EP2834830A1 - X-ray source, use thereof and method for producing x-rays - Google Patents

X-ray source, use thereof and method for producing x-rays

Info

Publication number
EP2834830A1
EP2834830A1 EP12729933.7A EP12729933A EP2834830A1 EP 2834830 A1 EP2834830 A1 EP 2834830A1 EP 12729933 A EP12729933 A EP 12729933A EP 2834830 A1 EP2834830 A1 EP 2834830A1
Authority
EP
European Patent Office
Prior art keywords
ray source
target
electron beam
housing
ray
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP12729933.7A
Other languages
German (de)
French (fr)
Other versions
EP2834830B1 (en
Inventor
Oliver Heid
Timothy Hughes
Jennifer SIRTL
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Publication of EP2834830A1 publication Critical patent/EP2834830A1/en
Application granted granted Critical
Publication of EP2834830B1 publication Critical patent/EP2834830B1/en
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H01J35/10—Rotary anodes; Arrangements for rotating anodes; Cooling rotary anodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H01J35/112—Non-rotating anodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H01J35/12—Cooling non-rotary anodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/24—Tubes wherein the point of impact of the cathode ray on the anode or anticathode is movable relative to the surface thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/06—Cathode assembly
    • H01J2235/064—Movement of cathode
    • H01J2235/066—Rotation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/08—Targets (anodes) and X-ray converters
    • H01J2235/081—Target material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/10—Drive means for anode (target) substrate
    • H01J2235/1006—Supports or shafts for target or substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/06—Cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H01J35/112—Non-rotating anodes
    • H01J35/116—Transmissive anodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/16—Vessels; Containers; Shields associated therewith
    • H01J35/18—Windows
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/22—X-ray tubes specially designed for passing a very high current for a very short time, e.g. for flash operation

Definitions

  • the invention relates to an X-ray source with a housing in which a target is provided, which can emit X-rays when shot with an electron beam.
  • the invention relates to a method for generating X-radiation in which a housing in the housing
  • the invention also relates to the use of a monochromatic X-ray radiation emitting X-ray source.
  • an X-ray source for example, by an arrangement of electrodes in a housing.
  • An electron beam is generated in the housing by an electrode which has a potential of 0 V ⁇ .
  • an anode is arranged ⁇ that comes as a target for the electron beam to the input sentence. This is at 100 kV.
  • Behind the anode is still a collector, which is at a potential of 10 kV.
  • the anode which serves as a target, can be designed as a thin-walled Gebil ⁇ de.
  • these may comprise a Basisplat ⁇ te of boron, which has a thickness between 10 and ym 200th
  • a thin layer of tungsten with a layer thickness of 0.1 to 5 ⁇ m, which is used as a target.
  • the very thin tungsten layer is exposed to high stress by the electron beam.
  • the object of the invention is to improve the above-angege bene ⁇ X-ray source such that a relatively long service life of the X-ray source is possible without that the target must be replaced. It is another object of the invention to provide a method for operating said X-ray source. Finally, it is an object of the invention to find a use for such an X-ray source.
  • the object of the invention is achieved with the above-mentioned X-ray source according to the invention in that a metal foil is provided as target material, wherein the electron beam and the target are movable relative to each other.
  • the metal foil consists of a light metal or several light metals, in particular aluminum. As light metals within the meaning of the application, the metals and their alloys are to be referred to, whose density is below 5 g / cm 3 .
  • this definition applies to the following light metals: all alkali metals, alkaline earth ⁇ all limetalle except radium, also scandium, yttrium, titanium and aluminum.
  • Other advantageous material groups for forming the metal foil are tungsten, molybdenum and the group of lanthanides. Specifically, this is the element lanthanum, the 14 elements following the lanthanum in the periodic table.
  • the use of a thin metal foil also has the advantage that can be advantageously generate a monochromatic X-ray having the electric ⁇ nenstrahl by excitation of the target the advantage.
  • This is X-radiation, with only one wavelength, which has the advantage that, for example, X-ray images can be reproduced more sharply with monochromatic X-radiation. Therefore, it is also an alternative solution of the invention to use this monochromatic X-ray radiation for transilluminating a body, which must be such that at the wavelength of the monochromatic X-ray radiation used, contrasts of the body appear on the image.
  • the body may be a technical entity (technical or inanimate body) such. For example, a component connection has to be examined, which has to be examined for air influences. Another possibility is the acquisition of X-ray images of a human or animal body.
  • the anode is designed as a band which can be unwound from a first roll and wound onto a second roll on ⁇ .
  • the band-shaped configuration of the Ano ⁇ de has the great advantage that this by simple han- Bungsuzee can be passed to the electron beam. This makes it possible create the aforementioned Relativbewe ⁇ movement between the target and the electron beam.
  • the generating means for the electron beam is made pivotable.
  • pivoting the generating device also moves the electron beam on the target material back and forth, whereby a uniform loading of the entire target material is possible.
