EP2472120A4 - Vacuum pump and member used for vacuum pump - Google Patents
Vacuum pump and member used for vacuum pump Download PDFInfo
- Publication number
- EP2472120A4 EP2472120A4 EP10811581.7A EP10811581A EP2472120A4 EP 2472120 A4 EP2472120 A4 EP 2472120A4 EP 10811581 A EP10811581 A EP 10811581A EP 2472120 A4 EP2472120 A4 EP 2472120A4
- Authority
- EP
- European Patent Office
- Prior art keywords
- vacuum pump
- member used
- vacuum
- pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D25/00—Pumping installations or systems
- F04D25/02—Units comprising pumps and their driving means
- F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
- F04D25/0693—Details or arrangements of the wiring
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
- F04D27/02—Surge control
- F04D27/0292—Stop safety or alarm devices, e.g. stop-and-go control; Disposition of check-valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/42—Casings; Connections of working fluid for radial or helico-centrifugal pumps
- F04D29/426—Casings; Connections of working fluid for radial or helico-centrifugal pumps especially adapted for liquid pumps
- F04D29/428—Discharge tongues
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/52—Casings; Connections of working fluid for axial pumps
- F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/60—Mounting; Assembling; Disassembling
- F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Rotary Pumps (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009198274 | 2009-08-28 | ||
PCT/JP2010/059186 WO2011024528A1 (en) | 2009-08-28 | 2010-05-31 | Vacuum pump and member used for vacuum pump |
Publications (3)
Publication Number | Publication Date |
---|---|
EP2472120A1 EP2472120A1 (en) | 2012-07-04 |
EP2472120A4 true EP2472120A4 (en) | 2017-08-02 |
EP2472120B1 EP2472120B1 (en) | 2022-11-30 |
Family
ID=43627641
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP10811581.7A Active EP2472120B1 (en) | 2009-08-28 | 2010-05-31 | Vacuum pump and member used for vacuum pump |
Country Status (6)
Country | Link |
---|---|
US (1) | US20120141254A1 (en) |
EP (1) | EP2472120B1 (en) |
JP (2) | JP5785494B2 (en) |
KR (1) | KR101784016B1 (en) |
CN (1) | CN102483069B (en) |
WO (1) | WO2011024528A1 (en) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6390098B2 (en) * | 2013-12-25 | 2018-09-19 | 株式会社島津製作所 | Vacuum pump |
JP6906941B2 (en) * | 2016-12-16 | 2021-07-21 | エドワーズ株式会社 | Vacuum pump and stator column used for it and its manufacturing method |
JP6948147B2 (en) | 2017-04-18 | 2021-10-13 | エドワーズ株式会社 | Vacuum pumps, magnetic bearings and shafts of vacuum pumps |
JP7289627B2 (en) * | 2018-10-31 | 2023-06-12 | エドワーズ株式会社 | Vacuum pumps, protection nets and contact parts |
JP7456394B2 (en) * | 2021-01-22 | 2024-03-27 | 株式会社島津製作所 | Vacuum pump |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE7121095U (en) * | 1971-05-29 | 1972-11-23 | Leybold-Heraeus Gmbh & Co Kg | DEVICE FOR OIL SUPPLY TO THE BEARING POINTS OF A VERTICALLY ARRANGED SHAFT, PREFERABLY THE SHAFT OF A TURBOMOLECULAR PUMP |
JPH0414793U (en) * | 1990-05-24 | 1992-02-06 | ||
US6866472B2 (en) * | 2002-03-12 | 2005-03-15 | Boc Edwards Technologies Limited | Vacuum pump |
US20050220607A1 (en) * | 2002-06-04 | 2005-10-06 | Ralf Adamietz | Evacuating device |
JP2008163857A (en) * | 2006-12-28 | 2008-07-17 | Shimadzu Corp | Turbo-molecular pump |
DE102007053980A1 (en) * | 2007-11-13 | 2009-05-14 | Pfeiffer Vacuum Gmbh | vacuum pump |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6413295U (en) * | 1987-07-13 | 1989-01-24 | ||
