EP3742469A1 - Anode à rayons x, émetteur de rayons x et procédé de fabrication d'une anode à rayons x - Google Patents

Anode à rayons x, émetteur de rayons x et procédé de fabrication d'une anode à rayons x Download PDF

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Publication number
EP3742469A1
EP3742469A1 EP20184903.1A EP20184903A EP3742469A1 EP 3742469 A1 EP3742469 A1 EP 3742469A1 EP 20184903 A EP20184903 A EP 20184903A EP 3742469 A1 EP3742469 A1 EP 3742469A1
Authority
EP
European Patent Office
Prior art keywords
ray
ray anode
anode
surface structure
alternating surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP20184903.1A
Other languages
German (de)
English (en)
Inventor
Anja Fritzler
Peter Geithner
Petra Maurer
Brigitte Streller
Thomas Weber
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens Healthineers AG
Original Assignee
Siemens Healthcare GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Healthcare GmbH filed Critical Siemens Healthcare GmbH
Priority to EP20184903.1A priority Critical patent/EP3742469A1/fr
Publication of EP3742469A1 publication Critical patent/EP3742469A1/fr
Pending legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H01J35/112—Non-rotating anodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H01J35/10—Rotary anodes; Arrangements for rotating anodes; Cooling rotary anodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/24—Tubes wherein the point of impact of the cathode ray on the anode or anticathode is movable relative to the surface thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/24—Tubes wherein the point of impact of the cathode ray on the anode or anticathode is movable relative to the surface thereof
    • H01J35/26—Tubes wherein the point of impact of the cathode ray on the anode or anticathode is movable relative to the surface thereof by rotation of the anode or anticathode
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/24—Tubes wherein the point of impact of the cathode ray on the anode or anticathode is movable relative to the surface thereof
    • H01J35/30—Tubes wherein the point of impact of the cathode ray on the anode or anticathode is movable relative to the surface thereof by deflection of the cathode ray
    • H01J35/305—Tubes wherein the point of impact of the cathode ray on the anode or anticathode is movable relative to the surface thereof by deflection of the cathode ray by using a rotating X-ray tube in conjunction therewith
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/08—Targets (anodes) and X-ray converters
    • H01J2235/086—Target geometry
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P10/00—Technologies related to metal processing
    • Y02P10/25—Process efficiency

