EP2472120A1 - Vakuumpumpe und element für die vakuumpumpe - Google Patents

Vakuumpumpe und element für die vakuumpumpe Download PDF

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Publication number
EP2472120A1
EP2472120A1 EP10811581A EP10811581A EP2472120A1 EP 2472120 A1 EP2472120 A1 EP 2472120A1 EP 10811581 A EP10811581 A EP 10811581A EP 10811581 A EP10811581 A EP 10811581A EP 2472120 A1 EP2472120 A1 EP 2472120A1
Authority
EP
European Patent Office
Prior art keywords
rotating body
vacuum pump
exhaust passage
gas exhaust
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP10811581A
Other languages
English (en)
French (fr)
Other versions
EP2472120B1 (de
EP2472120A4 (de
Inventor
Yoshinobu Ohtachi
Yasushi Maejima
Tsutomu Takaada
Tooru Miwata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Japan Ltd
Original Assignee
Edwards Japan Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Japan Ltd filed Critical Edwards Japan Ltd
Publication of EP2472120A1 publication Critical patent/EP2472120A1/de
Publication of EP2472120A4 publication Critical patent/EP2472120A4/de
Application granted granted Critical
Publication of EP2472120B1 publication Critical patent/EP2472120B1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/02—Units comprising pumps and their driving means
    • F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
    • F04D25/0693—Details or arrangements of the wiring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/02—Surge control
    • F04D27/0292—Stop safety or alarm devices, e.g. stop-and-go control; Disposition of check-valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/42—Casings; Connections of working fluid for radial or helico-centrifugal pumps
    • F04D29/426—Casings; Connections of working fluid for radial or helico-centrifugal pumps especially adapted for liquid pumps
    • F04D29/428—Discharge tongues
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps

