EP2472120A4 - Vacuum pump and member used for vacuum pump - Google Patents

Vacuum pump and member used for vacuum pump Download PDF

Info

Publication number
EP2472120A4
EP2472120A4 EP10811581.7A EP10811581A EP2472120A4 EP 2472120 A4 EP2472120 A4 EP 2472120A4 EP 10811581 A EP10811581 A EP 10811581A EP 2472120 A4 EP2472120 A4 EP 2472120A4
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
member used
vacuum
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP10811581.7A
Other languages
German (de)
French (fr)
Other versions
EP2472120B1 (en
EP2472120A1 (en
Inventor
Yoshinobu Ohtachi
Yasushi Maejima
Tsutomu Takaada
Tooru Miwata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Japan Ltd
Original Assignee
Edwards Japan Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Japan Ltd filed Critical Edwards Japan Ltd
Publication of EP2472120A1 publication Critical patent/EP2472120A1/en
Publication of EP2472120A4 publication Critical patent/EP2472120A4/en
Application granted granted Critical
Publication of EP2472120B1 publication Critical patent/EP2472120B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04DNON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00Axial-flow pumps
    • F04D19/02Multi-stage pumps
    • F04D19/04Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042Turbomolecular vacuum pumps
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04DNON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00Pumping installations or systems
    • F04D25/02Units comprising pumps and their driving means
    • F04D25/06Units comprising pumps and their driving means the pump being electrically driven
    • F04D25/0693Details or arrangements of the wiring
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04DNON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/02Surge control
    • F04D27/0292Stop safety or alarm devices, e.g. stop-and-go control; Disposition of check-valves
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04DNON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00Details, component parts, or accessories
    • F04D29/40Casings; Connections of working fluid
    • F04D29/42Casings; Connections of working fluid for radial or helico-centrifugal pumps
    • F04D29/426Casings; Connections of working fluid for radial or helico-centrifugal pumps especially adapted for liquid pumps
    • F04D29/428Discharge tongues
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04DNON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00Details, component parts, or accessories
    • F04D29/40Casings; Connections of working fluid
    • F04D29/52Casings; Connections of working fluid for axial pumps
    • F04D29/522Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04DNON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00Details, component parts, or accessories
    • F04D29/60Mounting; Assembling; Disassembling
    • F04D29/601Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps
EP10811581.7A 2009-08-28 2010-05-31 Vacuum pump and member used for vacuum pump Active EP2472120B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2009198274 2009-08-28
PCT/JP2010/059186 WO2011024528A1 (en) 2009-08-28 2010-05-31 Vacuum pump and member used for vacuum pump

Publications (3)

Publication Number Publication Date
EP2472120A1 EP2472120A1 (en) 2012-07-04
EP2472120A4 true EP2472120A4 (en) 2017-08-02
EP2472120B1 EP2472120B1 (en) 2022-11-30

Family

ID=43627641

Family Applications (1)

Application Number Title Priority Date Filing Date
EP10811581.7A Active EP2472120B1 (en) 2009-08-28 2010-05-31 Vacuum pump and member used for vacuum pump

Country Status (6)

Country Link
US (1) US20120141254A1 (en)
EP (1) EP2472120B1 (en)
JP (2) JP5785494B2 (en)
KR (1) KR101784016B1 (en)
CN (1) CN102483069B (en)
WO (1) WO2011024528A1 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6390098B2 (en) * 2013-12-25 2018-09-19 株式会社島津製作所 Vacuum pump
JP6906941B2 (en) * 2016-12-16 2021-07-21 エドワーズ株式会社 Vacuum pump and stator column used for it and its manufacturing method
JP6948147B2 (en) 2017-04-18 2021-10-13 エドワーズ株式会社 Vacuum pumps, magnetic bearings and shafts of vacuum pumps
JP7289627B2 (en) * 2018-10-31 2023-06-12 エドワーズ株式会社 Vacuum pumps, protection nets and contact parts
JP7456394B2 (en) * 2021-01-22 2024-03-27 株式会社島津製作所 Vacuum pump

