the electron beam 4 emitted by the cathode component 3 at least within a vacuum path 9 in the direction and with the target anode component 7.
  • the metal beam 6 is implemented as a thin metal beam to the extent that the electrons of the electron beam 4 are only partially decelerated by the metal beam 6.
  • the cathode component 3 has a cathode knife edge 10, so that the cathode component 3 also acts as a knife edge cathode can be designated.
  • the cathode knife cutting edge 10 is aligned with a slight downward slope in the direction of the liquid metal jet 6 of the anode component 7.
  • the exemplary embodiment according to the FIGURE additionally has an energy recovery device 12.
  • the metal beam 6 of the anode component 7 is embedded or dissolved in at least a single second, relatively good electron-permeable and heat-absorbing material 13.
  • a knife-cutting cathode is used that is slightly inclined with respect to any magnetic field lines that may be present.
  • an alloy or a mixture of at least two components is used as the X-ray generating anode material and an energy recovery device 12, which captures the electron beam emerging from the metal beam 6 of the anode component 7 with an electrostatic collector.
  • the material 13 used for the metal beam 6 of the anode component 7 is, for example, a chemical element with the atomic number 30 to 92, for example barium, lanthanum, cerium, bismuth, tungsten and so on, and at least one heat-absorbing, relatively electron and X-ray transparent component, for example one chemical element with atomic number ⁇ 20, e.g. lithium.
  • the metal beam 6 is injected into the electron beam 4, for example by means of an injector, so that bremsstrahlung and characteristic radiation are produced in the interaction zone 14.
  • the transmitted and scattered electrons are in an electrostatic collector by a Counter-E-field decelerated with energy recovery and absorbed at low speed.

Landscapes

  • X-Ray Techniques (AREA)

Claims (4)

  1. Tube (1) à rayons X à jet métallique, comportant, dans un espace (2) sous vide, un élément (3) formant cathode pour l'extraction d'un faisceau (4) d'électrons, un extracteur (5) pour l'extraction du faisceau (4) d'électrons de l'élément (3) formant cathode, un élément (7) formant anode, formé d'un jet (6) de métal liquide, comme cible du faisceau (4) d'électrons émis de l'élément (3) formant cathode et un accélérateur (8) pour accélérer le faisceau (4) d'électrons émis par l'élément (3) formant cathode, dans une section de vide, en direction de l'élément (7) formant anode et en l'ayant pour cible, dans lequel il est prévu, comme élément (7) formant anode, un jet (6) métallique mince, par lequel les électrons du faisceau (4) d'électrons, qui y est incident, ne sont freinés que partiellement, caractérisé en ce qu'il est prévu, comme élément (3) formant cathode, une cathode coupante comme un couteau, ayant un tranchant (10) de cathode allant avec une inclinaison petite vers le bas, en direction du jet (6) de métal liquide de l'élément (7) formant anode.
  2. Tube à rayons X à jet métallique suivant la revendication 1, caractérisé en ce qu'après l'élément (7) formant anode, est prévue une autre section (11) de vide pour les électrons, qui n'ont pas encore été freinés complètement, du faisceau (4) d'électrons, dans laquelle les électrons sont freinés, au moins à peu près jusqu'à l'arrêt.
  3. Tube à rayons X à jet métallique suivant la revendication 2, caractérisé en ce que le freinage des électrons s'accompagne, au moins à peu près jusqu'à l'arrêt, d'un dispositif (12) de récupération d'énergie.
  4. Tube à rayons X à jet métallique suivant l'une des revendications précédentes, caractérisé en ce que le jet (6) de métal de l'élément (7) formant anode est incorporé dans un deuxième matériau (13) relativement bien perméable aux électrons et absorbant la chaleur, ou y est dissout.
EP15820839.7A 2014-12-22 2015-12-18 Tube à rayons x à faisceau métallique Active EP3213337B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102014226813.3A DE102014226813A1 (de) 2014-12-22 2014-12-22 Metallstrahlröntgenröhre
PCT/EP2015/080504 WO2016102370A1 (fr) 2014-12-22 2015-12-18 Tube à rayons x à faisceau métallique

Publications (2)

Publication Number Publication Date
EP3213337A1 EP3213337A1 (fr) 2017-09-06
EP3213337B1 true EP3213337B1 (fr) 2020-10-07

Family

ID=55072621

Family Applications (1)

Application Number Title Priority Date Filing Date
EP15820839.7A Active EP3213337B1 (fr) 2014-12-22 2015-12-18 Tube à rayons x à faisceau métallique

Country Status (5)

Country Link
US (1) US10586673B2 (fr)
EP (1) EP3213337B1 (fr)
CN (1) CN107004552B (fr)
DE (1) DE102014226813A1 (fr)
WO (1) WO2016102370A1 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3214635A1 (fr) * 2016-03-01 2017-09-06 Excillum AB Source de rayons x cible liquide avec outil de mélange à jet
US10748736B2 (en) * 2017-10-18 2020-08-18 Kla-Tencor Corporation Liquid metal rotating anode X-ray source for semiconductor metrology
EP3671802A1 (fr) 2018-12-20 2020-06-24 Excillum AB Collecteur d'électrons doté d'une partie d'impact oblique

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IL42763A0 (en) 1972-09-18 1973-10-25 Bendix Corp A field emission x-ray tube
US4953191A (en) 1989-07-24 1990-08-28 The United States Of America As Represented By The United States Department Of Energy High intensity x-ray source using liquid gallium target
US5052034A (en) 1989-10-30 1991-09-24 Siemens Aktiengesellschaft X-ray generator
SE510133C2 (sv) * 1996-04-25 1999-04-19 Jettec Ab Laser-plasma röntgenkälla utnyttjande vätskor som strålmål
DE60143527D1 (de) * 2000-07-28 2011-01-05 Jettec Ab Verfahren und vorrichtung zur erzeugung von röntgenstrahlung
JP3866063B2 (ja) 2001-07-31 2007-01-10 独立行政法人科学技術振興機構 Ｘ線発生方法及びその装置
DE102004015590B4 (de) 2004-03-30 2008-10-09 GE Homeland Protection, Inc., Newark Anodenmodul für eine Flüssigmetallanoden-Röntgenquelle sowie Röntgenstrahler mit einem Anodenmodul
DE102008026938A1 (de) * 2008-06-05 2009-12-17 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Strahlungsquelle und Verfahren zum Erzeugen von Röntgenstrahlung
US7929667B1 (en) * 2008-10-02 2011-04-19 Kla-Tencor Corporation High brightness X-ray metrology
EP2415065A1 (fr) * 2009-04-03 2012-02-08 Excillum AB Fourniture d'une cible en métal liquide en génération de rayons x
JP5694558B2 (ja) 2010-12-22 2015-04-01 エクシルム・エービーＥｘｃｉｌｌｕｍ ＡＢ Ｘ線源での電子ビームの整列および合焦
US8908833B2 (en) * 2010-12-28 2014-12-09 Rigaku Corporation X-ray generator
DE102013209447A1 (de) 2013-05-22 2014-11-27 Siemens Aktiengesellschaft Röntgenquelle und Verfahren zur Erzeugung von Röntgenstrahlung

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
None *

Also Published As

Publication number Publication date
DE102014226813A1 (de) 2016-06-23
CN107004552B (zh) 2018-12-18
WO2016102370A1 (fr) 2016-06-30
US20170345611A1 (en) 2017-11-30
EP3213337A1 (fr) 2017-09-06
CN107004552A (zh) 2017-08-01
US10586673B2 (en) 2020-03-10

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