EP2301042B1 - Cible radiographique et procédé de production de rayons x - Google Patents

Cible radiographique et procédé de production de rayons x Download PDF

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Publication number
EP2301042B1
EP2301042B1 EP09777336A EP09777336A EP2301042B1 EP 2301042 B1 EP2301042 B1 EP 2301042B1 EP 09777336 A EP09777336 A EP 09777336A EP 09777336 A EP09777336 A EP 09777336A EP 2301042 B1 EP2301042 B1 EP 2301042B1
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EP
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Prior art keywords
ray target
ray
wire
electron beam
type
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EP09777336A
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German (de)
English (en)
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EP2301042A2 (fr
Inventor
Norman Uhlmann
Frank Sukowski
Frank Nachtrab
Petra-Maria Kessling
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Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
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Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
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    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K5/00—Irradiation devices
    • G21K5/08—Holders for targets or for other objects to be irradiated
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H01J35/112—Non-rotating anodes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/08—Targets (anodes) and X-ray converters
    • H01J2235/083—Bonding or fixing with the support or substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/08—Targets (anodes) and X-ray converters
    • H01J2235/086—Target geometry

Definitions

  • Embodiments of the present invention relate to an X-ray target for generating X-ray radiation by an electron beam and to a method for generating X-ray radiation. Further exemplary embodiments relate to an X-ray target for linear accelerators (LINACs), betatrons and x-ray tubes.
  • LINACs linear accelerators
  • betatrons betatrons
  • x-ray tubes X-ray target for linear accelerators (LINACs), betatrons and x-ray tubes.
  • a collimated beam of accelerated electrons is usually directed to a target (X-ray target). Due to the interaction of the accelerated electrons with the target material, the X-radiation is generated in a region called the focal spot. For example, the X-rays are generated as bremsstrahlung during this process of sudden deceleration of the high-energy charged particles.
  • X-rays are not only of outstanding importance in medical technology, but are also used extensively in materials testing, for example to detect defects in materials.
  • the examination of objects or even materials with high transmission lengths eg freight containers, motor vehicles, etc.
  • LINACs Linear accelerators
  • MeV range megaelectron volt range
  • the image quality of the entire imaging system should be optimized, the system comprising, for example, a radiation source, manipulators and a detector can.
  • An achievable resolution is currently limited less by the detector side of the system, but rather by the radiation source. Namely, the minimum focal spot size of the X-ray source directly limits the maximum applicable magnification.
  • the focal spot size for high energy X-ray sources should be minimized to allow an increase in the imaging performance of such imaging systems.
  • electrons are generated via glow emission and accelerated in an evacuated waveguide to energies in a range of usually 3 MeV to 24 MeV.
  • the X-ray target At the end of the waveguide is either directly the X-ray target or a deflection magnet, which directs the electrons to the target.
  • the x-ray target typically includes a vacuum-sealed window of copper and a tungsten layer, wherein the layer thickness of the tungsten layer may comprise, for example, several hundred microns.
  • the heat generated is dissipated via thermal contact with the housing (radiator head).
  • the X-ray targets are sufficiently thick for the electrons to deliver all their energy to the material. These targets, by their thickness and the resulting large interaction zones of the electrons create an undesirably large focal spot. As a result, for example, in the study of highly absorbent materials and large objects, the typical problems such as edge blur, poor detail recognition, and high detection thresholds occur.
  • Another alternative method for generating X-radiation is the use of an X-ray target in a circulating electron beam (electron storage or synchrotron).
  • an X-ray target in a circulating electron beam (electron storage or synchrotron).
  • An example of this is in " Novel X-ray source based on a tabletop synchrotron and its unique features ", Nuclear Instruments and Methods in Physics Research B 199 (2003), p 509-516
  • the disclosed X-ray targets for linear accelerators are inefficient and therefore excluded.
  • the JP 2004 028845 A describes an X-ray generating device, namely a micro-X-ray generating device, which apparently uses as an X-ray target an X-ray wire which is held along its longitudinal direction in the electron beam and thereby has an exemplary extension of 10 ⁇ m in the transverse direction and 20 ⁇ m in the electron beam direction.
