EP2834830B1 - X-ray source, use thereof and method for producing x-rays - Google Patents
X-ray source, use thereof and method for producing x-rays Download PDFInfo
- Publication number
- EP2834830B1 EP2834830B1 EP12729933.7A EP12729933A EP2834830B1 EP 2834830 B1 EP2834830 B1 EP 2834830B1 EP 12729933 A EP12729933 A EP 12729933A EP 2834830 B1 EP2834830 B1 EP 2834830B1
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- target
- ray source
- electron beam
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- housing
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
- H01J35/08—Anodes; Anti cathodes
- H01J35/10—Rotary anodes; Arrangements for rotating anodes; Cooling rotary anodes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
- H01J35/08—Anodes; Anti cathodes
- H01J35/12—Cooling non-rotary anodes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
- H01J35/08—Anodes; Anti cathodes
- H01J35/112—Non-rotating anodes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/24—Tubes wherein the point of impact of the cathode ray on the anode or anticathode is movable relative to the surface thereof
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2235/00—X-ray tubes
- H01J2235/06—Cathode assembly
- H01J2235/064—Movement of cathode
- H01J2235/066—Rotation
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2235/00—X-ray tubes
- H01J2235/08—Targets (anodes) and X-ray converters
- H01J2235/081—Target material
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2235/00—X-ray tubes
- H01J2235/10—Drive means for anode (target) substrate
- H01J2235/1006—Supports or shafts for target or substrate
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
- H01J35/06—Cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
- H01J35/08—Anodes; Anti cathodes
- H01J35/112—Non-rotating anodes
- H01J35/116—Transmissive anodes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/16—Vessels; Containers; Shields associated therewith
- H01J35/18—Windows
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/22—X-ray tubes specially designed for passing a very high current for a very short time, e.g. for flash operation
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- X-Ray Techniques (AREA)
Description
Die Erfindung betrifft eine Röntgenstrahlungsquelle nach dem Oberbegriff des Anspruchs 1. Außerdem betrifft die Erfindung ein Verfahren zum Erzeugen von Röntgenstrahlung nach dem Oberbegriff des Anspruchs 8.The invention relates to an X-ray source according to the preamble of claim 1. Furthermore, the invention relates to a method for generating X-radiation according to the preamble of claim 8.
Eine Röntgenstrahlungsquelle, deren Verwendung und ein Verfahren zum Erzeugen von Röntgenstrahlung der eingangs angegebenen Art ist beispielsweise in der
Die Anode, die als Target dient, kann als dünnwandiges Gebilde ausgeführt sein. Beispielsweise kann diese eine Basisplatte aus Bor aufweisen, die eine Dicke zwischen 10 und 200 µm hat. Auf diese wird eine dünne Schicht Wolfram mit einer Schichtdicke von 0,1 bis 5 µm aufgebracht, die als Target verwendet wird. Allerdings wird die sehr dünne Wolframschicht einer hohen Belastung durch den Elektrodenstrahl ausgesetzt.The anode, which serves as a target, can be designed as a thin-walled structure. For example, this may have a base plate of boron, which has a thickness between 10 and 200 microns. On top of this, a thin layer of tungsten with a layer thickness of 0.1 to 5 μm is applied, which is used as a target. However, the very thin tungsten layer is exposed to high stress by the electron beam.
Aus dem Dokument
Die Aufgabe der Erfindung besteht darin, die eingangs angegebene Röntgenstrahlungsquelle derart zu verbessern, dass eine vergleichsweise lange Betriebsdauer der Röntgenstrahlungsquelle möglich ist, und wenn das Target ausgewechselt werden muss, dies einfach möglich ist. Weiterhin ist es Aufgabe der Erfindung, ausgehend von einem Verfahren der eingangs genannten Art, dieses dahingehend zu verbessern, dass ein Austausch des Targets einfach möglich ist. Zuletzt ist es Aufgabe der Erfindung eine Verwendung für eine solche Röntgenstrahlungsquelle aufzufinden.The object of the invention is to improve the above-mentioned X-ray source such that a comparatively long service life of the X-ray source is possible, and if the target must be replaced, this is easily possible. Furthermore, it is an object of the invention, starting from a method of the type mentioned, to improve this to the extent that an exchange of the target is easily possible. Finally, it is an object of the invention to find a use for such an X-ray source.
