EP2472120A4 - Vakuumpumpe und element für die vakuumpumpe - Google Patents

Vakuumpumpe und element für die vakuumpumpe Download PDF

Info

Publication number
EP2472120A4
EP2472120A4 EP10811581.7A EP10811581A EP2472120A4 EP 2472120 A4 EP2472120 A4 EP 2472120A4 EP 10811581 A EP10811581 A EP 10811581A EP 2472120 A4 EP2472120 A4 EP 2472120A4
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
member used
vacuum
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP10811581.7A
Other languages
English (en)
French (fr)
Other versions
EP2472120B1 (de
EP2472120A1 (de
Inventor
Yoshinobu Ohtachi
Yasushi Maejima
Tsutomu Takaada
Tooru Miwata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Japan Ltd
Original Assignee
Edwards Japan Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Japan Ltd filed Critical Edwards Japan Ltd
Publication of EP2472120A1 publication Critical patent/EP2472120A1/de
Publication of EP2472120A4 publication Critical patent/EP2472120A4/de
Application granted granted Critical
Publication of EP2472120B1 publication Critical patent/EP2472120B1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/02—Units comprising pumps and their driving means
    • F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
    • F04D25/0693—Details or arrangements of the wiring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/02—Surge control
    • F04D27/0292—Stop safety or alarm devices, e.g. stop-and-go control; Disposition of check-valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/42—Casings; Connections of working fluid for radial or helico-centrifugal pumps
    • F04D29/426—Casings; Connections of working fluid for radial or helico-centrifugal pumps especially adapted for liquid pumps
    • F04D29/428—Discharge tongues
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Rotary Pumps (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
EP10811581.7A 2009-08-28 2010-05-31 Vakuumpumpe und element für die vakuumpumpe Active EP2472120B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2009198274 2009-08-28
PCT/JP2010/059186 WO2011024528A1 (ja) 2009-08-28 2010-05-31 真空ポンプ及び真空ポンプに使用される部材

Publications (3)

Publication Number Publication Date
EP2472120A1 EP2472120A1 (de) 2012-07-04
EP2472120A4 true EP2472120A4 (de) 2017-08-02
EP2472120B1 EP2472120B1 (de) 2022-11-30

Family

ID=43627641

Family Applications (1)

Application Number Title Priority Date Filing Date
EP10811581.7A Active EP2472120B1 (de) 2009-08-28 2010-05-31 Vakuumpumpe und element für die vakuumpumpe

Country Status (6)

Country Link
US (1) US20120141254A1 (de)
EP (1) EP2472120B1 (de)
JP (2) JP5785494B2 (de)
KR (1) KR101784016B1 (de)
CN (1) CN102483069B (de)
WO (1) WO2011024528A1 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6390098B2 (ja) * 2013-12-25 2018-09-19 株式会社島津製作所 真空ポンプ
JP6906941B2 (ja) * 2016-12-16 2021-07-21 エドワーズ株式会社 真空ポンプとこれに用いられるステータコラムとその製造方法
JP6948147B2 (ja) 2017-04-18 2021-10-13 エドワーズ株式会社 真空ポンプ、真空ポンプに備わる磁気軸受部およびシャフト
JP7289627B2 (ja) * 2018-10-31 2023-06-12 エドワーズ株式会社 真空ポンプ、保護網及び接触部品
JP7456394B2 (ja) * 2021-01-22 2024-03-27 株式会社島津製作所 真空ポンプ

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE7121095U (de) * 1971-05-29 1972-11-23 Leybold-Heraeus Gmbh & Co Kg Einrichtung zur oelversorgung der lagerstellen einer etwa vertikal angeordneten welle, vorzugsweise der welle einer turbomolekularpumpe
JPH0414793U (de) * 1990-05-24 1992-02-06
US6866472B2 (en) * 2002-03-12 2005-03-15 Boc Edwards Technologies Limited Vacuum pump
US20050220607A1 (en) * 2002-06-04 2005-10-06 Ralf Adamietz Evacuating device
JP2008163857A (ja) * 2006-12-28 2008-07-17 Shimadzu Corp ターボ分子ポンプ
DE102007053980A1 (de) * 2007-11-13 2009-05-14 Pfeiffer Vacuum Gmbh Vakuumpumpe