  • a pivotable generating device can also be combined with a roller mechanism.
  • the restriction device able to generate particular perpendicularly be pivotable to the movement direction of the belt. This ensures that the tape can be used in its full width, whereby optimal utilization of the target material is possible.
  • the metal foil is made with a thickness of 0.1 .mu.m to 0.5 .mu.m, preferably 0.5 .mu.m.
  • a thickness of 0.1 .mu.m to 0.5 .mu.m, preferably 0.5 .mu.m.
  • Au ⁇ ßerdem has the target material to the electron beam also have placed some resistance, especially thicker target materials allow for better heat distribution.
  • the target in order to generate monochromatic X-ray radiation, the target must be made as thin-walled as possible.
  • FIG 1 shows schematically the generation of monochromatic
  • FIG. 2 shows an embodiment of the invention X-ray light source in schematic section.
  • a metal foil 12 (shown as a detail) is provided as the target 11.
  • An electron beam 13 strikes an atom 15 of the target material with electrons 14 (eg. Aluminum).
  • electrons 14 eg. Aluminum
  • FIG. 2 shows the structure of the X-ray source according to the invention.
  • the X-ray source itself is accommodated in an evacuable housing 19, which has a window 22.
  • the electron beam 13 enters the housing 19. Subsequently, the electric ⁇ nenstrahl impinges on the target 11, this hardly absorbs energy of the electron beam due to its ge ⁇ rings thickness. However, some of the energy is converted by an excitation of the atoms 15 (see Figure 1) in the manner already described in monochromatic X-ray radiation 18, which can leave the housing through the window 22.
  • a so-called E-Gun that is an electron gun vorgese ⁇ hen.
  • This Elect ⁇ Ronen are bundled by a lens 24th
  • the electric field is built up by connecting the target as an anode. This can be operated with a potential of 100 to 300 kV, wherein in addition behind the target, a collector 27 with a potential of 40 to 120 kV is used.
  • the collector electrostatically decelerates the electron beam 13 which has almost completely passed the target 11 and removes the kinetic energy from it.
  • the non ⁇ energetic electrons of the braked beam are absorbed by the collector and removed as electricity.
  • a first roller 28 and a second roller 29 are provided in the housing.
  • the target which is in the form of a band 30, is rolled up and is in a manner not shown by means of an actuator M2 (sitting outside the housing in itself be be known manner on a drive shaft for rotation of the roller 29) driven.
  • the target 11 is unwound from the roll 28 and wound onto the roll 29.
  • dash-dotted lines indicated vacuum locks 31 are provided so that the remaining space of the housing when changing the rollers 28, 29 does not have to be flooded.
  • the rollers 28, 29 are removed by the indicated flaps 32.
  • the electron gun is also via a shaft 33
  • a drive takes place via a motor M1.
  • the shaft 33 is parallel to the plane of the drawing in bearings 34, so that a pivoting of the electron gun leads to the fact that the electron beam 13 over the entire width of the belt 30 ge ⁇ can be pivoted.
  • the drive of the rollers 28, 29 causes the electron beam in the direction of the longitudinal extent of the band 30 can change the point of impact on the target.

Landscapes

  • X-Ray Techniques (AREA)

Abstract

The invention relates to an x-ray source in which, in particular, monochromatic x-rays can be produced. The invention also relates to a method for producing X-rays and to the use of the x-ray source for x-raying bodies. According to the invention, a metallic film is arranged in a housing (19) as a target (11) which is bombarded with the electron beam (13). As a result, said metallic film is excited for emitting monochromatic x-rays (18), said relatively thin-walled target (11) being modified such that the intended use for producing monochromatic x-rays is no longer possible. Therefore, advantageously, the production device (26) can be pivoted for producing the electron beam as well as being able to wind the target on rollers (28, 29).

Description

Beschreibung description
Röntgenstrahlungsquelle und deren Verwendung und Verfahren zum Erzeugen von Röntgenstrahlung X-ray source and its use and method of generating X-radiation
Die Erfindung betrifft eine Röntgenstrahlungsquelle mit einem Gehäuse, in dem ein Target vorgesehen ist, welches unter Be- schuss mit einem Elektronenstrahl Röntgenstrahlen aussenden kann. Außerdem betrifft die Erfindung ein Verfahren zum Er- zeugen von Röntgenstrahlung, bei dem in dem Gehäuse einerThe invention relates to an X-ray source with a housing in which a target is provided, which can emit X-rays when shot with an electron beam. In addition, the invention relates to a method for generating X-radiation in which a housing in the housing
Röntgenstrahlungsquelle ein Target mit einem Elektronenstrahl beschossen wird. Zuletzt betrifft die Erfindung auch die Verwendung einer monochromatische Röntgenstrahlung aussendenden Röntgenstrahlungsquelle . X-ray source, a target is bombarded with an electron beam. Finally, the invention also relates to the use of a monochromatic X-ray radiation emitting X-ray source.
