EP3213337A1 - Metal jet x-ray tube - Google Patents

Metal jet x-ray tube

Info

Publication number
EP3213337A1
EP3213337A1 EP15820839.7A EP15820839A EP3213337A1 EP 3213337 A1 EP3213337 A1 EP 3213337A1 EP 15820839 A EP15820839 A EP 15820839A EP 3213337 A1 EP3213337 A1 EP 3213337A1
Authority
EP
European Patent Office
Prior art keywords
component
metal
cathode
electron beam
ray tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP15820839.7A
Other languages
German (de)
French (fr)
Other versions
EP3213337B1 (en
Inventor
Oliver Heid
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens Healthcare GmbH
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Publication of EP3213337A1 publication Critical patent/EP3213337A1/en
Application granted granted Critical
Publication of EP3213337B1 publication Critical patent/EP3213337B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/06—Cathodes
    • H01J35/065—Field emission, photo emission or secondary emission cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H01J35/12—Cooling non-rotary anodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/06—Cathode assembly
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/06—Cathode assembly
    • H01J2235/062—Cold cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/08—Targets (anodes) and X-ray converters
    • H01J2235/081—Target material
    • H01J2235/082—Fluids, e.g. liquids, gases
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/08—Targets (anodes) and X-ray converters
    • H01J2235/086—Target geometry

Definitions

  • the invention relates to a metal-ray X-ray tube according to the preamble of claim 1.
  • Object of the present invention is to provide a metal beam X-ray tube, which is less genröhren than conventional fixed or rotating anode tubes or previous Metallstrahlrönt ⁇ the problem of power density at the impact point of the electron beam hit on the anode component.
  • the metal beam X-ray tube in a vacuum chamber in addition to a cathode component for extracting an electric ⁇ nenstrahls also a provision for extracting the extracting the electron beam from the cathode component.
  • the metal-ray X-ray tube has an anode component formed with a liquid metal beam as a target for the emitted electron beam of the cathode component and a provision for accelerating the emitted from the cathode component electron beam within a vacuum path in the direction and target anode component.
  • the metal beam X-ray tube according to the invention a thin jet of metal as an anode component through which the electrons impinging on the anode component Elect ⁇ Ronen beam are only partly braked.
  • the metal beam X-ray tube according to the invention a knife cut ⁇ cathode as the cathode component with a pointing with a slight inclination downwards in the direction of liquid metal jet of the anode cathode component cutting edge.
  • a metal-ray X-ray tube in which the fast, electrostatically or electrodynamically accelerated primary electrons in a first vacuum path are only partially decelerated in a thin, relatively electron-transparent target medium.
  • a knife-edge cathode which, according to the invention, produces an electron flat jet with thickness matching the metal beam diameter so that a sufficiently large proportion of the electrons issuing from the cathode strike the metal beam.
  • a metal-ray X-ray tube is obtained, which no longer has the disadvantages mentioned above.
  • the light generation efficiency is increased in a particularly advantageous manner.
  • To increase efficiency additionally contributes to a metal beam of the anode component, which is embedded in a second, relatively well electron-permeable and heat-absorbing material or dissolved therein.
  • the dissolution can be carried out, for example, in the form of an alloy or a mixture.
  • the metal beam can have the cylinder shape with a diameter in the order of magnitude of the electron beam diameter, for example 10 to 100 ⁇ m, which is easy to realize, yet with sufficient electron-permeability.
  • the mixture or the alloy should have a low melting point in order to enable liquid jet formation.
  • the improved energy absorption capacity of the anode material redu ⁇ decorates the necessary A nodenst rahl york
  • the sole FIGURE shows a metal-ray X-ray tube 1, which has a vacuum space 2.
  • a cathode component 3 is arranged in the vacuum space 2.
  • the cathode component 3 is used for extracting an electron beam 4.
  • a precaution 5 for extracting the extracting the electron beam 4 is provided by the Kathodenkompo ⁇ component.
  • an anode component 7 formed with a liquid metal jet 6 is provided in the vacuum space 2.
  • the metal stream 6 is the destination for the emitted electron beam 4 of the cathode component 3.
  • a provision 8 is used for accelerating the emitted from the cathode component 3 electron beam 4, at least within a vacuum line 9 in the direction and with target Anodenkompo ⁇ component. 7
  • the metal beam 6 is realized as far as thin metal beam, as the electrons of the electron beam 4 are only partially decelerated by the metal beam 6.
  • the cathode component 3 has a cathode knife edge 10, so that the cathode component 3 can also be referred to as a knife edge cathode.
  • the cathode knife blade 10 is aligned with a slight downward slope in the direction of liquid metal jet 6 of the anode component 7. After the anode component 7, there is a further vacuum gap 11 for the not yet completely decelerated electrons of the electron beam 4.
  • the vacuum system 11 serves to brake the approximately to the anode component 7 only partially braked Elect ⁇ Ronen at least to a stop.
  • this comple ⁇ zend a Energy Weg forungsvorlotung 12th Not specifically recognizable in the figure is that the metal ⁇ beam 6 of the anode component 7 embedded at least in a single second, relatively well electron-permeable and heat-absorbing material 13 or dissolved therein.
  • a knife-edge cathode is used, which is slightly inclined against any existing magnetic field lines.
  • a chemical element of atomic number 30 to 92 is used, for example barium, lanthanum, cerium, bismuth, tungsten and so on and at least one heat-absorbing, relatively electron and X-ray transparent component, for example, a chemical element with atomic number ⁇ 20, for example lithium.
  • the metal beam 6 is injected, for example by means of a Injek ⁇ tors in the electron beam 4, so as to form 14 bremsstrahlung and characteristic radiation in the interaction zone.
  • the transmitted and scattered electrons are decelerated in an electrostatic collector by a counter-E field with energy recovery and collected at low speed.
  • Light-melting metal alloys tend to have a high vapor pressure at elevated temperatures, favoring the deposition of conductive surface layers on, for example, insulators. It is therefore advantageous for a minimal, for interaction with the electric ⁇ nenstrahl 4 to guide the metal beam 6 necessary length through the discharge space and to then enter into a wall cooled condensation and collection container.