Die Aufgabe der Erfindung wird mit der eingangs angegebenen Röntgenstrahlungsquelle erfindungsgemäß dadurch gelöst, dass neben dem Umstand, dass als Targetmaterial eine Metallfolie vorgesehen ist, wobei der Elektronenstrahl und das Target relativ zueinander beweglich sind, die erste Rolle und die zweite Rolle in Vakuumschleusen des Gehäuses untergebracht sind. Diese Aufgabe wird bezüglich des Verfahrens erfindungsgemäß dadurch gelöst, dass neben dem Verfahrensschritt, dass als Targetmaterial eine Metallfolie verwendet wird, wobei der Elektronenstrahl und das Target relativ zueinander bewegt werden, das Target von in Vakuumschleusen des Gehäuses gehaltener erster Rolle abgewickelt und zweiter Rolle aufgewickelt wird. Diese Aufgabe wird schließlich bezüglich einer Verwendung für eine solche Röntgenstrahlungsquelle dadurch gelöst, dass eine von der Röntgenstrahlungsquelle ausgesendete monochromatische Röntgenstrahlung zum Durchleuchten eines Körpers verwendet wird, der bei der Wellenlänge der verwendeten Röntgenstrahlung differenzierbare Kontraste ausbildet.The object of the invention is achieved with the above-mentioned X-ray source according to the invention, that in addition to the fact that a metal foil is provided as the target material, wherein the electron beam and the target are movable relative to each other, housed the first roller and the second roller in vacuum locks the housing are. This object is achieved with respect to the method according to the invention, that in addition to the process step that a metal foil is used as the target material, wherein the electron beam and the target are moved relative to each other, the target of held in vacuum locks the housing first roll unwound and second roll is wound , This object is finally achieved with respect to a use for such an X-ray source in that a monochromatic X-ray emitted by the X-ray source is used to illuminate a body which forms differentiable contrasts at the wavelength of the X-ray used.
Durch eine Bewegung des Elektronenstrahlerzeugers und/oder der Metallfolie wird erreicht, dass der Elektronenstrahl das Target nicht immer an derselben Stelle beaufschlägt und damit nur dort thermisch beansprucht. Vielmehr wandert der durch den Elektronenstrahl erzeugte aktive Bereich auf dem Target, so dass eine lokale thermische Überbeanspruchung vermieden werden kann. Außerdem ist es möglich, den Elektronenstrahl immer auf Targetmaterial zu richten, dessen Integrität nicht soweit beschädigt ist, dass die Erzeugung der gewünschten Menge an Röntgenstrahlung nicht mehr gewährleistet ist (zu den Varianten zur Erzeugung der Relativbewegung zwischen dem Elektronenstrahl und dem Target im Folgenden noch mehr). Insgesamt kann durch die erfindungsgemäße Maßnahme eine längere Betriebszeit der Röntgenstrahlungsquelle gewährleistet werden, da durch die mögliche Relativbewegung zwischen Target und Elektronenstrahl sozusagen ein Vorrat unverbrauchten Targetmaterials in dem Gehäuse der Röntgenstrahlungsquelle vorgehalten werden kann. Ein Wechsel des Targets ist damit seltener notwendig, wodurch über einen langen Zeitraum ein zuverlässiger Betrieb ohne Wechsel des Targets möglich ist. Hierdurch wird vorteilhaft der Betrieb der Röntgenstrahlungsquelle auch wirtschaftlicher.By a movement of the electron gun and / or the metal foil is achieved that the electron beam does not always act on the target at the same point and thus only thermally stressed there. Rather, the active region generated by the electron beam migrates on the target, so that a local thermal overstress can be avoided. It is also possible to use the electron beam always aiming at target material whose integrity has not been damaged to such an extent that the generation of the desired amount of X-radiation is no longer guaranteed (to the variants for generating the relative movement between the electron beam and the target in more detail below). Overall, a longer operating time of the X-ray source can be ensured by the measure according to the invention, since by the possible relative movement between the target and the electron beam, so to speak, a stock unused target material can be kept in the housing of the X-ray source. A change of the target is thus rarely necessary, which over a long period of reliable operation without changing the target is possible. As a result, the operation of the X-ray source is also advantageous economically.