Definitions

  • the present invention relates to a vacuum pump such as a turbomolecular pump performing gas evacuation from a vacuum container such as a process chamber used in a semiconductor fabrication apparatus. More particularly, the present invention relates to a technique for improving the evacuation performance that decreases depending on the arrangement positions of an outlet port and a connector, and for reducing the size of a vacuum pump.
  • a multiple-stage blade pump in which a rotary blade section and a cylindrical threaded section are combined is widely used as a large-flow-rate pump such as a turbomolecular pump.
  • FIG. 9 illustrates an example of such a multiple-stage blade pump.
  • This multiple-stage blade pump 200 is constituted by a tubular casing 20 having, formed in the upper portion thereof, an inlet port 10 for sucking in the gas from a chamber that is not shown in the figure, a plurality of rotary blades 32 that are provided at a rotating body 30 inside the casing 20, fixed blades 40 provided alternately with the rotary blades 32, a thread groove spacer 45 and a rotary blade cylindrical portion 50 constituting a spiral groove portion 80 where evacuation is performed by drag action, a disk-shaped base 70 covering the lower portion of the casing 20, an outlet port 90 for evacuating the gas evacuated from the upstream side where the inlet port is located to the outside on the downstream side, a connector 100 that is electrically connected to an externally located controller for controlling the pump, and a rear lid 110 that covers the bottom portion.
  • the rotating body 30 is contactless supported and position controlled by magnetic levitation implemented by radial bearings 34, 36 and a thrust bearing 38.
  • the rotating body 30 is rotatably driven at a high speed by a drive motor 60.
  • the rotating body 30 rotates at a high speed
  • the rotary blades 32 provided at the rotating body 30 simultaneously rotate at a high speed such that these rotary blades 32 interact with the alternately disposed stator blades 40, whereby evacuation is performed.
  • Turbomolecular pumps generally have a back pressure dependence, that is, the pump performance is affected by the pressure on the back pressure side (outlet port side). Accordingly, in a multiple-stage blade pump, a low pressure is maintained on the inlet port side and the back pressure is increased, thereby improving the pump performance, by enlarging the diameter of the spiral groove portion 80 and increasing the axial length of the spiral groove portion 80.
  • multiple-stage blade pumps should be designed with consideration for restrictive conditions relating to the installation thereof.
  • the length of the spiral groove portion 80 is increased, the axial length of the pump itself is also increased causing problems in installation.
  • Japanese Patent Application Publication No. 2008-163857 discloses a technique for preventing the reduction of the opening area of outlet port inside the pump and the degradation of exhaust performance caused by the extension of the spiral groove portion.
  • the exhaust performance is degraded because the reduction of the opening decreases the conductance and prevents the flow of gas into the outlet port.
  • a U-shaped groove for which the radial direction from the inner side serves as a depth direction is provided with respect to a cylindrical hole connecting the spiral groove portion with the outlet port provided in the base or thread groove spacer.
  • the reduction in the opening area of outlet port is thereby prevented.
  • the exhaust performance of the pump is improved.
  • the housing is manufactured by casting, since the concave groove exists on the inner side, the cast housing is difficult to remove from the mold, the mold structure becomes complex, and the casting cost rises significantly.
  • the spiral rotor is broken during rotation, the broken pieces thereof collide with the spiral stator and a force acts on the spiral stator or on the housing via the spiral stator.
  • stress concentration occurs in the corners of the formed groove, thereby creating weak points in terms of the pump strength and reducing the strength of the pump itself.
  • a dry etching apparatus which is one of semiconductor fabrication apparatuses
  • the pressure of process gas that has taken part in a reaction inside the chamber increases
  • the increase in temperature over the normal temperature results in a phase transition from a gaseous state to a solid state.
  • the solidified reaction products of the process gas are deposited on the spiral groove portion where the gas pressure rises, thereby degrading the exhaust performance of the pump.
  • the reaction products that have deposited on the interior portions of the pump should be removed periodically.
  • a cleaning agent or a removal tool is difficult to insert into the U-shaped groove and therefore the removal operation becomes difficult.
  • reaction products when the reaction products are removed, it is necessary to confirm visually that all of the reaction products have been removed. Since the process gas in the dry etching apparatus is typically highly corrosive, it is also necessary to verify visually after the removal whether corrosion is present on the gas flow channel surface of the housing or spiral stator and whether the surface film such as a plated film provided for corrosion protection has peeled off from the surface, and where such defects are present, they should be repaired. Where portions of the gas flow channel surface cannot be visually inspected, the residues of corrosion products or corrosion can remain unnoticed on such portions and the vacuum pump is restarted in the unrepaired state.
  • a turbomolecular pump has a connector serving to connect the pump to a controller for power supply to the motor or magnetic bearings or input/output of signals.
  • the pump structure is such that the hole for passing the connector wiring is completely isolated from the exhaust flow channel. Such a structure is used because if the exhaust flow channel and the hole are connected and gas flows to the connector, the exhaust performance is degraded or the connector is corroded. In some cases, it can result in accidents and cause significant problems for the pump.
  • the opening area of the hole for connector wiring should be reduced and the operation of passing the wiring from the motor or magnetic bearings to the connector becomes complex. Accordingly, the problem associated with the connector is similar to that relating to the outlet port. Namely, the increase in the spiral groove portion length requires the vacuum pump height to be increased.
  • the invention described in claim 1 provides a vacuum pump which includes an inlet port, a motor, a rotating body rotatably driven by the motor, a stator located facing the rotating body, and an outlet port for exhausting a gas that has been sucked in through the inlet port, and a gas exhaust passage combining a downstream space of the rotating body with the outlet port is formed in a flow channel of the gas, and the rotating body extends into an inner circumferential side in a radial direction of the rotating body, of the gas exhaust passage, wherein no blind portion exists at an opening edge portion of the gas exhaust passage, of the downstream space side when a gas exhaust passage forming member that forms the gas exhaust passage is viewed from at least either of an upper side or an oblique upper side, or from at least either of a lower side or an oblique lower side.
  • the invention described in claim 2 provides the vacuum pump according to claim 1, wherein the gas exhaust passage forming member is the stator.