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  • X-Ray Techniques (AREA)

Abstract

The invention relates to a metal jet x-ray tube which is less affected by the problem of the power density at the point of impact of the electron beam on the anode component than conventional tubes. For this purpose the metal jet x-ray tube has a metal jet (6) as anode component (7), which metal jet is so thin that an electron beam (4) impinging on the metal jet (6) is only partially decelerated by the metal jet. Furthermore a blade cathode is provided as a cathode component (3), which blade cathode comprises a cathode blade (10) directed with a slight inclination downwards in the direction of the liquid metal jet (6) of the anode component (7).

Description

Beschreibung description
Metallstrahlröntgenröhre Die Erfindung betrifft eine Metallstrahlröntgenröhre gemäß dem Oberbegriff des Anspruchs 1. The invention relates to a metal-ray X-ray tube according to the preamble of claim 1.
Bei bisher bekannten Fest- oder Drehanodenröhren oder auch Metallstrahlröntgenröhren besteht das Problem der Leistungs- dichte im Auftreffpunkt des Elektronenstrahls auf der Anoden¬ komponente. Es entstehen dort zu hohe Verlustleistungen für gegebene Lichtstärken und Brennfleck-Leuchtdichten. Außerdem stellen starke Hintergrund-Magnetfelder, beispielsweise hervorgerufen im Zusammenhang mit Magnetresonanztomographen, ein Problem dar. In solchen starken Magnetfeldern ist es unmöglich, den Elektronenstrahl elektrostatisch zu fokussieren. In previously known fixed or rotary anode tubes or metal-ray X-ray tubes, the problem of power density at the point of impact of the electron beam on the anode ¬ component. There arise too high power losses for given light levels and focal spot luminance. In addition, strong background magnetic fields, for example, caused in connection with magnetic resonance imaging, a problem. In such strong magnetic fields, it is impossible to electrostatically focus the electron beam.
Bei Rotationsanodenröhren und bei Metallstrahlröntgenröhren wird die Aufrechterhaltung des festen bzw. flüssigen Aggre- gatzustandes des Anodenmaterials im Brennpunkt des Elektro¬ nenstrahls bekanntermaßen dadurch gelöst, dass das Material der Drehanode oder des Metallstrahls im Brennpunkt des Elektronenstrahls genügend schnell durch den Brennfleck transportiert wird. Dabei werden die Elektronen bis zum Stillstand abgebremst, obwohl nur hochenergetische Elektro¬ nen die gewünschte kurzwellige Röntgenstrahlung hervorru¬ fen . Die vollständige Abbremsung ist bezüglich der Brennfleck-Leistungsdeposition und auch der Effizienz ein ungünstiger Prozess. In rotary anode tubes and metal beam X-ray tubes to maintain the solid or liquid aggregates is known to be dissolved gatzustandes of the anode material in the focal point of the electric ¬ nenstrahls characterized in that the material of the rotating anode or the metal beam is transported quickly enough at the focal point of the electron beam through the focal spot. The electrons are decelerated to a stop, although only high-energy electric ¬ ¬ nen hervorru fen the desired short-wavelength X-rays. Full deceleration is an inconvenient process in terms of focal spot power deposition and also efficiency.
Aufgabe der vorliegenden Erfindung ist es, eine Metallstrahlröntgenröhre vorzuschlagen, die weniger als konventionelle Fest- oder Drehanodenröhren oder bisherige Metallstrahlrönt¬ genröhren vom Problem der Leistungsdichte im Auftreffpunkt des Elektronenstrahls auf der Anodenkomponente betroffen ist. Object of the present invention is to provide a metal beam X-ray tube, which is less genröhren than conventional fixed or rotating anode tubes or previous Metallstrahlrönt ¬ the problem of power density at the impact point of the electron beam hit on the anode component.