JP2650372B2 (en) * | 1988-12-01 | 1997-09-03 | トヨタ自動車株式会社 | Method of joining ceramic member and metal member |
JPH05272478A (en) * | 1992-01-31 | 1993-10-19 | Matsushita Electric Ind Co Ltd | Vacuum pump |
JP2585265Y2 (en) * | 1993-03-19 | 1998-11-18 | セイコー精機株式会社 | Exhaust pump |
JP3795979B2 (en) * | 1996-03-21 | 2006-07-12 | 株式会社大阪真空機器製作所 | Molecular pump |
JP3038432B2 (en) * | 1998-07-21 | 2000-05-08 | セイコー精機株式会社 | Vacuum pump and vacuum device |
JP4104098B2 (en) * | 1999-03-31 | 2008-06-18 | エドワーズ株式会社 | Vacuum pump |
JP2001241393A (en) * | 1999-12-21 | 2001-09-07 | Seiko Seiki Co Ltd | Vacuum pump |
JP2002070787A (en) * | 2000-08-25 | 2002-03-08 | Kashiyama Kogyo Kk | Vacuum pump |
JP2002113607A (en) * | 2000-10-04 | 2002-04-16 | Mitsubishi Heavy Ind Ltd | Centrifugal hole chamfering tool and chamfering method |
JP2002276587A (en) * | 2001-03-19 | 2002-09-25 | Boc Edwards Technologies Ltd | Turbo molecular drag pump |
JP4156830B2 (en) * | 2001-12-13 | 2008-09-24 | エドワーズ株式会社 | Vacuum pump |
JP2003254286A (en) * | 2002-03-04 | 2003-09-10 | Boc Edwards Technologies Ltd | Vacuum pump device |
JP2003278691A (en) * | 2002-03-20 | 2003-10-02 | Boc Edwards Technologies Ltd | Vacuum pump |
KR20060061336A (en) * | 2003-08-08 | 2006-06-07 | 비오씨 에드워즈 가부시키가이샤 | Vacuum pump |
FR2859250B1 (en) * | 2003-08-29 | 2005-11-11 | Cit Alcatel | VACUUM PUMP |
JP2005194921A (en) * | 2004-01-06 | 2005-07-21 | Boc Edwards Kk | Molecular pump |
JP4594689B2 (en) * | 2004-09-27 | 2010-12-08 | エドワーズ株式会社 | Vacuum pump |
DE202007012070U1 (en) * | 2007-08-30 | 2009-01-08 | Oerlikon Leybold Vacuum Gmbh | Electric feedthrough of a vacuum pump |
-
2010
- 2010-05-31 JP JP2011528686A patent/JP5785494B2/en active Active
- 2010-05-31 EP EP10811581.7A patent/EP2472120B1/en active Active
- 2010-05-31 US US13/381,239 patent/US20120141254A1/en not_active Abandoned
- 2010-05-31 WO PCT/JP2010/059186 patent/WO2011024528A1/en active Application Filing
- 2010-05-31 CN CN201080036516.1A patent/CN102483069B/en active Active
- 2010-05-31 KR KR1020117027310A patent/KR101784016B1/en active IP Right Grant
-
2014
- 2014-02-12 JP JP2014024033A patent/JP5689546B2/en active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE7121095U (en) * | 1971-05-29 | 1972-11-23 | Leybold-Heraeus Gmbh & Co Kg | DEVICE FOR OIL SUPPLY TO THE BEARING POINTS OF A VERTICALLY ARRANGED SHAFT, PREFERABLY THE SHAFT OF A TURBOMOLECULAR PUMP |
JPH0414793U (en) * | 1990-05-24 | 1992-02-06 | ||
US6866472B2 (en) * | 2002-03-12 | 2005-03-15 | Boc Edwards Technologies Limited | Vacuum pump |
US20050220607A1 (en) * | 2002-06-04 | 2005-10-06 | Ralf Adamietz | Evacuating device |
JP2008163857A (en) * | 2006-12-28 | 2008-07-17 | Shimadzu Corp | Turbo-molecular pump |
DE102007053980A1 (en) * | 2007-11-13 | 2009-05-14 | Pfeiffer Vacuum Gmbh | vacuum pump |
Non-Patent Citations (1)
Title |
---|
See also references of WO2011024528A1 * |
Also Published As
Publication number | Publication date |
---|---|
US20120141254A1 (en) | 2012-06-07 |
JP5785494B2 (en) | 2015-09-30 |
JP5689546B2 (en) | 2015-03-25 |
KR20120061770A (en) | 2012-06-13 |
EP2472120B1 (en) | 2022-11-30 |
CN102483069B (en) | 2016-09-07 |
EP2472120A1 (en) | 2012-07-04 |
CN102483069A (en) | 2012-05-30 |
JP2014080981A (en) | 2014-05-08 |
WO2011024528A1 (en) | 2011-03-03 |
KR101784016B1 (en) | 2017-10-10 |
JPWO2011024528A1 (en) | 2013-01-24 |
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