  • the invention described in claim 3 provides the vacuum pump according to claim 1, further including a casing that covers an outer circumferential side of the rotating body and/or the stator, wherein the gas exhaust passage forming member is the casing.
  • the invention described in claim 4 provides the vacuum pump according to claim 1, further including a housing or a base member that supports the stator, wherein the gas exhaust passage forming member is the housing or the base member.
  • the invention described in claim 5 provides the vacuum pump according to claim 1, further including an outlet port member that forms the outlet port and extends inward the vacuum pump, wherein the gas exhaust passage forming member is the outlet port member.
  • the invention described in claim 6 provides the vacuum pump according to any one of claims 1 to 5, wherein an inner corner portion of the opening edge portion has a rounded inner corner shape that reduces stress concentration.
  • the invention described in claim 7 provides a vacuum pump which includes an inlet port, a motor, a rotating body rotatably driven by the motor, a stator located facing the rotating body, and an outlet port for exhausting a gas that has been sucked in through the inlet port, and a gas exhaust passage combining a downstream space of the rotating body with the outlet port is formed in a flow channel of the gas, and the rotating body extends into an inner circumferential side in a radial direction of the rotating body, of the gas exhaust passage, wherein an inner corner portion of an opening edge portion of the gas exhaust passage, of the downstream space side has a rounded inner corner shape that reduces stress concentration.
  • the effect of reducing stress concentration can be obtained even when the rounding size of the rounded inner corner portion is 0.1 mm. Even greater effect can be obtained when the rounding size is further increased.
  • the invention described in claim 8 provides the vacuum pump according to any one of claims 1 to 7, further including a connector for connecting a controller that controls the rotation of the rotating body, wherein the housing or the base member has a nearly coaxial hole that is nearly coaxial with a rotation center axis of the rotating body, a conductor wire insertion hole into which a conductor wire that connects the connector and the motor is inserted, and a groove that combines the nearly coaxial hole with the conductor wire insertion hole.
  • the controller may be directly connected to the connector or may be connected by a cable.
  • the invention described in claim 9 provides a vacuum pump which includes an inlet port, a motor, a rotating body rotatably driven by the motor, a stator located facing the rotating body, a housing or a base member supporting the stator, and a connector for connecting a controller that controls the rotation of the rotating body, wherein the housing or the base member has a nearly coaxial hole that is nearly coaxial with a rotation center axis of the rotating body, a conductor wire insertion hole into which a conductor wire that connects the connector and the motor is inserted, and a groove that combines the nearly coaxial hole with the conductor wire insertion hole.
  • the invention described in claim 10 provides the vacuum pump according to claim 8 or 9, wherein an edge of at least one from the nearly coaxial hole, the conductor wire insertion hole, and the groove has a rounded outer corner shape such that damage of the conductor wire caused by contact with the edge is reduced.
  • the invention described in claim 11 provides the vacuum pump according to any one of claims 8 to 10, wherein an outer circumferential end of the groove in the radial direction of the rotating body is positioned further toward the outer circumferential side than an inner circumferential end of the conductor wire insertion hole.
  • the invention described in claim 12 provides a member for use in a vacuum pump which includes an inlet port, a motor, a rotating body rotatably driven by the motor, a stator located facing the rotating body, and an outlet port for exhausting a gas that has been sucked in through the inlet port, and a gas exhaust passage combining a downstream space of the rotating body with the outlet port is formed in a flow channel of the gas, wherein no blind portion exists at an opening edge portion of the gas exhaust passage, of the downstream space side when the member is viewed from at least either of an upper side or an oblique upper side, or from at least either of a lower side or an oblique lower side.
  • Examples of the aforementioned member include the stator, casing, housing, base member, and outlet port member extending inward of the vacuum pump, which constitute the vacuum pump.
  • the decrease in exhaust performance of the vacuum pump occurring when the spiral groove portion of the pump is extended or positioned further below inside the pump can be prevented.
  • the degradation of wiring operability that decreases when the spiral groove portion is extended or positioned further below inside the pump can be reduced.
  • FIGS. 1 and 2 are vertical sectional views illustrating the configuration of the multiple-stage blade pump using the present invention.
  • FIG. 1 illustrates an example where an outlet port is provided in a thread groove spacer 45 serving as a stator.
  • FIG. 2 illustrates an example where an outlet port is provided in a base 70 serving as a base member.
  • the members identical to those in FIG. 9 that illustrates the conventional example will be assigned with same reference numerals.
  • the first embodiment relates to a technique for improving the exhaust performance of a vacuum pump that has decreased because a rotary blade cylindrical portion 50 serving as a rotating body or a thread groove spacer 45 covers the opening of a cylindrical hole 45a or 70a serving as a gas exhaust passage combining an outlet port 90 with a downstream space S of the rotary blade cylindrical portion 50 on the space S side.
  • a thread groove spacer 45 serving as a gas exhaust passage forming member in the configuration shown in FIG. 1 and the base 70 serving as a gas exhaust passage forming member in the configuration shown in FIG. 2 form the cylindrical hole 45a or 70a as shown in FIGS. 3B and 4B .
  • the opening edge portion 130 of the cylindrical hole 45a on the space S side in the thread groove spacer 45 is formed such that no blind portion exists at the opening edge portion 130 when the thread groove spacer 45 is viewed from at least either of the lower side or the oblique lower side.
  • the opening edge portion 130 of the cylindrical hole 70a on the space S side in the base 70 is formed such that no blind portion exists at the opening edge portion 130 when the base 70 is viewed from at least either of the upper side or the oblique upper side.
  • FIG. 5 is an explanatory drawing illustrating the blind portions in the case where the cylindrical hole 45a is formed as the gas exhaust passage in the thread groove spacer 45.
  • the opening edge portion 130 is formed such that no blind portion exists at the opening edge portion 130 when the thread groove spacer 45 is viewed from at least either of the lower side or the oblique lower side.
  • the opening edge portion 130 is formed such that no blind portion exists at the opening edge portion 130 when the base 70 is viewed from at least either of the upper side or the oblique upper side.
  • the field of view such as the cross-hatched portion in FIG. 5 is not blocked. Therefore, the entire opening edge portion 130 can be seen.
  • FIG. 6 shows the thread groove spacer 45 and FIG. 7 shows the base 70.
  • the inlet port is on the upper side and the pump bottom is on the lower side.
  • the C side of the center line C-C' is taken as the upper side and the C' side is taken as the lower side.
