JP5785494B2 - 真空ポンプ及び真空ポンプに使用される部材 - Google Patents

真空ポンプ及び真空ポンプに使用される部材 Download PDF

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Publication number
JP5785494B2
JP5785494B2 JP2011528686A JP2011528686A JP5785494B2 JP 5785494 B2 JP5785494 B2 JP 5785494B2 JP 2011528686 A JP2011528686 A JP 2011528686A JP 2011528686 A JP2011528686 A JP 2011528686A JP 5785494 B2 JP5785494 B2 JP 5785494B2
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JP
Japan
Prior art keywords
rotating body
discharge passage
gas discharge
vacuum pump
stator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2011528686A
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English (en)
Japanese (ja)
Other versions
JPWO2011024528A1 (ja
Inventor
好伸 大立
好伸 大立
靖 前島
靖 前島
勉 高阿田
勉 高阿田
三輪田　透
透 三輪田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
EDWARDSJAPAN LIMITED
Original Assignee
EDWARDSJAPAN LIMITED
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by EDWARDSJAPAN LIMITED filed Critical EDWARDSJAPAN LIMITED
Priority to JP2011528686A priority Critical patent/JP5785494B2/ja
Publication of JPWO2011024528A1 publication Critical patent/JPWO2011024528A1/ja
Application granted granted Critical
Publication of JP5785494B2 publication Critical patent/JP5785494B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/02—Units comprising pumps and their driving means
    • F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
    • F04D25/0693—Details or arrangements of the wiring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/02—Surge control
    • F04D27/0292—Stop safety or alarm devices, e.g. stop-and-go control; Disposition of check-valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/42—Casings; Connections of working fluid for radial or helico-centrifugal pumps
    • F04D29/426—Casings; Connections of working fluid for radial or helico-centrifugal pumps especially adapted for liquid pumps
    • F04D29/428—Discharge tongues
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Rotary Pumps (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
JP2011528686A 2009-08-28 2010-05-31 真空ポンプ及び真空ポンプに使用される部材 Active JP5785494B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011528686A JP5785494B2 (ja) 2009-08-28 2010-05-31 真空ポンプ及び真空ポンプに使用される部材

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2009198274 2009-08-28
JP2009198274 2009-08-28
PCT/JP2010/059186 WO2011024528A1 (ja) 2009-08-28 2010-05-31 真空ポンプ及び真空ポンプに使用される部材
JP2011528686A JP5785494B2 (ja) 2009-08-28 2010-05-31 真空ポンプ及び真空ポンプに使用される部材

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2014024033A Division JP5689546B2 (ja) 2009-08-28 2014-02-12 真空ポンプ

Publications (2)

Publication Number Publication Date
JPWO2011024528A1 JPWO2011024528A1 (ja) 2013-01-24
JP5785494B2 true JP5785494B2 (ja) 2015-09-30

Family

ID=43627641

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2011528686A Active JP5785494B2 (ja) 2009-08-28 2010-05-31 真空ポンプ及び真空ポンプに使用される部材
JP2014024033A Active JP5689546B2 (ja) 2009-08-28 2014-02-12 真空ポンプ

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2014024033A Active JP5689546B2 (ja) 2009-08-28 2014-02-12 真空ポンプ

Country Status (6)

Country Link
US (1) US20120141254A1 (de)
EP (1) EP2472120B1 (de)
JP (2) JP5785494B2 (de)
KR (1) KR101784016B1 (de)
CN (1) CN102483069B (de)
WO (1) WO2011024528A1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018193943A1 (ja) 2017-04-18 2018-10-25 エドワーズ株式会社 真空ポンプ、真空ポンプに備わる磁気軸受部およびシャフト

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6390098B2 (ja) * 2013-12-25 2018-09-19 株式会社島津製作所 真空ポンプ
JP6906941B2 (ja) * 2016-12-16 2021-07-21 エドワーズ株式会社 真空ポンプとこれに用いられるステータコラムとその製造方法
JP7289627B2 (ja) * 2018-10-31 2023-06-12 エドワーズ株式会社 真空ポンプ、保護網及び接触部品
JP7456394B2 (ja) * 2021-01-22 2024-03-27 株式会社島津製作所 真空ポンプ

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02149479A (ja) * 1988-12-01 1990-06-08 Toyota Motor Corp セラミックス部材と金属部材の結合方法
JPH0673395U (ja) * 1993-03-19 1994-10-18 セイコー精機株式会社 排気ポンプ
JPH09310696A (ja) * 1996-03-21 1997-12-02 Osaka Shinku Kiki Seisakusho:Kk 分子ポンプ
JP2002113607A (ja) * 2000-10-04 2002-04-16 Mitsubishi Heavy Ind Ltd 遠心式穴面取工具及び面取方法
JP2003278691A (ja) * 2002-03-20 2003-10-02 Boc Edwards Technologies Ltd 真空ポンプ
JP2005194921A (ja) * 2004-01-06 2005-07-21 Boc Edwards Kk 分子ポンプ
JP2006090251A (ja) * 2004-09-27 2006-04-06 Boc Edwards Kk 真空ポンプ
JP2008163857A (ja) * 2006-12-28 2008-07-17 Shimadzu Corp ターボ分子ポンプ

