EP3570310B1 - Dispositif de production d'électrons accélérés - Google Patents

Dispositif de production d'électrons accélérés Download PDF

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Publication number
EP3570310B1
EP3570310B1 EP19174559.5A EP19174559A EP3570310B1 EP 3570310 B1 EP3570310 B1 EP 3570310B1 EP 19174559 A EP19174559 A EP 19174559A EP 3570310 B1 EP3570310 B1 EP 3570310B1
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EP
European Patent Office
Prior art keywords
cylindrical
cathode
shaped
exit window
electron exit
Prior art date
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Active
Application number
EP19174559.5A
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German (de)
English (en)
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EP3570310A1 (fr
Inventor
André Weidauer
Frank-Holm Rögner
Gösta Dr. Mattausch
Ralf Blüthner
Ignacio Gabriel VICENTE GABAS
Jörg KUBUSCH
Volker Kirchhoff
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
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Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
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Publication of EP3570310A1 publication Critical patent/EP3570310A1/fr
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J33/00—Discharge tubes with provision for emergence of electrons or ions from the vessel; Lenard tubes
    • H01J33/02—Details
    • H01J33/04—Windows
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K5/00—Irradiation devices
    • G21K5/02—Irradiation devices having no beam-forming means

Definitions

  • the invention relates to a device for generating accelerated electrons.
  • a device according to the invention inner walls of hollow bodies as well as bulk material and fluids can be exposed to accelerated electrons.
  • Electron beam technology has been used on an industrial scale for the chemical modification of materials and for the disinfection and / or sterilization of surfaces for several decades.
  • the treatment of products can be carried out economically at atmospheric pressure, for which the electrons first have to be released in a vacuum, then accelerated and finally coupled out into the treatment zone through a beam exit window, usually a thin metal foil.
  • Acceleration voltages> 80 kV are typically required to penetrate sufficiently robust electron exit windows that can be used on a large scale and also to ensure sufficient treatment depth in the product.
  • Electron beam sources based on thermionic emitters are also mechanically complex, difficult to scale and require complex high-voltage supplies and high-vacuum systems. In the event of damage to the beam exit window, it will also come from it The resulting breakdown of the vacuum leads to irreversible damage to the cathode system and thus to high repair costs.
  • Such an electron beam source with a thermionic cathode is off, for example US 2005/0225224 A1 known.
  • the thermionic cathode is rod-shaped along the cylinder axis of a cylindrical electron exit window. Electrons are emitted from the surface of the rod-shaped cathode and these are released to the environment through the cylindrical electron window so that accelerated electrons can be applied to objects that are arranged around the cylindrical electron window.
  • the aforementioned disadvantages of electron beam sources with a thermionic cathode are also inherent in this configuration.
  • DE 10 2006 012 666 A1 Another solution is in DE 10 2006 012 666 A1 indicated, which includes three axial emitters with associated deflection control and three also associated electron exit windows.
  • the three electron exit windows are arranged in such a way that they completely enclose a triangular free space. If a substrate is passed through this free space, accelerated electrons can be applied to the full circumference of its cross section in one treatment pass. However, if the substrate does not have the same triangular cross section as the free space enclosed by the three electron exit windows, the dose distribution of the application of accelerated electrons on the surface of the substrate will be inhomogeneous.
  • the outlay on equipment in this embodiment is also very high, which means that this solution is also very expensive.
  • WO 2007/107331 A1 a device is known in which only two surface jet generators are required, between which a molded part moves through for the purpose of sterilizing its surface and while doing so with accelerated electrons can be applied.
  • This device also has a plurality of reflectors made of gold, with which marginal rays emitted by the surface jet generators are reflected onto surface areas of the molded part which are not in the immediate area of action of the surface jet generators. Since the reflectors known from this document are made of pure gold, such devices are also very expensive and thus impair their economic efficiency. Since reflected electrons have a lower energy than non-reflected electrons, only an inhomogeneous energy input into a substrate is also possible with this device.