Eine Röntgenstrahlungsquelle, deren Verwendung und ein Ver¬ fahren zum Erzeugen von Röntgenstrahlung der eingangs angegebenen Art ist beispielsweise in der US 2008/0144774 AI be¬ kannt. Danach kann eine Röntgenstrahlungsquelle beispielswei- se durch eine Anordnung von Elektroden in einem Gehäuse realisiert werden. Ein Elektronenstrahl wird in dem Gehäuse durch eine Elektrode erzeugt, die ein Potential von 0 V auf¬ weist. Dieser Elektrode gegenüberliegend ist eine Anode ange¬ ordnet, die als Target für die Elektronenstrahlung zum Ein- satz kommt. Diese liegt auf 100 kV. Hinter der Anode befindet sich weiterhin ein Kollektor, der auf einem Potential von 10 kV liegt. Trifft der Elektronenstrahl auf die Anode, so wird Röntgenstrahlung freigesetzt, die durch ein geeignetes Fens¬ ter (transparent für die Röntgenstrahlung) aus dem Gehäuse ausgekoppelt und einer Verwendung zugeführt werden kann. An X-ray source, their use and a Ver ¬ drive for generating X-radiation of the type described above for example in US 2008/0144774 Al ¬ be known. After that, an X-ray source can be realized, for example, by an arrangement of electrodes in a housing. An electron beam is generated in the housing by an electrode which has a potential of 0 V ¬ . Opposite to this electrode is an anode is arranged ¬ that comes as a target for the electron beam to the input sentence. This is at 100 kV. Behind the anode is still a collector, which is at a potential of 10 kV. Meets the electron beam on the anode, so X-ray radiation is released, the (transparent to X-rays) coupled by an appropriate Fen ¬ ter from the housing and a use can be supplied.
Die Anode, die als Target dient, kann als dünnwandiges Gebil¬ de ausgeführt sein. Beispielsweise kann diese eine Basisplat¬ te aus Bor aufweisen, die eine Dicke zwischen 10 und 200 ym hat. Auf diese wird eine dünne Schicht Wolfram mit einer Schichtdicke von 0,1 bis 5 ym aufgebracht, die als Target verwendet wird. Allerdings wird die sehr dünne Wolframschicht einer hohen Belastung durch den Elektrodenstrahl ausgesetzt. Die Aufgabe der Erfindung besteht darin, die eingangs angege¬ bene Röntgenstrahlungsquelle derart zu verbessern, dass eine vergleichsweise lange Betriebsdauer der Röntgenstrahlungs- quelle möglich ist, ohne dass das Target ausgewechselt werden muss. Weiterhin ist es Aufgabe der Erfindung, ein Verfahren zum Betrieb der genannten Röntgenstrahlungsquelle anzugeben. Zuletzt ist es Aufgabe der Erfindung eine Verwendung für eine solche Röntgenstrahlungsquelle aufzufinden. The anode, which serves as a target, can be designed as a thin-walled Gebil ¬ de. For example, these may comprise a Basisplat ¬ te of boron, which has a thickness between 10 and ym 200th On top of this is applied a thin layer of tungsten with a layer thickness of 0.1 to 5 μm, which is used as a target. However, the very thin tungsten layer is exposed to high stress by the electron beam. The object of the invention is to improve the above-angege bene ¬ X-ray source such that a relatively long service life of the X-ray source is possible without that the target must be replaced. It is another object of the invention to provide a method for operating said X-ray source. Finally, it is an object of the invention to find a use for such an X-ray source.
Die Aufgabe der Erfindung wird mit der eingangs angegebenen Röntgenstrahlungsquelle erfindungsgemäß dadurch gelöst, dass als Targetmaterial eine Metallfolie vorgesehen ist, wobei der Elektronenstrahl und das Target relativ zueinander beweglich sind. Durch eine Bewegung des Elektronenstrahlerzeugers und/oder der Metallfolie wird erreicht, dass der Elektronen¬ strahl das Target nicht immer an derselben Stelle beauf¬ schlagt und damit nur dort thermisch beansprucht. Vielmehr wandert der durch den Elektronenstrahl erzeugte aktive Be- reich auf dem Target, so dass eine lokale thermische Überbe¬ anspruchung vermieden werden kann. Außerdem ist es möglich, den Elektronenstrahl immer auf Targetmaterial zu richten, dessen Integrität nicht soweit beschädigt ist, dass die Er¬ zeugung der gewünschten Menge an Röntgenstrahlung nicht mehr gewährleistet ist (zu den Varianten zur Erzeugung der Relativbewegung zwischen dem Elektronenstrahl und dem Target im Folgenden noch mehr) . The object of the invention is achieved with the above-mentioned X-ray source according to the invention in that a metal foil is provided as target material, wherein the electron beam and the target are movable relative to each other. By a movement of the electron gun and / or the metal foil is achieved that the electron beam the target ¬ not always beauf ¬ strike at the same position and thus takes up only there thermally. Rather, the active loading generated by the electron beam migrates rich on the target, so that a local thermal Überbe ¬ anspruchung can be avoided. It is also possible to direct the electron beam is always on target material whose integrity is not as far damaged that he ¬ generating the desired amount of X-rays is no longer guaranteed (to the variants for producing the relative movement between the electron and the target below even more) .