Definitions

  • the invention relates to an X-ray anode, an X-ray emitter and a method for producing an X-ray anode.
  • X-ray emitters are sufficiently known from the prior art in different designs.
  • the electrons act on the X-ray anode in the area of the focal point and are slowed down with the emission of X-rays, in particular bremsstrahlung.
  • the x-ray anode can, for example, be designed as a stationary anode with a cathode typically arranged essentially in the center, or it can be rotatable about an axis of rotation.
  • Such X-ray emitters thus have rotating anodes, in which the cathode is typically arranged centrally above the focal path acted upon by the electrons, or are designed as rotary piston radiators (also: rotary piston tubes).
  • the X-ray anode is part of a rotatably mounted housing, which typically has a waist (also: X-ray waist).
  • the cathode is arranged essentially centrally above the X-ray anode, which is designed to be exposed to electrons in an area at the edge. The necessary deflection or focusing of the electrons emitted on the cathode side takes place, for example, by a magnetic quadrupole.
  • the object of the present invention is to specify X-ray emitters with improved radiation characteristics.
  • an X-ray anode with the features of claim 1 or an X-ray emitter with the features of claim 10.
  • An X-ray anode for an X-ray emitter has a structured surface intended for exposure to electrons.
  • the structured Surface has an at least partially periodically alternating surface structure which varies in terms of its depth and periodicity in the micrometer range.
  • the surface structure varies in terms of its depth and periodicity in the micrometer range should be understood in particular to mean that the depth and periodicity is a few micrometers, preferably less than 40 ⁇ m, particularly preferably less than 25 ⁇ m.
  • the structured surface has a surface structure that alternates periodically at least in sections is to be understood in particular as having a periodically alternating cross-sectional profile.
  • the periodically alternating cross-sectional profile can extend in particular in the radial direction.
  • the increase in the photon flux is approximately 20%, in particularly preferred embodiments up to 35% compared to conventional X-ray anodes with smooth surfaces. More power is deposited in the focal spot or in the focal path, although somewhat higher temperatures are generally reached there with the same load.
  • an increase in performance with regard to the photon flow goes hand in hand with no additional load on the X-ray source and can advantageously be used in particular to significantly increase the service life of the components used.
  • the increase in the photon yield depends on the angle of incidence at which the electrons hit the anode surface in the area of a focal point, for example a standing anode or - especially in the case of rotating anodes or rotary bulb radiators - a focal path. Since the direction of incidence of the electrons on the anode surface is essentially determined by the design, the increase in the photon yield is also different for the design. It has been shown in particular that at an angle of incidence of the electrons of about 20 °, an increase in the photon yield of about 30% can be expected.
  • the output of the high-voltage generator would have to be increased by 20%, for example from 100 kW to 120 kW, in order to achieve the same photon yield to reach. This would result in a corresponding increase in the thermal load.
  • the variation in depth and / or periodicity of the periodically alternating surface structure is in the range of the mean free electron path.
  • the expression that the depth expansion and periodicity are in the range of the mean free electron path is to be understood in particular that the depth expansion and periodicity are in the range of the mean free electron path in the material of the X-ray anode.
  • the free electron path is particularly dependent on the kinetic energy of the electrons.
  • the specific design of the structured surfaces of the X-ray anode is therefore different for X-ray sources of different voltages. If the depth and periodicity of the periodically alternating surface structure are, in particular, in the respective range of the mean free electron path, a broad power range can be covered.
  • the structured surface can, for example, have appropriately dimensioned needle-shaped structures.
  • the alternating surface structure comprises grooves running parallel to one another at least in sections.
  • the surface structure is only periodic with respect to one direction of extent.
  • the grooves, which run parallel to one another at least in sections, extend, in particular, in the non-radial direction, are, for example, formed continuously and in embodiments have a constant or varying depth.
  • the deep extension of the grooves can vary in particular periodically in different configurations. The latter design is particularly advantageous in terms of minimizing thermal stress.
  • the x-ray anode has a circumferential, for example rotationally symmetrical, shape.
  • the grooves run in particular at an angle to a radial direction which is predetermined by the circumferential or rotationally symmetrical shape of the X-ray anode.
  • the alternating surface structure comprises circumferential, circular grooves.
  • Such designs can be provided for all common anode types, that is to say in particular for standing anodes, rotating anodes or rotary piston radiators.
  • the circumferential, circular grooves are arranged concentrically to one another.
  • the X-ray anode is designed, for example, in the shape of a plate, so that the center of the circumferential, circular grooves, in particular, can coincide with the center of the X-ray anode which is designed in the shape of a plate.