  • the C side of a straight line forming an angle ⁇ less than 90 degrees with the center line C-C' is taken as the oblique upper side and the C' side meeting such a requirement is taken as the oblique lower side.
  • the absence of an blind portion at the opening edge portion 130 when the thread groove spacer 45 is viewed from at least either of the lower side or the oblique lower side means that any portion of the opening edge portion 130 is included in at least either of the visible portion of the opening edge portion 130 when it is viewed from the lower side or the visible portion of the opening edge portion 130 when it is viewed from the oblique lower side.
  • the absence of a blind portion at the opening edge portion 130 when the base 70 is viewed from at least either of the upper side or the oblique upper side means that any portion of the opening edge portion 130 is included in at least either of the visible portion of the opening edge portion 130 when it is viewed from the upper side or the visible portion of the opening edge portion 130 when it is viewed from the oblique upper side.
  • the outer side of the outlet port 90 is connected by a pipe to an auxiliary pump having the usual suction power.
  • FIGS. 3A and 4A illustrate an example in which the conventional U-shaped groove is formed.
  • the inner corner portion of the opening edge portion 130 does not have the rounded inner corner shape such as shown in these figures.
  • Cylindrical shapes and cavities thereof are usually machined by turning, and when a groove is bored in the direction perpendicular to the center axial line of the cylinder in the inner wall of the cavity portion, the cutting cannot be performed to the necessary depth or the cutting process becomes complex and the production cost rises due to the restrictions such as a machinable range of the cutting tool (bite).
  • cutting may be performed so as to bore a hole that becomes coaxial with the cylindrical outer circumferential surface in the center axial line direction of the cylinder and therefore the machining in the turning process is facilitated.
  • the mold structure does not become complex and the cast article can be easily removed from the mold, thereby making it possible to reduce the casting cost.
  • the operation of removing the deposited reaction products, verifying the presence of corrosion on the thread groove spacer 45 or base 70, and repairing the corrosion are not complex. Therefore, the residual amount of reaction products and leak caused by poor repair of corrosion can be reduced.
  • the rotary blade cylindrical portion 50 can be moved further down or the vacuum pump height can be further reduced.
  • a structure is considered in which the inner corner portion of the opening edge portion 130 of the cylindrical hole 45a on the space S side is rounded as shown in FIG. 3B , and stress concentration is reduced.
  • a vacuum pump in particular a turbomolecular pump
  • the rotary blade 32 and the rotary blade cylindrical portion 50 rotate at a high speed during operation and a large centrifugal force acts thereupon.
  • the resistance to the centrifugal force decreases and the pump is fractured.
  • the rotary blade cylindrical portion 50 is fractured in high-speed rotation, the rotary blade cylindrical portion is often split into 3 to 4 sections and these split cylindrical sections collide with the thread groove spacer 45.
  • a force is applied to the thread groove spacer 45 and to the base 70 via the thread groove spacer 45.
  • the rotary blade 32 and rotary blade cylindrical portion 50 usually rotate as a speed equal to or higher than 10,000 rpm, and where they are fractured the rotation energy thereof is released. Therefore, the force acting upon the thread groove spacer 45 or base 70 becomes very strong. When such a force is received, large stresses are generated in the thread groove spacer 45 and base 70.
  • stress concentration occurs in the inner corner portions of the groove and cracks can initiate from the stress concentration zones.
  • the cracks can cause fracture and destruction of the thread groove spacer 45 or base 70 that can result in the gas leaking to the outside of the pump. This gas leak adversely affects the environment.
  • the stress concentration can be reduced.
  • the strength of the pump itself can be increased and the probability of gas leak can be reduced.
  • only one inner corner portion exists, by contrast with the conventional U-shaped groove having two inner corner portions and the number of stress concentration zones is small. Therefore, the probability of gas leak can be further reduced.
  • the inner corner portions of the conventional U-shaped groove may be also rounded as shown in FIGS. 3A and 4A .
  • FIG. 8 is the view of the base 70 taken from the rear lid 110.
  • a structure is obtained in which when the connector wiring hole 120 serving as a conductor wire insertion hole is drilled in the base 70 from the outer circumferential side, the drilling is performed to the outer circumferential side in the radial direction of the rotary blade cylindrical portion 50 and a groove 102 is provided from the bottom surface of the base 70 so as to combine the connector wiring hole 120 with the hole 101 that is nearly coaxial with the rotation center axial line of the rotary blade cylindrical portion 50.
  • the connector wiring hole 120 is drilled as far as the outer circumferential side of the rotary blade cylindrical portion 50, rather than linearly to the hole 101 in order to avoid interference of the connector wiring hole 120 with the rotary blade cylindrical portion 50 or with the space S for the gas flow channel located therebelow. Where the connector wiring hole 120 interferes and is combined with the space S for the gas flow channel, the gas flows into the connector wiring hole 120 and the connector is corroded.
  • the outer corners formed in the connector wiring hole 120 and groove 102 can have the rounded outer corner shape. In such a case, a structure can be obtained in which the connector 100 and the conductor wire connected to the motor or magnetic bearings are unlikely to be damaged.
  • the end o of the groove 102 on the outer circumferential side of the pump is located on the outside of the end i of the connector wiring hole 120 on the inner circumferential side of the pump. This is done so because by increasing the distance "L” between the two ends "o” and “I” it is possible to ensure a larger pass-through area from the groove 102 to the connector 100.
  • the rotary blade cylindrical portion 50 or the space S for the gas flow channel located therebelow can be disposed at a lower level. Since the wiring of the conductor wire to the connector 100 is also performed by the groove of the shape obtained by cutting the wall below the inner circumferential portion of the connector wiring hole 120, the wiring connection is facilitated. Consequently, the production time of the pump can be reduced.
  • the rotary blade cylindrical portion 50 and the space S for the gas flow channel located therebelow can be enlarged in length to reach the lower level or disposed at the lower level without interfering with the connector wiring hole 120.
  • the connector 100 can be provided at a height greater than that in the conventional pump. As a result, the vacuum pump can be reduced in height.
  • the machined shape of the base 70 can be simplified and the production cost thereof can be reduced, without changing significantly the structure of the conventional pump.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Rotary Pumps (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
EP10811581.7A 2009-08-28 2010-05-31 Vakuumpumpe und element für die vakuumpumpe Active EP2472120B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2009198274 2009-08-28
PCT/JP2010/059186 WO2011024528A1 (ja) 2009-08-28 2010-05-31 真空ポンプ及び真空ポンプに使用される部材