Insgesamt kann durch die erfindungsgemäße Maßnahme eine län- gere Betriebszeit der Röntgenstrahlungsquelle gewährleistet werden, da durch die mögliche Relativbewegung zwischen Target und Elektronenstrahl sozusagen ein Vorrat unverbrauchten Targetmaterials in dem Gehäuse der Röntgenstrahlungsquelle vor¬ gehalten werden kann. Ein Wechsel des Targets ist damit sel- tener notwendig, wodurch über einen langen Zeitraum ein zuverlässiger Betrieb ohne Wechsel des Targets möglich ist. Hierdurch wird vorteilhaft der Betrieb der Röntgenstrahlungs¬ quelle auch wirtschaftlicher. Gemäß einer vorteilhaften Ausgestaltung der Erfindung ist vorgesehen, dass die Metallfolie aus einem Leichtmetall oder mehreren Leichtmetallen, insbesondere Aluminium besteht. Als Leichtmetalle im Sinne der Anmeldung sollen die Metalle und deren Legierungen bezeichnet werden, deren Dichte unterhalb von 5 g/cm3 liegt. Im Einzelnen trifft diese Definition auf folgende Leichtmetalle zu: alle Alkalimetalle, alle Erdalka¬ limetalle außer Radium, außerdem Scandium, Yttrium, Titan und Aluminium. Andere vorteilhafte Werkstoffgruppen zur Ausbildung der Metallfolie sind Wolfram, Molybdän und die Gruppe der Lanthanoide. Im Einzelnen handelt es sich dabei um das Element Lanthan die 14 im Periodensystem auf das Lanthan folgenden Elemente. Overall, a longer operating time of the x-ray source can be ensured by the inventive measure, as a stock unused target material may be held in the housing of the X-ray source before ¬ by the possible relative movement between the target and the electron beam, so to speak. Changing the target is therefore seldom necessary, which means reliable operation without changing the target over a long period of time. In this way, the operation of the X-ray source ¬ is advantageous also economically. According to an advantageous embodiment of the invention, it is provided that the metal foil consists of a light metal or several light metals, in particular aluminum. As light metals within the meaning of the application, the metals and their alloys are to be referred to, whose density is below 5 g / cm 3 . Specifically, this definition applies to the following light metals: all alkali metals, alkaline earth ¬ all limetalle except radium, also scandium, yttrium, titanium and aluminum. Other advantageous material groups for forming the metal foil are tungsten, molybdenum and the group of lanthanides. Specifically, this is the element lanthanum, the 14 elements following the lanthanum in the periodic table.
Die Verwendung einer dünnen Metallfolie hat außerdem den Vorteil, dass sich durch Anregung des Targets mit dem Elektro¬ nenstrahl vorteilhaft eine monochromatische Röntgenstrahlung erzeugen lässt. Dabei handelt es sich um Röntgenstrahlung, mit nur einer Wellenlänge, was den Vorteil hat, dass sich beispielsweise Röntgenbilder mit monochromatischer Röntgenstrahlung schärfer abbilden lassen. Deswegen ist es auch eine alternative Lösung der Erfindung, diese monochromatische Röntgenstrahlung zum Durchleuchten eines Körpers zu verwen- den, wobei dieser so beschaffen sein muss, dass bei der Wellenlänge der verwendeten monochromatischen Röntgenstrahlung auf der Abbildung Kontraste des Körpers erscheinen. Bei dem Körper kann es sich um ein technisches Gebilde (technischer oder unbelebter Körper) wie z. B. eine Bauteilverbindung han- dein, die auf Lufteinflüsse hin untersucht werden muss. Eine andere Möglichkeit ist die Aufnahme von Röntgenbildern eines menschlichen oder tierischen Körpers. The use of a thin metal foil also has the advantage that can be advantageously generate a monochromatic X-ray having the electric ¬ nenstrahl by excitation of the target the advantage. This is X-radiation, with only one wavelength, which has the advantage that, for example, X-ray images can be reproduced more sharply with monochromatic X-radiation. Therefore, it is also an alternative solution of the invention to use this monochromatic X-ray radiation for transilluminating a body, which must be such that at the wavelength of the monochromatic X-ray radiation used, contrasts of the body appear on the image. The body may be a technical entity (technical or inanimate body) such. For example, a component connection has to be examined, which has to be examined for air influences. Another possibility is the acquisition of X-ray images of a human or animal body.