  • Such plate-shaped X-ray anodes are designed, for example, as rotating anodes or provided as part of a rotary piston radiator with a rotating vacuum housing.
  • the ratio of depth and periodicity of the alternating surface structure is essentially 1: 1.
  • the surface structure varies in terms of its depth in the range of up to 40 ⁇ m, preferably in the range from 10 ( ⁇ m to 30 ⁇ m, in particular in the range from 10 ⁇ m to 20 ⁇ m.
  • the variation in depth is in particular around 15 ⁇ m
  • Periodicity (also: period length) of the alternating surface structure is likewise in the range of up to 40 ⁇ m, preferably in the range of 10 ⁇ m to 30 ⁇ m, particularly preferably in the range of 10 to 20 ⁇ m, in particular around 15 ⁇ m.
  • an optimally adapted maximum depth of the alternating surface structure or the groove depth is below 10 ⁇ m.
  • X-ray anodes for medical radiation therapy thus have a surface structure with a different depth variation, such as, for example, X-ray anodes for mammography.
  • the cross-sectional profile of the alternating surface structure has an extent that lies in the range of the mean free path of the electrons and the absorption length of the emitted photons and can have almost any shape.
  • the alternating surface structure comprises a trench structure with steep walls which are introduced into the material of the X-ray anode in particular by means of laser ablation.
  • the alternating surface structure in cross section has an essentially sinusoidal profile, essentially a rectangular profile or essentially a sawtooth profile.
  • the production of such structures is simplified if they can be produced by means of laser ablation.
  • the depth and / or periodicity of the alternating surface structure is less than 40 ⁇ m, preferably less than 30 ⁇ m, particularly preferably less than 20 ⁇ m, in particular approximately 15 ⁇ m.
  • the alternating surface structure by means of local ablation in particular by means of an ablation method, for example by means of laser ablation or electron beam ablation into the material of the X-ray anode is introduced.
  • a high-energy beam is usually directed onto the surface of the component to be structured and material is removed in a targeted manner.
  • Such methods are suitable for creating structures in the micrometer range with high precision.
  • irregular, curved and / or conical surfaces can be structured quickly, precisely and inexpensively.
  • microstructure machining for example micromilling, microsinker erosion and etching processes with prior lamination or masking of the focal path come into consideration.
  • the alternating surface structure is produced by means of a generative manufacturing process (also: additive manufacturing process), in particular by means of selective laser melting, selective laser sintering, selective electron beam melting.
  • the alternating surface structure is produced by means of fused filament fabrication, cold gas spraying, screen printing or by means of coating processes, in particular by means of chemical vapor deposition (CVD) or physical vapor deposition (PVD).
  • CVD chemical vapor deposition
  • PVD physical vapor deposition
  • An X-ray emitter has one of the X-ray anodes described above with a structured surface.
  • the associated advantages result directly from the previous description with reference to the structured X-ray anode.
  • an X-ray emitter designed in this way has a radiation characteristic with reduced extra-focal radiation. In particular, this increases the image quality of captured x-ray images.
  • the radiation exposure of a person, in particular a patient can be reduced for applications in medicine. Since the surface structure of the X-ray anode is also causes a higher yield of photons, it is also possible, for example, to switch to lower powers with an essentially constant emitted x-ray intensity. This results in a reduction in the thermal load, so that the service life of the X-ray tube is increased.
  • the X-ray anode can be rotated about an axis of rotation.
  • the x-ray emitter has, for example, a rotating anode or is designed as a rotary piston emitter.
  • the X-ray anode is designed as a standing anode.
  • the X-ray emitter has a structural design such that electrons hit the structured surface essentially at an angle of incidence of up to 90 °, preferably in an angle of incidence of less than 60 °, particularly preferably less than 50 °, in particular in an angle of incidence less than 45 °.
  • Such a flat angle of incidence of the electrons generally results in a relatively high backscatter rate.
  • This high backscatter rate can at least for the most part be compensated for by providing the X-ray anode with the structured surface described above in the area of the focal spot or, in the case of rotating X-ray anodes, in the area of the focal path.
  • the minimum angle of incidence can be approximately 1 °, for example.
  • the X-ray emitter described above is preferably used to generate X-ray images.
  • the surface structure of the X-ray anode is designed in particular to minimize extra-focal radiation that reduces image quality. This can be used advantageously in all imaging methods based on X-rays, in particular in computed tomography, mammography, angiography, fluoroscopy or in material testing.
  • the generated x-ray radiation is provided for imaging, for example for medical imaging, for radiation therapy, for material testing or for cargo control.
  • the x-ray emitter is used, for example, in a C-arm x-ray device, a computer tomograph, an x-ray device for mammography or angiography, or in another x-ray device for medical imaging.