Diese Aufgabe wird ausgehend von einer Metallstrahlröntgenröhre der eingangs genannten Art erfindungsgemäß gelöst durch eine Metallstrahlröntgenröhre, die die Merkmale im kennzeich¬ nenden Teil des Anspruchs 1 aufweist. This object is achieved on the basis of a metal-ray X-ray tube of the type mentioned above by a metal-ray X-ray tube having the features in the characterizing ¬ part of claim 1.
Danach weist die Metallstrahlröntgenröhre in einem Vakuumraum neben einer Kathodenkomponente zum Extrahieren eines Elektro¬ nenstrahls auch eine Vorkehrung zum Extrahieren des Extrahierens des Elektronenstrahls von der Kathodenkomponente auf. Außerdem weist die Metallstrahlröntgenröhre eine mit einem flüssigen Metallstrahl gebildete Anodenkomponente als Ziel für den ausgesendeten Elektronenstrahl der Kathodenkomponente und eine Vorkehrung zum Beschleunigen des von der Kathodenkomponente ausgesendeten Elektronenstrahls innerhalb einer Vakuumstrecke in Richtung und mit Ziel Anodenkomponente auf. Dazu weist die Metallstrahlröntgenröhre erfindungsgemäß einen dünnen Metallstrahl als Anodenkomponente auf, durch den die Elektronen des auf der Anodenkomponente auftreffenden Elekt¬ ronenstrahls nur teilweise abgebremst sind. Außerdem weist die Metallstrahlröntgenröhre erfindungsgemäß eine Messer¬ schneidekathode als Kathodenkomponente auf mit einer mit ei- ner geringen Neigung abwärts in Richtung flüssiger Metallstrahl der Anodenkomponente zeigenden Kathodenschneide. Thereafter, the metal beam X-ray tube in a vacuum chamber in addition to a cathode component for extracting an electric ¬ nenstrahls also a provision for extracting the extracting the electron beam from the cathode component. In addition, the metal-ray X-ray tube has an anode component formed with a liquid metal beam as a target for the emitted electron beam of the cathode component and a provision for accelerating the emitted from the cathode component electron beam within a vacuum path in the direction and target anode component. For this purpose, the metal beam X-ray tube according to the invention a thin jet of metal as an anode component through which the electrons impinging on the anode component Elect ¬ Ronen beam are only partly braked. In addition, the metal beam X-ray tube according to the invention a knife cut ¬ cathode as the cathode component with a pointing with a slight inclination downwards in the direction of liquid metal jet of the anode cathode component cutting edge.
Damit wird eine Metallstrahlröntgenröhre vorgeschlagen, bei der die schnellen, in einer ersten Vakuumstrecke elektrosta- tisch oder elektrodynamisch beschleunigten primären Elektronen in einem dünnen, relativ elektronentransparenten Zielmedium nur teilweise abgebremst werden. Thus, a metal-ray X-ray tube is proposed in which the fast, electrostatically or electrodynamically accelerated primary electrons in a first vacuum path are only partially decelerated in a thin, relatively electron-transparent target medium.
Hierbei besteht aber noch das Problem, dass das dünne lich- terzeugende Anodenmaterial nur sehr wenig Energie absorbie¬ ren kann. Im Endeffekt besteht zunächst im Wesentlichen die gleiche Leistungsgrenze wie bei einem dicken Anodenmateri¬ al. Es sind physikalisch sehr dünne Anodenmaterialien erforderlich, beispielsweise in der Stärke von 0,1 bis 10 ym. Here, however, there is still the problem that the thin more arising terzeugende anode material can only very little energy absorbie ¬ ren. In the end, there is initially substantially the same power limit as with a thick anode material. Physically very thin anode materials are required, for example in the thickness of 0.1 to 10 ym.
Andererseits sind Flüssigmetallstrahlen nur sehr schwierig in einer anderen als runder Form zu realisieren. Damit ist der Brennfleckdurchmesser ebenfalls auf eine sehr geringe Größe beschränkt. On the other hand, liquid metal jets are very difficult to realize in any other than round shape. Thus, the focal spot diameter is also on a very small Size restricted.