Gemäß einer besonderen Ausgestaltung der Erfindung ist vorge- sehen, dass die Anode als Band ausgeführt ist, welches von einer ersten Rolle abgewickelt und auf eine zweite Rolle auf¬ gewickelt werden kann. Die bandförmige Ausgestaltung der Ano¬ de hat den großen Vorteil, dass dieses durch einfache Handha- bungsschritte an dem Elektronenstrahl vorbeigeführt werden kann. Hierdurch lässt sich die bereits erwähnte Relativbewe¬ gung zwischen dem Target und dem Elektronenstrahl erzeugen. Besonders vorteilhaft ist es, das Band in Form einer Rolle der Röntgenstrahlungsquelle zuzuführen und das verbrauchte Band auf eine entsprechende Rolle aufzuwickeln, so dass es einfach möglich ist, das Band während des Betriebes der Rönt¬ genstrahlungsquelle in dem Gehäuse sicher aufzubewahren und zum Elektronenstrahl zu führen. Außerdem kann ein einfacher Wechsel des Bandes durch Entnehmen der Rollen erfolgen, wenn dieses aufgebraucht ist. Besonders vorteilhaft kann zu diesem Zwecke vorgesehen werden, dass die erste Rolle und die zweite Rolle in Vakuumschleusen des Gehäuses untergebracht sind. Un¬ ter einer Vakuumschleuse im Sinne der Anmeldung ist ein ge- sonderter abgeschlossener Raum im Gehäuse zu verstehen, welcher zum einen zum Gehäuseinneren einen Durchlass für das bandförmige Targetmaterial aufweisen. Außerdem gibt es ver¬ schließbare Schleusenöffnungen nach außen, durch die hindurch die verwendeten Rollen passen. Ein Rollenwechsel kann dann durch Fluten lediglich der zur Verfügung stehenden Schleusenkammern erfolgen, so dass der restliche Gehäuseraum des Gehäuses evakuiert bleibt. Hierzu ist zu bemerken, dass die Er¬ zeugung von Röntgenstrahlung bevorzugt in einem evakuierten Gehäuse stattfindet. Zumindest die zweite Rolle sollte vor- teilhaft auch mechanisch mit einem Antrieb gekoppelt sein, welcher vorzugsweise außen am Gehäuse befestigt ist. Die Be¬ festigung außen am Gehäuse hat den Vorteil, dass sich der Antrieb einfacher warten lässt, da dieser leicht zugänglich ist und Wartungsarbeiten nicht die Flutung des Gehäuseraums er- forderlich macht. According to a particular embodiment of the invention treadmill is intended that the anode is designed as a band which can be unwound from a first roll and wound onto a second roll on ¬. The band-shaped configuration of the Ano ¬ de has the great advantage that this by simple han- Bungsschritte can be passed to the electron beam. This makes it possible create the aforementioned Relativbewe ¬ movement between the target and the electron beam. It is particularly advantageous feed the tape in the form of a role of the X-ray source and to wind the used ribbon onto a corresponding roller, so that it is easily possible to securely retain the band during operation of the Rönt ¬ genstrahlungsquelle in the housing and leading to the electron beam is , In addition, a simple change of the tape can be done by removing the rollers when it is used up. Particularly advantageous may be provided for this purpose that the first roller and the second roller are housed in vacuum locks the housing. Un ¬ ter a vacuum lock in the sense of the application is to be understood an overall sonderter closed space in the housing, which on the one hand to the interior of the housing having a passage for the band-shaped target material. There is also ver ¬ lock closable openings to the outside will pass through the rollers used. A roll change can then be done by flooding only the available lock chambers, so that the remaining housing space of the housing remains evacuated. It should be noted that he ¬ generation of X-radiation preferably takes place in an evacuated enclosure. At least the second roller should advantageously also be mechanically coupled to a drive, which is preferably fastened to the outside of the housing. The Be ¬ fixing outside of the housing has the advantage that the drive can be easier to maintain because it is easily accessible and maintenance not ER- the flooding of the housing space makes conducive the advantage.