  • the alternating surface structure is introduced into the material of the X-ray anode by means of an ablation method, in particular by means of laser ablation or electron beam ablation.
  • the alternating surface structure is manufactured by means of a generative manufacturing process, in particular by means of selective laser melting, laser sintering, electron beam melting and / or by means of fused filament fabrication, cold gas spraying, screen printing or by means of a coating process, in particular by means of chemical vapor deposition or physical vapor deposition.
  • the alternating surface structure can also be formed by any combination of the methods described above. In particular, it can be provided to provide combinations of additive and subtractive methods.
  • Figure 1 shows an X-ray tube 100 designed as a rotary bulb with a vacuum housing 4 rotatably mounted in bearings 8 within a housing 2.
  • the housing 2 is typically filled or can be filled with a liquid coolant, in particular with a cooling oil, so that the vacuum housing 4, which rotates during operation, is directly supplied with coolant is flowed around.
  • the vacuum housing 4 can, for example, be set in a rotary movement about the axis of rotation R via a shaft 5.
  • a part of the vacuum housing 4 is formed by a plate-shaped X-ray anode 6, which has an edge-side area provided for exposure to electrons e.
  • a high voltage is applied between the x-ray anode 6 and a cathode 10, so that the cathode 10 emits electrons e during operation, which are directed in the direction of the x-ray anode 6 be accelerated.
  • a deflection device 12 which in particular comprises a plurality of magnetic deflection coils, directs the electrons e onto a suitable trajectory so that they impinge on the surface 14 of the X-ray anode 6 in the region of the focal point B.
  • the deflection device 12 is designed, for example, as a magnetic dipole and is arranged in the region of a waist 16 of the vacuum housing 4. Since the area between the waist 16 and the X-ray anode 6 is essentially field-free, the electrons in such an embodiment strike the surface 14 of the X-ray anode 6 at a relatively small angle of incidence ⁇ .
  • X-rays y arise in a manner known per se.
  • the x-rays y leave the housing 2 of the x-ray emitter 100 via an exit window 18.
  • the exit window 18 can be followed by further devices for beam shaping, not shown, such as a diaphragm box or a collimator.
  • the area of the surface 14 acted upon by electrons e in the area of the focal point B has a surface structuring in the micrometer range.
  • the surface structure 20 of the structured surface 14 is shown schematically in the not to scale illustrations in FIG Figures 2 to 4 shown.
  • Fig. 2 shows the section of the vacuum housing 4, which is rotationally symmetrical with respect to the axis of rotation R, beyond the waist 16.
  • the representation of the surface structure 20 is shown greatly enlarged for better illustration. In a representation true to scale, the surface structure 20, which has a periodically alternating profile in the micrometer range, would not be recognizable.
  • the periodically alternating surface structure 20 is also shown in detail in FIG. 3, which is not to scale Figure 3 and in the plan view in the not to scale Figure 4 shown.
  • the periodically alternating surface structure 20 comprises a plurality of grooves 22 which form a circumferential surface structure in the area of the X-ray anode 6 as concentric circles with respect to one another.
  • the grooves 22 are designed like a record.
  • the center of the concentric circular grooves 22 coincides with the axis of rotation R.
  • the surface structure 20 has an approximately sinusoidal profile (cf. Fig. 3 ) with a periodicity P and a depth dimension T.
  • Both the periodicity P (or: period length) and the depth dimension T are in the micrometer range.
  • the ratio between depth dimension T and the periodicity is approximately 1: 1.
  • both the depth T and the periodicity P are approximately 15 ⁇ m.
  • an X-ray anode 6 structured in this way, especially in the case of shallow electron incidence (cf. Fig. 2 ) reduce the proportion of scattered electrons e in the direction of incidence.
  • This effect can be used in an advantageous manner in the case of X-ray anodes 6 of different designs, that is to say in particular also in the case of rotating anodes or standing anodes.
  • this can be used particularly advantageously with rotary lobe radiators in order to compensate for the intrinsic, ie design-related disadvantage that results from a flat angle of incidence ⁇ of the electrons e with the associated high backscatter rate.
  • the surface structure 20 of the X-ray anode 6 reduces in particular the proportion of the scattered electrons e that strike the exit window 18 and reduce it thus the image quality-reducing extra-focal radiation caused by scattered electrons e.
  • An increased stress concentration is to be expected within the grooves 22 or the depressions of the structured surface 14, which is caused by the thermal loading of the x-ray anode 6 during operation of the x-ray emitter 100. It is advisable to provide the largest possible radius of curvature within the grooves 22 or the depressions in order to counteract a plastic deformation of the X-ray anode 6. It would be conceivable that stress-relieving cracks form at these points, which, however, generally at least not significantly influence the function of the grooves 22. In particular, it can be assumed that such cracks would cause no or only a slight reduction in the dose, at least in comparison to smooth anode surfaces, which in this regard can show signs of aging.
  • structured surfaces 14 can be provided for X-ray anodes 6 of different designs in order to minimize extra-focal radiation and / or to increase the photon yield while maintaining the same output.