  • the core idea of the present invention is to provide an X-ray target for generating X-ray radiation, wherein the X-ray radiation is generated by an incident electron beam in the X-ray target and the X-ray target has an elongate extent.
  • the elongate extent can be defined, for example, by the X-ray target having a cross-sectional area A perpendicular to the electron beam and having a longitudinal extent L parallel or along the electron beam, where the cross-sectional area A is smaller than the square of the longitudinal extent L and the electron beam can be directed to the cross-sectional area ,
  • the elongate extent may be defined such that a maximum extent of the X-ray target along the electron beam is greater than a maximum extent of the X-ray target perpendicular to the electron beam.
  • the idea of the present invention is thus to select a target geometry which has a sufficiently large extent along the direction of the electron beam in order to achieve a correspondingly high efficiency.
  • the possible focal spot size is limited upwards by the selected lateral extent.
  • the focal spot size can be suitably adjusted via the lateral extent (cross-sectional area) - for example below a predetermined value (eg less than 2 mm or less than 1 mm).
  • exemplary embodiments instead of a flat transmission target, as used for example in conventional X-ray targets, exemplary embodiments have a wire-like or rod-shaped X-ray target which has a heavy material (with a high atomic number, such as tungsten) and can be introduced into the electron beam in the linear accelerator.
  • the electron beam in this case runs essentially parallel to the longitudinal axis of the wire / rod.
  • This X-ray target may optionally be cylindrical or cuboid, wherein the longitudinal axis is in turn arranged parallel to the electron beam direction.
  • the X-ray target is fixed by threads on a frame, wherein the threads optionally comprise a material with a low atomic number.
  • the sizing of the filaments can be chosen such that interaction of the charged particles (e.g., the electrons) with the wires can be largely suppressed.
  • the wires may further have a high thermal conductivity.
  • Embodiments of the present invention also include a method for generating X-radiation by means of an X-ray target, which has a cross-sectional area A and a longitudinal extent L with A ⁇ L 2 .
  • the method comprises directing the electron beam onto the cross-sectional area A and deflecting the electrons after the generation of the X-radiation by means of a magnetic field.
  • the electrons of the electron beam can strike the X-ray target after passing through a straight-line or circular acceleration path and, after leaving the X-ray target, the deflection is effected by the magnetic field.
  • Embodiments of the present invention have a number of advantages over conventional x-ray targets.
  • a focal spot size is achieved which, in contrast to conventional targets, is not predetermined by the extent (perpendicular to the propagation direction) of the electron beam, but by the diameter (cross-sectional area) of the wire piece.
  • This limitation of the focal spot size has, for example, the following cause.
  • the electrons have a very low mass compared to the solid-state atoms, which means that the electrons in the solid undergo a large scattering angle.
  • the Bremsstrahlung is thus generated in regions that are located in part very far from the original beam entry point.
  • a second advantage of exemplary embodiments is that active cooling of the target can be dispensed with.
  • the energy of the accelerated electrons in the solid state is given off by two different processes: the radiation braking process and the impact braking process.
  • the radiation braking process is responsible for the generation of bremsstrahlung. In this case, little or no energy is given off in the form of heat to the target.
  • the impact braking process no or hardly any Bremsstrahlung is generated instead, but the energy of the electrons is released in the form of heat to the target.
  • the interaction cross sections and thus the probabilities of both processes are energy dependent.
  • the likelihood of radiation generation is high at high electron energies and decreases with decreasing kinetic energy Electrons off.
  • the electrons deposit more and more energy in the form of heat in the material, the slower they become (lower energy). It is therefore advantageous that the electrons leave the target after a few interactions and do not interact further. The number of interactions is limited by the small volume of the target in the embodiments.
  • the remaining energy of the electrons can optionally be converted into heat in an absorber block, wherein the absorber block is formed in order to dissipate the resulting heat well.
  • Fig. 1 1 shows an X-ray target 110 which serves to generate an X-radiation 120 through an electron beam 130 impinging on the X-ray target 110, wherein the X-ray target 110 has a cross-sectional area A perpendicular to the electron beam 130 and has a longitudinal extent L along the electron beam 130.