Eine andere Möglichkeit, eine Relativbewegung zwischen Elekt¬ ronenstrahl und Targetmaterial zu gewährleisten, liegt darin, dass die Erzeugungseinrichtung für den Elektronenstrahl schwenkbar ausgeführt ist. Durch Schwenken der Erzeugungseinrichtung wandert auch der Elektronenstrahl auf dem Targetmaterial hin und her, wodurch eine gleichmäßige Beaufschlagung des gesamten Targetmaterials möglich ist. Selbstverständlich kann eine schwenkbare Erzeugungseinrichtung auch mit einem Rollenmechanismus kombiniert werden. Während der Rollenmecha¬ nismus eine Bewegung des Elektronenstrahls auf dem Band in Richtung der Wickelrichtung bewirken kann, kann die Erzeu- gungseinrichtung insbesondere senkrecht zur Bewegungsrichtung des Bandes schwenkbar sein. Dies gewährleistet, dass das Band auch in seiner vollen Breite genutzt werden kann, wodurch eine optimale Ausnutzung des Targetmaterials möglich wird. Vorteilhaft wird die Metallfolie mit einer Dicke von 0,1 ym bis 0,5 ym, bevorzugt 0,5 ym, ausgeführt. Bei der angegebenen Dicke handelt es sich um einen technischen Kompromiss, der dadurch beeinflusst wird, dass die Metallfolie, die das Tar¬ get bildet, einerseits genügend stabil sein muss, um bei- spielsweise auf den Rollen gehandhabt werden zu können. Au¬ ßerdem muss das Targetmaterial dem Elektronenstrahl auch einen gewissen Widerstand entgegenbringen, zumal dickere Targetmaterialien auch eine bessere Wärmeverteilung ermöglichen. Andererseits muss zur Erzeugung von monochromatischer Rönt- genstrahlung das Target möglichst dünnwandig ausgeführt sein. Another way to ensure a relative movement between Elect ¬ Ronen jet and target material, is that the generating means for the electron beam is made pivotable. By pivoting the generating device also moves the electron beam on the target material back and forth, whereby a uniform loading of the entire target material is possible. Of course For example, a pivotable generating device can also be combined with a roller mechanism. During the Rollenmecha ¬ mechanism can effect movement of the electron beam on the tape in the direction of the winding direction, the restriction device able to generate particular perpendicularly be pivotable to the movement direction of the belt. This ensures that the tape can be used in its full width, whereby optimal utilization of the target material is possible. Advantageously, the metal foil is made with a thickness of 0.1 .mu.m to 0.5 .mu.m, preferably 0.5 .mu.m. At the specified thickness, it is a technical compromise, which is influenced by the fact that the metal foil which forms the tar get ¬ must be sufficiently stable, on the one hand, to be handled as examples game on the reels to. Au ¬ ßerdem has the target material to the electron beam also have placed some resistance, especially thicker target materials allow for better heat distribution. On the other hand, in order to generate monochromatic X-ray radiation, the target must be made as thin-walled as possible.
Weitere Einzelheiten werden nachfolgend anhand der Zeichnung beschrieben. Gleiche oder sich entsprechende Zeichnungsele¬ mente sind in den einzelnen Figuren jeweils mit den gleichen Bezugszeichen versehen und werden nur insoweit mehrfach erläutert, wie sich Unterschiede zwischen den einzelnen Figuren ergeben. Es zeigen: Further details will be described below with reference to the drawing. Identical or corresponding Zeichnungsele ¬ elements are each provided with the same reference numerals in the individual figures and are explained only to the extent that there are differences between the individual figures. Show it:
Figur 1 schematisch die Erzeugung von monochromatischer Figure 1 shows schematically the generation of monochromatic
Röntgenstrahlung in einer Folie im schematischen X-radiation in a foil in the schematic
Schnitt und Cut and
Figur 2 ein Ausführungsbeispiel der erfindungsgemäßen Rönt- genlichtquelle im schematischen Schnitt. 2 shows an embodiment of the invention X-ray light source in schematic section.
In Figur 1 ist als Target 11 eine Metallfolie 12 (dargestellt als Ausschnitt) vorgesehen. Ein Elektronenstrahl 13 trifft mit Elektronen 14 auf ein Atom 15 des Targetmaterials (z. B. Aluminium) . Dargestellt ist auch die K-Schale 16 des Atoms 15, wobei der Elektronenstrahl bewirkt, dass eines der Elekt¬ ronen 17 der K-Schale 16 angeregt wird und auf eine andere Schale angehoben wird. Wenn diese Elektronen zurückspringen, wird hierbei monochromatische Röntgenstrahlung 18 ausgesen¬ det . In FIG. 1, a metal foil 12 (shown as a detail) is provided as the target 11. An electron beam 13 strikes an atom 15 of the target material with electrons 14 (eg. Aluminum). Shown is also the K-shell 16 of the atom 15, wherein the electron beam causes one of the Elekt ¬ ronen 17 of the K-shell 16 is excited and is lifted to another shell. If these electrons to jump back, monochromatic X-ray radiation 18 is thereby ausgesen ¬ det.