Wenn ein Austausch des Targets dennoch einmal nötig ist, ist dieser in einfacher Weise möglich, weil durch Vakuumschleusen des Gehäuses für die erste und die zweite Rolle zum ab- beziehungsweise aufwickeln des Targets der restliche Raum des Gehäuses bei einem Wechsel der Rollen nicht geflutet werden muss. Die Rollen werden einfach durch Klappen entnommen.If an exchange of the target is nevertheless necessary, this is possible in a simple manner, because the remaining space of the housing does not have to be flooded by changing the vacuum of the housing for the first and the second roll for winding off or winding up the target , The rollers are simply removed by flaps.
Ist eine erfindungsgemäße Röntgenstrahlungsquelle mit einem soweit dünnwandigen Target gebildet, dass durch die Dünnwandigkeit des Targets von dem Target nicht nur Röntgenstrahlung an sich sondern sogar monochromatische Röntgenstrahlung abgestrahlt wird, ist eine monochromatische Röntgenstrahlung aussendende Röntgenstrahlungsquelle vorliegend, die zum Durchleuchten eines Körpers verwendbar ist, der bei der Wellenlänge der verwendeten Röntgenstrahlung differenzierbare Kontraste ausbildet.If an X-ray source according to the invention is formed with a thin-walled target so far that not only X-ray radiation per se but also monochromatic X-radiation is emitted by the thin-walledness of the target, a monochromatic X-ray radiation emitting X-ray source is present, which can be used for transilluminating a body which is at the wavelength of the X-ray radiation used forms differentiable contrasts.
Vorteilhafte Ausgestaltungen der Erfindung sind Gegenstand von Unteransprüchen.Advantageous embodiments of the invention are the subject of dependent claims.
Gemäß einer vorteilhaften Ausgestaltung der Erfindung ist vorgesehen, dass die Metallfolie aus einem Leichtmetall oder mehreren Leichtmetallen, insbesondere Aluminium besteht. Als Leichtmetalle im Sinne der Anmeldung sollen die Metalle und deren Legierungen bezeichnet werden, deren Dichte unterhalb von 5 g/cm3 liegt. Im Einzelnen trifft diese Definition auf folgende Leichtmetalle zu: alle Alkalimetalle, alle Erdalkalimetalle außer Radium, außerdem Scandium, Yttrium, Titan und Aluminium. Andere vorteilhafte Werkstoffgruppen zur Ausbildung der Metallfolie sind Wolfram, Molybdän und die Gruppe der Lanthanoide. Im Einzelnen handelt es sich dabei um das Element Lanthan die 14 im Periodensystem auf das Lanthan folgenden Elemente.According to an advantageous embodiment of the invention, it is provided that the metal foil consists of a light metal or several light metals, in particular aluminum. As light metals within the meaning of the application, the metals and their alloys are to be referred to, whose density is below 5 g / cm 3 . Specifically, this definition applies to the following light metals: all alkali metals, all alkaline earth metals except radium, as well as scandium, yttrium, titanium and aluminum. Other advantageous material groups for forming the metal foil are tungsten, molybdenum and the group of lanthanides. Specifically, this is the element lanthanum, the 14 elements following the lanthanum in the periodic table.
Die Verwendung einer dünnen Metallfolie hat außerdem den Vorteil, dass sich durch Anregung des Targets mit dem Elektronenstrahl vorteilhaft eine monochromatische Röntgenstrahlung erzeugen lässt. Dabei handelt es sich um Röntgenstrahlung, mit nur einer Wellenlänge, was den Vorteil hat, dass sich beispielsweise Röntgenbilder mit monochromatischer Röntgenstrahlung schärfer abbilden lassen. Es ist möglich, diese monochromatische Röntgenstrahlung zum Durchleuchten eines Körpers zu verwenden, wobei dieser so beschaffen sein muss, dass bei der Wellenlänge der verwendeten monochromatischen Röntgenstrahlung auf der Abbildung Kontraste des Körpers erscheinen. Bei dem Körper kann es sich um ein technisches Gebilde (technischer oder unbelebter Körper) wie z. B. eine Bauteilverbindung handeln, die auf Lufteinflüsse hin untersucht werden muss. Eine andere Möglichkeit ist die Aufnahme von Röntgenbildern eines menschlichen oder tierischen Körpers.The use of a thin metal foil also has the advantage that, by exciting the target with the electron beam, a monochromatic X-radiation can advantageously be produced. This is X-radiation, with only one wavelength, which has the advantage that, for example, X-ray images can be reproduced more sharply with monochromatic X-radiation. It is possible to use this monochromatic X-ray radiation to transilluminate a body, which must be such that appear at the wavelength of the monochromatic X-ray radiation used in the figure contrasts of the body. The body may be a technical entity (technical or inanimate body) such. B. act a component connection, which must be examined for air influences out. Another possibility is the acquisition of X-ray images of a human or animal body.