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE7121095U (en) * 1971-05-29 1972-11-23 Leybold-Heraeus Gmbh & Co Kg DEVICE FOR OIL SUPPLY TO THE BEARING POINTS OF A VERTICALLY ARRANGED SHAFT, PREFERABLY THE SHAFT OF A TURBOMOLECULAR PUMP
JPH0414793U (en) * 1990-05-24 1992-02-06
US6866472B2 (en) * 2002-03-12 2005-03-15 Boc Edwards Technologies Limited Vacuum pump
US20050220607A1 (en) * 2002-06-04 2005-10-06 Ralf Adamietz Evacuating device
JP2008163857A (en) * 2006-12-28 2008-07-17 Shimadzu Corp Turbo-molecular pump
DE102007053980A1 (en) * 2007-11-13 2009-05-14 Pfeiffer Vacuum Gmbh vacuum pump

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6413295U (en) * 1987-07-13 1989-01-24
JP2650372B2 (en) * 1988-12-01 1997-09-03 トヨタ自動車株式会社 Method of joining ceramic member and metal member
JPH05272478A (en) * 1992-01-31 1993-10-19 Matsushita Electric Ind Co Ltd Vacuum pump
JP2585265Y2 (en) * 1993-03-19 1998-11-18 セイコー精機株式会社 Exhaust pump
JP3795979B2 (en) * 1996-03-21 2006-07-12 株式会社大阪真空機器製作所 Molecular pump
JP3038432B2 (en) * 1998-07-21 2000-05-08 セイコー精機株式会社 Vacuum pump and vacuum device
JP4104098B2 (en) * 1999-03-31 2008-06-18 エドワーズ株式会社 Vacuum pump
JP2001241393A (en) * 1999-12-21 2001-09-07 Seiko Seiki Co Ltd Vacuum pump
JP2002070787A (en) * 2000-08-25 2002-03-08 Kashiyama Kogyo Kk Vacuum pump
JP2002113607A (en) * 2000-10-04 2002-04-16 Mitsubishi Heavy Ind Ltd Centrifugal hole chamfering tool and chamfering method
JP2002276587A (en) * 2001-03-19 2002-09-25 Boc Edwards Technologies Ltd Turbo molecular drag pump
JP4156830B2 (en) * 2001-12-13 2008-09-24 エドワーズ株式会社 Vacuum pump
JP2003254286A (en) * 2002-03-04 2003-09-10 Boc Edwards Technologies Ltd Vacuum pump device
JP2003278691A (en) * 2002-03-20 2003-10-02 Boc Edwards Technologies Ltd Vacuum pump
WO2005015026A1 (en) * 2003-08-08 2005-02-17 Boc Edwards Japan Limited Vacuum pump
FR2859250B1 (en) * 2003-08-29 2005-11-11 Cit Alcatel VACUUM PUMP
JP2005194921A (en) * 2004-01-06 2005-07-21 Boc Edwards Kk Molecular pump
JP4594689B2 (en) * 2004-09-27 2010-12-08 エドワーズ株式会社 Vacuum pump
DE202007012070U1 (en) * 2007-08-30 2009-01-08 Oerlikon Leybold Vacuum Gmbh Electric feedthrough of a vacuum pump

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE7121095U (en) * 1971-05-29 1972-11-23 Leybold-Heraeus Gmbh & Co Kg DEVICE FOR OIL SUPPLY TO THE BEARING POINTS OF A VERTICALLY ARRANGED SHAFT, PREFERABLY THE SHAFT OF A TURBOMOLECULAR PUMP
JPH0414793U (en) * 1990-05-24 1992-02-06
US6866472B2 (en) * 2002-03-12 2005-03-15 Boc Edwards Technologies Limited Vacuum pump
US20050220607A1 (en) * 2002-06-04 2005-10-06 Ralf Adamietz Evacuating device
JP2008163857A (en) * 2006-12-28 2008-07-17 Shimadzu Corp Turbo-molecular pump
DE102007053980A1 (en) * 2007-11-13 2009-05-14 Pfeiffer Vacuum Gmbh vacuum pump

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO2011024528A1 *

Also Published As

Publication number Publication date
EP2472120B1 (en) 2022-11-30
WO2011024528A1 (en) 2011-03-03
EP2472120A1 (en) 2012-07-04
JP5785494B2 (en) 2015-09-30
JP2014080981A (en) 2014-05-08
US20120141254A1 (en) 2012-06-07
KR20120061770A (en) 2012-06-13
JPWO2011024528A1 (en) 2013-01-24
CN102483069B (en) 2016-09-07
KR101784016B1 (en) 2017-10-10
JP5689546B2 (en) 2015-03-25
CN102483069A (en) 2012-05-30

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