  • the electron beam 130 can be directed onto the cross-sectional area A, so that the electron beam 130 penetrates through the cross-sectional area A into the X-ray target 110.
  • the x-ray target 110 has an elongate shape that can be defined by the cross-sectional area A being smaller than the square of the longitudinal extent L (A ⁇ L 2 ).
  • the X-ray 120 is caused in an origin region R by the impact of the electrons e - in the electron beam 130 on atoms of the X-ray target 110 (by the Bremsstrahlung effect), wherein the generation of X-rays is particularly efficient when the electrons have a high energy, whereas At low energy, lattice vibration of the crystal atoms in the X-ray target increases (ie heat is generated).
  • Fig. 1 also shows a focal spot B, which marks the region in which X-radiation is generated.
  • a focal spot B which is as small as possible, so that the X-ray source can be regarded as almost point-like.
  • This purpose is also served by the wire-shaped configuration of the X-ray target 110, which has the consequence that the region R, within which the X-radiation 120 is generated, has a maximum extent perpendicular to the incident electron beam 130, which is given by the cross-sectional area A. Since this lateral extent of the region R is limited, thus the focal spot B is limited.
  • the electrons leave the X-ray target 110 again and are deflected to an electron absorber (electron trap).
  • an electron absorber electron trap
  • Fig. 2 shows a conventional X-ray target, which compared to the embodiment, which in the Fig. 1 is shown, a significantly larger region R1, within which the X-ray 120 is formed. Consequently, the focal spot B1, on which the X-ray radiation 120 leaves the conventional X-ray target, is also significantly larger.
  • the conventional X-ray target has a planar design, so that the cross-sectional area A, which the electron beam 130 impinges on the X-ray target, is significantly larger than the longitudinal extent L, which runs parallel to the electron beam 130.
  • planar design of the conventional X-ray target has the consequence that the X-ray source region R1 in the directions perpendicular to the propagation direction of the electrons is significantly larger than in embodiments of the present invention (see Fig. 1 ) the case is.
  • One of the causes of this expansion is the strong scattering of the electrons at the lattice atoms.
  • the deceleration of the electrons takes place completely within the X-ray target or in a substrate arranged behind it.
  • the thermal conversion of the kinetic energy of the electrons is carried out in embodiments of the present invention are not in the X-ray target 110 or in an adjacent thereto substrate, but the electron e - generally leave after generating the X-ray radiation 120, the X-ray target 110 again and move further within the x-ray tube or linear accelerator to be trapped, for example, after being deflected by a magnetic field in the electron trap (absorber block) where it releases the kinetic energy in the form of heat.
  • the cross-sectional area A does not remain constant over the longitudinal extent L, but that, for example, the cross-sectional area A decreases or increases in the direction of the longitudinal extent L.
  • Fig. 4 1 shows an exemplary embodiment for attachment of the X-ray target 110 by means of threads 210 and 230, which fix the X-ray target 110 in the direction perpendicular to the electron beam 130.
  • threads 210 and 230 fix the X-ray target 110 in the direction perpendicular to the electron beam 130.
  • four threads 210a, 210b, 210c, 210d are fastened to the X-ray target 110, which in turn are in turn connected to a ring holder 220 (frame).
  • four further threads 230a, 230b, 230c, 230d are stretched between the x-ray target 110 and a further frame 240 on the side of the x-ray target 110 opposite the cross-sectional face A.
  • the four threads 210 and four further threads 230 can contact the X-ray target 110, for example at an angular distance of 90 ° to each other.
  • the number of threads 210, 230 may be changed - for example, three threads each may be arranged at an angular distance of 120 ° to each other.
  • even more threads can be used to improve, for example, the thermal conductivity.
  • the attachment or stabilization of the X-ray target 110 is thus made by thin filaments of a solid material having, for example, a low atomic number Z (lower than that of the X-ray target 110).
  • the filaments 210, 230 may have a high melting point and a high thermal conductivity. Carbon fiber could be taken as an exemplary material for this.
  • the positioning of the threads 210, 230 should be finely adjustable, as is possible, for example, by fixing the X-ray target 110 to the outer frame 220, 240.
  • the outer frames 220, 240 may then be arranged, for example, such that the X-ray target 110 in the electron beam 130 is adjusted in such a way that the electron beam 130 is aligned with the cross-sectional area A.
  • Accelerated electrons which do not interact with the X-ray target 110, should not impinge on the beam exit window for the X-radiation 120, but instead be directed by a magnetic field onto a so-called beam dump (absorber block). This avoids the formation of a diffuse X-ray background.