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • X-Ray Techniques (AREA)
  • Apparatus For Radiation Diagnosis (AREA)
EP20184903.1A 2018-09-26 2018-09-26 Anode à rayons x, émetteur de rayons x et procédé de fabrication d'une anode à rayons x Pending EP3742469A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP20184903.1A EP3742469A1 (fr) 2018-09-26 2018-09-26 Anode à rayons x, émetteur de rayons x et procédé de fabrication d'une anode à rayons x

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP18196848.8A EP3629361B1 (fr) 2018-09-26 2018-09-26 Émetteur de rayons x, emploi d'un émetteur de rayons x et procédé de fabrication d'un émetteur de rayons x
EP20184903.1A EP3742469A1 (fr) 2018-09-26 2018-09-26 Anode à rayons x, émetteur de rayons x et procédé de fabrication d'une anode à rayons x

Related Parent Applications (2)

Application Number Title Priority Date Filing Date
EP18196848.8A Division-Into EP3629361B1 (fr) 2018-09-26 2018-09-26 Émetteur de rayons x, emploi d'un émetteur de rayons x et procédé de fabrication d'un émetteur de rayons x
EP18196848.8A Division EP3629361B1 (fr) 2018-09-26 2018-09-26 Émetteur de rayons x, emploi d'un émetteur de rayons x et procédé de fabrication d'un émetteur de rayons x

Publications (1)

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EP3742469A1 true EP3742469A1 (fr) 2020-11-25

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EP18196848.8A Active EP3629361B1 (fr) 2018-09-26 2018-09-26 Émetteur de rayons x, emploi d'un émetteur de rayons x et procédé de fabrication d'un émetteur de rayons x
EP20184903.1A Pending EP3742469A1 (fr) 2018-09-26 2018-09-26 Anode à rayons x, émetteur de rayons x et procédé de fabrication d'une anode à rayons x

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EP18196848.8A Active EP3629361B1 (fr) 2018-09-26 2018-09-26 Émetteur de rayons x, emploi d'un émetteur de rayons x et procédé de fabrication d'un émetteur de rayons x

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US (2) US11227739B2 (fr)
EP (2) EP3629361B1 (fr)
CN (2) CN115116810A (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3629361B1 (fr) * 2018-09-26 2020-10-28 Siemens Healthcare GmbH Émetteur de rayons x, emploi d'un émetteur de rayons x et procédé de fabrication d'un émetteur de rayons x
EP3742468A1 (fr) 2019-05-20 2020-11-25 Siemens Healthcare GmbH Modulation de dose
EP3751594B1 (fr) 2019-06-11 2024-08-28 Siemens Healthineers AG Tube a rayons x

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DE102011083413A1 (de) 2011-09-26 2013-03-28 Siemens Aktiengesellschaft Verfahren zum Herstellen einer Röntgenanode und Röntgenanode

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Publication number Publication date
US11227739B2 (en) 2022-01-18
EP3629361B1 (fr) 2020-10-28
CN110957201A (zh) 2020-04-03
EP3629361A1 (fr) 2020-04-01
US20200098538A1 (en) 2020-03-26
US11670476B2 (en) 2023-06-06
CN115116810A (zh) 2022-09-27
US20220084775A1 (en) 2022-03-17
CN110957201B (zh) 2022-06-03

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