Gemäß der Erfindung ist vorgesehen, dass die Anode als Band ausgeführt ist, welches von einer ersten Rolle abgewickelt und auf eine zweite Rolle aufgewickelt werden kann. Die bandförmige Ausgestaltung der Anode hat den großen Vorteil, dass dieses durch einfache Handhabungsschritte an dem Elektronenstrahl vorbeigeführt werden kann. Hierdurch lässt sich die bereits erwähnte Relativbewegung zwischen dem Target und dem Elektronenstrahl erzeugen.According to the invention it is provided that the anode is designed as a band which can be unwound from a first roll and wound onto a second roll. The band-shaped design of the anode has the great advantage that this by simple handling steps can be passed by the electron beam. As a result, the already mentioned relative movement between the target and the electron beam can be generated.
Dabei wird das Band in Form einer Rolle der Röntgenstrahlungsquelle zugeführt und das verbrauchte Band auf eine entsprechende Rolle aufgewickelt, so dass es einfach möglich ist, das Band während des Betriebes der Röntgenstrahlungsquelle in dem Gehäuse sicher aufzubewahren und zum Elektronenstrahl zu führen. Außerdem kann ein einfacher Wechsel des Bandes durch Entnehmen der Rollen erfolgen, wenn dieses aufgebraucht ist. Erfindungsgemäss sind die erste Rolle und die zweite Rolle in Vakuumschleusen des Gehäuses untergebracht. Unter einer Vakuumschleuse im Sinne der Anmeldung ist ein gesonderter abgeschlossener Raum im Gehäuse zu verstehen, welcher zum einen zum Gehäuseinneren einen Durchlass für das bandförmige Targetmaterial aufweisen. Außerdem gibt es verschließbare Schleusenöffnungen nach außen, durch die hindurch die verwendeten Rollen passen. Ein Rollenwechsel kann dann durch Fluten lediglich der zur Verfügung stehenden Schleusenkammern erfolgen, so dass der restliche Gehäuseraum des Gehäuses evakuiert bleibt. Hierzu ist zu bemerken, dass die Erzeugung von Röntgenstrahlung bevorzugt in einem evakuierten Gehäuse stattfindet. Zumindest die zweite Rolle sollte vorteilhaft auch mechanisch mit einem Antrieb gekoppelt sein, welcher vorzugsweise außen am Gehäuse befestigt ist. Die Befestigung außen am Gehäuse hat den Vorteil, dass sich der Antrieb einfacher warten lässt, da dieser leicht zugänglich ist und Wartungsarbeiten nicht die Flutung des Gehäuseraums erforderlich macht.In this case, the tape is fed in the form of a roll of the X-ray source and the used tape wound on a corresponding role, so that it is easily possible to keep the tape during operation of the X-ray source in the housing safely and lead to the electron beam. In addition, a simple change of the tape can be done by removing the rollers when it is used up. According to the invention, the first roller and the second roller are housed in vacuum locks of the housing. Under a vacuum lock in the sense of the application is to be understood as a separate enclosed space in the housing, which on the one hand to the housing interior have a passage for the tape-shaped target material. There are also lockable lock openings to the outside through which the rollers used fit. A roll change can then be done by flooding only the available lock chambers, so that the remaining housing space of the housing remains evacuated. It should be noted that the generation of X-radiation preferably takes place in an evacuated housing. At least the second roller should advantageously also be mechanically coupled to a drive, which is preferably fastened to the outside of the housing. The attachment on the outside of the housing has the advantage that the drive is easier to maintain because it is easily accessible and maintenance does not require the flooding of the housing space.
Eine zusätzliche Möglichkeit, eine Relativbewegung zwischen Elektronenstrahl und Targetmaterial zu gewährleisten, liegt darin, dass die Erzeugungseinrichtung für den Elektronenstrahl schwenkbar ausgeführt ist. Durch Schwenken der Erzeugungseinrichtung wandert auch der Elektronenstrahl auf dem Targetmaterial hin und her, wodurch eine gleichmäßige Beaufschlagung des gesamten Targetmaterials möglich ist.An additional possibility to ensure a relative movement between the electron beam and the target material is that the generating means for the electron beam is designed to be pivotable. By pivoting the generating device, the electron beam also reciprocates on the target material, resulting in a uniform application of the entire target material is possible.