  • a ring-shaped device for generating accelerated electrons is in DE 10 2013 111 650 B3 and DE 10 2013 113 668 B3 discloses, in which all essential components, such as cathode, anode and electron exit window, are designed in a ring shape, so that a ring-shaped electron beam can be formed by means of such a device, in which the accelerated electrons move towards the inside of the ring.
  • a ring-shaped electron beam can be formed by means of such a device, in which the accelerated electrons move towards the inside of the ring.
  • US 2008/0267354 A1 also describes ring-shaped devices with which a high dose of X-rays and also electron beams can be generated. Because of the generation of a high dose of X-rays, such devices are not suitable for irradiating products which enter the food chain of humans or farm animals.
  • the invention is therefore based on the technical problem of creating a device for generating accelerated electrons by means of which the disadvantages of the prior art can be overcome.
  • a device with a compact design is to be created with which, for example, hollow bodies but also bulk material can be exposed to accelerated electrons from the inside.
  • FIG. 1 a cross section of a device 1 according to the invention is shown schematically.
  • Device 1 initially comprises an electron exit window 2 in the form of a hollow cylinder.
  • the cylindrical electron exit window 2 is part of a housing which has the shape of the lateral surfaces of a cylinder and which is therefore also cylindrical like the electron exit window 2.
  • the cylindrical housing encloses an evacuable space 3.
  • the cylindrical electron exit window of a device according to the invention also comprises a mechanical support grid to which a metal foil is attached.
  • the electron exit window 2 comprises an in Fig. 1 Mechanical support grid, not shown, made of copper, to which a titanium foil is attached.
  • At least one electrode extends along the cylinder axis of the cylinder-shaped electron exit window, which electrode has the shape of a rod or a hollow cylinder and which is thus rod-shaped or cylindrical.
  • a rod-shaped electrode 4 extends along the cylinder axis of the cylindrical electron exit window 2.
  • Wire-shaped electrodes 5 are arranged equidistantly from one another on a circular path around the cylinder axis of the cylindrical electron exit window 2.
  • the wire-shaped electrodes 5 extend along the cylinder length of the cylinder-shaped electron exit window completely or partially through the evacuable space 3 and are connected as an anode.
  • the device 1 has a total of eight wire-shaped electrodes 5.
  • the number of wire-shaped electrodes of a device according to the invention is not fixed at eight, but can alternatively also be smaller or larger than eight in other exemplary embodiments.
  • the wire-shaped electrodes of a device according to the invention connected as an anode preferably have a slightly positive voltage potential in the range of +0.25 kV to 5 kV with respect to the electrical ground of the device 1, whereas the cylindrical housing of a device according to the invention, including the cylindrical electron exit window and the support grid , preferably have the electronic ground potential.
  • a glow discharge plasma is formed in the evacuable space 3.
  • an electrical voltage of 1 kV is used to ignite the glow discharge between the wire-shaped electrodes 5 and the housing of the device 1 functioning as the first cathode, which voltage drops to 0.3 kV after the glow discharge is ignited to maintain the glow discharge.
  • an electrical voltage in a range from -60 kV to -300 kV can be applied to the central, rod-shaped or cylindrical electrode 4 of a device according to the invention.
  • An electrical voltage in the range from -80 kV to -200 kV is preferably applied to the electrode 4.
  • the electrode 4 thus functions as a second cathode of a device according to the invention.
  • a device further comprises a first lattice-shaped electrode 6 in the form of a hollow cylinder, which encloses the at least one second cathode 4, the first lattice-shaped and cylindrical electrode 6 being spaced a smaller amount from the second cathode 4 than the wire-shaped electrodes 5
  • the first grid-shaped and cylindrical electrode 6 also has the electrical ground potential of the device 1, shields the second cathode 4 from the plasma, and thus limits the space for the glow discharge plasma to spread to the volume between the first grid-shaped and cylindrical electrode 6 and the electron exit window 2 This volume in which the glow discharge plasma spreads is also referred to as plasma space 7 below.