  • Embodiments of the present invention are particularly advantageous for use in a linear accelerator.
  • Fig. 5 shows an embodiment for a linear accelerator, the X-ray target 110 according to embodiments having.
  • the linear accelerator in the Fig. 5 has a housing 310 which hermetically seals an evacuated cavity 312 so that a vacuum can be formed therein.
  • the X-ray target 110 can in turn be attached to the frames 220 and 240 by means of the threads 210 and 230 and is adjusted such that the electron beam 130 strikes the cross-sectional area A.
  • the linear accelerator furthermore has an electron source 320 (eg heating wire) and, on an opposite side thereof, an X-ray exit window 410 (radiation exit window), through which the resulting X-radiation 120 exits.
  • an electron source 320 eg heating wire
  • the electron source 320 is contacted via two terminals 322 and 324, and the electrons released are accelerated in a (straight) acceleration path 420 by acceleration electrodes 332a-d and 334a-d.
  • an alternating voltage can be applied to the acceleration electrodes 332 and 334, for example, which generates an alternating polarity between the acceleration electrodes 332 and 334 along the acceleration path 420, so that the electrons are accelerated.
  • a positive potential may initially be present at the first acceleration electrodes 332a, 334a, a negative potential at the second acceleration electrodes 332b, 334b, a positive potential at the third acceleration electrodes 332c, 334c, and a negative potential at the fourth acceleration electrodes 332d, 334d issue.
  • This polarity then changes with the frequency of the applied AC voltage. As the distance between adjacent acceleration electrodes 332, 334 increases along the acceleration path 420, this causes accelerated movement of the electrons.
  • the number of acceleration electrodes 332, 334 can be selected differently in further embodiments, wherein not only the number along the acceleration section 420 can be varied, but at one given location perpendicular to the propagation may be more than the two acceleration electrodes 332 and 334 are arranged.
  • the acceleration electrodes 332 and 334 may also be formed cylindrically around the electron beam 130 (such that the acceleration electrodes 332a and 334a belong to one and the same electrode, for example).
  • the electron beam 130 strikes the X-ray target 110.
  • the kinetic energy of the electrons is converted into X-ray 120, which in turn leaves the X-ray target 110 mainly in one direction of the electron beam 130 (FIG the momentum conservation assuming that there is no or hardly any momentum transfer to the X-ray target 110).
  • the X-radiation 120 leaves the radiation exit window 410 of the housing 310.
  • the electrons do not completely emit their energy within the X-ray target 110, but in turn exit the X-ray target 110 and are deflected in the deflection region 430 by a magnetic field.
  • the magnetic field is aligned perpendicular to the direction of propagation of the electrons, so that the electrons do not pass the beam exit window 410, but meet an absorber block 440 where they convert their residual kinetic energy into thermal energy.
  • the electrons in the absorber block 440 are finally removed via a port 450.
  • embodiments of the present invention include a wire-type x-ray target 110 for generating x-ray radiation 120 by bombardment of accelerated electrons.
  • the wire-type X-ray target can be defined, for example, in that the cross-section A is small in comparison to the longitudinal extent L, wherein the wire-type X-ray target 110 also can be configured cylindrical or cuboid.
  • the diameter or the maximum extent D of the cross-sectional area A of the X-ray target 110 may be, for example, less than 3 mm or less than 1 mm or in a range between 0.05 mm and 3 mm or in a range between 0.1 and 1 mm.
  • the cross-sectional area A may thus be, for example, less than 0.01 mm 2 or less than 1 mm 2 or in a range between 0.01 and 1 mm 2 .
  • the longitudinal extent L may for example be in a range between 0.5 and 20 mm or in a range between 1 and 10 mm.
  • the X-ray target may also be used in conventional X-ray tubes or betatrons.
  • the outstanding advantages of the X-ray target 110 according to the invention lie, on the one hand, in the realization of a very small focal spot B, which results in a clear improvement of the X-ray image (greater sharpness).
  • a further advantage of exemplary embodiments is that the electrons within the X-ray target generate only the X-ray radiation, but the thermal conversion of the residual energy of the electrons does not take place in the X-ray target 110 or in a substrate in contact with it, but instead after the electrodes have been generated X-ray 120 leave the X-ray target 110 in turn and supplied by means of a magnetic field, for example, an absorber block 440 and there is the thermal conversion of the residual energy of the electrons.
  • the threads 220, 240 may include, for example, the following materials: carbon fiber, beryllium, graphite, silicon carbide, etc.

