EP2747867B1 - Cassette de filtre modulaire - Google Patents

Cassette de filtre modulaire Download PDF

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Publication number
EP2747867B1
EP2747867B1 EP12775858.9A EP12775858A EP2747867B1 EP 2747867 B1 EP2747867 B1 EP 2747867B1 EP 12775858 A EP12775858 A EP 12775858A EP 2747867 B1 EP2747867 B1 EP 2747867B1
Authority
EP
European Patent Office
Prior art keywords
filter
cavity
sidewall
inlet
upstream
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP12775858.9A
Other languages
German (de)
English (en)
Other versions
EP2747867A1 (fr
Inventor
John P. Puglia
Louis BARROWS Jr.
Christopher John LOWE
Ben Mai Pak LEE
Marc Laverdiere
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Entegris Inc
Original Assignee
Entegris Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Entegris Inc filed Critical Entegris Inc
Publication of EP2747867A1 publication Critical patent/EP2747867A1/fr
Application granted granted Critical
Publication of EP2747867B1 publication Critical patent/EP2747867B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D35/00—Filtering devices having features not specifically covered by groups B01D24/00 - B01D33/00, or for applications not specifically covered by groups B01D24/00 - B01D33/00; Auxiliary devices for filtration; Filter housing constructions
    • B01D35/12—Devices for taking out of action one or more units of multi- unit filters, e.g. for regeneration
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D29/00—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor
    • B01D29/01—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor with flat filtering elements
    • B01D29/05—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor with flat filtering elements supported
    • B01D29/07—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor with flat filtering elements supported with corrugated, folded or wound filtering sheets
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D35/00—Filtering devices having features not specifically covered by groups B01D24/00 - B01D33/00, or for applications not specifically covered by groups B01D24/00 - B01D33/00; Auxiliary devices for filtration; Filter housing constructions
    • B01D35/30—Filter housing constructions
    • B01D35/301—Constructions of two or more housings
    • B01D35/303—Constructions of two or more housings the housings being modular, e.g. standardised
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/52—Particle separators, e.g. dust precipitators, using filters embodying folded corrugated or wound sheet material
    • B01D46/521—Particle separators, e.g. dust precipitators, using filters embodying folded corrugated or wound sheet material using folded, pleated material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D63/00—Apparatus in general for separation processes using semi-permeable membranes
    • B01D63/14—Pleat-type membrane modules
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2201/00—Details relating to filtering apparatus
    • B01D2201/12—Pleated filters
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2313/00—Details relating to membrane modules or apparatus
    • B01D2313/10—Specific supply elements
    • B01D2313/105—Supply manifolds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2313/00—Details relating to membrane modules or apparatus
    • B01D2313/12—Specific discharge elements
    • B01D2313/125—Discharge manifolds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2313/00—Details relating to membrane modules or apparatus
    • B01D2313/20—Specific housing
    • B01D2313/201—Closed housing, vessels or containers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2313/00—Details relating to membrane modules or apparatus
    • B01D2313/20—Specific housing
    • B01D2313/201—Closed housing, vessels or containers
    • B01D2313/2011—Pressure vessels
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2313/00—Details relating to membrane modules or apparatus
    • B01D2313/20—Specific housing
    • B01D2313/203—Open housings
    • B01D2313/2031—Frame or cage-like structures
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2313/00—Details relating to membrane modules or apparatus
    • B01D2313/21—Specific headers, end caps

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
  • Filtration Of Liquid (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)
  • Weting (AREA)
  • Filtering Materials (AREA)

Claims (7)