  • the surface perpendiculars of the surface area of the cathode from which electrons can be emitted are aligned with the cylindrical electron exit window. Electrons which penetrate the electron exit window of a device according to the invention are thus emitted to the external environment of a device according to the invention. With regard to the cross section of a device according to the invention, electrons can therefore be radiated outwards to the full extent, starting from the centrally arranged second cathode functioning as an emitter.
  • the cylinder axis of a cylinder-shaped device according to the invention can be aligned vertically, for example, and an annular curtain of bulk material can be passed in free fall around the cylinder cross-section.
  • the disadvantage here is that the bulk material cannot be fully exposed to accelerated electrons in one pass. This deficit can, however, be compensated for with a multiple run and represents an economical procedure for applying accelerated electrons to bulk material, especially with small quantities of bulk material.
  • a cylindrical electron reflector is also arranged around a cylindrical device according to the invention, which delimits an annular free space between the device according to the invention and the cylindrical electron reflector.
  • a ring-shaped curtain of bulk material can be guided in free fall past the electron exit window of the device according to the invention, with the electrons reflected on the electron reflector being able to at least partially impact the bulk material curtain with accelerated electrons from the rear.
  • the glow discharge plasma within the device 1 borders on the electron exit window 2, which is accompanied by ion bombardment of the electron exit window 2.
  • the resulting sputtering effects can damage the electron exit window 2 over time and the As a result, make device 1 inoperable. It is therefore advantageous to keep the plasma ions away from the electron exit window.
  • Fig. 2 a cross section of an embodiment of a device 8 according to the invention is shown schematically.
  • Device 8 initially comprises all components of device 1 Fig. 1 with the same functionality.
  • device 8 has a second lattice-shaped and cylindrical electrode 9 which surrounds the at least one second cathode 4, the second lattice-shaped and cylindrical electrode 9 being spaced from the second cathode 4 to a greater extent than the wire-shaped electrodes 5.
  • the second lattice-shaped and cylindrical electrode 9 preferably has an electrical voltage in the range from electrical ground potential to +500 V.
  • the plasma region 7 of the device 8 is limited to a volume between the first lattice-shaped and cylindrical electrode 6 and the second lattice-shaped and cylindrical electrode 9, through which the wire-shaped electrodes 5 extend partially or completely.
  • the electron exit window 2 of the device 8 is thus shielded from the glow discharge plasma, which extends the service life of the electron exit window 2.
  • the electrical voltage at the wire-shaped electrodes 5 is pulsed.
  • the glow discharge plasma of a device according to the invention can be maintained at lower pressures in the evacuable space.
  • the at least one electrode 4 functioning as a second cathode can also have at least one channel through which a coolant flows or flows.
  • the rod-shaped second cathode 4 from the Fig. 1 and 2 therefore has an in Fig. 1 and 2 Central through hole, not shown, through which a coolant flows.
  • a device according to the invention can be manufactured inexpensively and compactly due to its technically relatively simple and uncomplicated structure. Due to the compact structure with a relatively small vacuum volume, the evacuable space of a device according to the invention is evacuated in a further embodiment only during the manufacturing process, a working gas in the Introduced evacuable space and then vacuum-sealed the evacuable space.
  • a device according to the invention can also have first means for evacuating the evacuable space and second means for feeding a working gas into the evacuable space.
  • the evacuation of the evacuable space and the supply of the working gas can take place continuously or with a time interruption.
  • the accesses for the first and second means to the evacuable space 3 of a device according to the invention are preferably attached to the cylinder base and / or to the cylinder top of a cylindrical device according to the invention.
  • the cross-sections of all components designated as cylindrical, ring-shaped and rod-shaped are circular.
  • the cross-sections of the components designated as cylindrical, ring-shaped or rod-shaped can also have any geometric shape that deviates from circular.