Publications (3)

Publication Number Publication Date
EP2472120A1 true EP2472120A1 (de) 2012-07-04
EP2472120A4 EP2472120A4 (de) 2017-08-02
EP2472120B1 EP2472120B1 (de) 2022-11-30

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ID=43627641

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Application Number Title Priority Date Filing Date
EP10811581.7A Active EP2472120B1 (de) 2009-08-28 2010-05-31 Vakuumpumpe und element für die vakuumpumpe

Country Status (6)

Country Link
US (1) US20120141254A1 (de)
EP (1) EP2472120B1 (de)
JP (2) JP5785494B2 (de)
KR (1) KR101784016B1 (de)
CN (1) CN102483069B (de)
WO (1) WO2011024528A1 (de)

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JP6390098B2 (ja) * 2013-12-25 2018-09-19 株式会社島津製作所 真空ポンプ
JP6906941B2 (ja) * 2016-12-16 2021-07-21 エドワーズ株式会社 真空ポンプとこれに用いられるステータコラムとその製造方法
JP6948147B2 (ja) 2017-04-18 2021-10-13 エドワーズ株式会社 真空ポンプ、真空ポンプに備わる磁気軸受部およびシャフト
JP7289627B2 (ja) * 2018-10-31 2023-06-12 エドワーズ株式会社 真空ポンプ、保護網及び接触部品
JP7456394B2 (ja) * 2021-01-22 2024-03-27 株式会社島津製作所 真空ポンプ

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WO2011024528A1 (ja) 2011-03-03
KR101784016B1 (ko) 2017-10-10
CN102483069B (zh) 2016-09-07
KR20120061770A (ko) 2012-06-13
JP5689546B2 (ja) 2015-03-25
JP5785494B2 (ja) 2015-09-30
CN102483069A (zh) 2012-05-30
EP2472120B1 (de) 2022-11-30
JP2014080981A (ja) 2014-05-08
US20120141254A1 (en) 2012-06-07
EP2472120A4 (de) 2017-08-02
JPWO2011024528A1 (ja) 2013-01-24

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