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE7121095U (de) * 1971-05-29 1972-11-23 Leybold-Heraeus Gmbh & Co Kg Einrichtung zur oelversorgung der lagerstellen einer etwa vertikal angeordneten welle, vorzugsweise der welle einer turbomolekularpumpe
JPS6413295U (de) * 1987-07-13 1989-01-24
JPH0414793U (de) * 1990-05-24 1992-02-06
JPH05272478A (ja) * 1992-01-31 1993-10-19 Matsushita Electric Ind Co Ltd 真空ポンプ
JP3038432B2 (ja) * 1998-07-21 2000-05-08 セイコー精機株式会社 真空ポンプ及び真空装置
JP4104098B2 (ja) * 1999-03-31 2008-06-18 エドワーズ株式会社 真空ポンプ
JP2001241393A (ja) * 1999-12-21 2001-09-07 Seiko Seiki Co Ltd 真空ポンプ
JP2002070787A (ja) * 2000-08-25 2002-03-08 Kashiyama Kogyo Kk 真空ポンプ
JP2002276587A (ja) * 2001-03-19 2002-09-25 Boc Edwards Technologies Ltd ターボ分子ポンプ
JP4156830B2 (ja) * 2001-12-13 2008-09-24 エドワーズ株式会社 真空ポンプ
JP2003254286A (ja) * 2002-03-04 2003-09-10 Boc Edwards Technologies Ltd 真空ポンプ装置
JP4147042B2 (ja) * 2002-03-12 2008-09-10 エドワーズ株式会社 真空ポンプ
DE10224604B4 (de) * 2002-06-04 2014-01-30 Oerlikon Leybold Vacuum Gmbh Evakuierungseinrichtung
DE602004029470D1 (de) * 2003-08-08 2010-11-18 Edwards Japan Ltd Vakuumpumpe
FR2859250B1 (fr) * 2003-08-29 2005-11-11 Cit Alcatel Pompe a vide
DE202007012070U1 (de) * 2007-08-30 2009-01-08 Oerlikon Leybold Vacuum Gmbh Stromdurchführung einer Vakuumpumpe
DE102007053980A1 (de) * 2007-11-13 2009-05-14 Pfeiffer Vacuum Gmbh Vakuumpumpe

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02149479A (ja) * 1988-12-01 1990-06-08 Toyota Motor Corp セラミックス部材と金属部材の結合方法
JPH0673395U (ja) * 1993-03-19 1994-10-18 セイコー精機株式会社 排気ポンプ
JPH09310696A (ja) * 1996-03-21 1997-12-02 Osaka Shinku Kiki Seisakusho:Kk 分子ポンプ
JP2002113607A (ja) * 2000-10-04 2002-04-16 Mitsubishi Heavy Ind Ltd 遠心式穴面取工具及び面取方法
JP2003278691A (ja) * 2002-03-20 2003-10-02 Boc Edwards Technologies Ltd 真空ポンプ
JP2005194921A (ja) * 2004-01-06 2005-07-21 Boc Edwards Kk 分子ポンプ
JP2006090251A (ja) * 2004-09-27 2006-04-06 Boc Edwards Kk 真空ポンプ
JP2008163857A (ja) * 2006-12-28 2008-07-17 Shimadzu Corp ターボ分子ポンプ

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018193943A1 (ja) 2017-04-18 2018-10-25 エドワーズ株式会社 真空ポンプ、真空ポンプに備わる磁気軸受部およびシャフト
KR20190141138A (ko) 2017-04-18 2019-12-23 에드워즈 가부시키가이샤 진공 펌프, 진공 펌프에 구비되는 자기 베어링부 및 샤프트

Also Published As

Publication number Publication date
WO2011024528A1 (ja) 2011-03-03
EP2472120A4 (de) 2017-08-02
JP5689546B2 (ja) 2015-03-25
CN102483069A (zh) 2012-05-30
KR101784016B1 (ko) 2017-10-10
KR20120061770A (ko) 2012-06-13
EP2472120A1 (de) 2012-07-04
EP2472120B1 (de) 2022-11-30
JP2014080981A (ja) 2014-05-08
CN102483069B (zh) 2016-09-07
JPWO2011024528A1 (ja) 2013-01-24
US20120141254A1 (en) 2012-06-07

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