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • X-Ray Techniques (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)

Claims (13)

  1. Accélérateur linéaire avec:
    un boîtier (310);
    une source d'électrons (320) destinée à libérer des électrons;
    une cible radiographique en forme de fil (110);
    une fenêtre de sortie de rayons (410);
    un trajet d'accélération rectiligne (420) destiné à accélérer les électrons libérés de sorte qu'il se produise un faisceau d'électrons (130) et qu'il heurte en (A) la cible radiographique en forme de fil, la cible radiographique en forme de fil (110) étant disposée dans le faisceau d'électrons (130) de sorte que
    le faisceau d'électrons heurte perpendiculairement une face de section A de la cible radiographique en forme de fil et que le rayonnement X (120) qui est généré dans la cible radiographique en forme de fil par le faisceau de rayons X sorte du boîtier (310) par la fenêtre de sortie de rayonnement (410), et que
    la cible radiographique en forme de fil présente une extension longitudinale L parallèle au faisceau d'électrons (130), la face de section A présente une extension maximale D qui se situe dans une plage comprise entre 0,1 mm et 1 mm, et le double de l'extension maximale D soit inférieur à l'extension longitudinale L.
  2. Accélérateur linéaire selon la revendication 1, dans lequel la cible radiographique (110) présente du molybdène ou du rhodium ou de l'or ou du wolfram ou du rhénium ou du platine.
  3. Accélérateur linéaire selon la revendication 1 ou la revendication 2, dans lequel la face de section A présente une extension maximale D et m fois l'extension maximale D est inférieur à l'extension longitudinale L, m = 3, 4 ou 10.
  4. Accélérateur linéaire selon l'une des revendications précédentes, dans lequel la face de section A présente une forme circulaire ou rectangulaire.
  5. Accélérateur linéaire selon l'une des revendications précédentes, dans lequel l'extension longitudinale L se situe dans une plage comprise entre 1 mm et 10 mm.
  6. Accélérateur linéaire selon l'une des revendications précédentes, dans lequel la cible radiographique en forme de fil peut être fixée par l'intermédiaire de fils (210) à un cadre (220) et par l'intermédiaire d'autres fils (230) à un autre cadre (240).
  7. Accélérateur linéaire selon la revendication 6, dans lequel les fils (210) ou les autres fils (230) présentent un matériau à nombre atomique (Z) inférieur à 40.
  8. Accélérateur linéaire selon la revendication 7, dans lequel le matériau présente du carbone.
  9. Accélérateur linéaire selon l'une des revendications précédentes, dans lequel la cible radiographique (110) est disposée dans le boîtier (310) de sorte que les électrons libérés passent, après rayonnement X (120) et sortie de la cible radiographique en forme de fil, par une région de déviation (430), la région de déviation (430) étant réalisée pour dévier les électrons libérés, au moyen d'un champ magnétique, sur un bloc absorbeur (440).
  10. Accélérateur linéaire selon la revendication 9, dans lequel le bloc absorbeur (440) est réalisé pour convertir l'énergie résiduelle des électrons libérés en chaleur et pour évacuer la chaleur.
  11. Procédé pour générer des rayons X (120), aux étapes suivantes consistant à:
    orienter un faisceau d'électrons (130) accéléré sur un trajet d'accélération rectiligne (420) vers une face de section A d'une cible radiographique en forme de fil (110), de sorte que le rayonnement X (120) soit généré sous forme de rayonnement de freinage, et ce de sorte que la cible radiographique en forme de fil (110) soit disposée dans le faisceau d'électrons (130) de sorte que
    le faisceau d'électrons heurte perpendiculairement une face de section A de la cible radiographique en forme de fil et que le rayonnement X (120) qui est généré dans la cible radiographique en forme de fil par le rayon X sorte du boîtier (310) à travers la fenêtre de sortie de rayonnement (410), et que
    la cible radiographique en forme de fil présente une extension longitudinale L parallèle au faisceau d'électrons, la face de section A présentant une extension maximale D qui se situe dans une plage comprise entre 0,1 mm et 1 mm, et le double de l'extension maximale D étant inférieur à l'extension longitudinale L.
  12. Procédé selon la revendication 11, présentant par ailleurs l'étape suivante consistant à:
    dévier les électrons, après une générations de rayons X et après la sortie de la cible radiographique en forme de fil, au moyen d'un champ magnétique.
  13. Procédé selon la revendication 13, dans lequel les électrons sont déviés vers un bloc absorbeur (440) et le bloc absorbeur (440) est réalisé pour convertir une énergie résiduelle du faisceau d'électrons (130) en chaleur.
EP09777336A 2008-07-29 2009-07-21 Cible radiographique et procédé de production de rayons x Active EP2301042B1 (fr)