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6413295U (de) * 1987-07-13 1989-01-24
JP2650372B2 (ja) * 1988-12-01 1997-09-03 トヨタ自動車株式会社 セラミックス部材と金属部材の結合方法
JPH05272478A (ja) * 1992-01-31 1993-10-19 Matsushita Electric Ind Co Ltd 真空ポンプ
JP2585265Y2 (ja) * 1993-03-19 1998-11-18 セイコー精機株式会社 排気ポンプ
JP3795979B2 (ja) * 1996-03-21 2006-07-12 株式会社大阪真空機器製作所 分子ポンプ
JP3038432B2 (ja) * 1998-07-21 2000-05-08 セイコー精機株式会社 真空ポンプ及び真空装置
JP4104098B2 (ja) * 1999-03-31 2008-06-18 エドワーズ株式会社 真空ポンプ
JP2001241393A (ja) * 1999-12-21 2001-09-07 Seiko Seiki Co Ltd 真空ポンプ
JP2002070787A (ja) * 2000-08-25 2002-03-08 Kashiyama Kogyo Kk 真空ポンプ
JP2002113607A (ja) * 2000-10-04 2002-04-16 Mitsubishi Heavy Ind Ltd 遠心式穴面取工具及び面取方法
JP2002276587A (ja) * 2001-03-19 2002-09-25 Boc Edwards Technologies Ltd ターボ分子ポンプ
JP4156830B2 (ja) * 2001-12-13 2008-09-24 エドワーズ株式会社 真空ポンプ
JP2003254286A (ja) * 2002-03-04 2003-09-10 Boc Edwards Technologies Ltd 真空ポンプ装置
JP2003278691A (ja) * 2002-03-20 2003-10-02 Boc Edwards Technologies Ltd 真空ポンプ
WO2005015026A1 (ja) * 2003-08-08 2005-02-17 Boc Edwards Japan Limited 真空ポンプ
FR2859250B1 (fr) * 2003-08-29 2005-11-11 Cit Alcatel Pompe a vide
JP2005194921A (ja) * 2004-01-06 2005-07-21 Boc Edwards Kk 分子ポンプ
JP4594689B2 (ja) * 2004-09-27 2010-12-08 エドワーズ株式会社 真空ポンプ
DE202007012070U1 (de) * 2007-08-30 2009-01-08 Oerlikon Leybold Vacuum Gmbh Stromdurchführung einer Vakuumpumpe

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE7121095U (de) * 1971-05-29 1972-11-23 Leybold-Heraeus Gmbh & Co Kg Einrichtung zur oelversorgung der lagerstellen einer etwa vertikal angeordneten welle, vorzugsweise der welle einer turbomolekularpumpe
JPH0414793U (de) * 1990-05-24 1992-02-06
US6866472B2 (en) * 2002-03-12 2005-03-15 Boc Edwards Technologies Limited Vacuum pump
US20050220607A1 (en) * 2002-06-04 2005-10-06 Ralf Adamietz Evacuating device
JP2008163857A (ja) * 2006-12-28 2008-07-17 Shimadzu Corp ターボ分子ポンプ
DE102007053980A1 (de) * 2007-11-13 2009-05-14 Pfeiffer Vacuum Gmbh Vakuumpumpe

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO2011024528A1 *

Also Published As

Publication number Publication date
WO2011024528A1 (ja) 2011-03-03
KR101784016B1 (ko) 2017-10-10
CN102483069B (zh) 2016-09-07
KR20120061770A (ko) 2012-06-13
JP5689546B2 (ja) 2015-03-25
JP5785494B2 (ja) 2015-09-30
CN102483069A (zh) 2012-05-30
EP2472120B1 (de) 2022-11-30
JP2014080981A (ja) 2014-05-08
EP2472120A1 (de) 2012-07-04
US20120141254A1 (en) 2012-06-07
JPWO2011024528A1 (ja) 2013-01-24

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