Der Figur 2 lässt sich der Aufbau der erfindungsgemäßen Röntgenstrahlungsquelle entnehmen. Die Röntgenstrahlungsquelle selbst ist in einem evakuierbaren Gehäuse 19 untergebracht, welches ein Fenster 22 aufweist. Der Elektronenstrahl 13 tritt in das Gehäuse 19 ein. Anschließend trifft der Elektro¬ nenstrahl auf das Target 11, wobei dieses aufgrund seiner ge¬ ringen Dicke kaum Energie des Elektronenstrahls absorbiert. Allerdings wird ein Teil der Energie durch eine Anregung der Atome 15 (siehe Figur 1) in der bereits beschriebenen Weise in monochromatische Röntgenstrahlung 18 umgesetzt, welche das Gehäuse durch das Fenster 22 verlassen kann. Um die Elektronen 14 im Elektronenstrahl 13 genügend zu beschleunigen, ist eine sogenannte E-Gun (also eine Elektronenkanone) vorgese¬ hen. Diese weist eine Kathode 23 auf, welche bei Vorliegen eines elektrischen Feldes Elektronen aussendet. Diese Elekt¬ ronen werden mittels einer Linse 24 gebündelt. Das elektrische Feld wird dadurch aufgebaut, dass das Target als Anode geschaltet ist. Diese kann mit einem Potential von 100 bis 300 kV betrieben werden, wobei zusätzlich hinter dem Target noch ein Kollektor 27 mit einem Potential von 40 bis 120 kV zum Einsatz kommt. Der Kollektor bremst den Elektronenstrahl 13 der das Target 11 nahezu vollständig passiert hat elektro- statisch ab und entzieht ihm die kinetische Energie. Die nie¬ derenergetischen Elektronen des abgebremsten Strahls werden vom Kollektor absorbiert und als Strom abgeführt. FIG. 2 shows the structure of the X-ray source according to the invention. The X-ray source itself is accommodated in an evacuable housing 19, which has a window 22. The electron beam 13 enters the housing 19. Subsequently, the electric ¬ nenstrahl impinges on the target 11, this hardly absorbs energy of the electron beam due to its ge ¬ rings thickness. However, some of the energy is converted by an excitation of the atoms 15 (see Figure 1) in the manner already described in monochromatic X-ray radiation 18, which can leave the housing through the window 22. To the electrons 14 in the electron beam 13 to accelerate enough, a so-called E-Gun (that is an electron gun) vorgese ¬ hen. This has a cathode 23 which emits electrons in the presence of an electric field. This Elect ¬ Ronen are bundled by a lens 24th The electric field is built up by connecting the target as an anode. This can be operated with a potential of 100 to 300 kV, wherein in addition behind the target, a collector 27 with a potential of 40 to 120 kV is used. The collector electrostatically decelerates the electron beam 13 which has almost completely passed the target 11 and removes the kinetic energy from it. The non ¬ energetic electrons of the braked beam are absorbed by the collector and removed as electricity.
In dem Gehäuse sind außerdem eine erste Rolle 28 und eine zweite Rolle 29 vorgesehen. Auf der ersten Rolle 28 ist das Target, welches in Form eines Bandes 30 vorliegt, aufgerollt und wird in nicht näher dargestellter Weise mittels eines Stellantriebs M2 (sitzt außerhalb des Gehäuses in an sich be- kannter Weise auf einer Antriebswelle zur Drehung der Rolle 29) angetrieben. Dabei wird das Target 11 von der Rolle 28 abgewickelt und auf die Rolle 29 aufgewickelt. Damit ein Wechsel der Rollen 28, 29 einfach möglich ist, sind strichpunktiert angedeutete Vakuumschleusen 31 vorgesehen, so dass der restliche Raum des Gehäuses bei einem Wechsel der Rollen 28, 29 nicht geflutet werden muss. Die Rollen 28, 29 werden durch die angedeuteten Klappen 32 entnommen. In addition, a first roller 28 and a second roller 29 are provided in the housing. On the first roller 28, the target, which is in the form of a band 30, is rolled up and is in a manner not shown by means of an actuator M2 (sitting outside the housing in itself be be known manner on a drive shaft for rotation of the roller 29) driven. In this case, the target 11 is unwound from the roll 28 and wound onto the roll 29. So that a change of the rollers 28, 29 is simply possible, dash-dotted lines indicated vacuum locks 31 are provided so that the remaining space of the housing when changing the rollers 28, 29 does not have to be flooded. The rollers 28, 29 are removed by the indicated flaps 32.
Die Elektronenkanone ist ebenfalls über eine Welle 33 The electron gun is also via a shaft 33
schwenkbar gelagert. Ein Antrieb erfolgt über einen Motor Ml. Die Welle 33 liegt parallel zur Zeichenebene in Lagern 34, so dass ein Schwenken der Elektronenkanone dazu führt, dass der Elektronenstrahl 13 über die gesamte Breite des Bandes 30 ge¬ schwenkt werden kann. Der Antrieb der Rollen 28, 29 bewirkt, dass der Elektronenstahl auch in Richtung der Längenausdehnung des Bandes 30 die Auftreffstelle auf dem Target wechseln kann . pivoted. A drive takes place via a motor M1. The shaft 33 is parallel to the plane of the drawing in bearings 34, so that a pivoting of the electron gun leads to the fact that the electron beam 13 over the entire width of the belt 30 ge ¬ can be pivoted. The drive of the rollers 28, 29 causes the electron beam in the direction of the longitudinal extent of the band 30 can change the point of impact on the target.

Claims

Patentansprüche claims
1. Röntgenstrahlungsquelle mit einem Gehäuse (19), in dem ein Target (11) vorgesehen ist, welches unter Beschuss mit einem1. X-ray source with a housing (19) in which a target (11) is provided, which is under attack with a
Elektronenstrahl (13) Röntgenstrahlung aussenden kann, d a d u r c h g e k e n n z e i c h n e t , Electron beam (13) can emit X-rays, d a d u c h e c e
dass als Targetmaterial eine Metallfolie (12) vorgesehen ist wobei der Elektronenstrahl (13) und das Target relativ zuein- ander beweglich sind. in that a metal foil (12) is provided as the target material, wherein the electron beam (13) and the target are movable relative to one another.