Weiter macht die Anwesenheit eines starken, homogenen Hintergrundmagnetfelds, beispielsweise beim Einsatz in einem Magnetresonanztomographen, es unmöglich, die Elektronen elektrostatisch zu fokussieren. Furthermore, the presence of a strong, homogeneous background magnetic field, for example when used in a magnetic resonance tomograph, makes it impossible to electrostatically focus the electrons.
Es wird daher in Kombination mit dem entsprechend dünnen Metallstrahl der Anodenkomponente eine Messerschneidenkathode verwendet, die er- findungsgemäß einen Elektronen-Flachstrahl mit zum Metallstrahldurchmesser passender Dicke erzeugt, so dass ein ausreichend großer Anteil der aus der Kathode austretenden Elektronen den Metallstrahl trifft. In Summe wird eine Metallstrahlröntgenröhre erhalten, die die eingangs genannten Nachteile nicht mehr aufweist. Therefore, in combination with the correspondingly thin metal beam of the anode component, a knife-edge cathode is used which, according to the invention, produces an electron flat jet with thickness matching the metal beam diameter so that a sufficiently large proportion of the electrons issuing from the cathode strike the metal beam. In total, a metal-ray X-ray tube is obtained, which no longer has the disadvantages mentioned above.
Vorteilhafte Ausgestaltungen der Erfindung sind Gegenstand von Unteransprüchen. Advantageous embodiments of the invention are the subject of dependent claims.
Danach ist nach der Anodenkomponente eine weitere Vakuumstre¬ cke für die noch nicht ganz abgebremsten Elektronen des Then, after the anode component further Vakuumstre ¬ bridge is for the not quite decelerated the electrons
Elektronenstrahls vorgesehen, in der eine Abbremsung der Elektronen wenigstens annähernd bis zum Stillstand erfolgt. Provided electron beam, in which a deceleration of the electrons is at least approximately to a standstill.
Erfolgt dieses Abbremsen der Elektronen zusammen mit einer Energierückgewinnungsvorkehrung, wird in einer ganz besonders vorteilhaften Weise die Lichterzeugungseffizienz gesteigert. Zur Effizienzsteigerung trägt zusätzlich bei ein Metallstrahl der Anodenkomponente, der in einem zweiten, relativ gut elektronendurchlässigen und wärmeabsorbierenden Material eingebettet oder auch darin aufgelöst ist. Die Auflösung kann beispielsweise in Form einer Legierung oder eines Gemisches erfolgen. Dies ermöglicht im Gegensatz zu bisherigen Metallstrahlröntgenröhren physikalisch relativ dicke, aber elektronenoptisch dünne Anoden mit großem spe- zifischem Energieaufnahmevermögen. Insgesamt kann der Metallstrahl die einfach zu realisierende Zylinderform mit Durchmesser in der Größenordnung des Elektronenstrahldurchmes- sers, z.B. 10 bis 100 ym aufweisen bei dennoch elektronenki- netisch ausreichender Durchlässigkeit. Das Gemisch oder die Legierung sollte erfindungsgemäß einen geringen Schmelzpunkt haben, um die Flüssigstrahlbildung zu ermöglichen. Das verbesserte Energieaufnahmevermögen des Anodenmaterials redu¬ ziert die notwendige A n o d e n s t rahlgeschwindigkeit If this deceleration of the electrons occurs together with an energy recovery arrangement, the light generation efficiency is increased in a particularly advantageous manner. To increase efficiency additionally contributes to a metal beam of the anode component, which is embedded in a second, relatively well electron-permeable and heat-absorbing material or dissolved therein. The dissolution can be carried out, for example, in the form of an alloy or a mixture. In contrast to previous metal-ray X-ray tubes, this enables physically relatively thick but electron-optically thin anodes with a large spe- zifischem energy absorption capacity. On the whole, the metal beam can have the cylinder shape with a diameter in the order of magnitude of the electron beam diameter, for example 10 to 100 μm, which is easy to realize, yet with sufficient electron-permeability. According to the invention, the mixture or the alloy should have a low melting point in order to enable liquid jet formation. The improved energy absorption capacity of the anode material redu ¬ decorates the necessary A nodenst rahlgeschwindigkeit