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Apparatus For Disinfection Or Sterilisation (AREA)

Claims (7)

  1. Dispositif de production d'électrons accélérés, comprenant une fenêtre de sortie d'électrons (2) cylindrique faisant partie d'un boîtier cylindrique entourant un espace (3) pouvant être mis sous vide ; au moins une première cathode et une anode au moyen desquelles un plasma à décharge luminescente peut être produit dans l'espace (3) pouvant être mis sous vide, dans lequel des ions issus du plasma à décharge luminescente peuvent être accélérés sur la surface d'au moins une deuxième cathode (4) et des électrons pouvant être émis par ladite au moins une deuxième cathode (4) peuvent être accélérés en direction de la fenêtre de sortie d'électrons (2), caractérisé en ce que
    a) ladite au moins une deuxième cathode (4) est réalisée en forme de cylindre ou de barre comme un composant central le long de l'axe de cylindre de la fenêtre de sortie d'électrons (2) cylindrique ;
    b) le boîtier cylindrique est réalisé comme une première cathode ;
    c) l'anode est réalisée comme un nombre d'électrodes filiformes (5), les électrodes filiformes (5) étant disposées autour de la deuxième cathode (4) et s'étendant sur la longueur de cylindre de la fenêtre de sortie d'électrons (2) cylindrique partiellement ou complètement à travers l'espace (3) pouvant être mis sous vide ;
    d) une première électrode (6) en forme de réseau et de cylindre qui entoure ladite au moins une deuxième cathode (4), la première électrode (6) en forme de réseau et de cylindre étant espacée de la deuxième cathode (4) à un pas inférieur à celui des électrodes filiformes (5).
  2. Dispositif selon la revendication 1, caractérisé en ce qu'une deuxième électrode (9) en forme de réseau et de cylindre entoure ladite au moins une deuxième cathode (4), la deuxième électrode (9) en forme de réseau et de cylindre étant espacée de la deuxième cathode (4) à un pas supérieur à celui des électrodes filiformes (5).
  3. Dispositif selon la revendication 1 ou 2, caractérisé en ce que les sections transversales du boîtier cylindrique, de la fenêtre de sortie d'électrons (2) cylindrique, de la deuxième cathode (4) en forme de cylindre ou de barre, de la première électrode (6) en forme de réseau et de cylindre et de la deuxième électrode (7) en forme de réseau et de cylindre sont circulaires et leurs axes centraux de cylindre sont identiques.
  4. Dispositif selon l'une quelconque des revendications précédentes, caractérisé en ce que la cathode (4) en forme de cylindre ou de barre est traversée par au moins un canal.
  5. Dispositif selon l'une quelconque des revendications 1 à 4, caractérisé en ce que l'espace (3) pouvant être mis sous vide est scellé sous vide et présente un gaz de travail.
  6. Dispositif selon l'une quelconque des revendications 1 à 4, caractérisé par des premiers moyens pour mettre sous vide l'espace pouvant être mis sous vide et des deuxièmes moyens pour amener un gaz de travail dans l'espace (3) pouvant être mis sous vide.
  7. Dispositif selon l'une quelconque des revendications précédentes, caractérisé en ce que les électrodes filiformes (5) sont disposées sur une trajectoire circulaire autour de l'axe de cylindre de la fenêtre de sortie d'électrons (2) cylindrique et avec le même espacement les unes par rapport aux autres.
EP19174559.5A 2018-05-16 2019-05-15 Dispositif de production d'électrons accélérés Active EP3570310B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102018111782.5A DE102018111782A1 (de) 2018-05-16 2018-05-16 Vorrichtung zum Erzeugen beschleunigter Elektronen

Publications (2)

Publication Number Publication Date
EP3570310A1 EP3570310A1 (fr) 2019-11-20
EP3570310B1 true EP3570310B1 (fr) 2020-11-18

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DE (1) DE102018111782A1 (fr)

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4751429A (en) * 1986-05-15 1988-06-14 The United States Of America As Represented By The United States Department Of Energy High power microwave generator
DE19942142B4 (de) 1999-09-03 2004-04-15 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren und Einrichtung zur Behandlung von Schüttgut, vorzugsweise von Saatgut, mit beschleunigten Elektronen
US7148613B2 (en) * 2004-04-13 2006-12-12 Valence Corporation Source for energetic electrons
EP1747570A1 (fr) 2004-05-19 2007-01-31 Comet Holding AG Tube a rayons x pour emissions de doses elevees
WO2007107211A1 (fr) 2006-03-20 2007-09-27 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Dispositif de modification des propriétés de corps moulés tridimensionnels au moyen d'électrons
DE102006012666A1 (de) 2006-03-20 2007-09-27 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Vorrichtung und Verfahren zur Eigenschaftsänderung dreidimensionaler Formteile mittels Elektronen
DE102013111650B3 (de) 2013-10-23 2015-02-05 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Vorrichtung zum Erzeugen beschleunigter Elektronen
DE102013113688B3 (de) * 2013-12-09 2015-05-07 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Vorrichtung zum Beaufschlagen von Schüttgut mit beschleunigten Elektronen

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
None *

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Publication number Publication date
EP3570310A1 (fr) 2019-11-20
DE102018111782A1 (de) 2019-11-21

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