  1. Ensemble filtre (100) pour filtrer des liquides de fabrication de semi-conducteurs, l'ensemble filtre (100) comprenant :
    un boîtier de filtre (105) ayant une entrée de filtre (130) définissant un chemin d'écoulement d'entrée et une sortie de filtre (135) espacé de l'entrée de filtre (130) définissant un chemin d'écoulement de sortie, le boîtier de filtre (105) définissant une cavité de filtre (110) au moins partiellement définie par une paroi latérale amont (155, 185), une paroi latérale aval (235, 190) espacée de la paroi latérale amont, une troisième paroi (180, 275) allant de la paroi latérale amont (155, 185) à la paroi latérale aval (235, 190) et une quatrième paroi (175, 270) allant de la paroi latérale amont (155, 185) à la paroi latérale aval (235, 190) et espacée de la troisième paroi, dans lequel l'entrée (130) est reliée à la cavité de filtre (110) au niveau de la troisième paroi (180, 275) et la sortie (135) est reliée à la cavité de filtre (110) au niveau de la quatrième paroi (175, 270),
    un élément de filtre (125) disposé dans la cavité de filtre (110), l'élément de filtre (125) étant déporté vers la paroi latérale amont (155, 185) de telle sorte qu'une distance entre l'élément de filtre (125) et la paroi latérale amont (155, 185) diminue dans une direction allant de la troisième paroi (180, 275) à la quatrième paroi (175, 270), la cavité de filtre (110) comprenant une partie amont (115) de la cavité de filtre (110) en communication fluide avec l'entrée (130) et une partie aval (120) de la cavité de filtre (110) en communication fluide avec la sortie (135),
    l'élément de filtre (125) comprenant une membrane de filtre pour filtrer les impuretés microniques ou sub-microniques des fluides de traitement des semi-conducteurs, l'élément de filtre (125) recouvrant au moins partiellement l'entrée de filtre (130) d'un premier côté de l'élément de filtre (125), l'élément de filtre (125) séparant la partie amont (115) de la cavité de filtre (110) de la partie aval (120) de la cavité de filtre (110), l'élément de filtre comprenant en outre un filtre plissé rectangulaire enrobé dans lequel la membrane de filtre est plissée parallèlement à un axe long du boîtier de filtre (105) avec un ensemble de plis ayant un premier ensemble de bouts de plis (127) faisant face à la partie amont (115) de la cavité de filtre (110), et un deuxième ensemble de bouts de plis (129) faisant face à la partie aval (120) de la cavité de filtre (110), le premier ensemble de bouts de plis (127) formant une interface d'entrée rectangulaire plane et le deuxième ensemble de bouts de plis (129) formant une interface de sortie plane rectangulaire, et le chemin d'écoulement primaire du fluide traversant l'élément de filtre (125) étant perpendiculaire au chemin d'écoulement passant par l'entrée de filtre (130) ; et
    un couvercle de filtre (260) couplé au boîtier de filtre (105) pour retenir l'élément de filtre (125) en place.
  2. Ensemble filtre (100) selon la revendication 1, dans lequel :
    le filtre plissé rectangulaire comprend des extrémités qui sont enrobées d'une matière d'enrobage (590) qui scelle les extrémités du filtre plissé rectangulaire et la cavité intérieure, séparant la partie amont (115) et la partie aval (120) de l'ensemble filtre (100).
  3. Ensemble filtre (100) selon la revendication 1, comprenant en outre un guide d'écoulement (150) disposé entre l'entrée (130) et l'élément de filtre (125), le guide d'écoulement (150) étant configuré pour diriger l'écoulement de l'entrée (130) à la paroi latérale amont (155, 185).
  4. Ensemble filtre (100) selon la revendication 1, dans lequel le couvercle de filtre (260) définit au moins partiellement une zone de retenue d'élément de filtre en parallélogramme décalé (500).
  5. Ensemble filtre (100) selon la revendication 3, dans lequel l'élément de filtre (125) comprend un premier volet et un deuxième volet, et dans lequel le premier volet et le deuxième volet sont retenus entre le couvercle de filtre (260) et le boîtier de filtre (105).
  6. Ensemble filtre (100) selon la revendication 1, dans lequel la partie amont (115) de la cavité de filtre (110) a une forme telle que la partie amont (115) de la cavité de filtre (110) a un diamètre hydraulique diminuant en s'éloignant de l'entrée de filtre (130) et la partie aval (120) de la cavité de filtre (110) a une forme telle que le diamètre hydraulique augmente en s'approchant de la sortie (135).
  7. Ensemble filtre (100) selon la revendication 1, comprenant en outre un évent (140) ouvert à un point le plus haut de la partie amont (115) de la cavité (110) ou de la partie aval (120) de la cavité (110).
EP12775858.9A 2011-10-03 2012-10-03 Cassette de filtre modulaire Active EP2747867B1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201161542645P 2011-10-03 2011-10-03
US201261613886P 2012-03-21 2012-03-21
PCT/US2012/000427 WO2013052082A1 (fr) 2011-10-03 2012-10-03 Cassette de filtre modulaire

Publications (2)

Publication Number Publication Date
EP2747867A1 EP2747867A1 (fr) 2014-07-02
EP2747867B1 true EP2747867B1 (fr) 2019-11-27

Family

ID=47040773

Family Applications (2)

Application Number Title Priority Date Filing Date
EP12775858.9A Active EP2747867B1 (fr) 2011-10-03 2012-10-03 Cassette de filtre modulaire
EP12773417.6A Withdrawn EP2747866A1 (fr) 2011-10-03 2012-10-03 Système de filtration modulaire

Family Applications After (1)

Application Number Title Priority Date Filing Date
EP12773417.6A Withdrawn EP2747866A1 (fr) 2011-10-03 2012-10-03 Système de filtration modulaire

Country Status (8)

Country Link
US (2) US9943789B2 (fr)
EP (2) EP2747867B1 (fr)
JP (2) JP6257089B2 (fr)
KR (2) KR20140079449A (fr)
CN (2) CN103857452A (fr)
SG (2) SG11201401179PA (fr)
TW (2) TW201345594A (fr)
WO (2) WO2013052091A1 (fr)

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CN103889537B (zh) 2016-10-12
WO2013052091A1 (fr) 2013-04-11
KR102039199B1 (ko) 2019-10-31
KR20140079449A (ko) 2014-06-26
CN103857452A (zh) 2014-06-11
US20140238922A1 (en) 2014-08-28
SG11201401180XA (en) 2014-04-28
SG11201401179PA (en) 2014-04-28
TWI612999B (zh) 2018-02-01
TW201325687A (zh) 2013-07-01
JP2014531316A (ja) 2014-11-27
US9943789B2 (en) 2018-04-17
US20140246383A1 (en) 2014-09-04
EP2747866A1 (fr) 2014-07-02
EP2747867A1 (fr) 2014-07-02
JP2015513305A (ja) 2015-05-07
WO2013052082A1 (fr) 2013-04-11
JP6257089B2 (ja) 2018-01-10
TW201345594A (zh) 2013-11-16
CN103889537A (zh) 2014-06-25
KR20140079448A (ko) 2014-06-26

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