und/oder ermöglicht eine höhere Leistungsdeposition und da¬ mit Leuchtdichte des Brennflecks. and / or allows a higher power position and da ¬ with luminance of the focal spot.
Nachfolgend wird die Erfindung anhand einer Zeichnung näher erläutert . The invention will be explained in more detail with reference to a drawing.
Die einzige Figur zeigt eine Metallstrahlröntgenröhre 1, die einen Vakuumraum 2 aufweist. In dem Vakuumraum 2 ist eine Kathodenkomponente 3 angeordnet. Die Kathodenkomponente 3 dient zum Extrahieren eines Elektronenstrahls 4. Desweiteren ist in dem Vakuumraum 2 eine Vorkehrung 5 zum Extrahieren des Extrahierens des Elektronenstrahls 4 von der Kathodenkompo¬ nente 3 vorgesehen. Weiter ist in dem Vakuumraum 2 eine mit einem flüssigen Metallstrahl 6 gebildete Anodenkomponente 7 vorgesehen. Der Metallstrahl 6 ist das Ziel für den ausgesen- deten Elektronenstrahl 4 der Kathodenkomponente 3. Eine Vorkehrung 8 dient zum Beschleunigen des von der Kathodenkomponente 3 ausgesendeten Elektronenstrahls 4 zumindest innerhalb einer Vakuumstrecke 9 in Richtung und mit Ziel Anodenkompo¬ nente 7. The sole FIGURE shows a metal-ray X-ray tube 1, which has a vacuum space 2. In the vacuum space 2, a cathode component 3 is arranged. The cathode component 3 is used for extracting an electron beam 4. Furthermore, in the vacuum chamber 2 a precaution 5 for extracting the extracting the electron beam 4 is provided by the Kathodenkompo ¬ component. 3 Further, in the vacuum space 2, an anode component 7 formed with a liquid metal jet 6 is provided. The metal stream 6 is the destination for the emitted electron beam 4 of the cathode component 3. A provision 8 is used for accelerating the emitted from the cathode component 3 electron beam 4, at least within a vacuum line 9 in the direction and with target Anodenkompo ¬ component. 7
Der Metallstrahl 6 ist als soweit dünner Metallstrahl realisiert, als die Elektronen des Elektronenstrahls 4 durch den Metallstrahl 6 nur teilweise abgebremst werden. Die Kathodenkomponente 3 weist eine Kathodenmesserschneide 10 auf, so dass die Kathodenkomponente 3 auch als Messerschneidekathode bezeichnet werden kann. Die Kathodenmesserschneide 10 ist mit einer geringen Neigung abwärts in Richtung flüssiger Metallstrahl 6 der Anodenkomponente 7 ausgerichtet. Nach der Anodenkomponente 7 ist eine weitere Vakuumstrecke 11 für die noch nicht ganz abgebremsten Elektronen des Elektronenstrahls 4 vorhanden. Die Vakuumstrecke 11 dient dazu, die nach der Anodenkomponente 7 nur teilweise abgebremsten Elekt¬ ronen wenigstens annähernd bis zum Stillstand abzubremsen. Das Ausführungsbeispiel gemäß der Figur weist hierfür ergän¬ zend eine Energierückgewinnungsvorkehrung 12 auf. Nicht speziell erkennbar in der Figur ist, dass der Metall¬ strahl 6 der Anodenkomponente 7 wenigstens in einem einzigen zweiten, relativ gut elektronendurchlässigen und wärmeabsorbierenden Material 13 eingebettet oder darin aufgelöst ist. Erfindungsgemäß findet eine Messerschneidekathode Anwendung, die leicht gegen gegebenenfalls vorhandene Magnetfeldlinien geneigt ist. Zusätzlich findet beim Ausführungsbeispiel nach der Figur eine Legierung bzw. ein Gemisch aus mindestens zwei Komponenten als röntgenstrahlerzeugendes Anodenmaterial Ver- wendung und weiter eine Energierückgewinnungsvorkehrung 12, die das aus dem Metallstrahl 6 der Anodenkomponente 7 austre¬ tende