Während der Rollenmechanismus eine Bewegung des Elektronenstrahls auf dem Band in Richtung der Wickelrichtung bewirkt, kann die Erzeugungseinrichtung insbesondere senkrecht zur Bewegungsrichtung des Bandes schwenkbar sein. Dies gewährleistet, dass das Band auch in seiner vollen Breite genutzt werden kann, wodurch eine optimale Ausnutzung des Targetmaterials möglich wird.While the roller mechanism causes movement of the electron beam on the belt in the winding direction, the generating device may be pivotable in particular perpendicular to the direction of movement of the belt. This ensures that the tape can be used in its full width, whereby optimal utilization of the target material is possible.
Vorteilhaft wird die Metallfolie mit einer Dicke von 0,1 µm bis 0,5 µm, bevorzugt 0,5 µm, ausgeführt. Bei der angegebenen Dicke handelt es sich um einen technischen Kompromiss, der dadurch beeinflusst wird, dass die Metallfolie, die das Target bildet, einerseits genügend stabil sein muss, um beispielsweise auf den Rollen gehandhabt werden zu können. Außerdem muss das Targetmaterial dem Elektronenstrahl auch einen gewissen Widerstand entgegenbringen, zumal dickere Targetmaterialien auch eine bessere Wärmeverteilung ermöglichen. Andererseits muss zur Erzeugung von monochromatischer Röntgenstrahlung das Target möglichst dünnwandig ausgeführt sein.The metal foil is advantageously carried out with a thickness of 0.1 μm to 0.5 μm, preferably 0.5 μm. The specified thickness is a technical compromise, which is influenced by the fact that the metal foil forming the target on the one hand must be sufficiently stable, for example, to be able to be handled on the rollers. In addition, the target material must also bring some resistance to the electron beam, especially since thicker target materials also allow better heat distribution. On the other hand, to produce monochromatic X-ray radiation, the target must be made as thin-walled as possible.
Weitere Einzelheiten werden nachfolgend anhand der Zeichnung beschrieben. Gleiche oder sich entsprechende Zeichnungselemente sind in den einzelnen Figuren jeweils mit den gleichen Bezugszeichen versehen und werden nur insoweit mehrfach erläutert, wie sich Unterschiede zwischen den einzelnen Figuren ergeben. Es zeigen:
- Figur 1
- schematisch die Erzeugung von monochromatischer Röntgenstrahlung in einer Folie im schematischen Schnitt und
- Figur 2
- ein Ausführungsbeispiel der erfindungsgemäßen Röntgenlichtquelle im schematischen Schnitt.
- FIG. 1
- schematically the generation of monochromatic X-radiation in a film in schematic section and
- FIG. 2
- An embodiment of the X-ray source according to the invention in a schematic section.
In
Der
In dem Gehäuse sind außerdem eine erste Rolle 28 und eine zweite Rolle 29 vorgesehen. Auf der ersten Rolle 28 ist das Target, welches in Form eines Bandes 30 vorliegt, aufgerollt und wird in nicht näher dargestellter Weise mittels eines Stellantriebs M2 (sitzt außerhalb des Gehäuses in an sich bekannter Weise auf einer Antriebswelle zur Drehung der Rolle 29) angetrieben. Dabei wird das Target 11 von der Rolle 28 abgewickelt und auf die Rolle 29 aufgewickelt. Damit ein Wechsel der Rollen 28, 29 einfach möglich ist, sind strichpunktiert angedeutete Vakuumschleusen 31 vorgesehen, so dass der restliche Raum des Gehäuses bei einem Wechsel der Rollen 28, 29 nicht geflutet werden muss. Die Rollen 28, 29 werden durch die angedeuteten Klappen 32 entnommen.In addition, a
Die Elektronenkanone ist ebenfalls über eine Welle 33 schwenkbar gelagert. Ein Antrieb erfolgt über einen Motor M1. Die Welle 33 liegt parallel zur Zeichenebene in Lagern 34, so dass ein Schwenken der Elektronenkanone dazu führt, dass der Elektronenstrahl 13 über die gesamte Breite des Bandes 30 geschwenkt werden kann. Der Antrieb der Rollen 28, 29 bewirkt, dass der Elektronenstahl auch in Richtung der Längenausdehnung des Bandes 30 die Auftreffstelle auf dem Target wechseln kann.The electron gun is also pivotally mounted via a
Claims (8)
- X-ray source having a housing (19) in which a target (11) is located that can emit X-rays when being bombarded with an electron beam (13), wherein- a metal foil (12) is provided as the target material, wherein the electron beam (13) and the target are movable relative to one another, and- the target (11) is present in the form of a tape (30), which can be unwound from a first roller (28) and wound onto a second roller (29),characterized in that the first roller (28) and the second roller (29) are housed in vacuum locks (31) of the housing (19).