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PL09777336T PL2301042T3 (pl) 2008-07-29 2009-07-21 Tarcza rentgenowska i sposób wytwarzania promieni rentgena

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DE102008035210A DE102008035210B4 (de) 2008-07-29 2008-07-29 Röntgentarget, Linearbeschleuniger und Verfahren zur Erzeugung von Röntgenstrahlen
PCT/EP2009/005287 WO2010012403A2 (fr) 2008-07-29 2009-07-21 Cible radiographique et procédé de production de rayons x

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EP2301042B1 true EP2301042B1 (fr) 2012-02-15

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EP (1) EP2301042B1 (fr)
AT (1) ATE545936T1 (fr)
DE (1) DE102008035210B4 (fr)
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WO (1) WO2010012403A2 (fr)

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DE102012221638B4 (de) * 2012-01-11 2016-12-08 Siemens Healthcare Gmbh Röntgenstrahler
US9008278B2 (en) * 2012-12-28 2015-04-14 General Electric Company Multilayer X-ray source target with high thermal conductivity
CN111403073B (zh) * 2020-03-19 2023-01-03 哈尔滨工程大学 一种基于电子加速器的多用途终端

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Publication number Priority date Publication date Assignee Title
US4737647A (en) * 1986-03-31 1988-04-12 Siemens Medical Laboratories, Inc. Target assembly for an electron linear accelerator
SU1513528A1 (ru) * 1987-04-13 1989-10-07 Предприятие П/Я В-8851 Способ генерации монохроматического направленного рентгеновского излучени
EP0553914A1 (fr) * 1992-01-27 1993-08-04 Koninklijke Philips Electronics N.V. Tube à rayons X ä foyer variable
AUPQ831200A0 (en) * 2000-06-22 2000-07-13 X-Ray Technologies Pty Ltd X-ray micro-target source
JP2004028845A (ja) * 2002-06-27 2004-01-29 Japan Science & Technology Corp 高輝度・高出力微小ｘ線発生源とそれを用いた非破壊検査装置
US6954515B2 (en) * 2003-04-25 2005-10-11 Varian Medical Systems, Inc., Radiation sources and radiation scanning systems with improved uniformity of radiation intensity

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DE102008035210B4 (de) 2012-08-02
WO2010012403A3 (fr) 2010-03-25
ATE545936T1 (de) 2012-03-15
EP2301042A2 (fr) 2011-03-30
PL2301042T3 (pl) 2012-07-31
DE102008035210A1 (de) 2010-02-25
WO2010012403A2 (fr) 2010-02-04

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