Elektronenbündel mit einem elektrostatischen Kollektor auffängt. Als Material 13 für den Metallstrahl 6 der Anodenkomponente 7 ist beispielsweise ein chemisches Element der Ordnungszahl 30 bis 92 verwendet, zum Beispiel Barium, Lanthan, Cer, Wismut, Wolfram und so weiter und mindestens einer wärmeabsorbierenden, relativ elektronen- und röntgentranspa- renten Komponente, beispielsweise einem chemischen Element mit Ordnungszahl < 20, zum Beispiel Lithium. The metal beam 6 is realized as far as thin metal beam, as the electrons of the electron beam 4 are only partially decelerated by the metal beam 6. The cathode component 3 has a cathode knife edge 10, so that the cathode component 3 can also be referred to as a knife edge cathode. The cathode knife blade 10 is aligned with a slight downward slope in the direction of liquid metal jet 6 of the anode component 7. After the anode component 7, there is a further vacuum gap 11 for the not yet completely decelerated electrons of the electron beam 4. The vacuum system 11 serves to brake the approximately to the anode component 7 only partially braked Elect ¬ Ronen at least to a stop. The embodiment shown in the figure, this comple ¬ zend a Energierückgewinnungsvorkehrung 12th Not specifically recognizable in the figure is that the metal ¬ beam 6 of the anode component 7 embedded at least in a single second, relatively well electron-permeable and heat-absorbing material 13 or dissolved therein. According to the invention, a knife-edge cathode is used, which is slightly inclined against any existing magnetic field lines. Additionally place in the embodiment of the figure, an alloy or a mixture of at least two components as the X-ray beam generating anode material INTENT, and further a Energierückgewinnungsvorkehrung 12 7 austre ¬ tend electron beams intercept the out of the metal beam 6 of the anode component with an electrostatic collector. As a material 13 for the metal beam 6 of the anode component 7, for example, a chemical element of atomic number 30 to 92 is used, for example barium, lanthanum, cerium, bismuth, tungsten and so on and at least one heat-absorbing, relatively electron and X-ray transparent component, for example, a chemical element with atomic number <20, for example lithium.
Der Metallstrahl 6 wird beispielsweise mittels eines Injek¬ tors in den Elektronenstrahl 4 eingeschossen, so dass in der Interaktionszone 14 Bremsstrahlung und charakteristische Strahlung entsteht. Die transmittierten und gestreuten Elekt- ronen werden in einem elektrostatischen Kollektor durch ein Gegen-E-Feld unter Energierückgewinnung abgebremst und bei geringer Geschwindigkeit aufgefangen. Leichtschmelzende Metalllegierungen tendieren bei erhöhten Temperaturen zu einem hohen Dampfdruck, was die Ablagerung von leitfähigen Oberflächenschichten zum Beispiel auf Isolatoren begünstigt. Es ist daher vorteilhaft, den Metallstrahl 6 nur für eine minimale, für die Interaktion mit dem Elektro¬ nenstrahl 4 notwendige Länge durch den Entladungsraum zu führen und danach in einen wandgekühlten Kondensations- und Auffangbehälter eintreten zu lassen. The metal beam 6 is injected, for example by means of a Injek ¬ tors in the electron beam 4, so as to form 14 bremsstrahlung and characteristic radiation in the interaction zone. The transmitted and scattered electrons are decelerated in an electrostatic collector by a counter-E field with energy recovery and collected at low speed. Light-melting metal alloys tend to have a high vapor pressure at elevated temperatures, favoring the deposition of conductive surface layers on, for example, insulators. It is therefore advantageous for a minimal, for interaction with the electric ¬ nenstrahl 4 to guide the metal beam 6 necessary length through the discharge space and to then enter into a wall cooled condensation and collection container.