2. Röntgenstrahlungsquelle nach Anspruch 1, 2. X-ray source according to claim 1,
d a d u r c h g e k e n n z e i c h n e t , characterized ,
dass die Metallfolie aus einem Leichtmetall oder mehreren Leichtmetallen, insbesondere Aluminium besteht. the metal foil consists of one light metal or several light metals, in particular aluminum.
3. Röntgenstrahlungsquelle nach Anspruch 1, 3. X-ray source according to claim 1,
d a d u r c h g e k e n n z e i c h n e t , characterized ,
dass die Metallfolie aus einem Lanthanoid, Wolfram, Molybdän oder einer Legierung mindestens zweier der genannten Metalle besteht . the metal foil consists of a lanthanoid, tungsten, molybdenum or an alloy of at least two of the said metals.
4. Röntgenstrahlungsquelle nach einem der vorangehenden Ansprüche, 4. X-ray source according to one of the preceding claims,
d a d u r c h g e k e n n z e i c h n e t , characterized ,
dass die Anode als Band (30) ausgeführt ist, welches von ei¬ ner ersten Rolle (28) abgewickelt und auf eine zweite Rolle (29) aufgewickelt werden kann. that the anode is designed as a band (30) which can be unwound from egg ¬ ner first roller (28) and wound on a second roller (29).
5. Röntgenstrahlungsquelle nach Anspruch 4, 5. X-ray source according to claim 4,
d a d u r c h g e k e n n z e i c h n e t , characterized ,
dass die erste Rolle (28) und die zweite Rolle (29) in Vaku¬ umschleusen (31) des Gehäuses (19) untergebracht sind. that the first roller (28) and the second roller (29) in Vaku ¬ rerouting (31) of the housing (19) are housed.
6. Röntgenstrahlungsquelle nach Anspruch 4 oder 5 6. X-ray source according to claim 4 or 5
d a d u r c h g e k e n n z e i c h n e t , characterized ,
dass die zweite Rolle mit einem Antrieb mechanisch gekoppelt ist, welcher außen am Gehäuse befestigt ist. in that the second roller is mechanically coupled to a drive which is fastened to the outside of the housing.
7. Röntgenstrahlungsquelle nach einem der vorangehenden Ansprüche, 7. X-ray source according to one of the preceding claims,
d a d u r c h g e k e n n z e i c h n e t , characterized ,
dass eine Erzeugungseinrichtung (23, 24, 26) für den Elektronenstrahl (13) schwenkbar ausgeführt ist. in that a generating device (23, 24, 26) for the electron beam (13) is made pivotable.
8. Röntgenstrahlungsquelle nach einem der vorangehenden Ansprüche, 8. X-ray source according to one of the preceding claims,
d a d u r c h g e k e n n z e i c h n e t , characterized ,
dass die Metallfolie (12) mit einer Dicke von 0,1 ym bis 0,5 ym, bevorzugt 0,5 ym ausgeführt ist. in that the metal foil (12) has a thickness of 0.1 μm to 0.5 μm, preferably 0.5 μm.
9. Verfahren zum Erzeugen von Röntgenstrahlung, bei dem in dem Gehäuse (19) einer Röntgenstrahlungsquelle ein Target9. A method for generating X-radiation, wherein in the housing (19) of an X-ray source, a target
(11) mit einem Elektronenstrahl (13) beschossen wird und Röntgenstrahlung aussendet, (11) is bombarded with an electron beam (13) and emits X-ray radiation,
d a d u r c h g e k e n n z e i c h n e t , characterized ,
dass als Targetmaterial eine Metallfolie (12) verwendet wird wobei der Elektronenstrahl (13) und das Target relativ zueinander bewegt werden. in that a metal foil (12) is used as the target material, the electron beam (13) and the target being moved relative to one another.
10. Verfahren nach Anspruch 9, 10. The method according to claim 9,
d a d u r c h g e k e n n z e i c h n e t , characterized ,
dass mit dem Target eine monochromatische Röntgenstrahlung erzeugt wird. that with the target a monochromatic X-ray radiation is generated.
11. Verwendung einer monochromatische Röntgenstrahlung aussendenden Röntgenstrahlungsquelle nach einem der Ansprüche 1 bis 8 zum Durchleuchten eines Körpers, der bei der Wellenlänge der verwendeten Röntgenstrahlung differenzierbare Kontraste ausbildet. 11. The use of a monochromatic X-ray emitting X-ray source according to any one of claims 1 to 8 for transilluminating a body which forms differentiable contrasts at the wavelength of the X-ray radiation used.
EP12729933.7A 2012-06-14 2012-06-14 X-ray source, use thereof and method for producing x-rays Not-in-force EP2834830B1 (en)

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