- X-ray source according to Claim 1, characterized in that the metal foil is made of a light metal or a plurality of light metals, preferably aluminum.
- X-ray source according to Claim 1, characterized in that the metal foil consists of a lanthanide, tungsten, molybdenum or an alloy of at least two of the metals mentioned.
- X-ray source according to one of the preceding claims, characterized in that the second roller is mechanically coupled to a drive which is attached on the outside of the housing.
- X-ray source according to one of the preceding claims, characterized in that a production device (23, 24, 26) for the electron beam (13) is of pivotable design.
- X-ray source according to one of the preceding claims, characterized in that the metal foil (12) has a thickness of 0.1 µm to 0.5 µm, preferably 0.5 µm.
- X-ray source according to one of the preceding claims, characterized in that the target is connected as anode.
- Method for producing X-rays, in which a target (11) in the housing (19) of an X-ray source is bombarded with an electron beam (13) and X-rays are emitted by the target (11), wherein- a metal foil (12) is used as the target material, wherein the electron beam (13) and the target (11) are moved relative to one another, and- the target (11) is provided in the form of a tape (30), which is unwound from a first roller (28) and wound onto a second roller (29),characterized in that the target (11) is unwound from a first roller (28) held in vacuum locks (31) of the housing (19) and wound onto a second roller (29).
Applications Claiming Priority (1)
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PCT/EP2012/061297 WO2013185823A1 (en) | 2012-06-14 | 2012-06-14 | X-ray source, use thereof and method for producing x-rays |
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EP2834830A1 EP2834830A1 (en) | 2015-02-11 |
EP2834830B1 true EP2834830B1 (en) | 2017-03-22 |
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US (1) | US9761405B2 (en) |
EP (1) | EP2834830B1 (en) |
JP (1) | JP6076473B2 (en) |
KR (1) | KR101874029B1 (en) |
CN (1) | CN104350573B (en) |
RU (1) | RU2611051C2 (en) |
WO (1) | WO2013185823A1 (en) |
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US10170271B2 (en) * | 2014-09-12 | 2019-01-01 | Rigaku Corporation | X-ray generator and X-ray analyzer |
WO2023039774A1 (en) * | 2021-09-16 | 2023-03-23 | Shenzhen Xpectvision Technology Co., Ltd. | Imaging methods using multiple radiation beams |
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- 2012-06-14 US US14/407,654 patent/US9761405B2/en not_active Expired - Fee Related
- 2012-06-14 EP EP12729933.7A patent/EP2834830B1/en not_active Not-in-force
- 2012-06-14 RU RU2014152540A patent/RU2611051C2/en not_active IP Right Cessation
- 2012-06-14 JP JP2015516482A patent/JP6076473B2/en not_active Expired - Fee Related
- 2012-06-14 CN CN201280073907.XA patent/CN104350573B/en not_active Expired - Fee Related
- 2012-06-14 WO PCT/EP2012/061297 patent/WO2013185823A1/en active Application Filing
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None * |
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JP2015523685A (en) | 2015-08-13 |
CN104350573B (en) | 2017-05-10 |
US9761405B2 (en) | 2017-09-12 |
RU2014152540A (en) | 2016-08-10 |
KR101874029B1 (en) | 2018-07-05 |
EP2834830A1 (en) | 2015-02-11 |
WO2013185823A1 (en) | 2013-12-19 |
JP6076473B2 (en) | 2017-02-08 |
US20150170869A1 (en) | 2015-06-18 |
RU2611051C2 (en) | 2017-02-21 |
CN104350573A (en) | 2015-02-11 |
KR20150023009A (en) | 2015-03-04 |
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