Claims

Patentansprüche claims
1. Metallstrahlröntgenröhre, aufweisend in einem Vakuumraum eine Kathodenkomponente zum Extrahieren eines Elektronen- Strahls, eine Vorkehrung zum Extrahieren des Extrahierens des Elektronenstrahls von der Kathodenkomponente, eine mit einem flüssigen Metallstrahl gebildeten Anodenkomponente als Ziel für den ausgesendeten Elektronenstrahl der Kathodenkomponente und eine Vorkehrung zum Beschleunigen des von der Kathoden- komponente ausgesendeten Elektronenstrahls innerhalb einerA metal beam X-ray tube comprising, in a vacuum space, a cathode component for extracting an electron beam, a provision for extracting the electron beam from the cathode component, an anode component formed with a liquid metal beam as a target for the emitted electron beam of the cathode component, and a provision for accelerating the cathode component emitted by the cathode component electron beam within a
Vakuumstrecke in Richtung und mit Ziel Anodenkomponente, da¬ durch gekennzeichnet, dass ein dünner Metallstrahl (6) als Anodenkomponente (7) vorgesehen ist, durch den die Elektronen des darauf auftreffenden Elektronenstrahls (4) nur teilweise abgebremst sind, und dass eine Messerschneidekathode als Ka¬ thodenkomponente (3) vorgesehen ist mit einer mit einer ge¬ ringen Neigung abwärts in Richtung flüssiger Metallstrahl (6) der Anodenkomponente (7) zeigenden Kathodenschneide (10). Vacuum distance in the direction and target anode component, since ¬ characterized in that a thin metal beam (6) is provided as an anode component (7) through which the electrons of the incident thereon electron beam (4) are only partially decelerated, and that a Messerschneidekathode as Ka is provided ¬ Thode component (3) with a with a ge ¬ rings inclination downwards in the direction of the liquid metal jet (6) of the anode component (7) facing the cathode blade (10).
2. Metallstrahlröntgenröhre nach Anspruch 1, dadurch ge¬ kennzeichnet, dass nach der Anodenkomponente (7) eine weite¬ re Vakuumstrecke (11) für die noch nicht ganz abgebremsten Elektronen des Elektronenstrahls (4) vorgesehen sind, in der die Elektronen wenigstens annähernd bis zum Stillstand abge- bremst sind. 2. Metal-ray X-ray tube according to claim 1, characterized ge ¬ indicates that after the anode component (7) a ¬ wide vacuum line (11) for the not yet braked electrons of the electron beam (4) are provided in which the electrons at least approximately to Standstill are decelerated.
3. Metallstrahlröntgenröhre nach Anspruch 2, dadurch ge¬ kennzeichnet, dass das Abbremsen der Elektronen wenigstens annähernd bis zum Stillstand mit einer Energierückgewinnungs- Vorkehrung (12) verbunden ist. 3. Metal X-ray tube according to claim 2, characterized ge ¬ indicates that the deceleration of the electrons is at least approximately to a standstill connected to an energy recovery provision (12).
4. Metallstrahlröntgenröhre nach einem der vorherigen Ansprüche, dadurch gekennzeichnet, dass der Metallstrahl (6) der Anodenkomponente (7) wenigstens in einem einzigen zwei- ten, relativ gut elektronendurchlässigen und wärmeabsorbierenden Material (13) eingebettet oder darin aufgelöst ist. 4. metal beam X-ray tube according to one of the preceding claims, characterized in that the metal beam (6) of the anode component (7) embedded in at least one second, relatively well electron-permeable and heat-absorbing material (13) or dissolved therein.
EP15820839.7A 2014-12-22 2015-12-18 Metal jet x-ray tube Active EP3213337B1 (en)

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DE102014226813.3A DE102014226813A1 (en) 2014-12-22 2014-12-22 Metal beam X-ray tube
PCT/EP2015/080504 WO2016102370A1 (en) 2014-12-22 2015-12-18 Metal jet x-ray tube

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US10748736B2 (en) * 2017-10-18 2020-08-18 Kla-Tencor Corporation Liquid metal rotating anode X-ray source for semiconductor metrology
EP3671802A1 (en) 2018-12-20 2020-06-24 Excillum AB Electron collector with oblique impact portion

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US5052034A (en) 1989-10-30 1991-09-24 Siemens Aktiengesellschaft X-ray generator
SE510133C2 (en) * 1996-04-25 1999-04-19 Jettec Ab Laser plasma X-ray source utilizing fluids as radiation target
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CN107004552B (en) 2018-12-18
WO2016102370A1 (en) 2016-06-30
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EP3213337B1 (en) 2020-10-07
CN107004552A (en) 2017-08-01
US10586673B2 (en) 2020-03-10

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